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Optical device application of nano-structured electrochromic indium nitride films

Research Project

Project/Area Number 13555166
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Physical properties of metals
Research InstitutionNagoya University

Principal Investigator

INOUE Yasushi  Nagoya University, Research Center for Nuclear Materials Recycle, Associate Professor, 環境量子リサイクル研究センター, 助教授 (10252264)

Co-Investigator(Kenkyū-buntansha) ASAI Nobuaki  Brother Industries, Ltd., R&D Center, Researcher, 研究開発センター, 研究員
SUGIMURA Hiroyuki  Kyoto University, Faculty of Engineering, Professor, 大学院・工学研究科, 教授 (10293656)
TAKAI Osamu  Nagoya University, Center for Integrated Research in Science and Engineering, Professor, 理工科学総合研究センター, 教授 (40110712)
HOZUMI Atsushi  National Institute of Advanced Industrial Science and Technology, Researcher, セラミックス部門, 研究員
浅井 伸明  ブラザー工業(株), 研究開発センター, 研究員
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥12,700,000 (Direct Cost: ¥12,700,000)
Fiscal Year 2003: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2002: ¥7,200,000 (Direct Cost: ¥7,200,000)
Fiscal Year 2001: ¥3,800,000 (Direct Cost: ¥3,800,000)
Keywordsindium nitride / electrochromic / surface nanostructure / light-controlling material / display device / reactive ion plating / surface adsorption / chemical bonding states / 化学結合状態
Research Abstract

(1) The InN films were prepared by using an rf reactive ion plating method. After evacuation of a deposit ion chamber under 10-4 Pa, high-purity N2 gas was introduced upto 0.1 1 Pa. A 100 W rf power was applied into the N2 gas through an rf antenna to generate a nitrogen glow discharge. Then indium metal were evaporated from an alumina crucible. The angle of a substrate holder against the indium vapor flux was set at 85 degree.
(2) By means of varying the in-plane rotation condition of the substrate holder, the nanostructure of the films can be controlled into columnar, zig-zag and helical nanorods. The crystallinity and chemical composition of the films are almost constant upto 0.3 Pa.
(3) The EC properties were observed by using a double-beam optical spectrophotometer. Comparing the EC properties for the three types of nano-structured InN, we found that the order of the EC enhancement as zig-zag, helical and columnar. The zig-zag film showed 2.5 times larger color change quantity than that of the normally-deposited InN film. The speed of color change was independent of the nano-structure, around 2 times faster than the normally-deposited film.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] Wu YY, Kuroda M, Sugimura H, Inoue Y, Takai O: "Nanotextures fabricated by microwave plasma CVD : application to ultra water-repellent surface"Surf.Coat.Technol.. 174. 867-871 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Inoue, A.Yamaguchi, K.hasegawa, O.Takai: "Improvement of Electrovhromic Properties of Indium Nitride Films with Biomimetic Microstructure"International Workshop on Plasma Nano-Technology and Its Future Vision. 1. 11-11 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Wu, M.Bekke, Y.Inoue, 0.Takai: "Ultra Water-Repellent Thin Films Obtained by Controlling Deposition Pressure"International Workshop on Plasma Nano-Technology and Its Future Vision. 1. 12-12 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Tamaguchi, T.Fujihara, K.Hasegawa, Y.Inoue, O.Takai: "ELECTROCHROMIC PROPERTIES OF BIOMIMETIC NANOSTRUCTURED InN FILMS"Abst.4th Int.Symp.Biomimetic Materials Processing. 1. 30-30 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Athushi Yamaguchi, Takuya Fujihara, Yasushi Inoue, Osamu Takai: "Synthesis of InN Nanocolumnar Structure by Oblique Ion Plating"IUMRS-ICAM. A4-8. 40-40 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Wu YY, Kuroda M, Sugimura H, Inoue Y, Takai O: "Nanotextures fabricated by microwave plasma CVD : application to ultra water-repellent surface"Surf.Coat.Technol.. 174. 867-871 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Inoue, A.Yamaguchi, K.Hasegawa, O.Takai: "Improvement of Electrovhromic Properties of Indium Nitride Films with Biomimetic Microstructure"International Workshop on Plasma Nano-Technology and Its Future Vision. 1. 11-11 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Wu, M.Bekke, Y.Inoue, O.Takai: "Ultra Water-Repellent Thin Films Obtained by Controlling Deposition Pressure"International Workshop on Plasma Nano-Technology and Its Future Vision. 1. 12-12 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Yamaguchi, T.Fujihara, K.Hasegawa, Y.Inoue, O.Takai: "ELECTROCHROMIC PROPERTIES OF BIOMIMETIC NANOSTRUCTIJRED InN FILMS"Abst.4th Int.Symp.Biomimetic Materials Processing. 1. 30-30 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Atsushi Yamaguchi, Takuya Fujihara, Yasushi Inoue, Osamu Takai: "Synthesis of InN Nanocolumnar Structure by Oblique Ion Plating"IUMRS-ICAM. A4-8. 40-40 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Wu YY, Kuroda M, Sugimura H, Inoue Y, Takai O: "Nanotextures fabricated by microwave plasma CVD : application to ultra water-repellent surface"Surf.Coat.Technol.. 174. 867-871 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Inoue, A.Yamaguchi, K.Hasegawa, O.Takai: "mprovement of Electrovhromic Properties of Indium Nitride Films with Biomimetic Microstructure"International Workshop on Plasma Nano-Technology and Its Future Vision. 1. 11-11 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Wu, M.Bekke, Y.Inoue, O.Takai: "Ultra Water-Repellent Thin Films Obtained by Controlling Deposition Pressure"International Workshop on Plasma Nano-Technology and Its Future Vision. 1. 12-12 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Yamaguchi, T.Fujihara, K.Hasegawa, Y.Inoue, O.Takai: "ELECTROCHROMIC PROPERTIES OF BIOMIMETIC NANOSTRUCTURED InN FILMS"Abst.4th Int.Symp.Biomimetic Materials Processing. 1. 30-30 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Atsushi Yamaguchi, Takuya Fujihara, Yasushi Inoue, Osamu Takai: "Synthesis of InN Nanocolumnar Structure by Oblique Ion Plating"IUMRS-ICAM. A4-8. 40-40 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Atsushi Yamaguchi, Takuya FUJIHARA, Yasushi INOUE, Osamu TAKAI: "ELECTROCHROMIC PROPERTY OF INDIUM NITRIDE FILM PREPARED BY OBLIQUE DEPOSITION"The 4th Asian-European International Conference on Plasma Surface Engineering. 1. WeAC04-WeAC04 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] A.Yamaguchi, T.Fujihara, Y.Inoue, O.Takai: "ENHANCEMENT OF ELECTROCHROMIC PROPERTY OF INDIUM NITRIDE FILMS BY INTRODUCING BIOMIMETIC MICROSTRUCTURE"Abst. Third Int. Symp. Biomimetic Materials Processing. 1. 39-39 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.Matsui, D.Yamashina, Y.Inoue, O.Takai: "CHEMICAL STABILITY OF TIN-NITRIDE THIN FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING"Abst. Third Int. Symp. Biomimetic Materials Processing. 1. 79-79 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Inoue, H.Yamamoto, A.Yamaguchi, H.Sugimura, O.Takai: "Electrochromic Properties of Surface-microstructured InN Films Prepared by Reactive Ion Plating"Abst. Int. Symp. 6th APCPST, 15th SPSM, OS2002 and 11th KAPRA. 1. 134-134 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Inoue, K.Sano, H.Sugimura, O.Takai: "Structual and Mechanical Properties of Sputtered Tin-nitride Thin Films"Abst. Int. Conf. Metallurgical Coating and Thin Films 2002. 1. 49-49 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.D.Kim, K.H.Lee, K.Y.Kim, H.Sugimura, O.Takai, Y.Inoue: "Characteristics and high water-repellency of a-C : H films deposited by r.f. PECVD"Surf. Coat. Technol.. 162. 135-139 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Y.Wu, Y.Inoue, H.Sugimura, O.Takai: "Thin films with nanotextures for transparent and ultra water-repellent coatings produced from trimethylmethoxysilane by microwave plasma CVD"Chem. Vapor Depos.. 8. 47-50 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Yamamoto, Y.Inoue, H.Sugimura, O.Takai: "Studies on Electrochromic Property of InN Thin Films Prepared by Oblique Ion Plating"Proc.Frontiers of Surface Technology 2001. 337 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Inoue, K.Sano, H.Sugimura, O.Takai: "Crystallinity of Sputter-Deposited Tin-Nitride Thin Films"Proc.Frontiers of Surface Technology 2001. 351 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] H.Yamamoto, Y.Inoue, H.Sugimura, O.Takai: "Electrochromic Properties of InN Thin Films Prepared by Oblique Ion Plating"Proc.Int.Conf.Phenomena in Ionized Gases XXV. 161-1622 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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