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Development of Corrosion Fatigue Testing Machine for Micro-Sized Specimens for Bio-MEMS

Research Project

Project/Area Number 13555186
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Structural/Functional materials
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

TAKASHIMA Kazuki  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Associate Professor, 精密工学研究所, 助教授 (60163193)

Co-Investigator(Kenkyū-buntansha) ISHIYAMA Chiemi  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research Associate, 精密工学研究所, 助手 (00311663)
SHIMOJO Masayuki  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research Associate, 精密工学研究所, 助手 (00242313)
HIGO Yakichi  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 教授 (30016802)
杉浦 眞佐  日立ハイテクノロジーズ(株), 科学システム本部, 開発担当部長
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥13,700,000 (Direct Cost: ¥13,700,000)
Fiscal Year 2002: ¥4,700,000 (Direct Cost: ¥4,700,000)
Fiscal Year 2001: ¥9,000,000 (Direct Cost: ¥9,000,000)
KeywordsBio-Micromachine / MEMS / Micro-sized specimens / Corrosion fatigue / Fatigue life / Materials evaluation / Amorphous alloy / Austenitic stainless steel
Research Abstract

MEMS (Micro electro mechanical systems) devices are expected to be used in human body as Bio-MEMS (diagnosis and treatment devices) and in corrosive environments as inspection devices. The size of components used in such MEMS devices are considered to be in the order of microns. This size is smaller than the grain diameter in conventional metals and alloys. Mechanical properties of such micro-sized materials are considered to be different from those of bulk materials. In addition, the effect of corrosion is considered to be more prominent, because the specific surface area of micro-sized specimens is larger compared with that of bulk specimens. Crevices, the size of which is also in the order of microns, may exist in MEMS devices and thus crevice corrosion is also important. Therefore, corrosion fatigue properties of micro-sized materials are extremely important to design MEMS devices and micro-machines used in corrosive environments. However, there have been few studies that investiga … More te corrosion fatigue properties of micro-sized materials. However, there are several difficulties in corrosion fatigue tests on micro-sized specimens. It is also necessary to clarify the problems for the method and to find their solutions. In this investigation, we have developed a fatigue testing machine for micro-sized specimens, and corrosion fatigue tests for micro-sized Ni-P amorphous alloy and 304 austenitic stainless steel specimens have been carried out in air and 0.9% NaCl solution to investigate the size effects on corrosion fatigue properties. Specimens of cantilever-beam-type with dimensions of 10 microns × 10 microns × 50 microns were prepared from a Ni-P amorphous alloy thin film and a 304 austenitic stainless steel thin sheet by focused ion beam machining. The fatigue life of the specimen tested in air was more than 100,000 cycles, while that tested in the corrosive environment was less than 10,000 cycles. Distinct environmental effects on fatigue properties were observed. Several problems and solutions for the testing method were also discussed. Less

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Tests of Micro-SIzed Specimens"Mat.Res.Soc.Symp.Proc.. 657. EE5.11.1-EE5.11.6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Behavior of Micro-Sized Specimens"Materials Science for the 21st Century. B. 241-244 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Mizutani, M.Shimojo, K.Takashima, Y.Higo: "Size Effect of Corrosion Fatigue Properties in Micro-Sized 304 Austenitic Stainless Steel Specimens"Proc.ICF 10. (CD-ROM). ICF1000186OR (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Takashima, R.Tarumi, Y.Higo: "Fracture Behavior of Micro-Sized Specimens Prepared from an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures"MRS Symp.Proc.. 695. 355-360 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 高島和希, 肥後矢吉: "MEMS/NEMS材料における破壊と疲労特性評価"まてりあ. 41. 673-676 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Higo, K.Takashima: "Fracture and Fatigue of Microelements for Micro/Medical Applications"Proc.JSME/MMD. 26 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Tests of Micro-Sized Specimens"MRS Symp. Proc.. 657. EE5.11.1-11.6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Behavior of Micro-Sized Specimens"Materials Science for 21st Century. B. 241-244 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Mizutani, M. Shimojo, K. Takashima, Y. Higo: "Size Effect of Corrosion Fatigue Properties in Micro-Sized 304 Austenitic Stainless Steel Specimens"Proc. ICF 10. ICF1000186OR (CD-ROM). (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Takashima, R. Tarumi and Y. Higo: "Fracture Behavior of Micro-Sized Specimens Prepared from an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures"MRS Symp. Proc.. 695. 355-360 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Takashima and Y. Higo: "Evaluation of Fracture and Fatigue Properties for MEMS/NEMS Applications"Materia. 41, No. 10. 673-676 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Higo and K. Takashima: "Fracture and Fatigue of Microelements for Micro/Medical Applications"Proc. JSMS/MMD. 26 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Takashima, R.Tarumi, Y.Higo: "Fracture Behavior of Micro-Sized Specimens Prepared from an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures"MRS Symp. Proc.. 695. 355-360 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Ogi, G.Shimoike, M.Hirao, K.Takashima, Y.Higo: "Anisotropic Elastic-Stiffness Coefficients of an Amorphous Ni-P Film"J. Appl. Phys.. 91・8. 4857-4862 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高島和希, 肥後矢吉: "MEMS/NEMS材料における破壊と疲労特性評価"まてりあ. 41・10. 673-676 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Higo, K.Takashima: "Fracture and Fatigue of Microelements for Micro/Medical Applications"Proc. JSME/MMD. 26 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takashima, Y.Higo: "A New Evaluation Method for Fracture Toughness for Micro-Sized Specimens"Abstract for 2002 TMS Fall Meeting. 105 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takashima, Y.Higo, S.Sugiura, M.Shimojo: "Fatigue Crack Growth Behavior of Micro-Sized Specimens Prepared from an Electroless Plated Ni-P Amorphous Alloy Thin Film"Mater. Trans.. 42・1. 68-73 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Tests of Micro-SIzed Specimens"Mat. Res. Soc. Symp. Proc.. 657. EE5.11.1-EE5.11.6 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Takashima, M.Shimojo, Y.Higo, M.V.Swain: "Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film"ASTM STP. 1413. 72-81 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Takashima, M.Shimojo, Y.Higo, M.V.Swain: "Fatigue Crack Growth of a Ni-P Amorphous Alloy Thin Film"ASTM STP. 1413. 52-61 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Mizutani, Y.Higo, Y.Ichikawa, A.Morita, K.Takashima, Y.Higo: "Corrosion Fatigue Behavior of Micro-Sized Specimens"Materials Science for the 21st Century. B. 241-244 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Mizutani, M.Shimojo, K.Takashima, Y.Higo: "Size Effect of Corrosion Fatigue Properties in Micro-Sized 304 Austenitic Stainles Steel Specimens"Proc. ICF 10 (CD-ROM). ICF1000186OR (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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