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Development of a surface analysis method by X-ray traveling waves using an X-ray wave guide

Research Project

Project/Area Number 13555232
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 工業分析化学
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

KAWAI Jun  Kyoto Univ., Dept.of Mater.Sci.Eng., Professor, 工学研究科, 教授 (60191996)

Co-Investigator(Kenkyū-buntansha) TAKENAKA Hisataka  NTT-AT, Researcher, 研究員
TANABE Teruo  Kyoto Univ., Dept.of Mater.Sci.Eng., Associate Professor, 工学研究科, 助教授 (90026237)
EKTESSABI Ali  Kyoto Univ., IIC, Professor, 国際融合創造センター, 教授 (50232939)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥13,100,000 (Direct Cost: ¥13,100,000)
Fiscal Year 2003: ¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 2002: ¥4,200,000 (Direct Cost: ¥4,200,000)
Fiscal Year 2001: ¥6,200,000 (Direct Cost: ¥6,200,000)
KeywordsX-ray traveling wave / X-ray reflection / refraction / surface analysis
Research Abstract

We have found in the present research that the measurement of the white X-ray reflectivity for multilayer samples is a powerful tool to characterize multilayers (under patent application), and that the X-ray reflectivity exhibits pseudo-symmetric pattern for X-ray wave guide phenomena. This surface analysis method is based on the physical phenomena that X-rays higher energy than the critical energy will reflect, while X-rays lower energy than the critical energy will refract at the interface. Similar surface analysis methods exist but they have a problem of the saturation of the X-ray detector Because the incident direct strong X-rays impinge on the detector window. In the present research, we have avoided the saturation and consequently the present method is highly effective for the practical use as a surface analysis method. We have developed a computer program to analyze the experimental data, and the source code of it has been open in the Web page, and it can be freely downloaded. When the X-ray reflectivity is measured at the off-equiangular reflection, the energy spectrum tends to shift to the lower energy side, which has been successfully reproduced theoretically. Therefore the surface can be characterized by the measurement of an energy spectrum with the change of the angle of incidence. We have also made a portable X-ray analyzer using an electric battery, and succeeded to analyze ppm level elements on the analyte surface. The reason why the pseudo-symmetric pattern is observable is an open problem ; the pseudo-symmetric pattern resembles the so-called Yoneda wing, which is closely related to the surface roughness. Therefore the pseudo-symmetric pattern may have an information on the surface roughness. In summary, we have developed a surface analysis method by comparing the measurement of X-ray reflectivity and theoretical calculation, using surface traveling X-ray waves guided through the surface and interfaces.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (26 results)

All Other

All Publications (26 results)

  • [Publications] P.Karimov, J.Kawai: "多層膜X線反射率シミュレーションプログラム"理学電機ジャーナル. 33(1). 20-24 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.Karimov, S.Harada, J.Kawai: "X-rays reflection from thin multilayers. Symmetric patterns"Surf.Interface Anal.. 35. 76-79 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 貝淵和喜, 河合潤, 永園充, 福島昭子, 辛埴: "希土類フッ化物のX線吸収スペクトル"X線分析の進歩. 34. 253-258 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Liu, K.Yuge, J.Kawai: "High resolution Lα X-ray fluorescence spectra of palladium compounds"Spectrochim.Acta. B59. 93-99 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Liu, S.Sugata, K.Yuge, M.Nagasono, K.Tanaka, J.Kawai: "Correlation between chemical shift of Si Kα lines and the effective charge on Si atom and its application in the Fe-Si binary system"Phys.Rev.. B69. 035106-1-035106-5 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Liu, J.Kawamura, M.Nagasono, K.Maeda, J.Kawai: "Determination of the structure of boron subphosphide by P Kβ X-ray fluorescence spectra"J.Elctron Spectrosc.Relat.Phenom.. 135. 75-83 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 河合潤: "界面ハンドブック,岩澤康裕, 梅澤喜夫, 澤田嗣郎, 辻井薫監修"エヌ・ティー・エス. 1208(48-50, 110-111, 169-172, 243-248, 371-372) (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.Karimov, J.Kawai: "An X-Ray Reflectivity Simulation Program"RIGAKU DENKI Journal. 33(1). 20-24 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.Karimov, S.Harada, J.Kawai: "X-rays reflection from thin multilayers. Symmetric patterns"Surf.Interface Anal.. 35. 76-79 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Kaibuchi, J.Kawai, M.Nagasono, A.Fukushima, S.Shin: "X-ray absorption spectra of rare earth fluorides"Adv.X-Ray Chem.Anal.Japan. 34. 253-258 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Liu, K.Yuge, J.Kawai: "High resolution Lα X-ray fluorescence spectra of palladium compounds"Spectrochim.Acta Part B. 59. 93-99 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Liu, S.Sugata, K.Yuge, M.Nagasono, K.Tanaka, J.Kawai: "Correlation between chemical shift of Si Kα lines and the effective charge on Si atom and its application in the Fe-Si binary system"Phys.Rev.B. 69. 035106-1-035106-5 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Liu, J.Kawamura, M.Nagasono, K.Maeda, J.Kawai: "Determination of the structure of boron subphosphide by P Kβ x-ray fluorescence spectra"J.Electron Spectrosc.Relat.Phenom.. 135. 75-83 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] P.Karimov, J.Kawai: "An X-Ray Reflectivity Simulation Program"RIGAKU DENKI Journal. 33(1). 20-24 (2002)

    • Related Report
      2003 Annual Research Report
  • [Publications] J.Kawai, S.Tohno, Y.Kitajima, O.E.Raola, M.Takaoka: "Depth selective chemical state analysis of Pb and S in fly ash in municipal solid waste incinerator using X-ray absorption spectroscopy"Spectrochim. Acta. B58. 635-639 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 貝淵和喜, 河合潤, 永園充, 福島昭子, 辛埴: "希土類フッ化物のX線吸収スペクトル"X線分析の進歩. 34. 253-258 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Z.Liu, K.Yuge, J.Kawai: "High resolution Lα X-ray fluorescence spectra of palladium compounds"Spectrochim. Acta. B59. 93-99 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Z.Liu, S.Sugata, K.Yuge, M.Nagasono, K.Tanaka, J.Kawai: "Correlation between chemical shift of Si Kα lines and the effective charge on Si atom and its application in the Fe-Si binary system"Phys.Rev.. B69. 035016-1-035106-5 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Z.Liu, J.Kawamura, M.Nagasono, K.Maeda, J.Kawai: "Determination of the structure of boron subphosphide by P Kβ x-ray fluorescence spectra"J. Electron Spectrosc.Relat.Phenom.. 135. 75-83 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] J.Kawai: "X-ray traveling waves"Anal.Sci.. 7(Suppl.). i1205-i1206 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.Kawai: "X-ray wave guide and its possible application to surface analysis ; X-ray traveling waves"J.Surf.Anal.. 9. 356-358 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] パベル・カリモフ: "多層膜X線反射率シミュレーションプログラム"理学電機ジャーナル. 33(1). 20-24 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] P.Karimov: "X-rays reflection from thin multilayers. Symmetric patterns"Surf.Interface Anal.. 35. 76-79 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] J.Kawai: "Surface multilayer characterization using total reflection X-rays"Proceedings 3^<rd> International Symposium on Atomic Level Characterizations for New Materials and Devices '01, Nov.11-14, 2001 Nara. 249-254 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] 河合 潤: "X線進行波"表面科学. 22・6. 397-403 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] J.Kawai 他: "Microbeam XANES and X-Ray Fluorescence Analysis of Cadmium in Kidneg"J.Trace Microprobe Tech.. 19・4. 541-546 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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