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Preparation of transparent, thick films with high refractive index by the sol-gel method and application to the fine patterning process

Research Project

Project/Area Number 13555242
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 無機工業化学
Research InstitutionOsaka Prefecture University

Principal Investigator

MINAMI Tsutomu  Osaka Prefecture Univ., President, 学長 (80081313)

Co-Investigator(Kenkyū-buntansha) MATSUDA Atsunori  Toyohashi Univ. of Technol., Assoc. Prof., 物質工学系, 助教授 (70295723)
TADANAGA Kiyoharu  Osaka Prefecture Univ., Assoc. Prof., 工学研究科, 助教授 (90244657)
TATSUMISAGO Masahiro  Osaka Prefecture Univ., Prof., 工学研究科, 教授 (50137238)
NAKAMA Kenichi  Nippon Sheet Glass, Lab. Maneger, 技術研究所, 主任
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥13,200,000 (Direct Cost: ¥13,200,000)
Fiscal Year 2002: ¥5,700,000 (Direct Cost: ¥5,700,000)
Fiscal Year 2001: ¥7,500,000 (Direct Cost: ¥7,500,000)
KeywordsSol-Gel method / Thick film / refractive index / Micropatterning / Silsesquioxane / Organic-inorganic hybrid / Transparent / UV-irradiation / ゾルーゲル法
Research Abstract

1. Transparent, thick films with high refractive index have been successfully prepared using silsesquioxanes from such as phenyltriethoxysilane and benzyltriethoxysilane and metal oxides. Titania-silsesquioxane films showed the highest refractive index. Thick films from diphenyldimethoxysilane and titania showed higher refractive index than the films from phenyltrietoxysilane and titania. Thick films from diphenylmethoxysilane showed fluidity with less than 30 mol % of titania.
2. Changes of structure, morphology, and optical properties of silsesquioxane-titania thick films by UV-irradiation have been investigated. Irradiation of UV-light led to depletion of Si-C bonds in the thick films, and hardness and refractive index of the films were increased. It was found that hardness of the vinylsilsesquioxane-titania films mostly increased.
3. Micropatterns of phenylsisisesquioxane-titana thick films were successfully prepared by the embossing process. Convexly shaped micropatterns have been formed on hydrophobic-hydrophilic patterned substrate with titania and fluoroalkylsilanes thin layer, based on the difference in the surface free energy and fluidity of the phenylsilsesquioxane-titana at temperatures higher than then-glass transition temperatures.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (36 results)

All Other

All Publications (36 results)

  • [Publications] A.Matsuda: "Changes in Porosity and Amounts of Adsorbed Water in Sol-Gel Derived Porous Silica Films with Heat Treatment"J. Sol-Gel Sci. Tech.. 20・[2]. 129-134 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Matsuda: "Thermal Softening Behavior and Application to Transparent Thick Films of Poly(benzylsilsesquioxane) Particles Prepared by the Sol-Gel Process"J. Am. Ceram. Soc.. 84・[4]. 775-780 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 忠永清治: "ゾル-ゲル法による超撥水・超親水化技術(総説)"Material Stage. 1・[1]. 34-38 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Kotani: "Effects of Addition of Poly(ethylene glycol) on the Formation of Anatase Nanocrystals in SiO_2-TiO_2 Gel Films with Hot Water Treatment"Chem. Mater.. 13・[6]. 2144-2149 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 忠永清治: "ゾル-ゲル法による超撥水コーティング薄膜の形成と応用(総説)"マテリアルインテグレーション. 14・[10]. 9-13 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Matsuda: "Preparation of Copolymerized Phenylsilsesquioxane-Benzylsilsesquioxane Particles"J. Sol-Gel Sci. Tech.. 23. 247-252 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Matsuda: "Photocatalytic Micropatterning of Transparent Ethylsilsesquioxane-Titania Hybrid Films"Chem. Mater.. 14・[6]. 2693-2700 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Sasaki: "Control of Thermal Softening Behavior of Polyphenylsilsesquioxane Particles for Transparent Thick Films by Electrophoretic Deposition"J. Ceram. Soc. Jpn.. 110・[11]. 1005-1009 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Tadanaga: "Formation of Convexly Shaped Silica Micropatterns on Sol-Gel Derived Films Using a Difference in Surface Free Energy"Glass Technol.. 43C. 275-277 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Tadanaga: "Micropatterning of Inorganic-Organic Hybrid Coating Films from Various Tri-Functional Silicon Alkoxides with a Double Bond in Their Organic Components"J. Sol-Gel Sci. Tech.. 26・[1]. 431-434 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Matsuda: "Preparation and Characterization of Copolymerized Methylsilsesquioxane-Benzylsilsesquioxane Microparticles for Electrophoretic Sol-Gel Deposition"J. Mater. Sci.. (accepted for publication).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 松田厚範: "ナノマテリアルの最新技術"シーエムシー. 340 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Matsuda: "Changes in Porosity and Amounts of Adsorbed Water in Sol-Gel Derived Porous Silica Films with Heat Treatment"J. Sol-Gel Sci. Tech.. 20[2]. 129-134 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Matsuda: "Thermal Softening Behavior and Application to Transparent Thick Films of Poly(benzylsilsesquioxane) Particles Prepared by the Sol-Gel Process"J. Am. Ceram. Soc.. 84[4]. 775-780 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Tadanaga: "Formation of Superhydrophobic and Superhydrophlic Surfaces by the Sol-Gel Method (review)(in Japanese)"Material Stage. 1[1]. 34-38 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y. Kotani: "Effects of Addition of Poly (ethyfene glycol) on the Formation of Anatase Nanocryslals in SiO_2-TiO_2 Gel Films with Hot Water Treatment"Chem. Mater.. 13[6]. 2144-2149 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Tadanaga: "Preparation and Application of Superhydrophobic Coating Films by the Sol-Gel Method (review)(in Japanese)"Materials Integration. 14[10]. 9-13 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Matsuda: "Preparation of Copolymerized Phenylsilsesquioxane-Benzylsilsesquioxane Particles"J. Sol-Gel Sci. Tech.. 23. 247-252 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Matsuda: "Photocatalytic Micropatterning of Transparent Ethylsesesqiuoxane-Titania Hybrid Films"Chem. Mater.. 14[6]. 2693-2700 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Sasaki: "Control of Thermal Softening Behavior of Polyphenylsilsesquioxane Particles for Transparent Thick Films by Electrophoretic Deposition"J. Ceram Soc. Jpn.. 110[11]. 1005-1009 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Tadanaga: "Formation of Convexly Shaped Silica Micropatterns on Sol-Gd Derived Films Using a Diffidence in Surface Free Energy"Glass Tech.. 43C. 275-277 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Tadanaga: "Micropatterning of Inorganic-Organic Hybrid Coaling Films from Various Tri-Functional Silicon Alkoxides with a Double Bond in Their Organic Components"J. Sol-Gel Sci. Tech.. 26[1]. 431-434 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Matsuda: "Preparation and Characterization of Copolymerized Methylsilsesquioxane-Benzylsilsesquioxane Micoparticles for Electrophoretic Sol-Gel Deposition"J. Mater. Sci.. accepted for publication.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Matsuda: "New Fundtion Provided by the Sol-Gel Process(in Japanese), Recent Progress in Nano Materials (Book, contribution), Edited by M. Koizumi"(2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Matsuda: "Preparation of Copolymerized Phenylsilsesquioxane-Benzylsilsesquioxane Particles"J.Sol-Gel Sci.Tech.. 23. 247-252 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Matsuda: "Photocatalytic Micropatterning of Transparent Ethylsilsesquioxane-Titania Hybrid Films"Chem.Mater.. 14・[6]. 2693-2700 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Sasaki: "Control of Thermal Softening Behavior of Polyphenylsilsesquioxane Particles for Transparent Thick Films by Electrophoretic Deposition"J.Ceram.Soc.Jpn.. 110[11]. 1005-1009 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Tadanaga: "Formation of Convexly Shaped Silica Micropatterns on Sol-Gel Derived Films Using a Difference in Surface Free Energy"Glass Technol.. 43C. 275-277 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Tadanaga: "Micropatterning of Inorganic-Organic Hybrid Coating Films from Various Tri-Functional Silicon Alkoxides with a Double Bond in Their Organic Components"J.Sol-Gel Sci.Tech.. 26・[1]. 431-434 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Matsuda: "Changes in Porosity and Amounts of Adsorbed Water in Sol-Gel Derived Porous Silica Films with Heat Treatment"J.Sol-Gel Sci.Tech.. 20. 129-134 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Matsuda: "Thermal Softening Behavior and Application to Transparent Thick Films of Poly (benzylsilsesquioxane) Particles Prepared by the Sol-Gel Process"J.Am.Ceram.Soc.. 84・[4]. 775-780 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 忠永清治: "ゾルーゲル法による超擾水・超親水化技術(総説)"Material Stage. 1・[1]. 34-38 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 忠永清治: "ゾルーゲル法による超擾水コーティング薄膜の形成と応用(総説)"マテリアルインテグレーション. 14・[10]. 9-13 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Tadanaga: "Micropatterning of Inorganic-Organic Hybrid Coating Films from Various Tri-Functional Sillcon Alkoxides with a Double Bond in Their Organic Components"J.Sol-Gel Sci.Tech.. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Tadanaga: "Formation of Convexly Shaped Silica Micropatterns on Sol-Gel Derived Films Using a Difference in Surface Free Energy"Glass Technology. (印刷中). (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] 松田厚範: "ナノマテリアルの最新技術"小泉光恵他編 シーエムシー. 331 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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