| Project/Area Number |
13650114
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Nagaoka University of Technology |
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Principal Investigator |
AKETAGAWA Masato Fac. of Engineering, Nagaoka Univ. of Tech., Assoc. professor, 工学部, 助教授 (10231854)
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| Co-Investigator(Kenkyū-buntansha) |
TAKADA Koji Fac. of Engineering, Nagaoka Univ. of Tech., Professor, 工学部, 教授 (80126474)
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| Project Period (FY) |
2001 – 2002
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| Project Status |
Completed (Fiscal Year 2002)
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| Budget Amount *help |
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2002: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2001: ¥2,700,000 (Direct Cost: ¥2,700,000)
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| Keywords | Atom Craft / SPM (STM) / Atomic Tracking / positioning / sub nanometer / disturbance / トレーサビリティ / サブナノメートル精度 / 走査型トンネル顕微鏡(STM) / 原子間力顕微鏡(AFM) |
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| Research Abstract |
In this research, for the promote of the nanotechnology, we propose a compact absolute length measuring machine (ALMM) with sub-nanometer accuracy and sub-millimeter travel by combining crystalline lattice and the phase modulation homodyne laser interferometry. With the ALMM, an arbitrary length can be determined by combining fine scale (= lattice spacing) and coarse scale (= wavelength). The following results were obtained with the aid.
(1) Ultra precise /stable laser interferometer system ; We developed a phase modulation homodyne laser interferometer with multi-path configuration, which can determine length incase optical path difference equals to products of wavelength and integer. A positioning control system for the stage using the interferometer, a fast DSP and precise AD/DA was also developed.
(2) High stiff STM and ultra precise sample stage; A high stiff STM and a precise stage with the range of 10 micrometer and the resonance frequency is over 2kHz was developed using a flexture springs. It is easy to detect atomic image of graphite (HOPG) by combining the two instruments.
(3) Direct measurement of lattice spacing on HOPG surface ; By comparing the atomic STM image of HOPG with the displacement of the sample stage, the lattice spacing on the HOPG surface was determined with high accuracy.
(4) Protype of ALMM; We developed the protype of the ALMM, which included the phase modulation interferometer, dual sample stages, high stiff AFM/STM heads, thermo-stabilized vacuum cell. The performance has been evaluated.
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