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PRECISION FINISHING OF MONO-CRYSTAL SILICON BALLS FOR SPHERICAL SEMI-CONDUCTORS

Research Project

Project/Area Number 13650130
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionSHIBAURA INSTITUTE OF TECHNOLOGY

Principal Investigator

SHIBATA Junji  SHIBAURA INSTITUTE OF TECHNOLOGY, ENGINEERING PROFESSOR, 工学部, 教授 (30052822)

Co-Investigator(Kenkyū-buntansha) OHTA Masato  SHIBAURA INSTITUTE OF TECHNOLOGY, ENGINEERING ASSOCIATE PROFESSOR, 工学部, 助教授 (50052874)
KIMURA Takayasu  SHIBAURA INSTITUTE OF TECHNOLOGY, ENGINEERING PROFESSOR, 工学部, 教授 (90052711)
UEKI Tadahiro  SHIBAURA INSTITUTE OF TECHNOLOGY, ENGINEERING LECTURER, 工学部, 講師 (50052890)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 2002: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2001: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsPOLISHING / SMALL BALL / GLASS BALL / CENTRIFUGAL FORCE / ROUNDNESS / LAPPING MACHINE / LAPPING SLURRY / SILICA / 研磨加工 / 研磨スラリー / ゾルゲル法 / 球研磨 / 真球度 / シリカ粒子 / CMP / カップ研磨方式
Research Abstract

In this study, we focused our attention to a polishing technology for mono-crystal Silicon balls, which is very small (under 1 mm in diameter) and are expected to be applied to ball semi-conductors. The spherical surface of the ball-shaped semi-conductors should be finished in perfect smooth surface for making IC circuits on it, similarly for a Silicon wafer, by means of the photo-rithography method. The ball-shaped semi-conductors are excellent in production efficiency because precision silicon balls are easily mass-produced
In order to establish this new technology in the silicon semi-conductor's industry, the development of a new precision polishing machine for the small Silicon balls is demanded eagerly
At the beginning of this study in 2001, we designed and produced a polishing device on trial and investigated its polishing abilities experimentally. At the same time, we tried to produce polishing slurry by the sol-gel method and got some successful results. However, these were not sufficient for actual applications
This year, we adopted a new idea, namely that centrifugal force should be used for polishing small Silicon balls and then built a polishing device. The polishing principle is suitable for high-speed, automated and mass-productive polishing of silicon balls. Therefore, we can expect drastic effects by the newly designed polishing device
By using the new polishing machine, the following results were obtained
(1) The polishing machine has an excellent polishing ability for small Silicon balls
(2) Polishing accuracy of roundness, achieved by the polishing machine, is better than conventional ones. That is, we can easily get the roundness under 0.0001 mm
(3) This polishing method is suitable for automatic polishing process of Silicon balls

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (5 results)

All Other

All Publications (5 results)

  • [Publications] 織田晃嘉, 大田正人, 柴田順二: "CMPメカニズムの基礎研究"日本機械学会第4回生産加工・工作機械部門,講演会論文集. No.02-25. 213-214 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Akiyosi,ODA, Masato,OHTA, Junji,SHlBATA, Takayasu,KIMURA: "A Basic Study on Chemical Mechanical Polishing (CMP), The 4th Manufacturing and Machine Tool Conference"The Japan Society of Mechanical Engineers. No.02-25. 213-214 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 織田晃嘉, 大田正人, 柴田順二: "CMPメカニズムの基礎研究"日本機械学会第4回生産加工・工作機械部門講演会論文集. 213-214 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.SEKINE, M.OHTA, J.SHIBATA, T.KIMURA: "A BASIC STUDY ON CMP MECHANISM AND A TRIAL FOR CMP"Advances in Abrasive Technology. IV. 271-278 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 関根洋和, 大田正人, 柴田順二, 木邑隆保: "ゾルゲル研磨剤の製造と加工特性の評価"2001年度砥粒加工学会学術講演会講演論文集. 401-403 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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