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High Speed Slicing by Thin Diamond Wire Tool

Research Project

Project/Area Number 13650139
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionKanazawa Institute of Technology

Principal Investigator

SUWABE Hitoshi  Kanazawa Institute of Technology, Department of Engineering, Associate Professor, 工学部, 助教授 (40202139)

Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2002: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2001: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsSlicing / Wire Tool / Diamond Grains / Thin Wire Tool / Hard and Brittle Materials / 研削 / 切断 / 半導体材料
Research Abstract

As the results until last year, the plating apparatus to make thin diamond wire tool under φ180μm and the slicer to run the wire tool at high speed were manufactured for experiment of this research project. And, the relation between twist pitch of the thin wire tool and the processing characteristics were clear. In this year, the processing mechanisms of thin wire tool are examined through the material intensity test and the slicing test of thin wire tool. And, the followings are clear.
1.As the results to examine the best plating conditions to thin wire tool from point of the plating time, the plating pool length, the current density, the pre-plating pool length to improve stick strength between diamond grains and core wire is 200mm, the plating pool length to fix the diamond grains is 200mm, the after-plating pool length to make uniform extrusion amount is 200mm, and the current density is 1.5〜2.0×10^3 A/m^2.
2.As the results of the intensity test of thin wire tool, the tensile strength of wire tool decreases to the normal diamond wire tool by effect of decrease of the cross section. And, the twist strength of thin wire tool shows the value of 1.5 times to the normal wire tool.
3.As the examinations of effect between twist pitch of thin wire tool and slicing characteristics, the slicing efficiency shows the best value at 8mm of twist pitch. It is clear that the many diamond grains act on the processing surface in case of thin wire tool of long pitch.
4.As the results of measurement for processing surface, the accuracy of processing surface by the thin wire tool shows same value with the accuracy by the normal wire tool.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (9 results)

All Other

All Publications (9 results)

  • [Publications] 石川憲一: "細線ダイヤモンドワイヤ工具の加工特性"2003年度砥粒加工学会学術講演会論文集. 119-120 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 石川憲一: "細線ダイヤモンドワイヤ工具の工具形状が切断性能に及ぼす影響"2004年度精密工学会春季大会学術講演会講演論文集. 23-24 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 石川憲一: "縒り線ワイヤを用いたダイヤモンド電着ワイヤ工具の開発"砥粒加工学会誌. 47,9. 495-500 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Ken-ichi IHIKAWA: "Processing Characteristics of Thin Diamond Wire Tool"Proc. of JSGE. 119-120 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Ken-ichi IHIKAWA: "Relationship between Processing Ability and Shape of Thin Diamond Wire Tool"Proc. of JSPE. 23-24 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Ken-ichi IHIKAWA: "Development of Diamond Wire Tool by twisted Wire"Journal of JSGE. 47-9. 495-500 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 石川憲一: "細線ダイヤモンドワイヤ工具の加工特性"2003年度砥粒加工学会学術講演会論文集. 119-120 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 石川憲一: "細線ダイヤモンドワイヤ工具の工具形状が切断性能に及ぼす影響"2004年度精密工学会春季大会講演論文集. 23-24 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 石川憲一: "細線ダイヤモンドワイヤ工具の開発"2002年度砥粒加工学会学術講演会論文集. 93-94 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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