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Research on the micro turning process of optical fiber.

Research Project

Project/Area Number 13650291
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionGIFU NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

INABA Seiki  GIFU NATIONAL COLLEGE OF TECHNOLOGY, DEPARTMENT OF ELECTRICAL ENGINEERING, PROFESSOR, 電気情報工学科, 教授 (30110183)

Co-Investigator(Kenkyū-buntansha) HANE Kazuhiro  TOHOKU UNIVERSITY, FACULTY OF ENGINEERING, PROFESSOR, 大学院・工学研究科, 教授 (50164893)
Project Period (FY) 2001 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2004: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2003: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2002: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2001: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsOptical fiber / Micromachining / Lathe / Etching / Plasma process / 旋盤
Research Abstract

In this study, the micro turning process method, which was similar to the lathe for metallic material, was examined. Processed objects are the glass rods of 500 μm diameter or less such as optical fibers.
Wet etching, dry etching and the technique, which combined both, realize drilling, small diameter processing, thrust drill processing and taper processing. The research results are shown in the following.
1. The apparatus using RIE dry etching was developed. An optical fiber is rotated coaxially in CF4 plasma. Furthermore, the computer control system with rotation and shaft feed was constructed for the wet etching.
2. Drilling and small diameter processing by the wet etching were carried out, and the problem to the turning process was examined.
3. A thrust limit processing by the dry etching was realized. A micro capillary or photo resist and the Ni plating was used as the mask for dry etching in the turning process. In addition, it was also realized on the masking method using laser beam lithography.
4. By rotating in tilting optical fiber for the discharging electrode, taper processing was realized. The sharp angle was 15 degrees, and radius of curvatures was about 200nm.
5. Ni plating and the excimer laser also realized drilling process. Moreover, the technique using the optical trap was also examined.
6. The research results were shown in the paper.

Report

(5 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (8 results)

All 2005 2004 Other

All Journal Article (4 results) Publications (4 results)

  • [Journal Article] ファイバ型光制御デバイスのための三次元的微細加工2005

    • Author(s)
      熊崎 裕教
    • Journal Title

      電気学会論文誌E 125巻5号(印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Three-dimensional micro-machining for fiber type optical control devices2005

    • Author(s)
      H.Kumazaki, S.Inaba, K.Hane, Y.Nasu
    • Journal Title

      IEEj Transactions on Sensors and Micromachines Vol.125

    • NAID

      10015517870

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 光ファイバの微細加工とその応用2004

    • Author(s)
      稲葉 成基
    • Journal Title

      岐阜高専紀要 39巻

      Pages: 105-108

    • NAID

      110004649478

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Micromachining of optical fiber and its application2004

    • Author(s)
      S.Inaba, H.Kumazaki, K.Nakashima, F.Inoue, K.Hane
    • Journal Title

      Memoirs of Gifu National College of Technology Vol.39

      Pages: 105-108

    • NAID

      110004649478

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] H.Kumazaki: "Tunable wavelength filter using a Bragg grating fiber thinned by plasma Etching"IEEE Photonics Technology Letters. Vol.13, No.11. 1206-1208 (2001)

    • Related Report
      2003 Annual Research Report
  • [Publications] 稲葉 成基: "光ファイバの微細加工とその応用"岐阜高専紀要. 39巻. 105-108 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Kumazaki: "Tunable wavelength filter using a Bragg grating fiber thinned by plasma Etching"IEEE Photonics Technology Letters. Vol.13,No.11. 1206-1208 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Kumazaki: "Tunable Wavelength Filter Using a Bragg Grating Fiber Thinned by Plasma Etching"IEEE Photonics Technology Letters. 13・11. 1206-1208 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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