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Research on Optical Wave Control Devices using A Fluorinated Silicon Oxide Thin-Films Formed by Selective Liquid Phase Deposition

Research Project

Project/Area Number 13650384
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionShibaura Institute of Technology

Principal Investigator

HOMMMA Tetsuya  Shibaura Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (60286698)

Co-Investigator(Kenkyū-buntansha) TAKAHASHI Hideo  Shibaura Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (90052795)
Project Period (FY) 2001 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2003: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2002: ¥700,000 (Direct Cost: ¥700,000)
KeywordsThin-Film Optical Waveguide / Fluorinated Silicon Oxide (SiOF) / Liquid Phase Deposition (LPD) Technique / Spin-on Glass (SOG) / Thermo-Optical Device / Thermal Coefficient of Refractive Index / Extinction Ratio / Half-Wave Power / 有機スピンオングラス(SOG) / リブ型導波路 / 熱光学スイッチ / オージェ電子分光 / グレーティング結合 / 屈折率
Research Abstract

The transmission loss of thin-film optical waveguides using liquid-phase deposited (LPD) fluorinated silicon oxide (SiOF) core-layer and organic spin-on glass (SOG) cladding-layer was 2〜9 dB/cm at 532〜834 nm wavelengths. The thermo-optical devices with this waveguide show switching time 2.4 msec, extinction ratio 16 dB and half-wave power 2.78W.

Report

(4 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • 2001 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 落合聖, 黒須賢治, 丸山史和, 本間哲哉, 高橋英郎: "液相成長フッ素添加酸化シリコン薄膜を用いた導波路型光スイッチ(2)"第64回応用物理学会学術講演会講演予稿集. 1091 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 丸山史和, 堀江正樹, 谷口祐樹, 黒須賢治, 本間哲哉, 高橋英郎: "LPD-SiOF薄膜光導波路の伝送損失の波長依存性"第63回応用物理学会学術講演会講演予稿集. 858 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 黒須賢治, 谷口祐樹, 堀江正樹, 丸山史和, 本間哲哉, 高橋英郎: "液相成長フッ素添加酸化シリコン薄膜を用いた3層構造薄膜光導波路の評価"第63回応用物理学会学術講演会講演予稿集. 857 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Kondo, K.Inohara, Y.Taniguchi, J.Nakahata, T.Homma, H.Takahashi: "Thermo-optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films"Optical Review Letter. Vol.8. 323-325 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 谷口祐樹, 井之原和明, 野本雅洋, 近藤弘康, 本間哲哉, 高橋英郎: "液相成長フッ素添加酸化シリコン薄膜を用いた導波路型光スイッチ"第62回応用物理学会学術講演会講演予稿集. 904 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 堀江正樹, 野本雅洋, 井之原和明, 本間哲哉, 高橋英郎, 齋藤誠, 寺井藤雄: "グレーティング結合法によるフッ素添加酸化シリコン薄膜光導波路の評価"第62回応用物理学会学術講演会講演予稿集. 746 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Homma, H.Kondo, M.Sakamoto, K.Inohara, M.Nomoto, Y.Ariyama, H.Takahashi: "Surface Modification of Spin-on-Glass Film by Liquid-Phase Deposition of Fluorinated Silicon Oxide"Thin Solid Films. Vol.392. 107-112 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Ochiai, K.Kurosu, F.Maruyama, T.Homma, H.Takahashi: "Optical Switch with Thin-film Optical Waveguide using a LPD-SiOF Film(2)"Extended Abstract of The 64th Autumn Meeting The Japan Society of Applied Physics. No.3. 1091 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] F.Maruyama, M.Horie, Y.Taniguchi, K.Kurosu, T.Homma, H.Takahashi: "Wavelength Dependence of Transmission Loss in LPD-SiOF Thin-Film Optical Waveguides"Extended Abstract of The 63rd Autumn Meeting The Japan Society of Applied Physics. No.3. 858 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Kurosu, Y.Taniguchi, M.Horie, F.Maruyama, T.Homma, H.Takahashi: "Evaluation of Tri-layer Structure Thin-film Optical Waveguides using LPD-SiOF Films"Extended Abstract of The 63rd Autumn Meeting The Japan Society of Applied Physics. No.3. 857 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Kondo, K.Inohara, Y.Taniguchi, J.Nakahata, T.Homma, H.Takahashi: "Thermo-optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films"Optical Review Letter. Vol.8,No.5. 323-325 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taniguchi, K.Inohara, M.Nomoto, H.Kondo, T.Homma, H.Takahashi: "Optical Switch with Thin-Film Optical Waveguide using a LPD-SiOF Film"Extended Abstract of The 6nd Autumn Meeting The Japan Society of Applied Physics. No.3. 904 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Horie, M.Nomoto, K.Inohara, T.Homma, H.Takahashi, M.Saito, F.Terai: "Evaluation of Thin-Film Optical Waveguids Using Fluorinated Silicon Oxide Films by Grating-Coupling Method"Extended Abstract of The 62nd Autumn Meeting The Japan Society of Applied Physics. No.3. 746 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Homma, H.Kondo, M.Sakamoto, K.Inohara, M.Nomoto, Y.Ariyama, H.Takahashi: "Surface Modification of Spin-on-Glass Film by Liquid-Phase Deposition of Fluorinated Silicon Oxide"Thin Solid Films. Vol.392,No.1. 107-112 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 落合 聖, 黒須賢治, 丸山史和, 本間哲哉, 高橋英郎: "液相成長フッ素添加酸化シリコン薄膜を用いた導波路型光スイッチ(2)"第64回応用物理学会学術講演会 講演予稿集. No.3. 1091 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 丸山史和, 堀江正樹, 谷口祐樹, 黒須賢治, 本間哲哉, 高橋英郎: "LPD-SiOF薄膜光導波路の伝送損失の波長依存性"第63回応用物理学会学術講演会講演予稿集. No.3. 858 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 黒須賢治, 谷口祐樹, 堀江正樹, 丸山史和, 本間哲哉, 高橋英郎: "液相成長フッ素添加酸化シリコン薄膜を用いた3層構造薄膜光導波路の評価"第63回応用物理学会学術講演会講演予稿集. No.3. 857 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H. Kondo, K. Inohara, Y. Taniguchi, J. Nakahata, T. Homma, H. Takahashi: "Thermo-optic Switch using Fluorinated Silicon Oxide and Organic Spin-on-Glass Films"Optical Review Letter. Vol. 8(5). 323-325 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 谷口祐樹, 井之原和明, 野本雅洋, 近藤弘康, 本間哲哉, 高橋英郎: "液相成長フッ素添加酸化シリコン薄膜を用いた導波路型光スイッチ"第62回応用物理学会学術講演会 講演予稿集. 904 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 堀江正樹, 野本雅洋, 井之原和明, 本間哲哉, 高橋英郎, 齋藤誠, 寺井藤雄: "グレーティング結合法によるフッ素添加酸化シリコン薄膜光導波路の評価"第62回応用物理学会学術講演会 講演予稿集. 746 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T. Homma, H. Kondo, M. Sakamoto, K. Inohara, M. Nomoto, Y. Ariyama, H. Takahashi: "Surface Modification of Spin-on-Glass Film by Liquid-Phase Deposition of Fluorinated Silicon Oxide"Thin Solid Films. Vol. 392(1). 107-112 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 本間哲哉, 井之原和明, 谷口祐樹, 野本雅洋, 堀江正樹, 高橋英郎: "フッ素添加酸化シリコン薄膜の光デバイスへの応用"芝浦工業大学 先端工学研究機構 情報・環境材料研究センター成果報告会 講演資料集. 15-21 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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