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Visualization of Propagation of Surface Acoustic Waves in GHz Range by Laser Probing

Research Project

Project/Area Number 13650394
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 情報通信工学
Research InstitutionCHIBA UNIVERSITY

Principal Investigator

HASHIMOTO Ken-ya  Chiba University, Dept. Elec. Mech. Eng,, Associate Professor, 工学部, 助教授 (90134353)

Co-Investigator(Kenkyū-buntansha) OMORI Tatsuya  Chiba University, Dept. Elec. Mech. Eng., Research Associate, 工学部, 助手 (60302527)
YAMAGUCHI Masatsune  Chiba University, Dept. Elec. Mech. Eng., Professor, 工学部, 教授 (00009664)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2002: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2001: ¥2,100,000 (Direct Cost: ¥2,100,000)
KeywordsSurface Acoustic Wave / Visualization / SAW device / Laser Probe / Animation / ヘテロダイン
Research Abstract

Surface-Acoustic-Wave (SAW) devices are widely used in present mobile communication systems because of their compactness and high performances. This research discussed use of the laser probe method for the visualization of the SAW propagation in GHz range and its applicability to the diagnosis tool for high performance SAW devices. First, the laser probing system was constructed. For fast and precise measurement for both SAW amplitude and phase, we employed so called the knife edge method. For the operation in GHz range, we use the combination of prism mirror and high-speed photo diode instead of the knife-edge or the position-sensitive photo diode. The coherent detection was employed for the signal detection. Through the measurement, it was shown that the system is highly sensitive, wideband and large dynamic range more than 60 dB. The present system is more attractive than the system based on the Michelson interferometer from various aspects, such as precise measurement the phase response, insensitivity to ground vibration, etc. Then the extraction of SAW properties from the measured data was also investigated. By the use of phase and amplitude information, the SAW propagation can be characterized in the wavenumber domain as the Fourier transform (spectrum) of the spatial distribution. The spectral analysis was applied to extract various properties. For example, various resonance modes can be identified and separated, and variation of the laser reflection coefficient can be compensated through the evaluation of the field distribution function. Furthermore, it was shown that the SAW propagation can be easily understandable by constructing its animation movie. These results clearly shows effectiveness of the laser probe method as the diagnosis tool for high performance SAW devices.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] R.Nakagawa et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"Proc. IEEE Ultrasonics Symposium. 405-409 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Hashimoto et al.: "Design Considerations on Wideband Longitudinally-Coupled Double-Mode SAW Filters"Proc. IEEE Ultrasonics Symposium. 153-157 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Omori et al.: "SAW Reflection Characteristics of Cu Electrodes and Their Application to SAW IF Devices"Proc. IEEE Ultrasonics Symposium. 19-23 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 橋本研也他: "IDTにおける内部反射を含むSAW共振子の動作に関する基礎的検討"電子情報通信学会技術研究報告US2002-49. 19-24 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 中川亮他: "SAW導波路における高次横モードの励振・伝搬特性"電子情報通信学会技術研究報告US2002-48. 13-18 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 小澤寛司他: "電子線直接露光法によるSAWデバイス作製に関する基礎的検討"第31回EMシンポジウム予稿集. 131-136 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R. Nakagawa et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"Proc. IEEE Ultrasonics Symposium. 405-409 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Hashimoto et al.: "Design Considerations on Wide-band Longitudinally-Coupled Double-Mode SAW Filters"Proc. IEEE Ultrasonics Symposium. 153-157 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Omori et al.: "SAW Reflection Characteristics of Cu Electrodes and Their Application to SAW IF Devices"Proc. IEEE Ultrasonics Symposium. 19-23 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Hashimoto et al.: "Design Considerations on Wide-band Longitudinally-Coupled Double-Mode SAW Filters"Meeting Report, IEICE. US2002-49. 19-24 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R. Nakagawa, et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"Meeting Report, IEICE. US2002-48. 13-18 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Ozawa, et al.: "Study on SAW device fabrication by means of direct electron beam exposure"Proc. 31st EM Symposium. 131-136 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R. Nakagawa et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"Meeting Report, JSPS. No. 150 Committee. 79-84 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Omori et al.: "Preparation of PZT Micro-Discs and Their Piezoelectric Application to UHF-SHF Devices"Meeting Report, JSPS. No. 150 Committee. 85-88 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Hashimoto et al.: "Modelling of Shear-Horizontal-Type Surface Acoustic Waves and Its Application to COM-Based Device Simulation"Proc. IEEE Ultrasonics Symposium. 127-132 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Hashimoto: "Simulation Technologies for RF SAW devices"Meeting Report, IEICE. MW2001-58. 1-8 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Hashimoto et al.: "Behaviour of SAW devices as a multi-port circuit"Convention Record, IEICE. 283-284 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Ozawa, et al.: "Study on SAW device fabrication by means of direct electron beam exposure"Meeting Report, IEICE. US2001-30. 37-42 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] S.Nakagomi et al.: "Single-Phase Unidirectional SAW Transducer Using Cu Electrode"Jpn. J. Appl. Phys.. (印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] R.Nakagawa et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"Proc. IEEE Ultrasonics Symposium. (印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Hashimoto et al.: "Design Considerations on Wideband Longitudinally-Coupled Double-Mode SAW Filters"Proc. IEEE Ultrasonics Symposium. (印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Omori et al.: "SAW Reflection Characteristics of Cu Electrodes and Their Application to SAW IF Devices"Proc. IEEE Ultrasonics Symposium. (印刷中). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 橋本研也他: "漏洩弾性表面波に対する放射条件について"電子情報通信学会総合大会. A-1-8 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 橋本研也他: "IDTにおける内部反射を含むSAW共振子の動作に関する基礎的検討"電子情報通信学会技術研究報告US2002-49. 19-24 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 中川亮他: "SAW導波路における高次横モードの励振・伝搬特性"電子情報通信学会技術研究報告US2002-48. 13-18 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 小澤寛司他: "電子線直接露光法によるSAWデバイス作製に関する基礎的検討"第31回EMシンポジウム予稿集. 131-136 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] R.Nakagawa et al.: "Analysis of Excitation and Propagation Characteristics of Leaky Modes in SAW Waveguides"日本学術振興会第150委員会第75回研究会資料. 79-84 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Omori et al.: "Preparation of PZT Micro-Discs and Their Piezoelectric Application to UHF-SHF Devices"日本学術振興会第150委員会第75回研究会資料. 85-88 (2002)

    • Related Report
      2001 Annual Research Report
  • [Publications] K.Hashimoto et al.: "Modelling of Shear-Horizontal-Type Surface Acoustic Waves and Its Application to COM-Based Device Simulation"Proc. IEEE Ultrasonics Symposium. (印刷中). (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 橋本研也: "[招待論文]RF SAWデバイス用シミュレーション技術"電子情報通信学会技術研究報告MW2001-58. 1-8 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 橋本研也他: "SAWデバイスの多端子対回路としての振る舞いに関する一考察"電子情報通信学会ソサイエティ大会. 283-284 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] 小澤寛司他: "電子線露光によるSAWデバイス作製に関する基礎的検討"電子情報通信学会技術研究報告US2001-30. 37-42 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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