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Development of zirconia film oxygen sensor controlled with piezoelectric material

Research Project

Project/Area Number 13650729
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

MASUMOTO Hiroshi  Institute for Materials Research, Associate Professor, 金属材料研究所, 助教授 (50209459)

Co-Investigator(Kenkyū-buntansha) KIMURA Teiichi  Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (10333882)
AKASHI Takaya  Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (20312647)
GOTO Takashi  Institute for Materials Research, Professor, 金属材料研究所, 教授 (60125549)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2002: ¥1,400,000 (Direct Cost: ¥1,400,000)
Fiscal Year 2001: ¥2,000,000 (Direct Cost: ¥2,000,000)
Keywordspiezoelectric material / barium titanate / lead zirconate titanate / ion conductivity / complex impedance / yttoria stabilized zirconia / vibration dependence / multi-functional film / 振動依存性 / イツトリア安定化ジルコニア / 酸素センサー
Research Abstract

In this research, it succeeded in the improvement of electric conductivity of yttoria stabilized zirconia (YSZ) by using the vibration caused by a piezoelectric device to develop the oxygen ion sensor which worked at the low temperature.
1. YSZ thin film was prepared by the MOCVD method used Zr(DPM)_4 and Y(DPM)_3 as sauces. The YSZ film had the ionic conduction because the semicircle and the spike had been admitted on the low frequency and the high frequency respectively in the complex impedance measurement.
2. Read zirconate titanate (PZT) films which was the piezoelectric material were prepared by RF-sputtering method, and the relationship between experimental conditions, structure, and morphology and the ferroelectric characteristic of the films were investigated.
3. Barium titanate (BTO : BaTiO_3) films were prepared by MOCVD using Ba(DPM)_2 and Ti(O-i-C_3H_7)_2(DPM)_2 as sauces. The ionic-conduction/piezoelectric multi-functional film composed of the YSZ/BTO/Pt/MgO film was fabricated. The morphology of BTO was compact, and of YSZ was a columnar-shaped structure.
4. The YSZ/piezoelectric multi-functional film was fabricated, and the effect of the piezoelectric vibration on the electric characteristic of the YSZ film were investigated.
(1) The impedance of the YSZ thin film was decreased with increasing amplitude of the piezoelectric vibration.
(2) Conductivity of the YSZ thin film vibrated by the piezoelectric vibration (frequency 115kHz, 40V in the voltage) conductivity is about 2×10^<-6>Ω^<-1>m^<-1>.at 90℃. The value of this conductivity was about one digit or more higher than that of the no vibration YSZ thin film. It was suggested to be able to increase conductivity of the YSZ thin film by the piezoelectric vibration.
The reason that conductiveity of YSZ increases by the piezoelectric vibration is researching now.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] T.Tohma, H.Masumoto, T.Hirai, T.Goto: "Preparation of barium titanate films by metal-organic chemical vapor deposition and its thermodynamic analysis"Mater.Trans.. 42. 702-706 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Akashi, K.Morita, T.Hirai, H.Yamane, T.Goto: "Phase relationship in a BaO-Bi_2O_3-TiO_2 system and electrical properties of BaTiO_3 with addition of Bi_4Ti_3O_<12>"Mater.Trans. 42. 1823-1826 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Masumoto, T.Tohma, T.Goto, T.Smirnova, Y.Masuda, T.Hirai: "Dielectric properties of Ba-Ti-O thin films prepared by MOCVD"Proc.2000 12th IEEE Int.Symp.Applications of Ferroelectrics. II. 841-844 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Sugai, T.Iijima, H.Masumoto: "Preparation of lead titanate and PZT ultra-thin film using Langmuir-Blodgett film as precursor"Proc.2000 12th IEEE Int.Symp.Applications of Ferroelectrics. II. 917-920 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R.Tu, T.Kimura, T.Goto: "Rapid synthesis of yttria-partially-stabilized zirconia films by metal-organic chemical vapor deposition"Mater.Trans.. 43. 2354-2356 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Tohma, H.Masumoto, T.Goto: "Microstructure and dielectric properties of barium titanate film Prepared by MOCVD"Mater.Trans.. 43. 2880-2884 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T.Tohma, H.Masumoto, T.Goto: "Preparation of BaTiO_3-BaZrO_3 films by metal-organic chemical vapor deposition"Jpn.J.Appl.Phys.. 41. 6443-6446 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H.Masumoto, A.Kojima, T.Iijima, T.Goto: "Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr,Ti)O_3 films under various atmospheres"Jpn.J.Appl.Phys.. 41. 6882-6885 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Tohma, H. Masumoto, T. Hirai and T. Goto: "Preparation of barium titanate films by metal-organic chemical vapor deposition and its thermodynamic analysis"Mater. Trans.. 42. 702-706 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Akashi, K. Morita, T. Hirai, H. Yamane and T. Goto: "Phase relationship in a BaO-Bi_2O_3-TiO_2 system and electrical properties of BaTiO_3 with addition of Bi_4Ti_3O_<12>"Mater. Trans.. 42. 1823-1826 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Masumoto, T. Tohma, T. Goto, T. Smirnova, Y. Masuda and T. Hirai: "Dielectric properties of Ba-Ti-O thin films prepared by MOCVD"Proc. 2000 12th IEEE Int. Symp. Applications of Ferroelectrics (ISAF 2000). II. 841-844 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Sugai, T. Iijima and H. Masumoto: "Preparation of lead titanate and PZT ultra-thin film using Langmuir-Blodgett film as precursor"Proc. 2000 12th IEEE Int. Symp. Applications of Ferroelectrics (ISAF 2000). II. 917-920 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R. Tu, T. Kimura and T. Goto: "Rapid synthesis of yttria-partially-stabilized zirconia films by metal-organic chemical vapor deposition"Mater. Trans.. 43. 2354-2356 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Tohma, H. Masumoto and T. Goto: "Microstructure and dielectric properties of barium titanate film Prepared by MOCVD"Mater. Trans.. 43. 2880-2884 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] T. Tohma, H. Masumoto and T. Goto: "Preparation of BaTiO_3-BaZrO_3 films by metal-organic chemical vapor deposition"Jpn.J.Appl. Phys.. 41. 6643-6646 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] H. Masumoto, A. Kojima, T. Iijima and T. Goto: "Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr,Ti)O_3 films under various atmospheres"Jpn. J. Appl. Phys.. 41. 6882-6885 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R.Tu, T.Kimura, T.Goto: "Rapid synthesis of yttria-partially-stabilized zirconia films by metal-organic chemical vapor deposition"Mater. Trans.. 43. 2354-2356 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Tohma, H.Masumoto, T Goto: "Microstructure and dielectric properties of barium titanate film Prepared by MOCVD"Mater. Trans.. 43・11. 2880-2884 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Tohma, H.Masumoto, T.Goto: "Preparation of BaTiO_3-BaZrO_3 films by metal-organic chemical vapor deposition"Jpn. J. Appl. Phys.. 41・11B. 6643-6646 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Masumoto, A.Kojima, T.Iijima, T.Goto: "Preparation of Ag-alloy top-electrode for ferroelectric Pb(Zr,Ti)O_3 films under various atmospheres"Jpn. J. Appl. Phys.. 41・11B. 6882-6885 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Tohma, H.Masumoto, T.Hirai, T.Goto: "Preparation of Barium Titanate Film by Metal-Organic Chemical Vapor Deposition and its Thermodynamic Analysis"Mater. Trans.. 42. 702-706 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Akashi, K.Morita, T.Hirai, H.Yamane, T.Goto: "Phase relationship in a BaO-Bi_2O_3-TiO_2 system and electrical properties of BaTiO_3 with addition of Bi_4Ti_3O_<12>"Mater. Trans.. 42. 1823-1826 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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