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In-Situ Strengthening Method for Micro-Sized materials for MEMS devices by Nanocrystal Precipitation During Application of Stress

Research Project

Project/Area Number 13650754
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

TAKASHIMA Kazuki  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Associate Professor, 精密工学研究所, 助教授 (60163193)

Co-Investigator(Kenkyū-buntansha) ISHIYAMA Chiemi  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research Associate, 精密工学研究所, 助手 (00311663)
SHIMOJO Masayuki  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Research Associate, 精密工学研究所, 助手 (00242313)
HIGO Yakichi  Precision and Intelligence Laboratory, Tokyo Institute of Technology, Professor, 精密工学研究所, 教授 (30016802)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2002: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2001: ¥2,600,000 (Direct Cost: ¥2,600,000)
KeywordsNanocrystal / MEMS / Crystalline orientation / Ni-P amorphous alloy / Micro-sized specimen / Smarts materials / 平面歪
Research Abstract

Microelectromechanical systems (MEMS) are under intensive development for utilization in many scientific and technological fields such as information and biomedical technologies. These MEMS devices are usually fabricated from a thin film deposited on a substrate by suitable surface micromachining techniques, and the micro-sized elements prepared from a thin film layer are used as mechanical components. The size of the components used in such devices is thus considered to be in the order of microns, and the mechanical properties of such micro-sized materials are considered to be different from those of bulk (ordinary sized) materials. The development of high performance materials for MEMS applications is thus necessary. It is rather difficult to apply conventional strengthening methods for micro-sized materials, as the size of MEMS devices are of the order of microns and controlling the mechanical properties based on micro-size structural modifications is no longer adequate. Therefore, strengthening based on nanostructural control would be one of the most promising methods for micro-sized materials and the development of strengthening methods by nanostructural control are required. In this investigation, precipitation of nanocrystals in a Ni-P amorphous alloy film during application of a stress field was investigated. Microsized cantilever-beam-type specimens were prepared from the film by focused-ion-beam machining and bending stress was applied to the specimen using a mechanical testing machine for microsized specimens. Transmission electron microscopy observation in the plane strain deformed region has revealed that the deformation induces the precipitation of nanocrystalline Ni particles, and a (III) plane of all crystalline particles is aligned parallel to the side surface of the specimen. The precipitation of nanocrystals is considered to be effective for in-situ strengthening of micro-sized amorphous alloy.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] A.Ogura, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Control of Nanocrystalline Orientation Using the Application of a stress Field in an Amorphous Alloy"J. Appl. Phys. Letter. 79. 1042-1044 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R.Tarumi, A.Ogura, M.Shimojo, K.Takashima, Y.Higo: "Molecular Dynamics Simulation of Nano-Sized Crystallization During Plastic Deformation in an Amorphous Metal"Mat. Res. Soc. Symp. Proc.. 634. B1.9.1-B1.9.6. (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Ogura, M.Sato, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Formation of Nano-Sized Crystals During Plastic Deformation in Amorphous Alloys"Mat. Res. Soc. Symp. Proc.. 634. B1.10.1-B1.10.6 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Takashima, R.Tarumi, Y.Higo: "Fracture Behavior of Micro-Sized Specimens Prepared from an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures"Mat. Res. Soc. Symp. Proc.. 695. 355-360 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R.Tarumi, K.Takashima, Y.Higo: "Formation of Oriented Nanocrystals in an Amorphous Aloy by Focused-Ion-Beam Irradiation"Appl. Phys. Lett.. 81. 4610-4612 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Nakai, S.Koyama, K.Takashima, Y.Higo: "Evaluation of Acoustic Emission During Fracture Toughness Test of Micro-Sized Specimens"Proc. 6th Far-East Conf. on Nondestructive Testing. 481-486 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. Ogura, R. Tarumi, M. Shimojo, K. Takashima and Y. Higo: "Control of Nanocrystalline Orientation Using the Application of a stress Field in an Amorphous Alloy"J. Appl. Phys. Letters. 79. 1042-1044 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R. Tarumi, A. Ogura, M. Shimojo, K. Takashima and Y. Higo: "Molecular Dynamics Simulation of Nano-Sized Crystallization During Plastic Deformation in an Amorphous Metal"MRS Symp. Proc.. 634. B1.9.1-9.6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A. 0gura, M. Sato, R. Tarumi, M. Shimojo, K. Takashima, Y. Higo: "Formation of Nano-Sized Crystals During Plastic Deformation in Amorphous Alloys"MRS Symp. Proc.. 634. B1.10.1-10.6 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Takashima, R. Tarumi and Y. Higo: "Fracture Behavior of "Micro-Sized Specimens Prepared from an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures"MRS Symp. Proc.. 695. 355-360 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] R. Tarumi, K. Takashima and Y. Higo: "Formation of Oriented Nanocrystals in an Amorphous Aloy by Focused-Ion-Beam-Irradiation"Appl. Phys. Letters. 81, No.24. 4610-4612 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Nakai, S. Koyama, K. Takashima and Y. Higo: "Evaluation of Acoustic Emission during Fracture Toughness Test of Micro-Sized Specimens"Proc. 6th Far-East Conf. On Nondestructive Testing. 481-486 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Takashima, R.Tarumi Y.Higo: "Fracture Behavior of Micro-Sized Specimens Prepared from an Amorphous Alloy Thin Film at Ambient and Elevated Temperatures"Mat.Res.Soc.Symp.Proc.. 695. 355-360 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] R.Tarumi, K.Takashima, Y.Higo: "Formation of Oriented Nanocrystals in an Amorphous Aloy by Focused-Ion-Beam Irradiation"Appl.Phys.Lett.. 81・24. 4610-4612 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Nakai, S.Koyama, K.Takashima, Y.Higo: "Evaluation of Acoustic Emission During Fracture Toughness Test of Micro-Sized Specimens"Proc.6th Far-East Conf.on Nondestructive Testing. 481-486 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Ogura, T.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Control of Nanocrystalline Orientation Using the Application of a stress Field in an Amorphous Alloy"J. Appl. Phys. Letter. 79・7. 1042-1044 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] R.Tarumi, A.Ogura, M.Shimojo, K.Takashima, Y.Higo: "Molecular Dynamics Simulation of Nano-Sized Crystallization During Plastic Deformation in an Amorphous Metal"Mat. Res. Soc. Symp. Proc.. Vol.634. B1.9.1-B1.9.6 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] A.Ogura, M.Sato, R.Tarumi, M.Shimojo, K.Takashima, Y.Higo: "Formation of Nano-Sized Crystals During Plastic Deformation in Amorphous Alloys"Mat. Res. Soc. Symp. Proc.. Vol.634. B1.10.1-B1.10.6 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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