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Preparation of Tribological Materials for Microelectromechanical systems

Research Project

Project/Area Number 13650766
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Structural/Functional materials
Research InstitutionAichi Institute of Technology

Principal Investigator

TAKAGI Makoto  Aichi Institute of Technology, Department of Mechanical Engineering, Associate Professor, 工学部, 助教授 (40288428)

Co-Investigator(Kenkyū-buntansha) MATSUMURO Akihito  Nagoya University, Department of Micro System Engineering, Associate Professor, 工学部, 助教授 (80173889)
IMURA Toru  Aichi Institute of Technology, Department of Mechanical Engineering, Guest Professor, 工学部, 客員教授 (50022968)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥2,800,000 (Direct Cost: ¥2,800,000)
Fiscal Year 2002: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2001: ¥1,700,000 (Direct Cost: ¥1,700,000)
Keywordsmicrotribology / wear structure / scanning probe microscope / TEM / silicon single crystal / metallic glass / ceramics thin film / MEMS / 非平衡材料 / マイクロマシン
Research Abstract

(1) Microtribological properties of silicon single crystal and the wear structure
Microtribology of silicon single crystals is one of the important factors for the practical use of MEMS. In this study, the effect of crystal orientation on microwear of silicon single crystal and the wear structure were mainly investigated. Microfriction experiments using atomic force/friction force microscope (AFM/FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of Silicon single crystals. In these experiments, the scanning-scratching directions of a tip of AFM/FFM were <100> and <110> on Si(100) surface and <112> on Si(111) surface. As a result, it was found that the depth of the wear marks generated on silicon surfaces increased in the following order : <112>, <100>, <100>. Cross-sectional TEM observations of the microwear marks were carried out. As a result, it was found that the small dislocation loops were generated in the surface region at the first stag … More e of the microwear, and the size and the number of dislocations increased with the progress of the microwear.
(2) Tribological properties of Zr-based metallic glass and its composites
Zr-based metallic glass and its composites reinforced with ZrC powder were prepared by arc-melting and casting. The tribological properties of the materials thus prepared were investigated by using pin-on-disk type wear testing machine. As a result, it was found that the wear resistance of Zr-based metallic glass and its composites was better than that of conventional aluminum alloy A4032(Lowex). Zr-based metallic glass composite reinforced with 15vol.% ZrC powder exhibited a good wear resistance and low friction coefficient among the materials tested in this study. The microstructure of the surface of of the wear traces was observed by TEM. As a result, it was found that amorphous phase of Zr-based metallic glass was preserved after the wear tests.
(3) Mechanical properties of CN films prepared by ion-beam-assisted deposition
Carbon nitride (CN) films were prepared on Si(001) substrates by ion-beam-assisted deposition. Carbon was evaporated by electron beam and N and Ar ions bombarded simultaneously from one ion source. The films prepared under Ar/N2 ratio of 1 exhibited high hardness and good wear resistance. Less

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (16 results)

All Other

All Publications (16 results)

  • [Publications] Makoto Takagi: "Wear Properties of Nanocrystalline Aluminum Alloys and Their Composites"Scripta materialia. 44. 2145-2148 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Feng Chen: "Crystallization of Zr_<55>Al_<10>Ni_5Cu_<30> Bulk Metallic Glass Composites Containing ZrC Particles"Materials Transactions. Vol.43,No.1. 1-4 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Takagi: "Deformation Behavior of Pt-based Metallic Glass at Elevated Temperatures"Materials Transactions. Vol.43,No.10. 2463-2467 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Takagi: "Effect of Crystal Orientation on Microwear of Silicon Single Crystal and The Wear Structure"Proceedings of MRS 2002 Fall Meeting. (in printing).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] 有馬 則和: "シリコン単結晶のマイクロ摩耗と摩耗組織"日本金属学会誌. 67巻6号(印刷中). (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidenobu Ohta: "Ar Ion Effect on Mechanical Properties of Carbon Nitride Films Prepared by Ion-Beam-Assisted Deposition"Japanese Journal of Applied Physics. Vol.41. 7455-7461 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Takagi: "Wear Properties of Nanocrystalline Aluminum Alloys and Their Composites"Scripta Materialia. Vol.44. 2145-2148 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Feng Chen: "Crystallization of Zr_<55>Al_<10>Ni5Cu_<30> Bulk Metallic Glass Composites Containing ZrC Particles"Materials Transactions. Vol.43, No.1. 1-4 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Takagi: "Deformation Behavior of Pt-based Metallic Glass at Elevated Temperatures"Materials Transactions. Vol.43, No.10. 2463-2467 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Takagi: "Effect of Crystal Orientation on Microwear of Silicon Single Crystal and The Wear Structure"Proceedings of MRS 2002 Fall Meeting. (in printing). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Hidenobu Ohta: "Ar Ion Effect on Mechanical Properties of Carbon Nitride Films Prepared by Ion-Beam-Assisted Deposition"Japanese Journal of Applied Physics. Vol.41. 7455-7461 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] A.Matsumuro: "Development of In-site Surface Observation System with an Atomic Resolution under Tensile stress by Atomic Force Microscope"Proceedings of MRS 2002 Fall Meeting. (in printing). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Makoto Takagi: "Deformation Behavior of Pt-based Metallic Glass at Elevated Temperatures"Materials Transactions. 43・10. 2463-2467 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Makoto Takagi: "Effect of Crystal Orientation on Microwear of Silicon Single Crystal and The Wear Structure"MRS 2002 Fall Meeting Abstracts. 545-546 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Makoto Takagi: "Wear Properties of Nanocrystalline Aluminum Alloys and Their Composites"Scripta materialia. 44. 2145-2148 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Feng Chen: "Crystallization of Zr_<55>Al_<10>Ni_5Cu_<30> Bulk Metallic Glass Composites Containing ZrC Particles"Materials Transactions. Vol.43,No.1. 1-4 (2001)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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