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System Construction and Execution for the expansive upgrading of the practice Education in the College of Technology

Research Project

Project/Area Number 13680214
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Science education
Research InstitutionSuzuka National College of Technology

Principal Investigator

FUNATO Yasuyuki  Suzuka National College of Technology, Department of Electronic and Information Engineering, Professor, 電子情報工学科, 教授 (10005358)

Co-Investigator(Kenkyū-buntansha) ITOH Akira  Suzuka National College of Technology, Dep. of Electronic and Information Engineering, Asst. Professor, 電子情報工学科, 講師 (40259883)
NAGASHIMA Takayoshi  Suzuka National College of Technology, Dep. of Electronic and Information Engineering, Assoc. Professor, 電子情報工学科, 助教授 (30237515)
KUWABARA Hiroshi  Suzuka National College of Technology, Dep. of Electronic and Information Engineering, Professor, 電子情報工学科, 教授 (30043326)
CHO Rai  Kogakukan University, Dep. of Social Welfare, Asst. Professor, 社会福祉学部, 講師 (90432921)
KAWAGUCHI Motoichi  Mie University, Dep. of Education, Professor, 教育学部, 教授 (40023171)
大江 一行  名古屋工業大学, 生産システム工学科, 教授 (30024269)
Project Period (FY) 2001 – 2002
Project Status Completed (Fiscal Year 2002)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2002: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2001: ¥1,800,000 (Direct Cost: ¥1,800,000)
KeywordsCollege of technology / Discharge formation / Glow discharge / NOx gas / N_2 / O_2 mixed gas / Plasma device / quadrupole mass spectrometry / Cooperative study / プラズマプロセシング / 工学実践教育 / 放電プラズマの開始機構 / 酵素、窒素、混合ガス放電 / 放電の電圧・電流特性 / パルス性前駆現象 / プラズマの分光計測 / 水素ガス放出特性 / プラズマ容器壁
Research Abstract

This study aimed to couple education and research and carried out the practical education and the basic process research on an electromagnetic field through a glow discharge experiment. The main experiment and research was performed by using "the electromagnetic field integral experiment equipment", and it was promoted for the synthetic research, and following results and knowledge were obtained. In this study, the following are comprehensively intended in fields such as electricity base, electromagnetic field, gas and solid-state electronics, electronic property, computer hardware/software in the collage curriculum. The experiment and research of gas ionization process in parallel plate electric field. Electric field in generating process of glow discharge plasma, potential and the discharge current were measured carried out and analyzed with a computer method. Generating process and behavior of mixed gas plasma including the NOx gas were pursued as the basic research for air pollution purification. N_2, O_2 and N_2/O_2 mixed gas were used for test gases and correlation measurement of the build-up characteristics of glow discharge were carried out. A new knowledge on the correlation between discharge current and partial pressure, visible radiation spectrum in the discharge initial stage was obtained by measurement and visible light spectrometry of gas pressure with time change, in which the quadrupole mass spectrometry was applied for the measurements. In the capacitive coupling type RF plasma generation, the electric power optimization was attempted by electric circuit analysis, electric phase measurement. The research was performed by the cooperation between technical college, another university, laboratory for graduation research, special research in the advanced course and the above results were reported everywhere.

Report

(3 results)
  • 2002 Annual Research Report   Final Research Report Summary
  • 2001 Annual Research Report
  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] Y.Funato, T.Hosokawa, T.Kaneda: "Prebreakdown Characteristics and Correlations between Current and Optical Phenomena of Low-Pressure Glow Discharges in O_2, N_2 and their Mixture"Proc. of XIV International Conference on Gas Discharges and their Applications, 9/2-9/6(Liverpool, UK). Vol.1. 243-246 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Akaishi, M.Nakasuga, Y.Funato: "Simulation of hydrogen outgassing in ultrahigh vacuum chamber and fusion device by recombination limited model"Journal of Vacuum Science and Technology A. Volume20,No.3. 846-856 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yasuyuki FUNATO, Takayoshi NAGASHIMA, Takenori HIRANO: "Gas Dynamics of Non-Equilibrium Plasma in N2, O2 and Air"MEMOIRS of Suzuka National College of Technology. Vol.35. 75-80 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki, T.Hosokawa: "Spectroscopic and QMS Studies of DC-Glow Discharge with Reactive Cathode in N2/O2 Mixtures"Proc. 15^<th> Int.Symposium on Plasma Chemistry, July 9-13,2001,Orleans. Vol.III. 925-929 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Akaishi, M.Nakasuga, Y.Funato: "True and measured outgassing rates of a vacuum chamber with a reversibly adsorbed phase"J. of Vacuum Science & Technology A. Vol.19,No.1. 365-371 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Tatsuzo Hosokawa, Kazuhiro Goto, Mikio Ohuchi, Yasuyuki Funato: "Prebreakdown Phenomena and Formation Processes of Low-Pressure Glow Discharges in Ar, Ar/N_2 and Ar/O_2 Mixtures"Jpn. J. Appl. Phys. Vol.40,Pt.1,No.11. 6600-6606 (2001)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y, Funato, T. Hosokawa and T. Kaneda: "Prebreakdown Characteristics and Correlations between Current and Optical Phenomena of Low-Pressure Glow Discharges in O_2, N_2 and their Mixtures"Proc. of the XIV International Conference on Gas Discharges and their Applications, Liverpool. Vol.1. 243-246 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K.Akaishi, M. Nakasuga and Y. Funato: "Simulation of hydrogen outgassing in ultrahigh vacuum chamber and fusion device by recombination limited model"Journal of Vacuum Science and Technology A. Volume 20, No. 3. 848-856 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Yasuyuki FUNATO, Takayoshi NAGASHIMA, Takenori HIRANO and Tohru NANJO: "Gas Dynamics of Non-Equilibrium Plasma in N2, O2 and Air"MEMOIRS of Suzuka National College of Technology. Vol.35. 75-80 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Tatsuzo Hosokawa, Kazuhiro Goto, Mikio Ohuchi, Kensuke Ichinose, Yasuyuki Funato and Teruo Kaneda: "Prebreakdown Phenomena and Formation Processes of Low-Pressure Glow Discharges in Ar, Ar/N_2 and Ar/O_2 Mixtures"Jpn. J. Appl. Phys.. Vol. 40. 6600-6606 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki and T.Hosokawa: "Spectroscopic and QMS Studies of DC-Glow Discharge with Reactive Cathode in N2/O2 Mixtures"Proc. Int. Symposium on Plasma Chemistry. Orleans. 925-929 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] KAkaishi, M.Nakasuga, Y.Funato: "True and measured outgassing rates of a vacuum chamber with a reversibly adsorbed phase"J. of Vacuum Science & Technology A. Vol.19, No.1. 365-371 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] K. Akaishi,, M. Nakasuga, Y. Funato: "Simulation of Hydrogen Outgassing in a Fusion Device and a UHV Chamber by Recombination Limited Model"AVS 48th International Symposium, 11th International Conference on Solid Surfaces. VST-WeM5 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki and T.Hosokaw: "Initial Stage Dynamics of N2/O2 Glow Discharge with a Reactive Cathode"Proc. Int. Conf. On Phenomena in Ionized Gases, Nagoya,. VOL.1. 201-202 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Tatsuzo Hosokawa, Kazuhiro Goto, Mikio Ohuchi, Teruo Kaneda and Yasuyuki Funato: "Prebreakdown Phenomena of Glow Discharges in N_2,O_2 and Air"Proc. Int. Conf. on Phenomena in Ionized Gases, Nagoya,. VOL.1. 251-252 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y Funato, K Akaishi, Y.Kubota, M.Mushiaki: "Effects of Particle Wall Interaction on a Sputter Glow Discharge"Proc. XVth Europhysics Conf. on Atomic and Molecular Physics of Ionized Gases, Miskolc, Hungary,. VOL 24F. 412-413

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki: "Effects of Cathode Material on DC-Glow Discharge in N2/O2 Mixtures"Proc. Int. Conf. Phenomena in Ionized Gases, Warsaw. VOLIII. 27-28 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki: "Dynamics of NOx Gases during a Glow Discharge with a Sputter Discharge."BULLETIN OF THE AMERICAN PHYSICAL SOCIETY. Vol.44, No.1, PartII. 1096 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2002 Final Research Report Summary
  • [Publications] Y.Funato, T.Hosokawa, T.Kaneda: "Prebreakdown Characteristics and Correlations between Current and Optical Phenomena of Low-Pressure Glow Discharges in O_2, N_2 and their Mixtures"Proc.of XIV International Conference on Gas Discharges and their Applications, 9/1-9/6 (Liverpool, UK). Vol.1. 243-246 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Akaishi, M.Nakasuga, Y.Funato: "Simulation of hydrogen outgassing in ultrahigh vacuum chamber and fusion device by recombination limited model"Journal of Vacuum Science and Technology A. Volume20,No.3. 848-856 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yasuyuki FUNATO, Takayoshi NAGASHIMA, Takenori HIRANO, Tohru NANJO: "Gas Dynamics of Non-Equilibrium Plasma in N2, O2 and Air"MEMOIRS of Suzuka National College of Technology, 2002. Vol.35. 75-80 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Funato, K.Akaishi, Y.Kubota, M.Mushiaki, T.Hosokawa: "Spectroscopic and QMS Studies of DC-Glow Discharge with Reactive Cathode in N2/O2 Mixtures"Proc.Int.Symposium on Plasma Chemistry, July 9-13, 2001, Orleans. Vol.III. 925-929 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Akaishi, M.Nakasuga, Y.Funato: "True and measured outgassing rates of a vacuum chamber with a reversibly adsorbed phase"J.of Vacuum Science & Technonogy A. Vol.19,No.1. 365-371 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] Tatsuzo Hosokawa, Kazuhiro Goto, Mikio Ohuchi, Kensuke Ichinose, Yasuyuki Funato, Teruo Kaneda: "Prebreakdown Phenomena and Formation Processes of Low-Pressure Glow Discharges in Ar, Ar/N_2 and Ar/O_2 Mixtures"Jpn.J.Appl.Phys. Vol.40,Pt.1,No.11. 6600-6606 (2001)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Akaishi: "True and measured outgassing rates of a vacuum chamber with a reversibly adsorbed phase"Journal of Vacuum Science & Technology A. Vol.19,No.1. 365-371 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Funato: "Spectroscopic and QMS Studies of DC-Glow Discharge with Reactive Cathode in N2/O2 Mixtures"Proc. Int. Symposium on Plasma Chemistry, Orleans. July9-13,2001. 925-929 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Y.Funato: "Initial Stage Dynamics of N2/O2 Glow Discharges with a Reactive Cathode"Int. Conf. on Phenomena in Ionized Gases, Nagoya. VOL.I. 201-202 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] T.Hosokawa: "Prebreakdown Phenomena of Glow Discharge in N2, O2 and Air"Int. Conf. on Phenomena in Ionized Gases. VOL.I. 251-252 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Tatsuzo Hosokawa: "Prebreakdown Phenomena and Formation Processes of Low-Pressure Glow Discharges in Ar, Ar/N_2 and Ar/O_2 Mixtures"Jpn. J. Appl. Phys.. Vol.40. 6600-6606 (2001)

    • Related Report
      2001 Annual Research Report
  • [Publications] Yasuyuki Funato: "Gas Dynamics of Non-Equilibrium Plasma in N_2, O_2 and Air"MEMOIRES of Suzuka National College of Technology. Vol.35. 75-80 (2002)

    • Related Report
      2001 Annual Research Report

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Published: 2001-04-01   Modified: 2016-04-21  

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