非対称三重結合量子井戸における電界誘起屈折率効果とその光変調デバイスへの応用

• Project/Area Number: 13750304
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: 電子デバイス・機器工学
• Research Institution: Yokohama National University
• Principal Investigator: 荒川 太郎 横浜国立大学, 大学院・工学研究院, 助教授 (40293170)
• Project Period (FY): 2001 – 2002
• Project Status: Completed (Fiscal Year 2002)
• Budget Amount: ¥2,400,000 (Direct Cost: ¥2,400,000); Fiscal Year 2002: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 2001: ¥1,500,000 (Direct Cost: ¥1,500,000)
• Keywords: 結合量子井戸 / 電界誘起屈折率効果 / 分子線エピタキシー法 / 光変調器 / 光スイッチ / MEE法

Research Abstract

本研究は,新たに考案した非対称三重結合量子井戸構造(Asymmetric Triple Coupled Quantum Well, ATCQW)を作製し,超広波長域(超多波長)・超高速・超低電圧,低チャープの屈折率変化型多重量子井戸光変調デバイスへ応用することを目的とする.2年目にあたる今年度は,以下の成果が得られた.光変調デバイスの作製には至らなかったがGaAs/AlGaAs-ATCQWおよびInGaAs/InAlAs-ATCQW長波長帯の作製技術の基礎を確立できた.
1.GaAs/AlGaAs-ATCQWを有する光変調器の作製と特性評価
ATCQWのひとつで,透明波長領域で負の巨大な屈折率変化特性が得られるGaAs/AlGaAs-ATCQW (modified FACQW)構造について,光吸収電流特性測定を行い,理論計算結果と傾向が一致することを明らかにした.
2.長波長帯ATCQWの作製および特性評価
光通信用長波長帯ATCQWの作製を目指し,InP基板上へのInGaAs/InAlAs系材料のMBE結晶成長条件の最適化等を行い,高品質InGaAs/InAlAs量子井戸構造の作製に成功した.これにより,長波長帯ATCQW作製の見通しがついた.
3.光制御デバイス作製法の研究
光制御デバイスの作製のため,メタン・水素/酸素交互供給によるInP,InGaAs,InAlAsなどで構成される多層薄膜およびGaNのECR-RIEエッチングについて研究し,良好な表面平滑性と端面垂直性を得るためのプロセス条件を確立した.

Research Products

• [Publications] N.Haneji, G.Segami, K.Ide, T.Suzuki, T.Arakawa, K.Tada, et al.: "Electron Cyclotron Resonance-Reactive Ion Etching of III-V Semi-conductors by Cyclic Injection of CH_4/H_2/Ar and O_2 with Constant Ar Flow"Jpn. J. Appl. Phys.. 42,6B(掲載予定). (2003)
• [Publications] T.Arakawa, K.Tada, R.Iino, T.Suzuki, J.H.Noh, et al.: "Electrorefractive Properties of Modified Five-Layer Asymmetric Coupled Qunatum Well (FACQW)"Abstracts of 4^<th> International Conference on Low Dimensional Structures and Devices (LDSD 2002). TuO-7 (2002)
• [Publications] Kunio Tada, Taro Arakawa, Tatsuya Suzuki, et al.: "Possibility of Compact and Low-Voltage Optical Switches at 40 Gb/s and beyond (Invited)"Technical Digest of 2002 International Topical Meeting on Photonics in Switching. 66-68 (2002)
• [Publications] Kunio Tada, Taro Arakawa, Joo-Hyong Noh, et al.: "Ultra-Wideband Ultra-Fast Quantum Well Optical Modulators (Invited)"Technical Digest of 7^<th> Optoelectronics and Communication Conference (OECC 2002). 516-517 (2002)
• [Publications] J.H.Noh, T.Arakawa, K.Tada, Y.Okamiya, T.Suzuki, et al.: "Application of Migration Enhanced Epitaxy (MEE) Method to Fabricating Five-Layer Asymmetric Coupled Quantum Well (FACQW)"Short abstracts of 7^<th> International Conference on Nano-meter-scale Science and Technology (NANO-7). 60 (2002)
• [Publications] T.Suzuki, J.H.Noh, T.Arakawa, K.Tada, et al.: "Fabrication and Optical Characterization of Five-Layer Asymmetric Coupled Quantum Well (FACQW)"Jpn. J. Appl. Phys.. 41,4B. 2701-2706 (2002)
• [Publications] T.Suzuki, J. H. Noh, T.Arakawa, K.Tada, Y.Okamiya, Y.Miyagi, N.Sakai, N.Haneji: "Fabrication and Oprical Characterization of Five-Layer Asymmetric Coupled Quantum Well(FACQW)"Jpn. J. Appl. Phys.. 41, 4B(4月掲載予定). (2002)
• [Publications] K.Tada, T.Arakawa, J.-H.Noh, T.Suzuki, Y.Okamiya: "Optical Modulators Based on Potenitial-Tailored Quantum Wells for Broad Band Optical Fiber Communication"Int'l Conf. on Broad Band Optical Fiber Communication Technology(BBOFCT-2001). 119-124 (2001)
• [Publications] K.Tada, T.Arakawa, J.H.Noh, T.Suzuki: "Wideband and Low Voltage Waveguide Modulators with Asymmetric Coupled QWs beyond 40 Gb/s"2001 IEEE/LEOS Annual Meeting Conference Proceedings. 1. 38-39 (2001)
• [Publications] K.Tada, T.Arakawa, J.-H.Noh, T.Suzuki, Y.Okamiya: "Five-Layer Asymmetric Coupled Quantum Well --A Promising Nanostructure with Tailored Potential--"Proceedings of the 6th China-Japan Symposium on Thin Films(CJSTFVI). 16-19 (2001)
• [Publications] T.Suzuki, J.-H.Noh, T.Arakawa, K.Tada, Y.Okamiya, Y.Miyagi: "Electrooptic Characterization of Five-Layer Asymmetric Coupled Quantum Well"Extended Abstracts of the 2001 International Conference on Solid State Devices and Materials(SSDM2001). 2. 656-657 (2001)
• [Publications] T.Arakawa, H.Feng, K.Tada, R.Iino, K.Kazuma, J.H.Noh: "Large Negative Electrorefractive Index Change in Modified Five-Layer Asymmetric Coupled Quantrm Well(FACQW)"Technical Digest of The 4th Pacific Rim Conference on Lasers and Electro-Optics(CLEO PR). 2. 232-233 (2001)