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次世代高性能硬X線非球面望遠鏡の超平滑面創成

Research Project

Project/Area Number 13F03056
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section外国
Research Field Production engineering/Processing studies
Research InstitutionChubu University

Principal Investigator

難波 義治  中部大学, 工学部, 教授 (40029129)

Co-Investigator(Kenkyū-buntansha) BEAUCAMP Anthony  中部大学, 工学部, 外国人特別研究員
BEAUCAMP Anthony  中部大学, 工学部, 外国人特別研究員
Project Period (FY) 2013-04-01 – 2015-03-31
Project Status Completed (Fiscal Year 2014)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 2014: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2013: ¥1,200,000 (Direct Cost: ¥1,200,000)
Keywords国際研究者交流 / 硬X線望遠鏡 / 超精密研磨 / 非球面金型 / 超平滑面 / 合成石英 / 炭化珪素 / Shape Adaptive Grinding / X線望遠鏡 / 非球面 / レプリカ / 金型 / 無電解ニッケル / 液体ジェット研磨
Outline of Annual Research Achievements

欧米の協力の下に日本が2015年度に打上げる硬X線望遠鏡と軟X線望遠鏡を搭載したX線天文衛星ASTRO-Hの開発は終了し、現在は打ち上げ前の種々のテストを行っている。高性能な硬X線望遠鏡を開発するには現状の円錐近似の反射鏡ではなく、正確な回転放物面と回転双曲面からなる反射鏡が必須であり、軽量化のためには超精密な非球面金型からレプリカ法で非球面反射鏡基板を製作する方法がベストである。
従来は前加工のし易さからアルミニウム合金を超精密ダイヤモンド切削し、それに無電解ニッケルを成膜し、ダイヤモンド切削と研磨で非球面金型を製作する方法と合成石英を研削・研磨して非球面金型を製作する方法を研究開発して来た。しかし、日米欧の経済状態から次世代の硬X線望遠鏡にはより安価に非球面金型を製作する技術の開発が急務となった。特に、合成石英の非球面研磨では所用の形状を創成するのに年単位の時間が必要であった。
そこで、本年度は、前加工が極めて容易なグラファイトを金型材料として採用し、非球面切削後に炭化珪素を化学気相成長させ、その表面をこの研究で開発したShape Adaptive Grinding (SAG)工具で研削する方法を見出した。この工具は研究室内で極めて容易に製作でき、工具寿命も10時間以上あり、表面粗さ0.4nm Ra以下の面を従来法に比べ1~2桁高能率な10~100mm3/minの除去速度で加工できることを見出した。液晶用ガラスをX線反射鏡基板として使う場合に使用できる非球面金型をこのSAG研削のみで製作できることが判明し、次世代の高性能硬X線非球面望遠鏡の新しい製作法として注目を浴びている。
この研究により研究分担者は国際生産工学アカデミー(CIRP)より2015年8月にTaylor Medalを受賞することになった。

Research Progress Status

26年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

26年度が最終年度であるため、記入しない。

Report

(2 results)
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (27 results)

All 2015 2014 2013

All Journal Article (14 results) (of which Peer Reviewed: 8 results) Presentation (13 results) (of which Invited: 3 results)

  • [Journal Article] Process Mechanism of Shape Adaptive Grinding (SAG)2015

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton
    • Journal Title

      Annals of the CIRP

      Volume: 64

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Finishing of Additively Manufactured Titanium by Shape Adaptive Grinding (SAG)2015

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton, Arthur Graziano
    • Journal Title

      Surface Topography: Metrology and Properties

      Volume: 3

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton
    • Journal Title

      Applied Optics

      Volume: 53 Issue: 14 Pages: 3075-3080

    • DOI

      10.1364/ao.53.003075

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Surface integrity of fluid jet polished tungsten carbide2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Wilhelmus Messelink, David Walker, Phillip Charlton, Richard Freeman
    • Journal Title

      Procedia CIRP

      Volume: 13 Pages: 377-381

    • DOI

      10.1016/j.procir.2014.04.064

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Shape Adaptive Grinding of CVD Silicon Carbide2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Herman Combrinck, Phillip Charlton, Richard Freeman
    • Journal Title

      Annals of the CIRP

      Volume: 63 Issue: 1 Pages: 317-320

    • DOI

      10.1016/j.cirp.2014.03.019

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hard x-ray telescopes to be onboard ASTRO-H2014

    • Author(s)
      Hisamitsu Awaki, Hideyo Kunieda, Manabu Ishida, Hironori Matsumoto, Yoshiharu Namba, et al.
    • Journal Title

      Applied Optics

      Volume: 53 Issue: 32 Pages: 7664-7676

    • DOI

      10.1364/ao.53.007664

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] The ASTRO-H X-ray Astronomy Satellite2014

    • Author(s)
      Tadayuki Takahashi, Kazuhisa Mitsuda, Richard Kelley, Felix Aharonian, Yoshiharu Namba, et al.
    • Journal Title

      Proc. SPIE

      Volume: 9144 Pages: 91444F-91444F

    • DOI

      10.1117/12.2055290

    • Related Report
      2014 Annual Research Report
  • [Journal Article] Super Smooth Finishing of Optical Surfaces by Fluid Jet and Bonnet Polishing2014

    • Author(s)
      A. Beaucamp
    • Journal Title

      Proc. 9th International Conference on Optics-Photonics Design and Fabrication

      Pages: 35-36

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing2013

    • Author(s)
      A. Beaucamp
    • Journal Title

      Annals of the CIRP

      Volume: 62 Pages: 315-318

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Edge control in CNC polishing : simulation and validation of tool influence functions on edges2013

    • Author(s)
      H. Li
    • Journal Title

      Optics Express

      Volume: 21 Pages: 370-381

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of hybrid fluid jet/float polishing process2013

    • Author(s)
      A. Beaucamp
    • Journal Title

      Proc. SPIE

      Volume: 8838

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Finishing of EUV photomask substrates by CNC precessed bonnet polisher2013

    • Author(s)
      A. Beaucamp
    • Journal Title

      Proc. SPIE

      Volume: 8880

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Advances in Corrective Finishing of Optical Moulds for Future Aspheric Hard X-ray Telescopes2013

    • Author(s)
      A. Beaucamp
    • Journal Title

      Proc. Frontiers in Optics 2013/Laser Science XXIX

    • Related Report
      2013 Annual Research Report
  • [Journal Article] Manufacturing of Aspherical Molds for Next Generation X-Ray Telescopes2013

    • Author(s)
      A. Beaucamp
    • Journal Title

      Proc. 12^<th> Symposium on X-ray Imaging Optics

      Pages: 3-4

    • Related Report
      2013 Annual Research Report
  • [Presentation] Dynamometric Study of Shape Adaptive Grinding (SAG)2015

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton
    • Organizer
      2015年度精密工学会春季大会学術講演会
    • Place of Presentation
      東洋大学(東京都文京区)
    • Year and Date
      2015-03-17 – 2015-03-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] ガラス光学部品製造用ステンレス鋼金型の研磨加工技術2014

    • Author(s)
      篠崎烈,大木彬寛,難波義治
    • Organizer
      日本機械学会第10回生産加工・工作機械部門講演会
    • Place of Presentation
      徳島大学(徳島県徳島市)
    • Year and Date
      2014-11-15 – 2014-11-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] SAG工具の開発とその硬質セラミックス金型への応用2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba
    • Organizer
      第16回国際工作機械技術者会議
    • Place of Presentation
      東京ビッグサイト(東京都江東区)
    • Year and Date
      2014-10-30 – 2014-11-04
    • Related Report
      2014 Annual Research Report
  • [Presentation] Shape Adaptive Grinding of Optical Surfaces for Scientific Applications and Consumer Products2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton, Arthur Graziano
    • Organizer
      OSA Frontiers in Optics 2014/Laser Science XXIX
    • Place of Presentation
      JW Marriott Tuscon Starr Pass Resort (Tucson, AZ., U.S.A.)
    • Year and Date
      2014-10-19 – 2014-10-23
    • Related Report
      2014 Annual Research Report
  • [Presentation] Future Fabrication Technologies for X-Ray Telescope Mirrors2014

    • Author(s)
      Y. Namba, A. Beaucamp
    • Organizer
      10th China-Japan International Conference on Ultra-Precision Machining Process
    • Place of Presentation
      Jiaozuo Hotel (Jiaozuo, China)
    • Year and Date
      2014-10-17 – 2014-10-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Shape Adaptive Grinding of Freeform Molding Dies2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton, Arthur Grazianno
    • Organizer
      2014年度精密工学会秋季大会学術講演会
    • Place of Presentation
      鳥取大学(鳥取県鳥取市)
    • Year and Date
      2014-09-16 – 2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabrication of Parabolic Wolter Type-1 Molding Die with 100 nm Form Accuracy2014

    • Author(s)
      A. Beaucamp, Y. Namba, R. Freeman
    • Organizer
      ASPE/ASPEN Summer Topical Meeting
    • Place of Presentation
      The Fairmont Orchid (Hawaii, U.S.A.)
    • Year and Date
      2014-06-26 – 2014-06-27
    • Related Report
      2014 Annual Research Report
  • [Presentation] Shape Adaptive Grinding (SAG) - A Novel Fabrication Method for Freeform Optical Moulds2014

    • Author(s)
      A. Beaucamp, Y. Namba
    • Organizer
      OSA Optical Fabrication & Testing
    • Place of Presentation
      The Fairmont Orchid (Hawaii, U.S.A.)
    • Year and Date
      2014-06-22 – 2014-06-26
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Technological Advances in Super Fine Finishing2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba
    • Organizer
      euspen’s 14th International Conference
    • Place of Presentation
      Valamar Lacroma Hotel (Dubrovnik, Croatia)
    • Year and Date
      2014-06-02 – 2014-06-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Surface Integrity of Fluid Jet Polished Tungsten Carbide2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Wilhelmus Messelink, David Walker, Phillip Charlton, Richard Freeman
    • Organizer
      2nd CIRP Conference on Surface Integrity
    • Place of Presentation
      University of Nottingham (Nottingham, UK)
    • Year and Date
      2014-05-28 – 2014-05-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Finishing of Electron Beam Melted Titanium (Ti6Al4V) Using Shape Adaptive Grinding Tools2014

    • Author(s)
      Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton, Arthur Graziano
    • Organizer
      ASPE 2014 Spring Topical Meeting-Dimensional Accuracy and Surface Finish in Additive Manufacturing
    • Place of Presentation
      University of California (Berkeley, CA, U.S.A.)
    • Year and Date
      2014-04-13 – 2014-04-16
    • Related Report
      2014 Annual Research Report
  • [Presentation] Novel Grinding Method for CVD Silicon Carbide2014

    • Author(s)
      A. Beaucamp
    • Organizer
      2014年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京大学
    • Year and Date
      2014-03-19
    • Related Report
      2013 Annual Research Report
  • [Presentation] 次世代X線望遠鏡用非球面金型の加工2013

    • Author(s)
      難波義治
    • Organizer
      2013年度精密工学会秋季大会学術講演会
    • Place of Presentation
      関西大学
    • Year and Date
      2013-09-13
    • Related Report
      2013 Annual Research Report

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Published: 2014-01-29   Modified: 2024-03-26  

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