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バイオテンプレート極限加工による3次元量子ナノ構造の作製と光学デバイスへの応用

Research Project

Project/Area Number 13J08639
Research Category

Grant-in-Aid for JSPS Fellows

Allocation TypeSingle-year Grants
Section国内
Research Field Microdevices/Nanodevices
Research InstitutionTohoku University

Principal Investigator

田村 洋典  東北大学, 工学研究科, 特別研究員(DC1)

Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 2015: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2014: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2013: ¥900,000 (Direct Cost: ¥900,000)
KeywordsGaAs / 光学特性 / エレクトロルミネッセンス / LED / 量子ドット / レーザ / バイオテンプレート技術 / 中性粒子ビーム技術
Outline of Annual Research Achievements

3次元GaAs量子ナノ構造はGaAs/AlGaAs積層構造をドライエッチングすることにより作製する。その後、有機金属気相成長法により再成長を行う。最後に、電極を形成し3次元GaAs量子ナノディスク発光ダイオードを作製する。従来は、積層構造作製時のAlGaAsと同じAl濃度のAlGaAsキャップ層で再成長を行っていたが、この対称バリアのGaAs量子ナノ構造を用いて作製した発光ダイオード(LED)は100K付近において電流注入による発光が消失した。
そこで、積層構造作製時のAlGaAsよりも高いAl濃度のAlGaAsを用いてキャップ層の再成長を行った。埋め込み再成長のAlGaAsのAl濃度を上げることで、GaAs量子ナノ構造の周りの障壁高さは平面方向よりも垂直方向の方が高くなる。この非対称バリアのGaAs量子ナノ構造を用いて作製した発光ダイオードでは、室温においても電流注入による発光を確認することができた。
実際に作製した次元GaAs量子ナノ構造の障壁高さをシミュレーションにより計算した。その結果、対称形バリアの3次元GaAs量子ナノ構造では平面方向及び垂直方向ともに同じバリア高さであるという結果が得られた。一方で、非対称形バリアの3次元GaAs量子ナノ構造の場合では、Al濃度の低いバリアから電流が注入され量子ナノ構造にて再結合をすることがわかった。さらに、高濃度AlのAlGaAsバリアで囲まれているため、バリアと量子ナノ構造のエネルギー準位の差が開いている。そのため、深い閉じ込めによってキャリアがバリアに抜けてにくく、その結果室温まで動作することがわかった。
以上のように、本年度はAl濃度の高いAlGaAsバリア層で埋め込み再成長を行うことで、室温で発光する3次元GaAs量子ナノ構造LEDの作製に成功した。また、このメカニズムを解明した。

Research Progress Status

27年度が最終年度であるため、記入しない。

Strategy for Future Research Activity

27年度が最終年度であるため、記入しない。

Report

(3 results)
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (56 results)

All 2016 2015 2014 2013

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 4 results,  Acknowledgement Compliant: 1 results) Presentation (48 results) (of which Int'l Joint Research: 3 results,  Invited: 1 results)

  • [Journal Article] Temperature-Dependent Operation of GaAs Quantum Nanodisk LEDs with Asymmetric AlGaAs Barriers2016

    • Author(s)
      Y. Tamura, A. Higo, T. Kiba, C. Thomas, J. Takayama, I.Yamashita, A. Murayama, S. Samukawa
    • Journal Title

      IEEE Transactions on Nanotechnology

      Volume: 印刷中 Issue: 3 Pages: 557-562

    • DOI

      10.1109/tnano.2016.2550481

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] AlN Nanowall Structures Grown on Si (111) Substrate by Molecular Beam Epitaxy2015

    • Author(s)
      Y. Tamura and K. Hane
    • Journal Title

      Nanoscale Research Letters

      Volume: 10 Issue: 1 Pages: 460-460

    • DOI

      10.1186/s11671-015-1178-7

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Light-Emitting Devices Based on Top-down Fabrication GaAs Quantum Nanodisks2015

    • Author(s)
      A. Higo, T. Kiba, Y. Tamura, C. Thomas, J. Takayama, Y. Wang, H. Sodabanlu, M. Sugiyama, Y. Nakano, I. Yamashita, A. Murayama and S. Samukawa
    • Journal Title

      Scientific Reports

      Volume: 5 Issue: 1 Pages: 9371-9371

    • DOI

      10.1038/srep09371

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Electron g-factor and spin decoherence inGaAs quantum nanodisks fabricated by fully top-down lithography2015

    • Author(s)
      T. Toru, T. Kiba, A. Higo, C. Thomas, Y. Tamura, S. Samukawa and A. Murayama
    • Journal Title

      Journal of Crystal Growth

      Volume: 印刷中 Pages: 295-298

    • DOI

      10.1016/j.jcrysgro.2015.02.066

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Estimation of activation energy and surface reaction mechanism of chlorine neutral beam etching2014

    • Author(s)
      C. Thomas, Y. Tamura, T. Okada, A. Higo and S. Samukawa
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 47 Issue: 27 Pages: 275201-275201

    • DOI

      10.1088/0022-3727/47/27/275201

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Impact of artificial lateral quantum confinement on exciton-spin relaxation in a two-dimensional GaAs electronic system2014

    • Author(s)
      T. Kiba, T. Tanaka, Y. Tamura, A. Higo, C. Thomas, S. Samukawa and A. Murayama
    • Journal Title

      AIP Advances

      Volume: 4 Issue: 10 Pages: 107112-107112

    • DOI

      10.1063/1.4897958

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Oxidation state of GaAs surface and their effect on neutral beam etching during nano-pillar fabrication2014

    • Author(s)
      C. Thomas, Y. Tamura, M. E. S yazwan, A. Higo, S. Samukawa
    • Journal Title

      Journal of Physics D

      Volume: (accepted)(掲載確定)

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quantum size effect in GaAs nanodisks fabricated using a combination of the bio-template technique and neutral beam etching2013

    • Author(s)
      Y. Tamura, T. Kaizu, T. Kiba, M. Igarashi, R. Tsukamoto, A. Higo, W. Hu, C. Thomas, M. E. Fauzi, T. Hoshii, I. Yamashita, Y. Okada, A. Murayama, S. Samukawa
    • Journal Title

      NANOTECHNOLOGY

      Volume: 24巻 Issue: 28 Pages: 285301-285301

    • DOI

      10.1088/0957-4484/24/28/285301

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Bio-nano-templateと中性粒子ビームエッチングを用いたInGaAs/GaAs量子ナノディスクLEDの設計と試作2015

    • Author(s)
      肥後昭男、木場隆之、トーマス セドリック、田村洋典、高山純一、山下一郎、王雲鵬、ハサネット ソダーバンル、杉山正和、中野義昭、村山明宏、寒川誠二
    • Organizer
      第32回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      朱鷺メッセ(新潟)
    • Year and Date
      2015-10-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] Low-damage etching process for the fabrication of GaAs based light emitting devices2015

    • Author(s)
      C. Thomas, A. Higo, T. Kiba, Y. Tamura, N. Okamoto, I. Yamashita, A. Murayama, S. Samukawa
    • Organizer
      American Vacuum Society 62nd International symposium and exhibition
    • Place of Presentation
      サンノゼ(アメリカ)
    • Year and Date
      2015-10-18
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of InGaAs quantum nanodisk light-emitting diodes by fusion top-down process of bio-template and neutral beam etching2015

    • Author(s)
      A. Higo, C. Thomas, T. Kiba, J. Takyama, C.Y. Lee, Y. Tamura, I. Yamashita, M. Sugiyama, Y. Nakano, A. Murayama, S. Samukawa
    • Organizer
      The 2015 European Materials Research Society Fall meeting
    • Place of Presentation
      ワルシャワ(ポーランド)
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Low Damage Neutral Beam AlGaN/GaN etching for Recess Gate Fabrication2015

    • Author(s)
      A. Higo, C.Y. Lee, J. Ohta, C. Thomas, Y. Tamura, H. Fujioka, and S. Samukawa
    • Organizer
      11th Topical Workshop on Heterostructure Microelectronics
    • Place of Presentation
      高山(日本)
    • Year and Date
      2015-08-23
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Top-down InGaAs/GaAs nanopillars fabrication using bio-nano process and neutral beam etching process2014

    • Author(s)
      C. Thomas, K. Yoshikawa, C. Y. Lee, Y. Tamura, A. Higo, T. Kiba, A. Murayama, I. Yamashita and S. Samukawa
    • Organizer
      American Vacuum Society 61st international Symposium & Exhibition
    • Place of Presentation
      ボルチモア(アメリカ)
    • Year and Date
      2014-11-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] バイオテンプレート極限加工によるInGaAs量子ナノディスクの光学特性2014

    • Author(s)
      肥後昭男,木場隆之,トーマスセドリック,李昌勇,吉川憲一,田村洋典,山下一郎,王云鵬,Hassanet Sodabamlu,杉山正和,中野義昭,村山明宏,寒川誠二
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] バイオテンプレート極限加工によるGaAs量子ナノディスクにおけるピコ秒キャリア補足ダイナミクス2014

    • Author(s)
      木場隆之,肥後昭男,田村洋典,トーマスセドリック,寒川誠二,村山明宏
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] バイオテンプレート極限加工GaAs量子ナノディスクにおける電子スピンダイナミクスの磁場中反射ポンププローブ分光2014

    • Author(s)
      田中亨,木場隆之,肥後昭男,田村洋典,トーマスセドリック,寒川誠二,村山明宏
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] Suppresion of exciton-spin relaxation induced by artificial lateral quantum confinement in GaAs2014

    • Author(s)
      T. Kiba, C. Thomas, Y. Tamura, C. Thomas, T. Kaizu, Y. Okada, S. Samukawa and A. Murayama
    • Organizer
      18th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      フラッグスタッフ(カナダ)
    • Year and Date
      2014-09-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Electron G-factor and Spin-relaxation in GaAs Quantum Disks Fabricated by Fully Top-down Lithography2014

    • Author(s)
      T. Tanaka, T. Kiba, Y. Tamura, A. Higo, S. Samukawa and A. Murayama
    • Organizer
      18th International Conference on Molecular Beam Epitaxy
    • Place of Presentation
      フラッグスタッフ(カナダ)
    • Year and Date
      2014-09-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Quantum GaAs Nanodisk Light Emitting Diode Fabricated by Ultimate Top-down Neutral Beam Etching2014

    • Author(s)
      A. Higo, Y. Tamura, C. Thomas, T. Kiba, Y. wang, H. Sodabanlu, J. Takayama, M. Sugiyama, Y. Nakano, I. Yamashita, A. Murayama and S. Samukawa
    • Organizer
      24th International Semiconductor Laser Conference
    • Place of Presentation
      パルマ(スペイン)
    • Year and Date
      2014-09-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabrication of InGaAs Quantum Nanodisk Array by using Bio-Template and Top-Down Etching process2014

    • Author(s)
      K. Yoshikawa, A. Higo, C. Y. Lee, Y. Tamura, C. Thomas, T. Kiba, S. Ishii, H. Sodabanlu, Y. Wang, M. Sugiyama, Y. Nakano, I. Yamashita, A. Murayama and S. Samukawa
    • Organizer
      14th IEEE International Conference on Nanotechnology
    • Place of Presentation
      トロント(カナダ)
    • Year and Date
      2014-08-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Narrow Line-width Photoluminescence Spectrum of GaAs Nanodisks Fabricated Using Bio-Template Ultimate Top-Down Process2014

    • Author(s)
      Y. Tamura, A. Higo, T. Kiba, C. Thomas, Y. Wang, H. Sodabanlu, I. Yamashita, M. Sugiyama, Y. Nakano, A. Murayama and S. Samukawa
    • Organizer
      14th IEEE International Conference on Nanotechnology
    • Place of Presentation
      トロント(カナダ)
    • Year and Date
      2014-08-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] OPTICAL CHARACTERISTICS OF GAAS QUANTUM NANODISKS ARRAY BY USING NEUTRAL BEAM TOP-DOWN PROCESS2014

    • Author(s)
      A. Higo, T. Kiba, Y. Tamura, C. Thomas, I. Yamashita, A. Murayama and S. Samukawa
    • Organizer
      2014 International Conference on Optical MEMS and Nanopghotonics
    • Place of Presentation
      グラスゴー(スペイン)
    • Year and Date
      2014-08-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fundamental mechanism of neutral beam etching for III-V quantum dots fabrication2014

    • Author(s)
      C. Thomas, Y. Tamura, T. Okada, A. Higo and S. Samukawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] GaAs/AlGaAs quantum nanodisks by using neutral beam etching and their optical response2014

    • Author(s)
      Y. Tamura, A. Higo, T. Kiba, C. Thomas, T. Okada, Y. Wang, H. Sodabanlu, M. Sugiyama, Y. Nakano, A. Murayama and S. Samukawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Optical characteristics of GaAs Quantum nanodisks by the combination of Bio-template Ultimate Top-down process2014

    • Author(s)
      A. Higo, T. Kiba, Y. Tamura, S. Ishii, C. Thomas, T. Ozaki, A. Murayama and S. Samukawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Low Temperature InGaAs Oxidation Process using Defect-Free Neutral Beam technology with Various Indium Concentration2014

    • Author(s)
      C. Y. Lee, A. Higo, C. Thomas, Y. Tamura and S. Samukawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Fabrication of InGaAs quantum nanodisk by using Bio-template and neutral beam etching process2014

    • Author(s)
      K. Yoshikawa, A. Higo, C. Y. Lee, Y. Tamura, C. Thomas, T. Kiba, S. Ishii, H. Sodabanlu, Y. Wang, M. Sugiyama, Y. Nakano, I. Yamashita, A. Murayama and S. Samukawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Annual Research Report
  • [Presentation] Quantum energy levels simulation for InGaAs/GaAs Quantum Nanodisks fabricated by Ultimate Top-down Process2014

    • Author(s)
      S. Ishii, A. Higo, K. Yoshikawa, Y. Tamura, T. Kiba, A. Murayama, Y. Li and S. samukawa
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] Longitudinal and transvers electron-spin relaxation times in GaAs nanodisks fabricated by bio-nano templates and damage-free neutral beam etching2014

    • Author(s)
      T. Tanaka, T. Kiba, Y. Tamura, C. Thomas, A. Higo, S. Samukawa and A. Murayama
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] Ultrafast carrier capture in high optical quality GaAs nanodisks fabricated by bio-nano templates and damage free neutral-beam etching2014

    • Author(s)
      T. Kiba, A. Higo, Y. Tamura, C. Thomas, S. Samukawa and A. Murayama
    • Organizer
      The 6th IEEE International Nanoelectronics Conference 2014
    • Place of Presentation
      北海道大学(北海道)
    • Year and Date
      2014-07-29
    • Related Report
      2014 Annual Research Report
  • [Presentation] GaAs/AlGaAs stacked layers etched by neural beam for the fabrication of quantum dot structure2014

    • Author(s)
      C. Thomas, Y. Tamura, A. Higo, T. Kiba, A. Murayama and S. Samukawa
    • Organizer
      The 3rd International Symposium Next-Generation Electronics
    • Place of Presentation
      桃園(台湾)
    • Year and Date
      2014-05-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Full 2D Quantum Energy Level Simulation for GaAs/AlGaAs Quantum Nanodisks Fabricated by Ultimate Top-down Process2014

    • Author(s)
      S. Ishii, A. Higo, Y. Tamura, T. Kiba, A. Murayama, Y. Li, and S. Samukawa
    • Organizer
      The 3rd International Symposium Next-Generation Electronics
    • Place of Presentation
      桃園(台湾)
    • Year and Date
      2014-05-10
    • Related Report
      2014 Annual Research Report
  • [Presentation] Full 3D Quantum Energy Level Simulation for GaAs/AlGaAs Quantum Nanodisks Fabricated by Ultimate Top-down Process2014

    • Author(s)
      S. Ishii, A. Higo, Y. Tamura, T. Kiba, A. Murayama, Y. Li, S. Samukawa
    • Organizer
      The 3^<rd> International Symposium on Next-Generation Electronics
    • Place of Presentation
      桃園、台湾(発表確定)
    • Year and Date
      2014-05-10
    • Related Report
      2013 Annual Research Report
  • [Presentation] GaAs/AlGaAs stacked layers etched by neutral beam for the fabrication of quantum dot structure2014

    • Author(s)
      C. Thomas, Y. Tamura, A. Higo, T. Kiba, A. Murayama, S. Samukawa
    • Organizer
      The 3^<rd> International Symposium on Next-Generation Electronics
    • Place of Presentation
      桃園、台湾(発表確定)
    • Year and Date
      2014-05-10
    • Related Report
      2013 Annual Research Report
  • [Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl2 Neutral Beam for High-Performance HEMTs2014

    • Author(s)
      H. Sekhar, T. Kubota, T. Okada, Y. Tamura, C. Y. Lee, J. Ohta, H. Fujioka and S. Samukawa
    • Organizer
      The 3rd International Symposium Next-Generation Electronics
    • Place of Presentation
      桃園(台湾)
    • Year and Date
      2014-05-08
    • Related Report
      2014 Annual Research Report
  • [Presentation] Damage-free AlGaN/GaN Recess-Gate Etching using Cl_2 Neutral Beam for High-Performance HEMTs2014

    • Author(s)
      H. Sekhar, T. Kubota, T. Okada, Y. Tamura, C. Y. Lee, J. Ohta, H. Fujioka, S. Samukawa
    • Organizer
      The 3^<rd> International Symposium on Next-Generation Electronics
    • Place of Presentation
      桃園、台湾(発表確定)
    • Year and Date
      2014-05-08
    • Related Report
      2013 Annual Research Report
  • [Presentation] PEG修飾フェリチンによる高密度分散配置GaAsナノディスクの作製2014

    • Author(s)
      田村 洋典、トーマス セドリック、李 昌勇、肥後 昭男、岡田 健、山下 一郎、寒川 誠二
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-20
    • Related Report
      2013 Annual Research Report
  • [Presentation] Polyethylene glycol(PEG)を塗布した基板上のフェリチン2次元配列2014

    • Author(s)
      李 昌勇、肥後 昭男、トーマス セドリック、田村 洋典、吉川 憲一、山下 一郎、寒川 誠二
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-20
    • Related Report
      2013 Annual Research Report
  • [Presentation] Activation energy measurement of chlorine neutral beam etching of GaAs2014

    • Author(s)
      C. Thomas, Y. Tamura, A. Higo, T. Okada, S. Samukawa
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-19
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工による超高密度(10^<11>cm^<-2>以上)・均一GaAsナノディスクの作製プロセス2014

    • Author(s)
      田村 洋典、肥後 昭男、トーマス セドリック、吉川 憲一、岡田 健、王 云鵬、杉山 正和、中野 義昭、寒川 誠二
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-17
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工によるGaAs量子ナノディスクの狭帯域フォトルミネッセンス特性2014

    • Author(s)
      肥後 昭男、田村 洋典、木場 隆之、トーマス セドリック、王 云鵬、山下 一郎、杉山 正和、中野 義昭、村山 明宏、寒川 誠二
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-17
    • Related Report
      2013 Annual Research Report
  • [Presentation] 高均一GaAs量子ナノディスクにおけるピコ秒キャリアダイナミクス2014

    • Author(s)
      木場 隆之、田中 亨、田村 洋典、肥後 昭男、寒川 誠二、村山 明宏
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-17
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工によるInGaAs量子ナノディスクの作製2014

    • Author(s)
      吉川 憲一、李 昌勇、田村 洋典、肥後 昭男、トーマス セドリック、山下 一郎、寒川 誠二
    • Organizer
      2014年第61回応用物理学会春季学術講演会
    • Place of Presentation
      青山学院大学相模原キャンパス(神奈川県相模原市)
    • Year and Date
      2014-03-17
    • Related Report
      2013 Annual Research Report
  • [Presentation] Fabrication of GaAs/AlGaAs Nano-pillars using Bio-Template Combined with Neutral Beam Defect-free Etching2013

    • Author(s)
      C. Thomas, Y. Tamura, A. Higo, N. Okamoto, I. Yamashita, S. Samukawa
    • Organizer
      American Vacuum Society 60^<th> International Symposium & Exhibition
    • Place of Presentation
      カリフォルニア、アメリカ
    • Year and Date
      2013-10-31
    • Related Report
      2013 Annual Research Report
  • [Presentation] The Fabrication of GaAs Quantum Nanodisks Combination of Bio-template, Neutral Beam Etching and MOVPE Regrowth2013

    • Author(s)
      A. Higo, Y. Tamura, T. Kiba, C. Thomas, W. Yunpeng, M. Sugiyama, Y. Nakano, A. Murayama, S. Samukawa
    • Organizer
      2013 IEEE Nanotechnology Materials and Devices Conference
    • Place of Presentation
      台南、台湾
    • Year and Date
      2013-10-07
    • Related Report
      2013 Annual Research Report
  • [Presentation] High Density and High Aspect Ratio GaAs/AlGaAs Nanopillar array Fabricated by Fusion of Bio-Template and Neutral Beam Etching2013

    • Author(s)
      Y. Tamura, A. Higo, T. Kiba, W. Yunpeng, C. Thomas, T. Okada, W. Hu, A. Murayama, M. Sugiyama, Y. Nakano, S. Samukawa
    • Organizer
      2013 International Conference on Solid State Devices and Materials
    • Place of Presentation
      ヒルトン福岡シーホーク(福岡県)
    • Year and Date
      2013-09-25
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工によるGaAsナノディスクの作製プロセスの最適化2013

    • Author(s)
      田村 洋典、肥後 昭男、トーマス セドリック、岡田 健、山下 一郎、寒川誠二
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] GaAs surface investigation for high density quantum nanodisk array with a bio-template top-down process2013

    • Author(s)
      Cedric Thomas, Y. Tamura, A. Higo, T. Okada, N. Okamoto, I. Yamashita. S. Samukawa
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工によるGaAs量子ナノディスクの作製とフォトルミネッセンス特性2013

    • Author(s)
      肥後 昭男、田村 洋典、木場 隆之、トーマス セドリック、王 云鵬、山下 一郎、杉山 正和、中野 義昭、村山 明宏、寒川 誠二
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工GaAs量子ナノディスクにおける光励起キャリアダイナミクス2013

    • Author(s)
      木場 隆之、須崎 健太、田村 洋典、肥後 昭男、寒川 誠二、村山 明宏
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工GaAs量子ナノディスクにおける光学利得2013

    • Author(s)
      須崎 健太、木場 隆之、Kyhm Kwangseuk、田村 洋典、肥後 昭男、寒川 誠二、村山 明宏
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] バイオテンプレート極限加工GaAs量子ナノディスクの反射ポンププローブ分光2013

    • Author(s)
      田中 亨、佐々木 義、木場 隆之、Kyhm Kwangseuk、田村 洋典、肥後 昭男、寒川 誠二、村山 明宏
    • Organizer
      2013年第74回応用物理学会秋季学術講演会
    • Place of Presentation
      同志社大学京田辺キャンパス(京都府京田辺市)
    • Year and Date
      2013-09-18
    • Related Report
      2013 Annual Research Report
  • [Presentation] Dynamics of exaction-spin relaxation in GaAs nanodisks fabricated by fully-top-down and damage-free lithography2013

    • Author(s)
      T. Kiba, K. Suzaki, Y. Tamura, M. Igarashi, C. Thomas, W. Hu, T. Kaizu, Y. Okada, S. Samukawa, A. Murayama
    • Organizer
      18^<th> International Conference on Dynamical Processes in Excited State of Solids
    • Place of Presentation
      福州・中国
    • Year and Date
      2013-08-09
    • Related Report
      2013 Annual Research Report
  • [Presentation] Photoluminescence of High-density and Sub-20-nm GaAs Nanodisks Fabricated with a Neutral Beam Etching Process and MOVPE Regrowth for High-Performance QDs Devices2013

    • Author(s)
      Y. Tamura, A. Higo, T. Kiba, W. Yunpeng, M. Igarashi, C. Thomas, W. Hu, M. E. Fauzi, A. Murayama, M. Sugiyama, Y. Nakano, S. Samukawa
    • Organizer
      The 13^<th> IEEE International Conference on Nanotechnology
    • Place of Presentation
      北京、中国
    • Year and Date
      2013-08-08
    • Related Report
      2013 Annual Research Report
  • [Presentation] Observation of optical gain in GaAs quantum disks fabricated by neutral-beam etching using bio-nano templates2013

    • Author(s)
      K. Suzaki, T. Kiba, K. Kyhm, Y. Tamura, A. Higo, S. Samukawa, A. Murayama
    • Organizer
      18^<th> International Conference on Dynamical Processes in Excited State of Solids
    • Place of Presentation
      福州、中国
    • Year and Date
      2013-08-06
    • Related Report
      2013 Annual Research Report
  • [Presentation] Transient Kerr effect in GaAs quantum disks fabricated by neutral-beam etching using bio-nano templates2013

    • Author(s)
      T. Tanaka, T. Sasaki, T. Kiba, K. Kyhm, Y. Tamura, A. Higo, S. Samukawa, A. Murayama
    • Organizer
      18^<th> International Conference on Dynamical Processes in Excited State of Solids
    • Place of Presentation
      福州、中国
    • Year and Date
      2013-08-06
    • Related Report
      2013 Annual Research Report

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Published: 2014-01-29   Modified: 2024-03-26  

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