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マイクロ気液・プラズマ流体素子のグローバル集積化による高感度元素検出システム開発

Research Project

Project/Area Number 14040219
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionToyo University

Principal Investigator

一木 隆範  東洋大学, 工学部, 助教授 (20277362)

Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥4,500,000 (Direct Cost: ¥4,500,000)
Fiscal Year 2003: ¥2,200,000 (Direct Cost: ¥2,200,000)
Fiscal Year 2002: ¥2,300,000 (Direct Cost: ¥2,300,000)
Keywordsマイクロ流体デバイス / グローバル集積化 / プラズマ発光分析 / オンサイト分析 / 微量元素検出 / アフィニティアッセイデバイス / 微細加工技術 / マイクロプラズマ / マイクロマシン / プラズマ加工
Research Abstract

バイオ研究、創薬、医療、環境などの広い分野で必要な分析作業に要するコストや時間を数桁に及ぶ革新的レベルで短縮可能なμTAS(Micro Total Analysis System)呼ばれる技術が、欧米を中心に急速に発展している。マイクロ化学分析チップを汎用性の高い測定装置にするためにはICP発光分析装置や質量分析装置並みのppm〜ppbクラスの感度をもつ検出モジュールを集積化することが必要になる。本研究では申請者がこれまでに研究開発を進めてきたマイクロプラズマ源、マイクロキャピラリー電気泳動、マイクロネブライザーインターフェイスやプラズマ駆動電源整合回路をチップ化し、集積化することによりシステム全体を小型化し、携帯可能な高感度分析システムを実現して再現性や検出感度などの特性を評価し、血液化学検査の中でも緊急検査項目である血清成分の高精度測定やオンサイト環境分析への応用を目指している。
最終年度にあたる本年度は高機能マイクロ分析システムの実現のため、マイクロプラズマ源とその周辺デバイスの開発を進め、大気圧マイクロプラズマ源の小型化を実現し、水溶液中のNaの検出限界として400ppbを達成するなど水溶液試料中の微量元素検出への応用の可能性を示すことができた。更に、マイクロ分析システムの作製に不可欠な微細加工技術についても従来の半導体加工技術にとらわれない新規なプロセスの開発を進め、マイクロプラズマジェットを用いたマスクレス加工システムの可能性を示した。また、新規なドライエッチングケミストリーによるパーマロイ薄膜の微細加工法を研究し、微細磁気デバイスをマイクロ流体デバイスに集積化したアフィニティアッセイ用磁気ビーズ操作デバイスを開発し、その動作を実証した。

Report

(2 results)
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] Takanori Ichiki: "Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets"Journal of Applied Physics. 95. 35-39 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "An atmospheric -pressure microplasma jet source for the optical emission spectroscopic analysis of a liquid sample"Plasma Sources and Science Technology. 12. S16-s20 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yoshimi Otsu: "Plasma process applied in the fabrication of plastic microfluidic chips"Journal of Photopolymer Science and Technology. 16. 39-42 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Akio Oki: "Healthcare chip for checking health condition from analysis of trace blood collected by painless needle"Japanese Journal of Applied Physics. 42. 3733-3737 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Plasma applications for biochip technology"Thin Solid Films. 435. 62-68 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for MEMS fabrication"Journal of Vacuum Science and Technology. B21. 2188-2192 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Development of Nano/Microfluidic Devices for the Analysis of Biomolecules"Proc.Fourth Int.Symp.on Biomimetic Materials Processing (BMMP-4). 82 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Micro/Nanofabrication Technologies for Nano-Bioanalytical Devices"Proc.Int.workshop on plasma nano-technology and its future vision. 3-8-3-9 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Microfluidic devices for cellular manipulation and analysis on a chip"Proc.Int.Symp.MEMS and Nanotechnology. 334-338 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Naoaki Ichikawa: "Microfluidic devices integrated with permalloy micropatterns for manipulating magnetic beads"Ext.Abstr.Int.Conf.on Solid State Dev.and Mater.(SSDM 2003). 680-681 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Surface micromachined hollow microneedle array integrated on a microfluidic chip"Seventh International Conference on Miniaturized Chemical and Biochemical Analysis Systems. 1025-1028 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Naoaki Ichikawa: "Dry etching of Ni based alloy films and its application to the fabrication of molecular affinity separation devices using magnetic beads"Proceeding of the 25th International Symposium on Dry Process. 69-74 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 一木 隆範: "「ナノバイオテクノロジーの最前線」第3章3節2 -ナノバイオ分析デバイスの微細加工技術-"シーエムシー出版. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takanori Ichiki: "Immunoelectrophoresis of red blood cells on a microcapillary chip"Electrophoresis. 23. 2029-2034 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Microchip technologies for the analysis of biological cells"Journal of Photopolymer Science and Technology. 15・3. 487-492 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Miniaturized Capillary electrophoresis fabricated on Pyrex glass chips using deep dry etching and anodic bonding"Journal of Photopolymer Science and Technology. 15・2. 311-316 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Plasma applications for biochip technology"Thin Solid Films. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yoshinari Sugiyama: "Precise and feasible fabrication process of microfluidic devices on a borosilicate glass chip"Micro Total Analysis Systems 2002. 118-121 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Tomofumi Hara: "Fabrication of on-chip sorter devices with sub-micrometer scale channels and self-aligned microelectrodes"Micro Total Analysis Systems 2002. 124-126 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Toru Koidesawa: "An atmospheric-pressure microplasma jet source for optical emission spectroscopy of liquid sample"Micro Total Analysis Systems 2002. 894-896 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Mirofluidic mixer devices fabricated using high-aspect ratio glass micromachining technology"Abstr. Microprocesses and Nanotechnology 2002. 292-293 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Improvement on power transfer efficiency of microplasma devices designed for the portable analysis system of aqueous solution"Extended Abstract of Int. Conf. on Solid State Dev. and Mater 2002. 680-681 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Challenges in plasma technologies for chemical /biochemical analysis systems"Proceedings of The 16th Europhysics Conf. Atomic & Molecular Phys. of Ionized Gases (ESCAMPIG), the 5th Int. Conf. Reactive Plasmas (ICRP). 2. 11-12 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "Plasma Technologies for Biochip Technology"Abstract of Joint International Plasma Symp. 6th Asia Pacific Plasma Science and Technology (APCPST), Proc. 15th Symp.Plasma Sci. Mater.(SPSM), OS 2002,and 11th KAPRA. 171 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takanori Ichiki: "A novel microplasma process for localized and ultrahigh-rate etching of silicon wafers"Proceeding of the 24th International Symposium on Dry Process. 69-74 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2018-03-28  

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