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Development of a surface encoder for next generation three-axis precision stages

Research Project

Project/Area Number 14102017
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTohoku University

Principal Investigator

KIYONO Satoshi  Tohoku University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (40005468)

Co-Investigator(Kenkyū-buntansha) GAO Wei  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (70270816)
YAMANAKA Masashi  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (20292229)
JU Bingfeng  Tohoku University, Graduate School of Engineering, Research Associate, 大学院工学研究科, 助手 (10431529)
SHIMIZU Hiroki  Kyushu Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (50323043)
青木 純  東北大学, 大学院・工学研究科, 助手 (40374954)
Project Period (FY) 2002 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥108,550,000 (Direct Cost: ¥83,500,000、Indirect Cost: ¥25,050,000)
Fiscal Year 2006: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Fiscal Year 2005: ¥13,650,000 (Direct Cost: ¥10,500,000、Indirect Cost: ¥3,150,000)
Fiscal Year 2004: ¥21,060,000 (Direct Cost: ¥16,200,000、Indirect Cost: ¥4,860,000)
Fiscal Year 2003: ¥23,010,000 (Direct Cost: ¥17,700,000、Indirect Cost: ¥5,310,000)
Fiscal Year 2002: ¥40,950,000 (Direct Cost: ¥31,500,000、Indirect Cost: ¥9,450,000)
Keywordsposition measurement / surface motor / multi-degee-of-freedom / slope / angle grid / closed-loop control / sensor / accuracy / 他自由度 / エンコーダ / 高速工具サーボ / 制御
Research Abstract

This research has developed a surface encoder consisting of a sinusoidal angle grid and a two-dimensional slope sensor for multi-degree-of-freedom planar motion measurement. The angle grid has a three dimensional micro-structured surface, which is a superposition of periodic sinusoidal waves in the X-and Y-directions. The laser-based slope sensor is used to read local slope profiles of the grid surface. The X-and Y-positions together with tilt motions about the X-, Y-and Z-axes can be detected by using multiple sensors with a maximum speed of 550mm/s. a double pass surface encoder for nanometer position measurement in the XY plane. By using a double pass optical layout, the sensitivity of the sensor becomes twice as much as that of the single pass surface encoder. A resolution of 2 nm has been realized.
Diamond turning with a fast tool servo has been chosen as the fabrication method for the angle grid. The constructed fast tool servo, which employs a piezoelectric tube actuator to actua … More te the diamond tool and a capacitance probe as the feedback sensor, was confirmed to have a bandwidth of approximately 4 kHz and a tool displacement accuracy of several nanometers in the closed-loop mode. An evaluation technique based on the two-dimensional discrete Fourier transform (DFT) of interference microscope images has been developed to evaluate the fabricated grid surface effectively. The fabrication result of a grid surface over an area of φ150 mm has indicated the effectiveness of the fabrication system. The fabricated minimum pitch of the angle grid is 10 μm. A UV roller replication technique has also been developed to fabricate the angle grid on large area films.
The surface encoder has been applied for surface motor-driven stages for five degree-of-freedom precision positioning. The surface motor consists of pairs of linear motors placed on the same surface. The magnetic array and the stator winding of the linear motor are mounted on the platen (the moving element) and the stage base, respectively. The angle grid of the surface encoder is mounted on the platen of the stage which is levitated by air-bearings. The slope sensors and the air-bearing pads are fixed on the stage base so that the motion of the platen is not affected by the electronic cables and air hoses. The surface encoder has also been applied to Sawyer motor driven stages. Less

Report

(6 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (73 results)

All 2007 2006 2005 2004 2003 Other

All Journal Article (52 results) Patent(Industrial Property Rights) (4 results) Publications (17 results)

  • [Journal Article] A double pass surface encoder for measurement of planar motion2007

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      International Journal of Surface Science and Engineering (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A double pass surface encoder for measurement of planar motion2007

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      International Journal of Surface Science and Engineering (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A double pass surface encoder for measurement of planar motion2007

    • Author(s)
      Y.Watanabe
    • Journal Title

      International Journal of Surface Science and Engineering (in press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Design and construction of a surface encoder with dual sine-grids2007

    • Author(s)
      A.Kimura
    • Journal Title

      International Journal of Precision Engineering and Manufacturing (In press)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Design and Construction of a Surface Encoder with Dual Sine-Grids2006

    • Author(s)
      Akihide Kimura, et al.
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 8・2

      Pages: 20-25

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision measurement and decoupled control of a planar motion stage2006

    • Author(s)
      Song Yi Dian, et al.
    • Journal Title

      Journal of CSME 27・5

      Pages: 567-574

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Improvement in a surface motor-driven planar motion stage2006

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of Robotics and Mechatronics 18・6

      Pages: 808-815

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Construction of a measurement and control system for a Sawyer motor-driven planar stage2006

    • Author(s)
      M.Tano, et al.
    • Journal Title

      Journal of Nanotechnology and Precision Engineering 4・3

      Pages: 182-189

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Design and Construction of a Surface Encoder with Dual Sine-Grids2006

    • Author(s)
      Akihide Kimura, et al.
    • Journal Title

      International Journal of Precision Engineering and Manufacturing Vol.8, No.2

      Pages: 20-25

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision measurement and decoupled control of a planar motion stage2006

    • Author(s)
      Song Yi Dian, Wei Gao, Katsutoshi Horie, Satoshi Kiyono
    • Journal Title

      Journal of CSME Vol.27, No.5

      Pages: 567-574

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Improvement in a surface motor-driven planar motion stage2006

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of Robotics and Mechatronics Vol.18, No.6

      Pages: 808-815

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Construction of a measurement and control system for a Sawyer motor-driven planar stage2006

    • Author(s)
      M.Tano, et al.
    • Journal Title

      Journal of Nanotechnology and Precision Engineering Vol.4, No.3

      Pages: 182-189

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Construction of a measurement and control system for a Sawyer motor-driven planar stage2006

    • Author(s)
      M.Tano
    • Journal Title

      Journal of Nanotechnology and Precision Engineering 4・3

      Pages: 182-189

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Improvement in a surface motor-driven planar motion stage2006

    • Author(s)
      W.Gao
    • Journal Title

      Journal of Robotics and Mechatronics 18・6

      Pages: 808-815

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Precision measurement and decoupled control of a planar motion stage2006

    • Author(s)
      Song Yi Dian
    • Journal Title

      Journal of CSME 27・5

      Pages: 567-574

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Dual正弦波格子型サーフェスエンコーダに関する研究2006

    • Author(s)
      高偉, 鶴見直也, 渡辺陽司, 木村彰秀, 清野 慧
    • Journal Title

      精密工学会誌 72・3

      Pages: 382-386

    • NAID

      130004655856

    • Related Report
      2005 Annual Research Report
  • [Journal Article] On-machine measurement of a cylindrical surface with sinusoidal micro-structures by an optical slope sensor2006

    • Author(s)
      W.Gao, M.Tano, S.Sato, S.Kiyono
    • Journal Title

      Precision Engineering 30(印刷中)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Dual正弦波格子型サーフェスエンコーダに関する研究2005

    • Author(s)
      高偉, 他.
    • Journal Title

      精密工学会誌 72・3

      Pages: 382-386

    • NAID

      130004655856

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 高速工具サーボによる大面積正弦波微細格子基準面の高精度創成2005

    • Author(s)
      田野 誠, 他.
    • Journal Title

      日本機械学会論文集(C) 71・712

      Pages: 3602-3607

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] 光干渉型サーフェスエンコーダに関する研究2005

    • Author(s)
      渡辺陽司, 他.
    • Journal Title

      精密工学会誌 71・8

      Pages: 1051-1055

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005

    • Author(s)
      Shuichi DEJIMA, et al.
    • Journal Title

      Precision Engineering 29・3

      Pages: 263-271

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Sawyer型平面モータの精密位置決めに関する研究-位置決やシステムの提案と微小位置決め実験-2005

    • Author(s)
      高偉, 他.
    • Journal Title

      精密工学会誌 74・1

      Pages: 523-527

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005

    • Author(s)
      Shuichi Dejima, et al.
    • Journal Title

      Mechatronics 15

      Pages: 969-987

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A Dual-Mode Surface Encoder for Position Measurement2005

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Sensors and Actuators A 117・1

      Pages: 95-102

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A surface encoder with dual sine-grids2005

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of JSPE Vol.72, No.3

      Pages: 382-386

    • NAID

      130004657418

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] High-accuracy fabrication of a simusoidal grid surface over a large area by fast tool servo2005

    • Author(s)
      Makoto Tano, et al.
    • Journal Title

      Transactions of JSME C Vol.71, No.712

      Pages: 3602-3607

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A surface encoder based on wave optics2005

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      Journal of JSPE Vol.71, No.8

      Pages: 1051-1055

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005

    • Author(s)
      S.Dejima, et al.
    • Journal Title

      Precision Engineering Vol.29, No.3

      Pages: 263-271

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Positioning of a Sawyer motor-driven stage2005

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of JSPE Vol.74, No.1

      Pages: 523-527

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005

    • Author(s)
      Shuichi Dejima, et al.
    • Journal Title

      Mechatronics Vol.15

      Pages: 969-987

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A Dual-Mode Surface Encoder for Position Measurement,2005

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Sensors and Actuators A Vol.117, No.1

      Pages: 95-102

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005

    • Author(s)
      Shuichi Dejima, Wei Gao, Hiroki Shimizu, Satoshi Kiyono, Yoshiyuki Tomita
    • Journal Title

      Mechatronics 15・8

      Pages: 969-987

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 光干渉型サーフェスエンコーダに関する研究2005

    • Author(s)
      渡辺陽司, 高 偉, 清水浩貴, 清野 慧
    • Journal Title

      精密工学会誌 71・8

      Pages: 1051-1055

    • NAID

      10016679183

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 高速工具サーボによる大面積正弦波微細格子基準面の高精度創成2005

    • Author(s)
      田野 誠, 高 偉, 荒木 武, 清野 慧
    • Journal Title

      日本機械学会論文集(C) 71・712

      Pages: 3602-3607

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005

    • Author(s)
      Shuichi DEJIMA, Wei GAO, Kei KATAKURA, Satoshi KIYONO
    • Journal Title

      Precision Engineering (印刷中)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Sawyer型平面モータの精密位置決めに関する研究-位置決めシステムの提案と微小位置決め実験-2005

    • Author(s)
      高偉, 田野誠, 清野慧, 冨田良幸, 佐々木卓也
    • Journal Title

      精密工学会誌 (印刷中)

    • NAID

      110001824158

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYO_z Surface Encoder for Precision Positioning2004

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering 28・3

      Pages: 329-337

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYθz Surface Encoder for Precision Positioning,2004

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering Vol.28, No.3

      Pages: 329-337

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Surface Motor-Driven Planar Motion Stage Integrated with an XYθ_Z A Surface Encoder for Precision Positioning2004

    • Author(s)
      Wei Gao, Shuichi Dejima, Hiroaki Yanai, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita
    • Journal Title

      Precision Engineering 28・3

      Pages: 329-337

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Controller Design and Adjustment for a Three DOF Planar Motion2004

    • Author(s)
      Shuichi Dejima, Wei Gao, Kei Katakura, Satoshi Kiyono, Yoshiyuki Tomita
    • Journal Title

      Proc.of the 1st Int.Conf.on Positioning Technology

      Pages: 343-344

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of a Multi-cell Photodiode for a MDOF Surface Encoder2004

    • Author(s)
      Y.Watanabe, W.Gao, H.Shimizu, S.Kiyono
    • Journal Title

      Proceedings of the 2nd International Symposium on Nanomanufacturing

      Pages: 591-595

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication and Measurement of a cylinder surface with sinusoidal micro-structures2004

    • Author(s)
      Makoto TANO, Shinji SATO, Wei GAO, Satoshi KIYONO
    • Journal Title

      Proc.of the 1st Int.Conf.on Positioning Technology

      Pages: 327-328

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Analysis of a Surface Encoder in Wave Optics2003

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      Key Engineering Materials 257・258

      Pages: 219-224

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision nanometrology of a large area microstructured metrology surface2003

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Optics and Precision Engineering 11・3

      Pages: 223-226

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Measurement of Two-Axis Positions and Tilt Moticns Using a Surface Encoder2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Annals of CIRP 52・2

      Pages: 435-438

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering 27・3

      Pages: 289-298

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] サーフェスモータ駆動型多自由度ステージの位置決めの研究(第2報)-ステージのダイナミック制御による微小位置決め実験-2003

    • Author(s)
      出島秀一, 他.
    • Journal Title

      精密工学会誌 69・3

      Pages: 433-437

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Analysis of a surface encoder in wave optics2003

    • Author(s)
      Y.Watanabe, et al.
    • Journal Title

      Key Engineering Materials Vol.257-258

      Pages: 219-224

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision nanometrology of a large area microstructured metrology surface2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Optics and Precision Engineering Vol.11, No.3

      Pages: 223-226

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface Encoder2003

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Annals of CIRP Vol.52, No.2

      Pages: 435-438

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering Vol.27, No.3

      Pages: 289-298

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Precision positioning of a surface motor-driven multi-axis stage using a surface encoder2003

    • Author(s)
      Shuichi Dejima, et al.
    • Journal Title

      Journal of JSPE Vol.69, No.3

      Pages: 433-437

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] ステージ装置2004

    • Inventor(s)
      高偉, 清野慧, 富田良幸, 田野誠
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Filing Date
      2004-03-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 検出装置及びステージ装置2004

    • Inventor(s)
      高偉, 清野慧, 富田良幸, 渡辺陽司
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Filing Date
      2004-04-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 検出装置2004

    • Inventor(s)
      清野慧, 渡辺陽司, 高偉, 清水浩貴
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Filing Date
      2004-05-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 検出装置及びステージ装置2004

    • Inventor(s)
      高偉, 清野慧, 渡辺陽司, 富田良幸, 牧野健一, 平田徹
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Filing Date
      2004-06-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Publications] 出島秀一, 高 偉, 矢内宏明, 清野彗: "サーフェスモータ駆動型多自由度ステージの位置決めの研究(第2報)-ステージのダイナミック制御による微小位置決め実験-"精密工学会誌. 69・3. 433-436 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] W.Gao, S.Dejima, Y.Shimizu, S.Kiyono: "Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface Encorder"Annals of CIRP. 52・1. 435-438 (2003)

    • Related Report
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  • [Publications] Yoji Watanabe, Wei Gao, Hiroki Shimizu, Satoshi Kiyono: "Analysis of a Surface Encoder in Wave Optics"Key Engineering Materials. 257-258. 219-224 (2004)

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  • [Publications] Wei Gao, Shuichi Deijma, Hiroaki Yanai, Kei Katakura Satoshi Kiyono, Yoshiyuki Tomita: "A Surface Motor-Driven Planar Motion Stage Integrated with an XYθ_z Surface Encoder for Precision Positioning"Precision Engineering. (In press). (2004)

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  • [Publications] M.Tano, W.Gao, S.Kiyono, M.Mito: "A Miniaturized Fast Tool Servo for Generating Micro-Structured Surface"Proceedings of euspen International Topical Conference. Vol.1. 73-76 (2003)

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  • [Publications] Shuichi DEJIMA: "Precision Positioning of a Planar Motion Stage"Proc. of The 1st International Symposium on Mechanical Science Based on Nanotechnology. 115-121 (2004)

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  • [Publications] 出島秀一, 高 偉, 渡辺 陽司, 清水浩貴, 清野 彗: "5自由度サーフェスエンコーダの高速化に関する研究"2003年度精密工学会秋季大会学術講演論文集. 435 (2003)

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  • [Publications] 出島秀一, 高 偉, 清野 彗: "サーフェスエンコーダによる位置・姿勢5自由度検出についての研究-検出誤差の低減-"日本機械学会東北支部第38期総会・講演会講演論文集. 136-137 (2003)

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  • [Publications] 出島秀一, 高 偉, 渡辺 陽司, 清水浩貴, 清野 彗: "5自由度サーフェスエンコーダの高速化に関する研究"2003年度精密工学会秋季大会学術講演会講演論文集. 435 (2003)

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  • [Publications] 出島秀一, 高 偉, 清野 彗, 冨田良幸: "サーフェスエンコーダを用いた平面モータの5自由度精密位置決め"2004年度精密工学会秋季大会学術講演会講演論文集. (発表予定). (2004)

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  • [Publications] 平林 龍太郎, 田野 誠, 高 偉, 清野 彗: "3次元微細形状の転写加工に関する研究"2003年度精密工学会東北支部学術講演会. 9-10 (2003)

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  • [Publications] 出島秀一, 高 偉, 清野 慧: "サーフェスモータ駆動型多自由度ステージの位置決めの研究(第2報)"精密工学会誌. (掲載予定).

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  • [Publications] Wei Gao, Takeshi Araki, Satoshi Kiyono, Yuichi Okazaki, Masashi Yamanaka: "Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder"Precision Engineering. (In press).

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  • [Publications] Hiroaki Yanai, Wei Gao, Satoshi Kiyono: "A compact surface motor stage equipped with a surface encoder"Proc. of 1st Korea-Japan Conference on Positioning Technology, Daejeon. 23-24 (2002)

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  • [Publications] Takeshi Araki, Wei Gao, Satoshi Kiyono, Masasyu Sudoh, Masami Mito: "Generation of large-area microstructured surface by diamond turning with a fast tool servo"Proc. of the 17th Annual Meeting ASPE, St. Louis, Misouri. 538-541 (2002)

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  • [Publications] Shuichi Dejima, Wei Gao, Satoshi Kiyono, Ybshiyuki Tomita: "Multi-degree of freedom precision stage system integrated with a surface encoder"Proc. of 3rd euspen Int. Conf., Eindhoven. 59-62 (2002)

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  • [Publications] Shuichi DEJIMA, Wei GAO, Yuki SHIMIZU, Hiroki SHIMIZU, Satoshi KIYONO: "A five degree-of-freedom surface encoder"Proc. of 1st Korea-Japan Conference on Positioning Technology, Daejeon. 102-103 (2002)

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Published: 2002-04-01   Modified: 2016-04-21  

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