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Development of nanodevice processes for carbon nanotubes

Research Project

Project/Area Number 14205005
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionRIKEN

Principal Investigator

ISHIBASHI Koji  RIKEN, Advanced Device Laboratory, Chief Scientist, 石橋極微デバイス工学研究室, 主任研究員 (30211048)

Co-Investigator(Kenkyū-buntansha) SHIOKAWA Takao  RIKEN, Advanced Device Laboratory, Senior Researcher, 石橋極微デバイス工学研究室, 先任研究員 (00183393)
MATSUMOTO Kazuhiko  AIST, Nanotechnology Department, Group leader, ナノテクノロジー部門, 総括研究員 (80344232)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥55,510,000 (Direct Cost: ¥42,700,000、Indirect Cost: ¥12,810,000)
Fiscal Year 2004: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2003: ¥7,670,000 (Direct Cost: ¥5,900,000、Indirect Cost: ¥1,770,000)
Fiscal Year 2002: ¥43,420,000 (Direct Cost: ¥33,400,000、Indirect Cost: ¥10,020,000)
Keywordscarbon nanotube / quantum dots / single electron transistor / single electron inverter / local beam irradiation / large current flowing process / position controlled growth / tunnel barrier / 単層カーボンナノチューブ / 多層カーボンナノチューブ / バンドル / クーロン振動 / 離散化量子準位 / 過電流 / ナノデバイス / 量子ナノデバイス
Research Abstract

Device processes have been developed for carbon nanotubes to be applied for nanodevices. First of all, a process to fabricate electrical contacts to individual carbon nanotubes was developed, based on the mark alignment technique in electron beam lithography. For single-wall carbon nanotubes (SWCNTs), the tunnel barrier is formed at the edge of the metallic contact, and a whole nanotube between the contacts form a single quantum dot. This fact indicates that the SWCNTs underneath the contact is insulating. The barrier height of the tunnel barrier was estimated by measuring a temperature dependence of the electronic transport, and was turned out to be several meV. This means that despite the large charging energy of the SWCNT single electron transistor, the operation temperature is not limited by the charging energy, but is limited by the barrier height. This coincides with an experimental observation that the Coulomb blockade effect is observed up to around 20K.
In the course of this study, we have pointed out the important factor for the carbon nanotube device process. These are 1)a need to form artificial tunnel barriers, 2)a need to overcome the bundle effect, and 3)a need to grow carbon nanotubes with possible position control. To tackle these problems, we have attempted following approaches. 1)Tunnel barrier : We have developed a local Ar beam irradiation technique to multi-wall carbon nanotubs. 2)Bundle effect : To overcome the problem, the large current flowing process has been developed, where the peaks from single quantum dots were selectively observed. 3)Position control growth : To do this, we have developed a chemical vapor deposition technique with patterned catalysts and an applied electric field.
In the present project, we believe that the basic technique to fabricate nanodevices with carbon nanotubes have been established

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (22 results)

All 2005 2004 2003 2002 Other

All Journal Article (14 results) Publications (8 results)

  • [Journal Article] Fabrication of single electron inverter in single-wall carbon nanotubes2005

    • Author(s)
      D.Tsuya, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Jpn.J.Appl.Phys. 44

      Pages: 1588-1591

    • NAID

      10015469658

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Quantum dots and their tunnel barrier in semiconducting carbon nanotubes with a p-type behavior2005

    • Author(s)
      D.Tsuya, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Jpn.J.Appl.Phys. 44

      Pages: 2596-2599

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Growth control of carbon nanotube using various applied electric fields for electronic device applictions2005

    • Author(s)
      M.Maeda, C.K.Hyon, T.Kamimura, A.Kijima, K.Sakamoto, K.Matsumoto
    • Journal Title

      Jpn.J.Appl.Phys. 44

      Pages: 1585-1587

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Growth control of carbon nanotube using various applied electric fields for electronic device applications2005

    • Author(s)
      M.Maeda, C.K.Hyon, T.Kamimura, A.Kojima, K.Sakamoto, K.Matsumoto
    • Journal Title

      Jpn.J.Appl.Phys. 44

      Pages: 1585-1587

    • NAID

      10015469647

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Local Change of Carbon Nanotube-Metal Contacts by Current Flow through Electrodes2004

    • Author(s)
      Hideyuki Maki, Masaki Suzuki, Koji Ishibashi
    • Journal Title

      Jpn.J.Appl.Phys 43

      Pages: 2027-2030

    • NAID

      10012949225

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Observation of the discrete quantum levels in multi-wall carbon nanotube quantum dots2004

    • Author(s)
      D.Tsuya, M.Suzuki, S.Moriyama, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Physica E 24

      Pages: 50-53

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Selecting single quantum dots from bundle of single-wall carbon nanotubes using effect of the large current flow2004

    • Author(s)
      S.Moriyama, T.Fuse, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Science and Technology of Advanced Materials 5

      Pages: 613-615

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electrical transport in semiconducting single-wall carbon nanotubes2004

    • Author(s)
      S.Moriyama, K.Toratani, D.Tsuya, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Physica E 24

      Pages: 46-49

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Effect of ultra-low energy Nitrogen-ion irradiation to carbon nanotube channel single electron transistor2004

    • Author(s)
      T.Kamimura, K.Yamamoto, K.Matsumoto
    • Journal Title

      Jpn.J.Appl.Phys. 43

      Pages: 2771-2773

    • NAID

      10012948145

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of single electron inverter in multiwall carbon nanotubes2003

    • Author(s)
      K.Ishibashi, D.Tsuya, M.Suzuki, Y.Aoyagi
    • Journal Title

      Appl.Phys.Lett. 82

      Pages: 3307-3309

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of large current flow on the low temperature transport properties in a bundle of single-wall arbon nanotubes2003

    • Author(s)
      T.Fuse, S.Moriyama, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Appl.Phys.Lett. 83

      Pages: 3803-3805

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of large current flow on the low temperature transport properties in a bundle of single-wall arbon nanotubes2003

    • Author(s)
      T.Fuse, S.Moriyama, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Appl.Phys.Lett.

      Pages: 3803-3805

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Tunnel barrier formation using Argon ion irradiation and single quantum dots in multi-wall carbon naotubes2002

    • Author(s)
      M.Suzuki, K.Ishibashi, T.Toratani, D.Tsuya, Y.Aoyagi
    • Journal Title

      Appl.Phys.Lett. 81

      Pages: 2273-2275

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Quantum dots and their tunnel barrier in semiconducting single-wall carbon nanotubes with a p-type behavior

    • Author(s)
      D.Tsuya, M.Suzuki, Y.Aoyagi, K.Ishibashi
    • Journal Title

      Jpn.J.Appl.Phys. (印刷中)

    • NAID

      10015704998

    • Related Report
      2004 Annual Research Report
  • [Publications] K.Ishibashi, M.Suzuki, D.Tsuya, Y.Aoyagi: "Fabuication of single electron transistors in multi-wall carbon nanotubes by using Ar beam irradiation"Microelectronic Engineering. 67-68. 749-754 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] D.Tsuya, K.Ishibashi, M.Suzuki, Y.Aoyagi: "Local Ar beam irradiation for making tunneling barriers and its application to single electron inverter in multi-wall cabon nanotubes"Physica E. 19. 157-160 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.fuse, et al.: "Effect of the large current flow on the low-temperature transport properties in a bundle of single-wall cabon nanotubes"Appl.Phys.Lett. 83. 3803-3805 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Matsumoto et al.: "Single Electron Transistor with Ultra-High Coulomb Energy of 5000K Using Position Controlled Grown Carbon Nanotube as Channel"Jpn.J.Appl.Phys.. 42. 2415-2418 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Suzuki, K.Ishibashi, T.Toratani, D.Tsuya, Y.Aoyagi: "Tunnel barrier formation using Argon ion irradialion and single quantum dots in multi-wall carbon nanotubes"Appi.Phys.Lett.. 81. 2273-2275 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Ishibashi, M.Suzuki, S.Moriyama, T.Ida, Y.Aoyagi: "Single and Coupled Quantum Dots in Single-Wall Carbon Nanotubes"Superlattices and Microstructures. 31. 141-149 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Ishibashi, M.Suzuki, K.Toratani, T.Ida, Y.Aoyagi: "Low temperature transport in single and coupled quantum dots in single-wall caibon nanotubes"Physica E. (in press).

    • Related Report
      2002 Annual Research Report
  • [Publications] 石橋幸治(分担執筆): "インテリジェント材料・技術の最新開発動向(仮)"シーエムシー出版(in press). (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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