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Development of a real time stereo phase microscope

Research Project

Project/Area Number 14205008
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionNagoya University

Principal Investigator

TANJI Takayoshi  Nagoya University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (90125609)

Co-Investigator(Kenkyū-buntansha) CHEN Jun  Tokyo Institute of Polytechnics, Associate Professor, 工学部, 助教授 (90308338)
ICHIHASI Mikio  Nagoya University, Ecotopia Science Institute, Professor, エコトピア科学研究所, 教授 (90345869)
TANAKA Shigeyasu  Nagoya University, Ecotopia Science Institute, Associate Professor, エコトピア科学研究所, 助教授 (70217032)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥54,600,000 (Direct Cost: ¥42,000,000、Indirect Cost: ¥12,600,000)
Fiscal Year 2004: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2003: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Fiscal Year 2002: ¥44,200,000 (Direct Cost: ¥34,000,000、Indirect Cost: ¥10,200,000)
Keywordsstereoscopy / real time observation / transmission electron microscope / electron holography / 立体観察 / ステレオ法 / 透過電子顕微鏡観察 / 電子線実体位相顕微鏡 / ステレオ電子線ホログラフィ / 立体像観察 / 実時間ステレオ観察 / 実時間ステレオ電子顕微鏡 / ステレオ位相顕微鏡 / 透過型電子顕微鏡
Research Abstract

Transmission electron microscope(TEM) images are intrinsically two-dimensional projections of specimens wherein information along the incident electron beam direction is lost. Three-dimensional(3-D) observations by TEM, however, are indispensable in material science studies for observing dislocations, precipitates, voids, and so on. Moreover, it is also a very effective technique in biomedical sciences, for example, for structure analysis of cell membranes and nervous tissues. The principle of stereoscopic electron micrography was proposed in 1940s, thereafter, many investigations using stereographic 3-D observation have been carried out. Such stereoscopic microcopy is that we take two micrographs projected along two different directions with tilting specimens and develop the films and print them, then we can observe by special glasses at last. Computer tomography(CT) was introduced in the early 1980s, especially in molecular biology it has been developed into the electron crystallogra … More phy by combining the electron imaging with the electron diffraction. Recently, progressive mechanical accuracy of electron microscopes and the development of clever software have encouraged 3-D reconstructions using CT. All electron microscope manufacturers enforce installing the CT system to their microscopes, which can acquire image series quickly and automatically reconstruct. The techniques used thus far in TEM for 3-D imaging require the specimens to be stable, because the stereo method requires taking two images projected along the different directions by tilting a specimen, and the CT necessitates the acquisition oftens of images, which can take several tens of seconds to a few hours.
In this research, a new transmission electron microscope that allows for stereoscopic observations in real time at a video rate has been developed. In order to make stereo pairs at a high speed, illumination of a specimen from two directions instead of specimen tilting is adopted. Three dimensional displays give observers a stereo impression without the need for special glasses. A lateral resolution less than 1 nm and a longitudinal resolution of 6.3 nm are possible with a proper defocused condition. This expectation of the resolution is confirmed for the image of Au fine particles. The motion of objects in the lateral direction can be detected up to a speed of 8.3 nm/s. Fine particles of ZnO and dislocations in aluminum and stainless steal thin films were observed using this microscope. This microscope can be utilized to a stereoscopic electron holograph microscope. Realization of real time stereoscopic electron holography is confirmed by combining a stereoscopic electron holography microscope and an optical reconstruction system. Less

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (45 results)

All 2005 2004 2003 2002 Other

All Journal Article (31 results) Book (2 results) Patent(Industrial Property Rights) (3 results) Publications (9 results)

  • [Journal Article] Development of a Real-Time Stereo Transmission Electron Microscope.2005

    • Author(s)
      T.Tanji 他2名
    • Journal Title

      J.Electron Microsc. 54(印刷中)

    • NAID

      10016856151

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Direct Observation of Electrostatic Micro fields by Four-Electron-Wave Interference Using Two Electron Biprisms. Direct Observation of Electrostatic Micro fields by Four-Electron-Wave Interference Using Two Electron Biprisms.2005

    • Author(s)
      K.Miyashita, K.Yamamoto, T.Hirayama, T.Tanji
    • Journal Title

      J.Electron Microsc. Vol.53-No.6

      Pages: 577-582

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of a Real-Time Stereo Transmission Electron Microscope.2005

    • Author(s)
      T.Tanji, H.Tanaka, T.Kojima
    • Journal Title

      J.Electron Microsc. Vol.54(in press)

    • NAID

      10016856151

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Imaging Magnetic Structures using TEM Method.2005

    • Author(s)
      T.Tanji
    • Journal Title

      Handbook of Microscopy for Nanotechnology(eds.N.Yao and Z.-L.Wan)(Kluwer Academic Publishers, Boston)

      Pages: 683-715

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Development of a Real-Time Stereo Transmission Electron Microscope.2005

    • Author(s)
      T.Tanji, ほか2名
    • Journal Title

      Journal of Electron Microscopy 54(in press)

    • NAID

      10016856151

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Observation of Magnetic Multilayers by Electron Holography.2004

    • Author(s)
      T.Tanji 他3名
    • Journal Title

      Microscopy and Microanalysis 10

      Pages: 146-152

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Transmission Electron Microscopy Study of an AlN Nucleation layer for the Growth of GaN on a 7-Degree Off-Oriented (001) Si Substrate by Metalorganic Vapor Phase Epitaxy.2004

    • Author(s)
      S.Tanaka, T.Tanji, M.Ichihasi 他4名
    • Journal Title

      J.Crystal Growth 260

      Pages: 360-365

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Off-Axis Electron Holography without Fresnel Fringes2004

    • Author(s)
      T.Tanji 他2名
    • Journal Title

      Ultramicroscopy 101

      Pages: 265-269

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] フレネルインライン電子線ホログラフィにおける画質改善2004

    • Author(s)
      丹司敬義他3名
    • Journal Title

      電気学会論文誌C 124

      Pages: 2497-2498

    • NAID

      10014163311

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Direct Observation of Electrostatic Microfields by Four-Electron-Wave Interference Using Two Electron Biprisms. Direct Observation of Electrostatic Microfields by Four-Electron-Wave Interference Using Two Electron Biprisms.2004

    • Author(s)
      T.Tanji 他3名
    • Journal Title

      J.Electron Microsc. 53

      Pages: 577-582

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Observation of Magnetic Multilayers by Electron Holography.2004

    • Author(s)
      T.Tanji, S.Hasebe, Y.Nakagami, K.Yamamoto
    • Journal Title

      Microscopy and Microanalysis Vol.10-No.1

      Pages: 146-152

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Transmission Electron Microscopy Study of an AlN Nucleation layer for the Growth of GaN on a 7-Degree Off-Oriented (001) Si Substrate by Metalorganic Vapor Phase Epitaxy.2004

    • Author(s)
      S.Tanaka, Y.Honda, N.Kameshiro, R.Iwasaki, N.Sawaki, T.Tanji, M.Ichihashi
    • Journal Title

      J.Crystal Growth Vol.260

      Pages: 360-365

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Off-axis Electron Holography without Fresnel Fringes.2004

    • Author(s)
      K.Yamamoto, T.Hirayama, T.Tanji
    • Journal Title

      Ultramicroscopy Vol.101-No.2-4

      Pages: 265-269

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Improvement by Removing the Conjugate Image for In-line Fresnel Electron Holography.2004

    • Author(s)
      S.Sugiyama, Y.Kajino, T.Tanji, N.Sugie
    • Journal Title

      IEEJ Trans.EIS Vol.124, No.12

      Pages: 2497-2498

    • NAID

      10014163311

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Direct Observation of Electrostatic Microfields by Four-Electron-Wave Interference Using Two Electron Biprisms.2004

    • Author(s)
      T.Tanji ほか3名
    • Journal Title

      Journal of Electron Microscopy 53・6

      Pages: 577-582

    • NAID

      10014320429

    • Related Report
      2004 Annual Research Report
  • [Journal Article] フレネルインラインホログラフィにおける画像改善2004

    • Author(s)
      丹司敬義 ほか3名
    • Journal Title

      電気学会論文誌 C 124・12

      Pages: 2497-2498

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Off-axis Electron Holography without Fresnel Fringes.2004

    • Author(s)
      T.Tanji ほか2名
    • Journal Title

      Ultramicroscopy 101・2-4

      Pages: 265-269

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Development of an On-line Stereo TEM.2004

    • Author(s)
      T.Tanji, M.Ichihashi ほか4名
    • Journal Title

      Proc.8th Asia-Pacific Electron Microscopy Conference, Kanazawa

      Pages: 288-289

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electron Holography Study of a GaN/AlGaN Interface and a GaN Crystal on Si Substrates.2004

    • Author(s)
      S.Tanaka, T.Tanji, M.Ichihashi ほか2名
    • Journal Title

      Proc.8th Asia-Pacific Electron Microscopy Conference, Kanazawa

      Pages: 507-508

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Phase-Shifting Fizeau Interference Microscope with a Wavelength-Shifted Laser Diode.2003

    • Author(s)
      J.Chen 他3名
    • Journal Title

      Optical Engineering 142

      Pages: 60-67

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation of High-Precision Phase-Shifting Electron Holography by using Hologram Simulation.2003

    • Author(s)
      T.Tanji 他3名
    • Journal Title

      Surface and Interface Analysis. 35

      Pages: 60-65

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Phase-Shifting Fizeau Interference Microscope with a Wavelength-Shifted Laser Diode.2003

    • Author(s)
      Y.Ishii, J.Chen, R.Onodera, T.Nakamura
    • Journal Title

      Optical Engineering Vo.142, No.1

      Pages: 60-67

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation of High-Precision Phase-Shifting Electron Holography by using Hologram Simulation.2003

    • Author(s)
      K.Yamamoto, T.Hirayama, T.Tanji, M.Hibino
    • Journal Title

      Surface and Interface Analysis Vol.35-No.2

      Pages: 60-65

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Transmission Electron Microscopy Study of the Microstucture in Selective-Area-Grown GaN and an AlGaN/GaN Heterostructure on a 7-Degree Off-Oriented (001) Si Substrate.2002

    • Author(s)
      S.Tanaka, T.Tanji, 他4名
    • Journal Title

      Jpn.J.Appl.Phys. 41

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Balanced-Homodyne Ddetection Technique for Surface Nonlinear Optics.2002

    • Author(s)
      J.Chen 他2名
    • Journal Title

      Proc.of the International Society for Optical Engineering (SPIE) 4919

      Pages: 68-74

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Quantitative Phase Measurement Interference Microscope for Transparent Objects.2002

    • Author(s)
      J.Chen 他2名
    • Journal Title

      Proc.of the International Society for Optical Engineering (SPIE) 4919

      Pages: 364-370

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] ファブリペロー・エタロン面精度のサブナノメーター計測2002

    • Author(s)
      伊藤進一, 陳 軍
    • Journal Title

      応用光学 2

      Pages: 5-8

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Transmission Electron Microscopy Study of the Microstructure in Selective-Area-Grown GaN and an AlGaN/GaN Heterostructure on a 7-Degree Off-Oriented (001) Si Substrate.2002

    • Author(s)
      S.Tanaka, Y.Honda, N.Kameshiro, R.Iwasaki, N.Sawaki, T.Tanji
    • Journal Title

      Jpn.J.Appl.Phys. Vol.41Part2-No.7B

    • NAID

      110004081100

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Balanced-Homodyne Ddetection Technique for Surface Nonlinear Optics.2002

    • Author(s)
      J.Chen, S.Machida, Y.Yamamoto
    • Journal Title

      Proc.SPIE Vol.4919

      Pages: 68-74

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Quantitative Phase Measurement Interference Microscope for Transparent Objects.2002

    • Author(s)
      J.Chen, J.Endo, H.Fujit
    • Journal Title

      Proc.SPIE Vol.4919

      Pages: 364-370

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Sub-Nanometer Measurement of Fabri-Perrot Etalon Surfaces.2002

    • Author(s)
      S.Ito, J.Chen
    • Journal Title

      Ouyou-Kougaku Vol.2. No.8

      Pages: 5-8

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] Imaging Magnetic Structures using TEM Method.(in Handbook of Microscopy for Nanotechnology, eds.N.Yao and Z.-L.Wan)2005

    • Author(s)
      T.Tanji
    • Total Pages
      32
    • Publisher
      Kluwer Academic Publishers, Boston
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] Imaging Magnetic Structures using TEM Method. (in Handbook of Microscopy for Nanotechnology)(eds. N.Yao, Z.L.Wang)2005

    • Author(s)
      T.Tanji
    • Total Pages
      32
    • Publisher
      Kluwer Academic Publishers, Boston
    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] Transmission electron Microscope and Three-Dimensional observing Method2003

    • Inventor(s)
      T.Tanji
    • Industrial Property Rights Holder
      Nagoya University
    • Filing Date
      2003-11-17
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Patent(Industrial Property Rights)] Transmission electron Microscope and Three-Dimensional observing Method2003

    • Inventor(s)
      T.Tanji
    • Industrial Property Rights Holder
      Nagoya University
    • Filing Date
      2003-11-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 透過型電子顕微鏡及び立体観察法2002

    • Inventor(s)
      丹司 敬義
    • Industrial Property Rights Holder
      名古屋大学
    • Patent Publication Number
      2004-243490
    • Filing Date
      2002-11-20
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] T.Tanji 他3名: "Evaluation of high-precision phase-shifting electron holograpy by using hologram simulation"Surface and Interface Analysis. 35・2. 60-65 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Tanji 他3名: "Observation of Magnetic Multilayers by Electron Holography"Microscopy and Microanalysis. 10・1. 146-152 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Tanaka, T.Tanji 他5名: "Transmission Electron Microscopy Study of an AlN Nucleation layer for the Growth of GaN on a 7-Degree Off-Oriented (001) Si Substrate by Metalorganic Vapor Phase Epitaxy"J.Crystal Growth. 260・3-4. 360-365 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 丹司敬義: "磁性グラニュラー膜のローレンツ顕微鏡観察"まてりあ. 41・12. 890-891 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Tanaka, T.Tanji 他4名: "Transmission electron microscopy study of the microstructure in selective-grown GaN and an AlGaN/GaN heterostructure on a 7-degree off-oriented (001) Si substrate"Jpn. J. Appl. Phys.. 41・7B. L846-L848 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Tanji, S.Hasebe, T.Suzuki: "Fine structures in new magnetic materials"Microscopy and Microanalysis. 8・suppl.2. 30-31 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Yamamoto, T.Hirayama, T.Tanji, M.Hibino: "Effects of Fresnel corrections for phase-shifting electron holography"Microscopy and Microanalysis. 8・suppl.2. 24-25 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Hibino, T.Tanji 他5名: "Phase contrast transfer function of spherical aberration corrected objective lens"Proc. 15th Int. Cong. on Electron Microscopy, Durban, South Africa. Vol.3. 39-40 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Tanaka, T.Tanji 他3名: "TEM characterization of (1-101)GaN grown selectively on 7-degree off-orientated (001)Si substrate"Proc. 15th Int. Cong. on Electron Microscopy, Durban, South Africa. Vol.1. 117-118 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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