• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

DEVELOPMENT OF ULTRAPRECISION CLEANING SYSTEM USING HIGH-VELOCITY SHEAR FLOW AND ELECTROCHEMICAL ETCHING PROCESS IN ULTRAPRE WATER

Research Project

Project/Area Number 14205025
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionOSAKA UNIVERSITY

Principal Investigator

GOTO Hidekazu (2003)  OSAKA UNIVERSITY, PRECISION SCIENCE AND TECHNOLOGY, ASSOCIATE PROFESSOR, 大学院・工学研究科, 助教授 (80170463)

森 勇蔵 (2002)  大阪大学, 大学院・工学研究科, 教授 (00029125)

Co-Investigator(Kenkyū-buntansha) YAMAUCHI Kazuto  OSAKA UNIVERSITY, PRECISION SCIENCE AND TECHNOLOGY, PROFESSOR, 大学院・工学研究科, 教授 (10174575)
HIROSE Kikuji  OSAKA UNIVERSITY, PRECISION SCIENCE AND TECHNOLOGY, PROFESSOR, 大学院・工学研究科, 教授 (10073892)
MORI Yuzo  OSAKA UNIVERSITY, PRECISION SCIENCE AND TECHNOLOGY, GUEST PROFESSOR, 大学院・工学研究科, 客員教授 (00029125)
後藤 英和  大阪大学, 大学院・工学研究科, 助教授 (80170463)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥45,370,000 (Direct Cost: ¥34,900,000、Indirect Cost: ¥10,470,000)
Fiscal Year 2003: ¥24,960,000 (Direct Cost: ¥19,200,000、Indirect Cost: ¥5,760,000)
Fiscal Year 2002: ¥20,410,000 (Direct Cost: ¥15,700,000、Indirect Cost: ¥4,710,000)
Keywordsultrapure water / shear flow / cleaning process / particle contamination / silica / silicon wafer / metal contamination / electrochemical etching / 液晶ディスプレー / インジウム・シン・オキサイド
Research Abstract

A new method of ultraprecision cleaning process for removing the particle contamination using high-velocity shear flow of ultrapure water along the surface to be cleaned was proposed. We constructed a new experimental apparatus which can supply high-velocity shear flow of ultrapure water, and performed cleaning processes in ultrapure water of Si wafer surfaces which are pre-contaminated by silica particles whose diameters are 0.4〜7.0μm. Cleaning processes of amorphous Si, ITO (indium tin oxide), TIN and organic compound deposited on Si wafer were also performed. It was confirmed that perfect removal of contaminated particles on the substrates are possible. In addition, cleaning processes in the air were also conducted, and it was confirmed that the processes in the air are more effective than the one in the ultrapure water, since the processes in the air require smaller amount of ultrapure water than the ones in ultrapure water.
As the second step, we proposed another new cleaning process for removing metal contaminations applying electrochemical etching process of metal induced by OH^-ions in ultrapure water. In order to increase the density of the OH^-ions in ultrapure water, we prototyped carboxylated graphite electrodes, since the carboxyl function has the ability of dissociation of the water molecules into H+ and OH^-ions. Applying the carboxylated graphite electrodes as cathodes and the substrates to be cleaned as anodes, electrolysis current induced by H+ and OH^-ions was observed, and Cu plate on the anode substrates was etched off. From these results, we concluded that our newly proposed cleaning processes are useful for perfect removal of contaminations of particles and metal on substrates.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (25 results)

All Other

All Publications (25 results)

  • [Publications] 森 勇藏, 後藤英和, 広瀬喜久治, 小畠厳貴, 當間 康, 西村丈人: "超純水のみによる電気化学的加工法の研究 -陰極表面における加工現象-"精密工学会誌. 68-9. 1241-1245 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 後藤英和, 広瀬喜久治, 小畠厳貴, 當間 康, 稲田 敬, 森 勇藏: "超純水のみによる電気化学的加工法の研究 -Al(001)表面の陰極反応素過程の第一原理分子動力学シミュレーション-"精密工学会誌. 69-9. 1332-1336 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 森 勇藏, 広瀬喜久治, 後藤英和, 山内和人, 當間 康, 小畠厳貴, 他: "超純水・超高速せん断流による洗浄プロセスの開発"精密工学会2002年度関西地方定期学術講演会講演論文集. 141-142 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 森 勇藏, 広瀬喜久治, 後藤英和, 遠藤勝義, 森田健一, 岡本弥華: "超純水・超高速せん断流による基板洗浄法の開発"精密工学会2003年度関西地方定期学術講演会講演論文集. 27-28 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 森 勇藏, 広瀬喜久治, 後藤英和, 岩井章人, 一井愛雄, 當間 康 他: "超純水のみによる電気化学的加工法の研究 -水分子を解離する機能を有する電極の開発-"精密工学会2003年度関西地方定期学術講演会講演論文集. 25-26 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 森 勇藏, 後藤英和, 広瀬喜久治, 當間 康, 小畠厳貴, 岩井章人 他: "超純水のみによる電気化学的加工法の研究"2003年度精密工学会春季大会学術講演会講演論文集. 313-313 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 森 勇藏, 後藤英和, 広瀬喜久治, 當間 康, 小畠厳貴, 岩井章人 他: "超純水のみによる電気化学的加工法の研究 -水分子を解離する機能を有する電極の開発-"2003年度精密工学会秋季大会学術講演会講演論文集. 337-337 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 若狭加奈子, 小野倫也, 後藤英和, 広瀬喜久治: "第一原理分子動力学シミュレーションによる水分子解離過程の解析"日本物理学会講演概要集. 58-2. 264-264 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Hidekazu Goto, Kikuji Hirose, Koji Inagaki, Yuzo Mori: "First-Principles Molecular-Dynamics Simulations of Electrochemical Machining Processes on Cathode Surface in Ultrapure Water"The 6th Asian Workshop on First-Principles Electronic Structure Calculations. (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Mori, H.Goto, K.Hirose, I.Kobata, Y.Toma, T.Nishimura: "A Study on Electrochemical Machining Method in Ultrapure Water -Electrochemical Machining of Cathode Surface in Ultra pure Water -"Journal of the Japan Society for Precision Engineering. 68-9. 1241-1245 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Goto, K.Hirose, I.Kobata, Y.Toma, T.Inada, Y.Mori: "A Study on Electrochemical Machining Method in Ultrapure Water -First-Principles Molecular-Dynamics Simulations of Etching Process on Al(001) Cathode Surface -"Journal of the Japan Society for Precision Engineering. 69-9. 1332-1336 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Mori, K.Hirose, H.Goto, K.Yamauchi, Y.Toma, I.Kobata: "Development of Cleaning Process using High-Velocity Shear Flow in Ultrapure Water"Meeting Abstracts of the Western Division of the Japan Society for Precision Engineering. 14-142 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Mori, K.Hirose, H.Goto, K.Endo, K.Morita, M.O.kamoto: "Development of Cleaning Process for Wafers using High-Velocity Shear Flow in Ultrapure Water"Meeting Abstracts of the Western Division of the Japan Society for Precision Engineering. 27-28 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Mori, K.Hirose, H.Goto, A.Iwai, Y.Ichii, Y.Toma: "A Study on Electrochemical Machining Method in Ultrapure Water -Development of Electrode for Dissociation of Water Molecules -"Meeting Abstracts of the Western Division of the Japan Society for Precision Engineering. 25-26 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Mori, H.Goto, K.Hirose, Y.Toma, I.Kobata, A.Iwai: "A Study on Electrochemical Machining Method in Ultrapure Water"Spring Meeting Abstracts of the Japan Society for Precision Engineering. 313-313 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Mori, H.Goto, K.Hirose, Y.Toma, I.Kobata, A.Iwai: "A Study on Electrochemical Machining Method in Ultrapure Water -Development of Electrode for Dissociation of Water Molecules -"Autumn Meeting Abstracts of the Japan Society for Precision Engineering. 337-337 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Wakasa, T.Ono, H.Goto, K.Hirose: "First-Principles Analysis of Dissociation Process of Water Molecules"Meeting Abstracts of the Physical Society of Japan. 58-2. 264-264 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Hidekazu Goto, Kikuji Hirose, Koji Inagaki, Ynzo Mori: "First-Principles Molecular-Dynamics Simulations of Electrochemical Machining Processes on Cathode Surface in Ultrapure Water"The 6th Asian Workshop on First-Principles Electronic Structure Calculations. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 後藤英和, 広瀬喜久治, 小畠厳貴, 當間 康, 稲田 敬, 森 勇藏: "超純水のみによる電気化学的加工法の研究-A1(001)表面の陰極反応素過程の第一原理分子動力学シミュレーション-"精密工学会誌. 69-9. 1332-1336 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 森 勇藏, 後藤英和, 広瀬喜久治, 當間 康, 小畠厳貴, 岩井章人 他: "超純水のみによる電気化学的加工法の研究"2003年度精密工学会春季大会学術講演会講演論文集. 313-313 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 森 勇藏, 広瀬喜久治, 後藤英和, 岩井章人, 一井愛雄, 當間 康 他: "超純水のみによる電気化学的加工法の研究-水分子を解離する機能を有する電極の開発-"精密工学会2003年度関西地方定期学術講演会講演論文集. 25-26 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 森 勇藏, 広瀬喜久治, 後藤英和, 遠藤勝義, 森田健一, 岡本弥華: "超純水・超高速せん断流による基板洗浄法の開発"精密工学会2003年度関西地方定期学術講演会講演論文集. 25-26 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 森 勇藏, 後藤英和, 広瀬喜久治, 當間 康, 小畠厳貴, 岩井章人 他: "超純水のみによる電気化学的加工法の研究-水分子を解離する機能を有する電極の開発-"2003年度精密工学会秋季大会学術講演会講演論文集. 337-337 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 若狭加奈子, 小野倫也, 後藤英和, 広瀬喜久治: "第一原理分子動力学シミュレーションによる水分子解離過程の解析"日本物理学会講演概要集. 58-2. 264-264 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 森勇藏, 広瀬喜久治, 後藤英和, 山内和人, 當間康, 小畠厳貴 他: "超純水・超高速せん断流による洗浄プロセスの開発"精密工学会2002年度関西地方定期学術講演会講演論文集. 141-142 (2002)

    • Related Report
      2002 Annual Research Report

URL: 

Published: 2002-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi