| Project/Area Number |
14205044
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Toyohashi University of Technology |
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Principal Investigator |
ISHIDA Makoto Toyohashi University of Technology, Faculty of Engineering, Professor, 工学部, 教授 (30126924)
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| Co-Investigator(Kenkyū-buntansha) |
SAWADA Kazuaki Toyohashi University of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (40235461)
TAKAO Hidekuni Toyohashi University of Technology, Faculty of Engineering, Associate, 工学部, 助手 (40314091)
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| Project Period (FY) |
2002 – 2004
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| Project Status |
Completed (Fiscal Year 2004)
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| Budget Amount *help |
¥48,490,000 (Direct Cost: ¥37,300,000、Indirect Cost: ¥11,190,000)
Fiscal Year 2004: ¥11,830,000 (Direct Cost: ¥9,100,000、Indirect Cost: ¥2,730,000)
Fiscal Year 2003: ¥14,430,000 (Direct Cost: ¥11,100,000、Indirect Cost: ¥3,330,000)
Fiscal Year 2002: ¥22,230,000 (Direct Cost: ¥17,100,000、Indirect Cost: ¥5,130,000)
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| Keywords | Smart chip / Microprobe electrode / Single crystalline silicon probe array / Vapor-liquid-solid growth / Analysis of neurons / Retina, neuroscience / MOSFET on Si(111) / Micro-Nano technology / 細胞電立計測 / 単結晶シリコンプローブレイ / 網膜,脳科学 |
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| Research Abstract |
Study of nervous system by highly complex structures is a key problem in modern neuroscience. Understanding of nervous systems involves analysis of the great number of neurons in the tissue. Here we proposed a new electrode device, which is a high-density penetrating silicon (Si) microprobe electrode array, each with diameter similar to neuron, by selective Si growth using catalytic-gold (Au) and disilane (Si_2H_6) gas source. Diameter, position, and length of the Si probes were controlled. The diameter and density were reduced by 1/10, respectively, compared with previous microelectrodes. Low conductance of the probes was realized, and the mechanical strength of the probe was enough to withstand the neural penetration. In addition, the Si microprobes were fabricated on integrated circuits (IC), improving the performance of the electrode device. We also show the first neural recording demonstrated with a retina of carp (Cyrpinus carpio). Consequently, the Si probes recorded neural signals in the retina. In neuroscience, the Si microprobe array chip becomes an effective technique to provide accurate information from the neurons and allow understanding the mechanism of nervous system.
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