Three-dimensional structure fabrication and its material characterization
| Project/Area Number |
14350024
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
表面界面物性
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| Research Institution | Laboratory of Advanced Science and Technology for Industry University of Hyogo (2004)
Himeji Institute of Technology (2002-2003) |
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Principal Investigator |
MATSUI Shinji University of Hyogo, Laboratory of Advanced Science and Technology for Industry, 高度産業科学技術研究所, 教授 (00312306)
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| Co-Investigator(Kenkyū-buntansha) |
KANDA Kazuhiro University of Hyogo, Laboratory of Advanced Science and Technology for Industry, 高度産業科学技術研究所, 助教授 (20201452)
HARUYAMA Yuuichi University of Hyogo, Laboratory of Advanced Science and Technology for Industry, 高度産業科学技術研究所, 助手 (10316036)
FUJITA Junichi NEC Fundamental Research Labs, 基礎研究所, 主任研究員
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| Project Period (FY) |
2002 – 2004
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| Project Status |
Completed (Fiscal Year 2004)
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| Budget Amount *help |
¥15,800,000 (Direct Cost: ¥15,800,000)
Fiscal Year 2004: ¥2,500,000 (Direct Cost: ¥2,500,000)
Fiscal Year 2003: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 2002: ¥8,500,000 (Direct Cost: ¥8,500,000)
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| Keywords | focused-ion-beam / beam-induced surface reaction / deposition / CVD / three-dimensional structure / nanostructure / FIB / 立体ナノ構造 / 三次元構造 / アクチュエータ |
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| Research Abstract |
Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga^+ focused-ion-beam chemical-vapor-deposition(FIB-CVD) using a phenanthrene (C_<14>H_<10>) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 μm external diameter and 12 μm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 μm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.
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Report
(4 results)
Research Products
(29 results)
