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Development of molecular design and fabrication technology for a new bio-compatible piezo-electric Perovskite crystal micro-actuator of Bio-MEMS medical device

Research Project

Project/Area Number 14350062
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionOsaka Institute of Technology

Principal Investigator

NAKAMACHI Eiji  OSAKA INSTITUTE OF TECHNOLOGY, Eng., Professor, 工学部, 教授 (60099893)

Co-Investigator(Kenkyū-buntansha) SHIBUTANI Yoji  Osaka Univ., Eng., Professor, 大学院・工学研究科, 教授 (70206150)
UEDA Sei  OSAKA INSTITUTE OF TECHNOLOGY, Eng., Professor, 工学部, 教授 (10176589)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2003: ¥1,800,000 (Direct Cost: ¥1,800,000)
Fiscal Year 2002: ¥13,500,000 (Direct Cost: ¥13,500,000)
Keywordsbio-compatible material / piezo-electri / bio-microactuator / Bio-MEMS / medical device / Perovskite crystal / Helicon wave sputtering / thin film / 生体適合性 / 3元素アクチュエータ素材 / 原子・結晶構造解析 / ヘリコン波スパッタ成膜 / ペロブスカイト結晶構造 / 均質化法有限要素解析 / 薄膜創製
Research Abstract

In this research, a advanced technology development was performed to design and fabricate a new bio-compatible piezo-electric material for a bio-microactuator of Bio-MEMS medical device. There were two main research subjects ; (1)A new three elements Perovskite crystal structure was designed by using ab-initio molecular mechanics analysis. (2)A thin film of bio-cornpatible piezo-electric material was fabricated by using Helicon wave plasma sputtering apparatus. A summery is shown as below.
1.Develonment of ab-initio molecular design of three elements bio-comnatible piezo-electric material.
A new Perovskite crystal type elastic piezo-electric material shows a high performance of dynamic response and power generation. This material was designed as follow : (1)Selection of bio-compatible 'element was carried out by using HSAB rule, which is the Technique of evaluating interaction properties with Guanine, which is one of important DNA, and Amino acid, which constitutes protein. (2)A geometri … More cal search and selection of three candidate atoms of Perovskite type crystal structure was carried out by using the interaction evaluation technique based on the tolerance factor method. (3)Ab-initio molecular structure analysis based on the density function analysis was used to confirm the stability and evaluate piezo-electric properties of a candidate crystal material MgSiO_3. The density function analysis and the electron density distribution method evaluate potential energies of a cubic crystal structure and a tetragonal Perovskite one, and further a possibility of spontaneous polarization state from cube structure to tetragonal one is investigated. It is confirmed that the candidate material MgSiO_3 becomes the most stable in the state of tetragonal spontaneous polarization, and it is concluded that MgSiO_3 shows a high-performance of piezoelectric characteristics.
2.Fabrication technology development of a bio-compatible piezo-electric material MgSiO_3 by using Helicon wave sputtering apparatus.
Helicon wave plasma sputtering (HWPS) apparatus was purchased by this research grant and used to fabricate thin film of MgSiO_3 Perovskite crystal type piezo-electric material. Many factors of sputtering conditions can be considered. To overcome this difficulty to find an optimum condition for a fabrication technology, a hybrid scheme was introduced, which is combined with the heuristic method based on the experience and the experimental design method based on a statistical analysis. At first, this designed HWPS apparatus shows a high performance of vacuum and temperature without a contaminant mixing, therefore we adopted 10^<-4>Pa pressure, RF electric power and a high temperature sputtering to fabricate a thin film with a aimed crystal structure "as deposited."
Four conditions, such as, (1)Ar:O_2 (flux ratio), (2)area fraction of Si, (3)substrate temperature and (4)pressure in the chamber of sputtering, were selected to carry out the experimental design method to find an optimum fabrication condition. We have employed three objective functions, such as the volume fraction of fabricated thin film material measured by ESCA, the Perovskite crystal structural evaluation measured by XRD analyses, and the piezo-electric property, d_<31>, evaluated by a cantilever type testing apparatus. A optimum fabrication condition was found by using interaction diagram, "the orthogonal diagram," through twenty seven trials. The best condition to fabricate a thin piezoelectric film of MgSiO_3. is indicated as follo9w ; (1)Ar:O_2=3:1 (0.6sccm:0.2sccm), (2)area fraction of Si=0.75, (3)Substrate temperature=700℃ and (4)Pressure=8.0x10^<-2>Pa. Less

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] 上辻靖智, 仲町英治, 他: "結晶均質化法に基づく圧電弾性有限要素解析手法の開発"日本機械学会論文集(A編). 69・679. 501-508 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Uetsuji, E.Nakamachi, et al.: "Multi-Scale finite element analysis of piezoelectric materials based on crystallographic homogenization method"Computational Fluid and Solid Mechanics. 709-712 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Tsuchiya, E.Nakamachi, et al.: "Development of RF magnetron sputtering method to fabricate PZT thin film actuator"PRECISION ENGINEERING. 27. 258-264 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 上辻靖智, 仲町英治, 他: "結晶均質化法に基づく圧電セラミックスの強誘電特性評価"材料. 52・9. 1116-1121 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 上辻靖智, 仲町英治, 他: "結晶均質化法に基づく微視的圧電弾性挙動の有限要素解析"日本機械学会論文集(A編). 69・684. 1284-1290 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 槌谷和義, 仲町英治, 他: "マイクロアクチュエータ用PZT薄膜創製技術の開発"日本機械学会論文集(A編). 69・687. 1601-1605 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazuyoshi Tsuchiya, Toshiaki Kitagawa, Eiji Nakamachi: "Development of bio-compatible PZT actuator for medical device"Proc.of BioMEMS & Biomedical Nanotech World 2002. Vol.II. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazuyoshi Tsuchiya, Toshiaki Kitagawa, Eiji Nakamachi: "Study of piezoelectricity characterization PZT actuators deposited by RF magnetron sputtering for MEMS"Proc.of Nano-and Microtechnology : Materials, Processes, Packing, and Systems, SPIE.. Vol.4936. 225-233 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Eiji Nakamachi, Chen Yiping, Hideo Morimoto, Kiminori Morita, Naofumi Yokoyama: "Textural desigin of high-strength and high-formability sheet metal by using crystalline plasticity finite element simulation"Proc.of Numisheet 2002(Korea). Vol.1. 611-616 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Chen Yiping, Xian Dong, Eiji Nakamachi, Zhong Li: "Dynamic explicit FEM simulation of earing using a texture adjusted strain-rate potential"Proc.of Numisheet 2002(Korea). Vol.1. 611-616 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Chen Yiping, Eiji Nakamachi, Naofumi Yokoyama, Hideo Morimoto: "Development of dual phase sheet metal design system by using elastic/crystallin viscoplastic finite element simulation"Advanced Plasticity 2002(Eds.Kiuchi, Nishimura, and Yanagimoto)(Kanagawa, Japan). Vol.2. 1585-1590 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kazuyoshi Tsuchiya, Naoyuki Nakanishi, Eiji Nakamachi: "Development of blood extraction system for health monitoring system"SPIE Int.Symposium Microelectronics, MEMS and Nanotechnology. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 上辻靖智, 仲町英治 他: "結晶均質化法に基づく圧電弾性有限要素解析手法の開発"日本機械学会論文集(A編). 69・679. 501-508 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Uetsuji, E.Nakamachi, et al.: "Multi-scale finite element analysis of piezoelectric materials based on crystallographic homojenization method"Computational Fluid and Solid Mechanics. 709-712 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Tsuchiya, E.Nakamachi, et al.: "Development of RF magnetron sputtering method to fabricate PZT thin film actuator"PRECISION ENGINEERING. 27. 258-264 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 上辻靖智, 仲町英治 他: "結晶均質化法に基づく圧電セラミックスの強誘電特性評価"材料. 52・9. 1116-1121 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 上辻靖智, 仲町英治 他: "結晶均質化法に基づく微視的圧電弾性挙動の有限素解析"日本機械学会論文集(A編). 69・684. 1284-1290 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 槌谷和義, 仲町英治 他: "マイクロアクチュエータ用PZT薄膜創製技術の開発"日本機械学会論文集(A編). 69・687. 1601-1605 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 北川俊明, 奥田雄二, 槌谷和義, 仲町英治: "Bio-MEMS用PZT薄膜創成技術の開発"日本機械学会第15回バイオエンジニアリング講演会講演論文集. 243-244 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 井本浩平, 上辻靖智, 槌谷和義, 仲町英治: "Bio-MEMs用生体適合圧電材料創成技術の開発"日本機械学会第15回バイオエンジニアリング講演会講演論文集. 245-246 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 仲町英治 他5名: "Bio-MEM用ヘルスモニタリングシステムの開発"日本機械学会第15回バイオエンジニアリング講演会講演論文集. 227-228 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 仲町英治 他4名: "MOSFETを用いたBio-MEM用酵素センサの開発"日本機械学会第15回バイオエンジニアリング講演会講演論文集. 251-252 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 酒井 孝, 星合壮大, 仲町英治: "チタン被覆したPZT圧電セラミックスの生体適合性の検討"軽金属. 52・12. 609-610 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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