| Budget Amount *help |
¥17,200,000 (Direct Cost: ¥17,200,000)
Fiscal Year 2003: ¥3,800,000 (Direct Cost: ¥3,800,000)
Fiscal Year 2002: ¥13,400,000 (Direct Cost: ¥13,400,000)
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| Research Abstract |
In this study, characteristic of micro ultrasonic machining is investigated for the purpose of realization steady machining of sub millimeter sized structure.
At first, test model of equipment is manufactured. To machine 3D structure, the equipment employs 3 axes controlled by NC. Quite thin tool is necessary to machine the sub-millimeter sized structure. However, thin tool is breakable. Biased wear of tool causes biased stress and biased stress break the thin tool easily. To prevent biased wear, the rotational axis of tool is installed to the equipment. In addition, the on machine truer is developed to reduce decentering of tool.
Experiment is carried out with developed micro ultrasonic machine. In the experiment, it is observed that cavitations generated by ultrasonic vibration reject abrasive grains from machining point. And chipping is formed on large area of machined point. These chippings are caused by the direct contact of workpiece and tool. To reduce the chipping, abrasive grains must be concentrated in machining point so that the direct contact of workpiece and tool is prevented. To concentrate abrasive grains, electrorheologial fluid is used. The visconsity of electrorheological fluid is raised by electric field, and the abrasive grains are fixed. In addition, abrasive grains are concentrated by the force, which is caused by the electric field gradient. A little chipping is observed on the surface of electrorheological fluid assisted ultrasonic machining.
In this way, the steady machining sub-millimeter sized structure is realized.
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