|Budget Amount *help
¥14,900,000 (Direct Cost: ¥14,900,000)
Fiscal Year 2004: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2003: ¥6,300,000 (Direct Cost: ¥6,300,000)
Fiscal Year 2002: ¥7,600,000 (Direct Cost: ¥7,600,000)
In laser beam machining of glass materials, there are many machining methods such as drilling, cutting, surface treatment, etc. The laser beam absorbed in the material causes a rapid temperature rise, and then the material melts and evaporates. Such laser beam machining belongs to a type of material removal processing. Therefore, the processed shape is concave. To make a convex shape on the surface by laser beam machining, all the circumferences must be removed. It is considered that by irradiating the glass with the laser beam of lower power than conventional laser beam machining, the glass should not evaporate, and that a local high-temperature part may appear. It is possible that the part produces a large difference of expansion coefficient around the transition temperature of glass. As the resuit, it is expected that the part may swell. Purpose of this study is to investigate a possibility of generating the convex shapes on glass surface by a YAG laser irradiation, and feasibilitie
s of its applications to various micromachining of glass materials. As the result, the following have been obtained, and the micromachining of glass surface by generating convex shapes could be accomplished.
1.Generating the convex shapes on glass surface by a YAG laser irradiation :
For a glass material, which is comparatively easy to absorb YAG laser, generating convex shapes on the glass surface was possible by YAG laser irradiation. It seems a cubical expansion of glass caused by quick heating and cooling around the transition temperature. By realizing the generating processing of the convex shape, which is different from conventional laser beam machining, various applications are expected as new micromachining technology.
2.Micromachining by the generation of convex shapes :
Micromachining using the generation of convex shapes by laser was proposed. As the result, marking and patterning of the glass surface became possible with many convex shapes and linear convex shapes. Also, it was possible to make three-dimensional microstructures by piling up the convex shapes.
3.Micro forming of the convex shapes :
Possibility of micro forming of the convex shapes by external forces was investigated. As the result, molding or filling of the expanding convex shape in to a die cavity was possible. And, the expanding convex shape could be deformed plastically by striking it with a hammer, and pressing with a silica glass plate. Less