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Length measurement method with resolution of picometer using high-finesse optical cavity and regular crystalline lattice

Research Project

Project/Area Number 14350070
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionNagaoka University of Technology

Principal Investigator

AKETAGAWA Masato (2003-2004)  Nagaoka University of Technology, Mechanical Department, Associate Prof., 工学部, 助教授 (10231854)

高田 孝次 (2002)  長岡技術科学大学, 工学部, 教授 (80126474)

Co-Investigator(Kenkyū-buntansha) YANAGI Kazuhisa  Nagaoka University of Technology, Medical Department, Prof., 工学部, 教授 (80108216)
明田川 正人  長岡技術科学大学, 工学部, 助教授 (10231854)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥15,300,000 (Direct Cost: ¥15,300,000)
Fiscal Year 2004: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2003: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2002: ¥14,000,000 (Direct Cost: ¥14,000,000)
KeywordsOptical cavity / Resonance / Picometer / Traceability / Scanning tunneling Microscope (STM) / Atomic Force Microscope (AFM) / Regular crystalline lattice / 原子間力顕微鏡(AFM)
Research Abstract

A purpose of the research project is to develop a length measurement method with resolution of picometer, which is directly traceable to the meter definition, in order to promote the Nanotechnology. A change of an optical cavity can be measured with the change of the resonance frequency of the cavity using the beat frequency between the resonance laser and the frequency stabilized laser. And the change of the cavity can be also calibrated with a regular crystalline lattice. The following results are obtained.
(1)Prototype of the optical cavity and the measurement system were developed. The one end mirror of the optical cavity is supported by the high rigid flexure stage, whose driving tool is a high power PZT actuator. Two mirrors, whose finesse are 400 and 1000, respectively, are used for the optical cavity. Resonance signals are detected with a lock-in detection method. The lock-in detection circuit consists of a microwave mixer and a microwave low-pass filter. A circuit and a saftware to detect and record the beat frequency were also developed.
(2)Resonance feedback experiment was performed using the above experimental system. A frequency of the tunable laser diode can be tuned to the resonance frequency of the optical cavity using the above system. When the position of the one end optical cavity is changed, the displacement of the mirror can be determined from the shift of the resonance frequency. The results were compared with the laser interferometer. The measurement resolution of 0.1 nm or less can be achieved from the results.
(3)The optical cavity whose finesse of 5000 or more was designated. With the optical cavity, we expect the resolution of 30 pm for the displacement measurement using the above system.

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (8 results)

All 2004 2002 Other

All Journal Article (6 results) Publications (2 results)

  • [Journal Article] 周波数可変レーザと結晶格子を利用したピコメートル測長法の開発2004

    • Author(s)
      石下雅史, 松浦文生, バンジョンサクシリナッタポン, 明田川正人
    • Journal Title

      2004年度精密工学会秋季大会学術講演会講演論文集

    • NAID

      130004655858

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Length Measurement with resolution of picometer using tunable laser and regular crystalline lattice2004

    • Author(s)
      Masashi ISHIGE, Fumio MATSURA, Masato AKETAGAWA et al.
    • Journal Title

      Proceedings of Annual Autumn Meeting of Japan Society for Precision Engineering

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 周波数可変レーザと結晶格子を利用したピコメートル側長法の開発2004

    • Author(s)
      石下雅史, 松浦文生, バンジョンサクシリナッタポン, 明田川正人
    • Journal Title

      2004年度精密工学会秋季大会学術講演会講演論文集

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 高フィネス光共振器と結晶格子によるピコメートル分解能測長法の開発(第1報:計測原理と装置設計)2002

    • Author(s)
      明田川正人, 高田孝次
    • Journal Title

      2002年度精密工学会秋季大会学術講演会講演論文集

      Pages: 597-597

    • NAID

      80015811060

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Length measurement method with resolution of picometer using high-finesse optical cavity and regular cystalline lattice2002

    • Author(s)
      Masato AKETAGAWA, Koji TAKADA
    • Journal Title

      Proceedings of Annual Autumn Meeting of Japan Society for Precision Engineering

      Pages: 597-597

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 高フィネス光共振器と結晶格子によるピコメートル分解能側長法の開発(第1報:計測原理と装置設計)2002

    • Author(s)
      明田川正人, 高田孝次
    • Journal Title

      2002年度精密工学会秋季大会学術講演会講演論文集

      Pages: 597-597

    • Related Report
      2004 Annual Research Report
  • [Publications] 明田川正人, 高田孝次: "高フィネス光共振器と結晶格子によるピコメートル分解能測長法の開発(第1報:計測原理と装置設計)"2002年度精密工学会秋季大会学術講演会講演論文集. 597 (2002)

    • Related Report
      2003 Annual Research Report
  • [Publications] 明田川正人, 高田孝次: "高フィネス光共振器と結晶格子によるピコメートル分解能測長法の開発(第1報:計測原理と装置設計)"2002年度精密工学会秋季大会学術講演会講演論文集. 597 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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