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Study on Nano-scale Measurement Technique of Thermophysical Properties Using Near-field Optics

Research Project

Project/Area Number 14350112
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Thermal engineering
Research InstitutionKeio University

Principal Investigator

NAGASAKA Yuji  Keio Univ., Dept. of Science and Technology, Professor, 理工学部, 教授 (40129573)

Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥17,100,000 (Direct Cost: ¥17,100,000)
Fiscal Year 2003: ¥6,100,000 (Direct Cost: ¥6,100,000)
Fiscal Year 2002: ¥11,000,000 (Direct Cost: ¥11,000,000)
KeywordsThermal properties / Optical measurement technique / Nanotechnology / Thermal conductivity / Thermal diffusivity / Near-field optics
Research Abstract

In order to measure nano-scale thermal properties (i.e. thermal conductivity and thermal diffusivity) of nano-materials, Near-field Optics Thermal Nanoscopy, which has a high spatial resolution beyond a diffraction limit of light, has been developed. Research results are summarized as follows;
1, Adopting the PZT scanning-stage, dithering system and near-field optical system, near-field light can be stably excited in a near-field regime of sample surface.
2, To check the validity of present technique, diffracted grating and 150 nm-thick Al thin film were demonstrated, and thermoreflectance signal was successfully detected by using present apparatus. The spatial resolution is estimated to be about 100 nm.
3, Probe oscillation method, which can eliminate the error due to a reflection from Au coating of near-field optical fiber, was originated to detect the weak signal of reflectivity change in near-field light.
4, The near-field lights that contain the information of thermal properties of 125 nm-thick Al thin film and Single-walled Carbon Nanotube were successfully detected by using probe oscillation method with 500 nm apertured near-field optical fiber. Results of phase-lag (heating laser vs. temperature change) indicate the adequacy of present study to measure thermal conductivity and thermal diffusivity of nano materials.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] 田口 良広: "近接場光を用いたナノスケール熱物性計測法の開発(第3報 単層カーボンナノチューブの予備的測定)"第41回日本伝熱シンポジウム講演論文集. (発表予定). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics"JSME Int.J.. B47(掲載予定). (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics"Int.Symp.Micro-Mechanical Eng.2003. 1. 455-460 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 田口 良広: "近接場光を用いたナノスケール熱物性計測法の開発(第1報 測定原理および装置の試作)"第40回日本伝熱シンポジウム講演論文集. 40. 361-362 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 堀口 幸裕: "近接場光を用いたナノスケール熱物性計測法の開発(第2報 高分解能化の検討)"熱光学コンファレンス2003講演論文集. 1. 307-308 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 田口 良広: "四則演算から生まれるマイクロ・ナノスケール熱物性値測定法"伝熱. 42. 5-8 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 長坂 雄次: "ナノ・マイクロスケール熱物性研究の展望"第23回日本熱物性シンポジウム講演論文集. 23. 268-270 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi, Y.Nagasaka: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics."Japan Society of Mechanical Engineers International Journal (to be published). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi, Y.Horiguchi, M.Kobayashi, T.Saiki, Y.Nagasaka: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics."The International Symposium on Micro-Mechanical Engineering 2003, (Tsukuba, Japan). (to be presented). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi, M.Kobayashi, Y.Horiguchi, T.Saiki, Y.Nagasaka: "Development of Nanoscale Thermal Properties Measurement Technique Using Near-field Optics (3^<rd> report, A Preliminary Measurement using Single-Walled Carbon Nanotube)."Proceeding of 41^<st> Japan Heat Transfer Symposium, (Toyama, Japan). (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Horiguchi, Y.Taguchi, M.Kobayashi, T.Saiki, Y.Nagasaka: "Development of Nanoscale Thermal Properties Measurement Technique by Using the Near-field Optics (2^<nd> report, Improvement of Spatial Resolution)."Proceeding of JSME Thermal Engineering Conference 2003, (Kanazawa, Japan). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi, Y.Nagasaka: "Measurement Technique of Micro/Nano-scale Thermophysical Properties Originated from Simple Arithmetic."Journal of HTSJ. 42-177 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Taguchi, Y.Horiguchi, T.Saiki, Y.Nagasaka: "Development of Nanoscale Thermal Properties Measurement Technique by Using the Near-field Optics (1^<st> report, Basic Theory and Experimental Apparatus)."Proceeding of 40^<th> Japan Heat Transfer Symposium, (Hiroshima, Japan). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Nagasaka: "Recent Development of Thermophysical Properties Research in Nano/Microscale."Proceeding of 23^<rd> Japan Symposium on Thermophysical Properties, (Tokyo, Japan). (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 田口 良広: "近接場光を用いたナノスケール熱物性計測法の開発(第3報 単層カーボンナノチューブの予備的測定)"第41回日本伝熱シンポジウム講演論文集. (発表予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Taguchi: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics"JSME Int.J.. (掲載予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Taguchi: "Development of Nanoscale Thermal Properties Measurement Technique by Using Near-field Optics"Int.Symp.Micro-Mechanical Eng.2003. 1. 455-460 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田口 良広: "近接場光を用いたナノスケール熱物性計測法の開発(第1報 測定原理および装置の試作)"第40回日本伝熱シンポジウム講演論文集. 40. 361-362 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 堀口 幸裕: "近接場光を用いたナノスケール熱物性計測法の開発(第2報 高分解能化の検討)"熱工学コンファレンス2003講演論文集. 1. 307-308 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 田口 良広: "四則演算から生まれるマイクロ・ナノスケール熱物性値測定法"伝熱. 42. 5-8 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 長坂 雄次: "ナノ・マイクロスケール熱物性研究の展開"第23回日本熱物性シンポジウム講演論文集. 23. 268-270 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 田口 良広: "近接場光を用いたナノスケール熱物性計測法の開発(第1報測定原理および装置の試作)"第40回日本伝熱シンポジウム講演論文集. 40(発表予定). (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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