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Development of Indoor Environmental Improvement System by Using Nano Structural High Sensitivity Thin Film Gas Sensor

Research Project

Project/Area Number 14350153
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 電力工学・電気機器工学
Research InstitutionSASEBO NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

SUDA Yoshiaki  SASEBO NATIONAL COLLEGE OF TECHNOLOGY, PROFESSOR, 電気電子工学科, 教授 (20124141)

Co-Investigator(Kenkyū-buntansha) WADA Kenji  SASEBO NATIONAL COLLEGE OF TECHNOLOGY, PROFESSOR, 物質工学科, 教授 (30044457)
KAWASAKI Hiroharu  SASEBO NATIONAL COLLEGE OF TECHNOLOGY, ASSOCIATE PROFESSOR, 電気電子工学科, 助教授 (10253494)
OHSHIMA Tamiko  SASEBO NATIONAL COLLEGE OF TECHNOLOGY, LECTURER, 電気電子工学科, 講師 (00370049)
吉田 英樹  長崎県窯業技術センター, 研究員
Project Period (FY) 2002 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥7,400,000 (Direct Cost: ¥7,400,000)
Fiscal Year 2005: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2004: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2003: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2002: ¥4,800,000 (Direct Cost: ¥4,800,000)
KeywordsNano structure / Thin film gas sensor / Environmental improvement / SnO_2 / WO_3 / PLD method / Ozonizer / Dielectric thin film / TiO_2
Research Abstract

The purpose of this research is to combine the ozone deodorizations with the high sensitive and selective gas sensor and develop the indoor environmental improvement system.
In this study, we prepared SnO_2, WO_3, ZnO, TiO_2 fims by pulsed Nd:YAG laser deposition (PLD) method. The surface morphology, crystalline structure, crystallographic orientation, composition ratio and bonding state of the films were analyzed by AFM, GXRD, FT-IR, XPS. Exprimental results suggest that the stoichimetric and crystalline SnO_2, WO_3, ZnO, TiO_2 flms can be prepared. We have succesfully deposited H_2 sensitive SnO_2-Pd thin films and NOx sensitive WO_3-Pd thin films using the new PLD In method combined with d.c. sputtering. Various dielectric thin films were prepared on the electrode surface of silent electrical discharge type ozonizer by sputtering method to get the highly effective ozonizer. The relation between the amount of the ozone generation and the discharge voltage and the dielectric thin film was clarified, and we succeeded in the development of highly effective ozonizer.
In addition, the indoor environmental improvement system that combined a high sensitivity gas sensor, nitrogen dope TiO_2 photocatalyst, and highly effective ozonizer was developed.
As mentioned above, the purpose of this research was achieved enough. In the future, an extremely new result is expected to be obtained by the development of the environmental improvement thin film material process using the pulsed laser and the development of the environmental improvement system using the ozonizer. It is very important to research the problem of this field aggressively from academic and an industrial viewpoint.
A part of this research is published at a domestic and foreign science magazine and the academic society.The remainder of this research is scheduled to be made public one by one by the end of this year.

Report

(5 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (57 results)

All 2006 2005 2004 2003 2002 Other

All Journal Article (44 results) Patent(Industrial Property Rights) (1 results) Publications (12 results)

  • [Journal Article] Hydroxyapatite coatings on titanium dioxide thin films prepared by pulsed laser deposition method2006

    • Author(s)
      Y.Suda, J.Kawasaki, T.Ohshima, S.Nakashima, S.Kawazoe, T.Toma
    • Journal Title

      Thin Solid Films Vol.506-507C

      Pages: 115-119

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Research on Waste Water Purification by Ozone Treatment and Pulsed Discharge Treatment2006

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ohshima
    • Journal Title

      Journal of Advanced Oxidation Technologies (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fast Color CCD Imaging of Nd : YAG Laser Induced Plasma Plumes Using Titanium Target2006

    • Author(s)
      H.Kawasaki, T.Ohshima, Y.Suda
    • Journal Title

      IEEE Trans. Plasma Science (in press)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Hydroxyapatite coatings on titanium dioxide thin films prepared by pulsed laser deposition method2006

    • Author(s)
      Y.Suda
    • Journal Title

      Thin Solid Films Vol.506-507C

      Pages: 115-119

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Hydroxyapatite coatings on titanium dioxide thin films prepared by pulsed laser deposition method2006

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ohshima, S.Nakashima, S.Kawazoe, T.Toma
    • Journal Title

      Thin Solid Films Vol.506-507C

      Pages: 115-119

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen concentration ratio in nitrogen/oxygen gas mixture2005

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ueda, T.Ohshima
    • Journal Title

      Thin Solid Films Vol.475

      Pages: 337-341

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] パルスレーザデポジション法による有機発光薄膜の作製2005

    • Author(s)
      大島多美子, 川崎仁晴, 須田義昭, 山口淑久, 池上知顯, 蛯原健治
    • Journal Title

      電気学会論文誌 Vol.125A

      Pages: 373-378

    • NAID

      10015576933

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of Carbon Nano-Materials Using Arc Discharge in Liquid2005

    • Author(s)
      Y.Suda, J.Kawasaki, T.Ohshima, S.Nakashima, S.Kawazoe, T.Toma
    • Journal Title

      Mater. Res. Soc. Symp. Proc Vol.829

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen concentration ratio in nitrogen/oxygen gas mixture2005

    • Author(s)
      Y.Suda
    • Journal Title

      Thin Solid Films Vol.475

      Pages: 337-341

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of Organic Light-Emitting Thin Films by Pulsed Laser Deposition2005

    • Author(s)
      T.Ohshima
    • Journal Title

      IEEJ Trans. Vol.125A

      Pages: 373-378

    • NAID

      10015576933

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of Carbon Nano-Materials Using Arc Discharge in Liquid2005

    • Author(s)
      Y.Suda
    • Journal Title

      Mater.Res.Soc.Symp.Proc. Vol.829

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] パルスレーザデポジション法による有機発光薄膜の作製2005

    • Author(s)
      大島多美子, 川崎仁晴, 須田義昭, 山口淑久, 池上知顯, 蛯原健治
    • Journal Title

      電気学会論文誌 Vol.125-A

      Pages: 373-378

    • NAID

      10015576933

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen" concentration ratio in nitrogen/oxygen gas mixture2005

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ueda, T.Ohshima
    • Journal Title

      Thin Solid Films Vol.475

      Pages: 337-341

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Preparation of Carbon Nano-Materials Using Arc Discharge in Liquid2005

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ohshima, S.Nakashima, S.Kawazoe, T.Toma
    • Journal Title

      Mater.Res, Soc. Vol.829

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Preparation of nitrogen-doped titanium oxide thin film using a PLD method as parameters of target material and nitrogen concentration ratio in nitrogen/oxygen gas mixture2005

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ueda, Tamiko Ohshima
    • Journal Title

      Thin Solid Films Vol.475

      Pages: 337-341

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Preparation of silicon carbide nano-particles using a pulsed laser deposition method2005

    • Author(s)
      H.Kawasaki, Y.Suda, T.Ueda, S.Nakashima
    • Journal Title

      Mater.Res.Soc. Vol.818

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Preparation of Carbon Nano-Materials Using Arc Discharge in Liquid2005

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ohshima, S.Nakashima, S.Kawazoe, T.Toma
    • Journal Title

      Mater.Res.Soc. Vol.829

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 放電・プラズマを用いた電子工学公開講座I2004

    • Author(s)
      川崎仁晴, 茂木貴之, 熊井悠城, 須田義昭
    • Journal Title

      佐世保工業高等専門学校研究報告 第40号

      Pages: 13-18

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of High Quality Nitrogen Doped TiO_2 Thin Films as a Photocatalyst Using a Pulsed Laser Deposition Method2004

    • Author(s)
      Y.Suda, H.Kawasaki, T.Ueda, T.Ohshima
    • Journal Title

      Thin Solid Films Vol.452-454

      Pages: 162-166

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Properties of metal doped tungsten oxide thin films for NOx gas sensors grown by PLD method combined with sputtering process2004

    • Author(s)
      H.Kawasaki, T.Ueda, Y.Suda, T.Ohoshima
    • Journal Title

      Sensor and Actuators B : Chemical Vo.100

      Pages: 266-269

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of silicon carbide nano-particles using a pulsed laser deposition method2004

    • Author(s)
      H.Kawasaki, Y.Suda, T.Ohshima, T.Ueda, S.Nakashima
    • Journal Title

      Mater. Res. Soc. Proc. Vol.818

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electronic engineering open lecture (I) using electrical discharge and plasma2004

    • Author(s)
      H.Kawasaki
    • Journal Title

      Research Reports of Sasebo National College of Technology Vol.40

      Pages: 13-18

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of High Quality Nitrogen Doped TiO_2 Thin Film as a Photocatalyst Using a Pulsed Laser Deposition Method2004

    • Author(s)
      Y.Suda
    • Journal Title

      Thin Solid Films Vol.453-454

      Pages: 162-166

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Properties of metal doped tungsten oxide thin films for NOx gas sensors grown by PLD method combined with sputtering process2004

    • Author(s)
      H.Kawasaki
    • Journal Title

      Sensors and Actuators B : Chemical Vol.100

      Pages: 266-269

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of silicon carbide nano-particles using a pulsed laser deposition method2004

    • Author(s)
      H.Kawasaki
    • Journal Title

      Mater.Res.Soc.Symp.Proc. Vol.818

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of high quality nitrogen doped TiO_2 thin film as a photocatalyst using a pulsed laser deposition method2004

    • Author(s)
      Y.Suda.H.Kawasaki, T.Ueda, T.Ohshima
    • Journal Title

      Thin Solid Films Vol.453-454

      Pages: 162-166

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 放電・プラズマを用いた電子工学公開 講座I2004

    • Author(s)
      川崎 仁晴, 茂木貴之, 熊井悠城, 須田義昭
    • Journal Title

      佐世保工業高等専門学校研究報告 Vol.40

      Pages: 13-18

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Properties of metal doped tungsten oxide thin films for NOx gas sensors grown by PLD method combined with sputtering process2004

    • Author(s)
      H.Kawasaki, T.Ueda, Y.Suda, T.Ohshima
    • Journal Title

      Sensors and Actuators B : Chemical Vol.100

      Pages: 266-269

    • Related Report
      2004 Annual Research Report
  • [Journal Article] PLD法による酸化スズ(SnO_2)薄膜ガスセンサの作製2003

    • Author(s)
      須田義昭, 川崎仁晴, 岩辻圭太郎, 大島多美子
    • Journal Title

      電気学会論文誌 Vol.123-C

      Pages: 222-227

    • NAID

      130000089370

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Properties of Palladium Doped Tin Oxide Thin Films for Gas Sensor Grown by PLD Method Combined with Sputtering Process2003

    • Author(s)
      Y.Suda, H.Kawasaki, J.Namaba, K.Iwatsuji, K.Doi, K.Wada
    • Journal Title

      Surface and Coatings Technology Vol174-175

      Pages: 1293-1296

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Characteristics of TiO_2 Thin Films as a Photocatalyst Using a Pulsed Laser Deposition Method2003

    • Author(s)
      Y.Suda, H.Kawasaki, K.Iwatsuji, T.Ueda
    • Journal Title

      Journal of the Surface Finishing Society Vol.54

      Pages: 754-757

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of tin oxide (SnO_2) thin film gas sensor by PLD method2003

    • Author(s)
      Y.Suda
    • Journal Title

      LEEJ Trans. Vol.123C

      Pages: 222-227

    • NAID

      130000089370

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Properties of Palladium Doped Tin Oxide Thin Films for Gas Sensors Grown by PLD Method Combined with Sputtering Process2003

    • Author(s)
      Y.Suda
    • Journal Title

      Surface and Coatings Technology Vol.175-176

      Pages: 1293-1296

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Characteristics of TiO_2 Thin Films as a Photocatalyst Using a Pulsed Laser Deposition Method2003

    • Author(s)
      Y.Suda
    • Journal Title

      Journal of the Surface Finishing Society Vol.54

      Pages: 754-757

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of New Preparation System for Highly Sensitive Flammable Gas Sensor2002

    • Author(s)
      H.Kawasaki, J.Namba, K.Iwatusji, Y.Suda
    • Journal Title

      Jpn. J. Appl. Phys. Vol.41

      Pages: 5390-5391

    • NAID

      110006341742

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of Crystalline TiC Thin Films by pulsed Nd : YAG Laser Deposition Using Ti target in Methane Gas2002

    • Author(s)
      Y.Suda, H.Kawasaki, K.Doi, J.Namba, T.Ohshima
    • Journal Title

      Materials Characterization Vol.48/2-3

      Pages: 221-228

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electro chromic WO_<3x> and Colossal Magnetroresistive (La, Sr) MnO_3 Perovskite Oxide Thin Films by Pulsed Laser Deposition2002

    • Author(s)
      F Mitsugi, E Hiraiwa, T Ikegami, K. Ebihara, Y. Suda
    • Journal Title

      Mat. Res. Soc. Symp. Proc. Vol.728

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] NOx gas sensing properties of tungsten oxide thin films synthesized by pulsed laser deposition method2002

    • Author(s)
      H.Kawasaki, J.Namba, K Isatsuji, Y.Suda, K.Wada, K.Ebihara, T.Ohshima
    • Journal Title

      Applied Surface Science Vol.197-198

      Pages: 547-551

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Development of New Preparation System for Highly Sensitive Flammable Gas Sensor2002

    • Author(s)
      H.Kawasaki
    • Journal Title

      Jpn.J.Appl.Phys. Vol.41

      Pages: 5390-5391

    • NAID

      110006341742

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Preparation of Crystalline TiC Thin Films by pulsed Nd : YAG Laser Deposition Using Ti target in Methane Gas2002

    • Author(s)
      Y.Suda
    • Journal Title

      Materials Characterization Vol.48/2-3

      Pages: 221-228

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Electrochromic WO_3, and Colossal Magnetroresistive (La, Sr)MnO_3 Perovskite Oxide Thin Films by Pulsed Laser Deposition2002

    • Author(s)
      F.Mitsugi
    • Journal Title

      Mat.Res.Soc.Symp.Proc. Vol.728

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] NOx gas sensing properties of tungsten oxide thin films synthesized by pulsed laser deposition method2002

    • Author(s)
      H.Kawasaki
    • Journal Title

      Applied Surface Science Vol.197-198

      Pages: 547-551

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Research on Waste Water Purification by Ozone Treatment and Pulsed Discharge Treatment

    • Author(s)
      Y.Suda
    • Journal Title

      Journal of Advanced Oxidation Technologies (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fast Color CCD Imaging of Nd : YAG Laser Induced Plasma Plumes Using Titanium Target

    • Author(s)
      H.Kawasaki
    • Journal Title

      IEEE Trans.Plasma Science (in press)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 酸化チタンの形成方法及び光触媒2003

    • Inventor(s)
      川崎仁晴, 須田義昭
    • Industrial Property Rights Holder
      佐世保工業高等専門学校
    • Filing Date
      2003-02-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Publications] 川崎仁晴: "アブレーションプラズマプルーム中に発生する微粒子の挙動"佐世保工業高等専門学校研究報告. 39巻. 49-54 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 須田義昭: "PLD法による酸化スズ(SnO_2)薄膜ガスセンサの作製"電気学会論文誌C. 123巻,2号. 222-227 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 須田義昭: "Properties of palladium doped tin oxide thin films for gas sensors grown by PLD method conbined with sputtering process"Surface and Coatings Technology. Vol.174-175. 1293-1296 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 川崎仁晴: "Characteristics of TiO_2 thin films as a photocatalyst prepared using a pulsed laser deposition method"Journal of the Surface Finishing Society. Vol.54. 754-757 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 須田義昭: "Preparation of high quality nitrogen doped TiO_2 thin film as a photocatalyst using a pulsed laser deposition method"Thin Solid Films. (in press).

    • Related Report
      2003 Annual Research Report
  • [Publications] 川崎仁晴: "Properties of metal doped tungsten oxide thin films for No_x gas sensors grown by PLD method combined with sputtering proces"Sensor and Actuators B. (in press).

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Kawasaki: "Development of New Preparation System for Highly Sensitive Flammable Gas Sensor"Jpn. J. Appl. Phys.. 41巻,8号. 5390-5391 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Suda: "Preparation of Crystalline TiC Thin Films by Pulsed Nd : YAG Laser Deposition Using Ti Target in Methane Gas"Materials Characterization. 48巻,2-3号. 221-228 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] F.Mitsugi: "Electrochromic WO_<3-*> and Colossal Magnetroresistive(La, Sr)MnO_3 Perovskite Oxide Thin Films by Pulsed Laser Deposition"Mat. Res. Soc. Symp. Proc.. 728巻. S3.3.1-S3.3.6 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Kawasaki: "NOx gas sensing properties of tungsten oxide thin films synthesized by pulsed laser deposition method"Applied Surface Scicnce. 197巻-198巻. 547-551 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 川崎 仁晴: "アブレーションプラズマプルーム中に発生する微粒子の挙動"佐世保工業高等専門学校研究報告. 39巻. 49-54 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 須田 義昭: "PLD法による酸化スズ(SnO_2)薄膜ガスセンサの作製"電気学会論文誌. 113巻C号. 222-227 (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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