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Realization of dislocation-free epitaxy using nanochannel epitaxy

Research Project

Project/Area Number 14350172
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionMeijo University

Principal Investigator

NARITSUKA Shigeya  Meijo University, Science & Engineering, Professor, 理工学部, 教授 (80282680)

Co-Investigator(Kenkyū-buntansha) ANDO Yoshinori  Meijo University, Science & Engineering, Professor, 理工学部, 教授 (30076591)
MARUYAMA Takahiro  Meijo University, Science & Engineering, Associate Professor, 理工学部, 助教授 (30282338)
Project Period (FY) 2002 – 2005
Project Status Completed (Fiscal Year 2005)
Budget Amount *help
¥15,000,000 (Direct Cost: ¥15,000,000)
Fiscal Year 2005: ¥1,100,000 (Direct Cost: ¥1,100,000)
Fiscal Year 2004: ¥1,600,000 (Direct Cost: ¥1,600,000)
Fiscal Year 2003: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2002: ¥11,000,000 (Direct Cost: ¥11,000,000)
KeywordsNanochannel epitaxy / Scanning tunnel microscopy / STM lithography / Si thermal oxide / GaN dot / Droplet epitaxy / Si substrate / Molecular beam epitaxy / 走査トンネル顕微鏡 / STMリソグラフィー / 面間拡散 / ナノチャンネルエピタキシー(NCE) / 走査型トンネル顕微鏡(STM) / STMソグラフィー / ビーム誘起横方向成長(BILE) / GaAs / 分子線結晶成長(MBE) / GaAs基板 / GaNマスク / 自然酸化膜 / 残留応力 / 有限要素法
Research Abstract

In highly mismatched heteroepitaxy, dislocation-free layer can be grown in case the layer is laterally grown from an extremely narrow line opening cut in a selective growth mask. It is because the residual stress should be reduced below the threshold for the generation of dislocations with the help of the 3-dimentional structure shaped by the narrow opening. The new method of lateral growth with the extremely narrow channel was named as "nanochannel epitaxy (NCE)" and set as the main target of this research project.
The following items should be addressed to fabricate a narrow opening with nanometer size and to perform NCE :
1)Development of nano-lithographic technique using scanning tunnel microscopy (STM),
2)Development of lateral growth technique performed by molecular beam epitaxy (MBE).
The following themes were also studied in the research project,
3)Droplet epitaxy of nano structures, e.g.quantum dots,
4)Fabrication of vertical-cavity surface-emitting laser (VCSEL) using molecular bea … More m epitaxy in situ reflectance monitor.
Consequently, the following results were obtained :
1)STM lithography was realized on an oxide on (001)GaAs substrates, on an native and thermal oxides on (111)Si substrates. The lithography conditions were optimized and the mechanism for nano-lithography were studied.
2)Beam induced lateral epitaxy (BILE), which enables a lateral growth using MBE, was studied. BILE of GaAs layer was performed on (111)GaAs substrates. BILE was also applied on the lateral growth of GaAs layer on (111)Si substrates and, consequently, dislocation-free areas of GaAs were successfully grown on the substrates.
3)Importance of GaN-related materials and the fine matching between droplet epitaxy and NCE led us to the study on droplet epitaxy of GaN dots. As a result, high density (10^<11> cm^<-2>) and small sized (10nm in diameter) GaN dots were successfully fabricated and the effect of annealing on the degree of the nitridation was also ascertained.
4)A VCSEL was fabricated using an in situ reflectance monitor by MBE. Both the center wavelength of the stop band of the distributed Bragg reflector (DBR) and the resonant wavelength of the optical cavity were successfully controlled using the monitor. The desirable laser performance of the VCSEL fabricated from the wafer indicates marked increases in the controllability and reproducibility of growth with the aid of the in situ reflectance monitor. Less

Report

(5 results)
  • 2005 Annual Research Report   Final Research Report Summary
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (45 results)

All 2006 2005 2004 2003 Other

All Journal Article (35 results) Publications (10 results)

  • [Journal Article] Precise control of growth of DBR by MBE using in-sifu reflectance monitoring system2006

    • Author(s)
      M.Mizutani, F.Teramae, O.Kobayashi, S.Naritsuka, T.Maruyama
    • Journal Title

      phys.stat.sol.? 3

      Pages: 659-662

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precise control of Vertical-Cavity Surface-Emitting Laser Structural Growth Using Molecular Beam Epitaxy In Situ Reflectance Monitor2006

    • Author(s)
      M.Mizutani, F.Teramae, K.Takeuchi, T.Murase, S.Narituka, T.Maruyama
    • Journal Title

      J. J.A,P 45 4B

      Pages: 3552-3555

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of GaN dot structures on Si substrates by droplet epitaxy2006

    • Author(s)
      T.Kondo, K.Saito, Y.Yamamoto, T.Maruyama, S.Naritsuka
    • Journal Title

      phys.stat.sol.(a) 203 7

      Pages: 1700-1703

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] "Precise reflectance monitoring system" control of growth of DBR by MBE using in-situ2006

    • Author(s)
      M.Mizutani, F.Teramae, O.Kobayashi, S.Naritsuka, T.Maruyama
    • Journal Title

      phys.stat.sol.(c) 3

      Pages: 659-662

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precise control of Vertical-Cavity Surface-Emitting Laser Structural Growth Using Molecular Beam Epitaxy In Situ Reflectance Monitor2006

    • Author(s)
      M.Mizutani, F.Teramae, K.Takeuchi, T.Murase, S.Naritsuka, T.Maruyama
    • Journal Title

      J.J.A.P 45 4B

      Pages: 3552-3555

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Fabrication of GaN dot structures on Si substrates by droplet epitaxy2006

    • Author(s)
      T.Kondo, K.Saito, Y.Yamamoto, T.Maruyama, S.Naritsuka
    • Journal Title

      phys.stat.sol.(a)

      Pages: 1700-1703

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Precise Control of Growth of VCSEL Structure by using MBE in-situ Reflectance Monitor2006

    • Author(s)
      M.Mizutani, F.Teramae, K.Takeuchi, T.Murase, S.Naritsuka, T.Maruyama
    • Journal Title

      Jpn.J.Appl.Phys. 印刷中

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication of GaN dot structures on Si substrate by droplet epitaxy2006

    • Author(s)
      T.Kondo, K.Saitoh, Y.Yamamoto, S.Naritsuka, T.Maruyama
    • Journal Title

      J.Cryst.Growth 印刷中

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Precise Control of Growth of DBR by MBE using in-situ reflectance monitoring system2006

    • Author(s)
      M.Mizutani, F.Teramae, O.Kobayashi, S.Naritsuka, T.Maruyama
    • Journal Title

      Phys.Stat.Sol 3

      Pages: 659-662

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Multinuclear layer-by-layer growth on Ge(111)by LPE2005

    • Author(s)
      T.Maruyama, K.Matsuda, N.Naritsuka
    • Journal Title

      J.Crystal Growth 275

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Defect formation mechanism in beam-induced lateral epitaxy on (111)B GaAs substrate2005

    • Author(s)
      K.Saitoh, T.Suzuki, T.Maruyama, S.Naritsuka
    • Journal Title

      J.Crystal Growth 277

      Pages: 51-56

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] New Technique for Suppressing Oxygen Impurity in AlGaAs Layer during Molecular Beam Epitaxy by Surface Segregation2005

    • Author(s)
      S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Nishinaga
    • Journal Title

      Jpn.J.Appl.Phys 44

      Pages: 1669-1672

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Lithography of nanometer-size pattern in surface oxide of GaAs using ultrahigh-Vacuum scanning tunnel microscope2005

    • Author(s)
      H.Uemura, Y.Ito, Y.Kawamura, T.Maruyama, S.Naritsuka
    • Journal Title

      Journal of Research Insitute of Meijo University 4

      Pages: 133-139

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Multinuclear layer-by-layer growth on Ge(111) by LPE2005

    • Author(s)
      T.Maruyama, K.Matsuda, N.Naritsuka
    • Journal Title

      J.Crystal Growth 275

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] New Technique for Suppressing Oxygen Impurity in AlGaAs Layer during Molecular Beam Epitaxy by Surface Segregation2005

    • Author(s)
      S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Nishinaga
    • Journal Title

      Jpn.J.Appl.Phys. 44

      Pages: 1669-1672

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Lithography of nanometer-size pattern in surface oxide of GaAs using ultrahigh-vacuum scanning tunnel microscope2005

    • Author(s)
      H.Uemura, Y.Ito, Y.Kawamura, T.Maruyama, S.Naritsuka
    • Journal Title

      Journal of Research Institute of Meijo University no.4

      Pages: 133-139

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Density Control of GaN dots on Si substrates by droplet epitaxy2005

    • Author(s)
      T.Kondo, K.Saitoh, Y.Yamamoto, T.Maruyama, S.Naritsuka
    • Journal Title

      Extended Abstracts of the 24^<th> Electronic Materials Symposium 24

      Pages: 229-229

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fabrication Process of Nitrided Mask on GaAs Surface for Nano Lithography2005

    • Author(s)
      Y.Yamamoto, T.Kondo, S.Matsuoka, T.Maruyama, S.Naritsuka
    • Journal Title

      Extended Abstracts of the 24th Electronic Materials Symposium 24

      Pages: 253-253

    • Related Report
      2005 Annual Research Report
  • [Journal Article] New Technique for Suppressing Oxygen Impurity in AlGaAs Layer during Molecular Beam Epitaxy by Surface Segregation2005

    • Author(s)
      S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Nishinaga
    • Journal Title

      Jpn.J.Appl.Phys.

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Multinuclear layer-by-layer growth on Ge(111) by LPE2005

    • Author(s)
      T.Maruyama, K.Matsuda, N.Naritsuka
    • Journal Title

      J.Crystal Growth

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Growth mechanism of beam induced lateral epitaxy on (001)GaAs substrate in molecular beam epitaxy2004

    • Author(s)
      S.Naritsuka, T.Suzuki, K.Saitoh, T.Maruyama, T.Nishinaga
    • Journal Title

      J.Crystal Growth 276

      Pages: 64-71

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Simulation of three-Dimensional Stress in GaAs Microchannel Epitaxy Layer on Si Substrates2004

    • Author(s)
      S.Naritsuka, M.Okada, T.Maruyama
    • Journal Title

      Jpn.J.Appl.Phya. 43

      Pages: 3289-3292

    • NAID

      10013154233

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Growth mechanism of beam induced lateral epitaxy on (001) GaAs substrate in molecular beam epitaxy"2004

    • Author(s)
      S.Naritsuka, T.Suzuki, K.Saitoh, T.Maruyama, T.Nishinaga
    • Journal Title

      J.Crystal Growth 276

      Pages: 64-71

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Simulation of Three-Dimensional Stress in GaAs Microchannel Epitaxy Layer on Si Substrates2004

    • Author(s)
      S.Naritsuka, M.Okada, T.Maruyama
    • Journal Title

      Jpn.J.Appl.Phys. 43

      Pages: 3289-3292

    • NAID

      10013154233

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Growth mechanism of beam induced lateral epitaxy on (001) GaAs substrate in molecular beam epitaxy2004

    • Author(s)
      S.Naritsuka, T.Suzuki, K.Saitoh, T.Maruyama, T.Nishinaga
    • Journal Title

      J.Crystal Growth 276

      Pages: 64-71

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Beam induced lateral epitaxy of GaAs grown directly on Si(001) ridge structure by molecular beam epitaxy2004

    • Author(s)
      T.Kondo, K.Saitoh, T.Maruyama, S.Naritsuka
    • Journal Title

      Extended Abstracts of the 23^<rd> Electronic Materials Symposium

      Pages: 63-63

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Atomically flat surface on Ge(111) mesa by LPE growth2004

    • Author(s)
      K.Matsuda, T.Maruyama, S.Naritsuka
    • Journal Title

      Extended Abstracts of the 23^<rd> Electronic Materials Symposium

      Pages: 67-67

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Numerical model for Oxygen incorporation in AlGaAs layer grown by molecular beam epitaxy2003

    • Author(s)
      S.Naritsuka, O.Kobayashi, T.Maruyama
    • Journal Title

      Jon.J.Appl.Phys. 42

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Beam induced lateral epitaxy : a new approach for lateral growth in molecular beam epitaxy2003

    • Author(s)
      T.Suzuki, S.Naritsuka, T.Maruyama, T.Nishinaga
    • Journal Title

      Cryst. Res. Technol 38 7-8

      Pages: 614-618

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Oxygen incorporation into MBE-grown AIGaAs layers2003

    • Author(s)
      S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Maruyama, T.Nishinaga
    • Journal Title

      Materials Research Society Symposium Proceeding 744

      Pages: 445-449

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Numerical model for Oxygen incorporation in AlGaAs layer grown by molecular beam epitaxy2003

    • Author(s)
      S.Naritsuka, O.Kobayashi, T.Maruyama
    • Journal Title

      Jpn.J.Appl.Phys. 42

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Beam induced lateral epitaxy : a new approach for lateral growth in molecular beam epitaxy2003

    • Author(s)
      T.Suzuki, S.Naritsuka, T.Maruyama, T.Nishinaga
    • Journal Title

      Cryst.Res.Technol. 38, No.7-8

      Pages: 614-618

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Oxygen incorporation into MBE-grown AlGaAs layers2003

    • Author(s)
      S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Maruyama, T.Nishinaga
    • Journal Title

      Materials Research Society Symposium Proceeding Vol.744

      Pages: 445-449

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2005 Final Research Report Summary
  • [Journal Article] Beam induced lateral epitaxy : a new way to lateral growth in molecular beam epitaxy2003

    • Author(s)
      S.Naritsuka, K.Saitoh, T.Suzuki, T.Maruyama
    • Journal Title

      Proceeding of 2003 MRS fall meeting 799

      Pages: 91-91

    • Related Report
      2004 Annual Research Report
  • [Journal Article] LPE growth of atomically flat Ge layer on a mesa pattern2003

    • Author(s)
      T.Maruyama, K.Matsuda, N.Saikawa, S.Naritsuka
    • Journal Title

      Proceeding of 2003 MRS fall meeting 788

      Pages: 583-583

    • Related Report
      2004 Annual Research Report
  • [Publications] S.Naritsuka, O.Kobayashi, T.Maruyama: "Numerical model for Oxygen incorporation in AlGaAs layer grown by molecular beam epitaxy"Jpn.J.Appl.Phys.. 42. L1041-L1043 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Nishinaga: "Oxygen incorporation mechanism in AlGaAs layers grown by molecular beam epitaxy"J.Crystal Growth. 254. 310-315 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Suzuki, S.Naritsuka, T.Maruyama, T.Nishinaga: "Beam induced lateral epitaxy : a new approach for lateral growth in molecular beam epitaxy"Cryst.Res.Technol.. 38・7-8. 614-618 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Naritsuka, O.Kobayashi, K.Mitsuda, T.Maruyama, T.Nishinaga: "Oxygen incorporation into MBE-grown AlGaAs layers"Materials Research Society Symposium Proceeding. 744. 445-449 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Suzuki, K.Saitoh, T.Maruyama, S.Naritsuka: "Lateral growth mechanism on GaAs(011) and GaAs(111)B substrates with ridge structure by low angle MBE"Extended Abstracts of The 22^<nd> Electronic Materials Symposium. 149-150 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Saitoh, T.Suzuki, T.Maruyama, S.Naritsuka: "Epitaxial lateral growth on GaAs (111)B from ridge structure by Beam Induced Lateral Epitaxy"Extended Abstracts of The 22^<nd> Electronic Materials Symposium. 151-152 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Naritsuka, O.Kobayashi, T.Maruyama: "Numerical model for oxygen incorporation in AlGaAs layer grown by molecular beam epitaxy"Extended Abstracts of The 22^<nd> Electronic Materials Symposium. 145-146 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Maruyama, K.Akiyama, Y.Nanishi: "GaN中の希土類イオンの価電子状態"Research Reports of the Faculty of Science and Technology Meijo University. 43. 4-9 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Matusnaga, S.Naritsuka, T.Nishinaga: "A new way to achieve dislocation-free heteroepitaxial growth by molecular beam epitaxy : vertical microchannel epitaxy"J.Crystal Growth. 237-239. 1460-1465 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] D.Kishimoto, T.Nishinaga, S.Naritsuka, H.Sakaki: "Start of 2D nucleation by accumulation of Ga adatoms GaAs (111)B facet"J.Crystal Growth. 240. 52-56 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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