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Fundamental technology for nano-device fabrication utilizing nanocomposite substrates

Research Project

Project/Area Number 14350362
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Composite materials/Physical properties
Research InstitutionNational Institute of Advanced Industrial Science and Technology (AIST)

Principal Investigator

KOSHIZAKI Naoto  National Institute of Advanced Industrial Science and Technology (AIST), Nanoarchitectonics Research Center, Leader, 界面ナノアーキテクトニクス研究センター・高密度界面ナノ構造チーム, 研究チーム長 (40344197)

Co-Investigator(Kenkyū-buntansha) TERASHIMA Kazuo  The University of Tokyo, Graduate School of Frontier Sciences, Associate Professor, 大学院・新領域創成科学研究科, 助教授 (30176911)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥15,100,000 (Direct Cost: ¥15,100,000)
Fiscal Year 2003: ¥5,800,000 (Direct Cost: ¥5,800,000)
Fiscal Year 2002: ¥9,300,000 (Direct Cost: ¥9,300,000)
KeywordsNanocomposite / Nanodevice / Substrate / Carbon Nanotube / Microplasma / Low temperature / Catalyst / Supercritical fluid plasma
Research Abstract

Final goal of this study is to develop fundamental technology for nano-device fabrication utilizing precisely controlled nanocomposite substrates and microplasma technology. We applied these techniques to carbon nanotube (CNT) fabrication and studied low-temperature processing technique for inorganic nano-parts aiming for future part-to-part contact in nanodevice.
(1)Carbon nanotube array fabrication on nanocomposite thin film substrates
We succeeded in fabrication of forest-like CNT al-rays by plasma-enhanced chemical vapor deposition method using nanocomposite substrate composed of nickel metal as a catalyst for CNT growth and inert substances such as Mo, TiO_2 and SiO_2. Such CNT arrays have twice higher field emission current compared to simple CNT arrays, suggesting the possibility of a self-sustainable and long-life field emission device. Nanocomposite substrate is also applied for a substrate organic molecular arrangement.
(2) Basic technology for nano-wiring utilizing microplasma
We tried to fabricate CNTs at low temperature under atmospheric pressure using a microplasma confined in small space. CNTs were successfully formed under the atmospheric pressure without substrate heating by introducing CH_4 as a raw material and Fe-containing substance as a catalyst into a microplasma in a glass capillary whose diameter is less than 100 micron. At this stage, CNTs were formed on metal wire inserted into the capillary for ignition or on inner surface of glass capillary. We are planning to improve this technique to be able to deposit CNT at any arbitrary position.
We also developed a new technique, laser ablation in liquid media, for high quality nanoparticle preparation.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (40 results)

All Other

All Publications (40 results)

  • [Publications] Tsuyohito Ito: "Thermoelectron-enhanced micrometer-scale plasma generation"Applied Physics Letters. 80. 2648-2650 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuyohito Ito: "Generation of micrometer-scale discharge in a supercritical fluid environment"Applied Physics Letters. 80. 2654-2656 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhongke Wang: "Catalyst-free fabrication of single crystalline boron nanobelts by laser ablation"Chemical Physics Letters. 368. 663-667 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoshiki Shimizu: "Fabrication of carbon nanotube assemblies on Ni-Mo substrates mimics law of natural forest growth"Chemical Physics Letters. 370. 774-780 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changhao Liang: "Synthesis of ultrafine SnO_<2-x> nanocrystals by pulsed laser-induced reactive qoenching is liquid medium"Journal of Physical Chemistry B. 107. 9220-9225 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuyohito Ito: "Decrease of breakdown voltages for micrometer-scale gap electrodes for carbon dioxide near the critical point : Temperature and pressure dependences"Journal of Applied Physics. 94. 5411-5413 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoshihi Shimizu: "Fabrication of spherical carbon via UHF microplasma CVD"Journal of Physics D. 36. 2940-2944 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changhao Liang: "One-step growth of silica nanotubes and simultaneous filling with indium sulfide nanorods"Journal of Materials Chemistry. 14. 248-252 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changhao Liang: "Preparation of layered zinc hydroxide/surfactant nanocomposite by pulsed-laser ablation is a liquid medium"Chemistry of Materials. 16. 963-965 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuyohito Ito: "Carbon nanotube and nanopolyhedron syntheses by a discharge under supercritical fluid"Journal of Materials Chemistry. 14. 1513-1515 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changhao Liang: "Pulsed-laser ablation of Mg in liquids : surfactant-directing nanoparticle assembly for magnesium hydroxide nanostructures"Chemical Physics Letters. 389. 58-63 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Tsuyohito Ito: "Spectroscopic study on a thermoelectron-enhanced microplasma jet"Journal of Physics D. 37. 445-448 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Changhao Liang: "Synthesis, characterization, and phase stability of ultrafine TiQ_2 nanoparticles by pulsed laser ablation in liquid media"Journal of Materials Research. 19. 1551-1557 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Takeshi Sasaki: "Fabrication of oxide base nanostructures using pulsed laser ablation in aqueous solutions"Applied Physics A. 印刷中.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 越崎 直人: "基礎から学ぶナノテクノロジー 第9章 ナノプロセス-ナノの部品を創る・並べる・つなげる"東京化学同人. 223-242 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ito et al.: "Thermoelectron-enhanced micrometer-scale plasma generation"Applied Physics Letters. 80(15). 2648-2650 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ito et al.: "Generation of micrometer-scale discharge in a supercritical fluid environment"Applied Physics Letters. 80(16). 2854-2856 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.Wang et al.: "Catalyst-free fabrication of single crystalline boron nanobelts by laser ablation"Chemical Physics Letters. 368(5-6). 663-667 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Shimizu et al.: "Fabrication of carbon nanotube assemblies on Ni-Mo substrates mimics law of natural forest growth"Chemical Physics Letters. 370(5-6). 774-780 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Liang et al.: "Synthesis of ultrafine SnO_<2-x> nanocrystals by pulsed laser-induced reactive quenching in liquid medium"Journal of Physical Chemistry B. 107(35). 9220-9225 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ito et al.: "Decrease of breakdown voltages for micrometer-scale gap electrodes for carbon dioxide near the critical point : Temperature and pressure dependences"Journal of Applied Physics. 94(8). 5411-5413 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Shimizu et al.: "Fabrication of spherical carbon via UHF inductively coupled microplasma CVD"Journal of Physics D. 36(23). 2940-2944 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Liang et al.: "One-step growth of silica nanotubes and simultaneous filling with indium sulfide nanorods"Journal of Materials Chemistry. 14(2). 248-252 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Liang et al.: "Preparation of layered zinc hydroxide/surfactant nanoconposite by pulsed-laser ablation in a liquid medium"Chemistry of Materials. 16(6). 963-965 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ito et al.: "Carbon nanotube and nanopolyhedron syntheses by a discharge under a supercritical fluid"Journal of Materials Chemistry. 14(10). 1513-1515 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Liang et al.: "Pulsed-laser ablation of Mg in liquids : surfactant-directing nanoparticle assembly for magnesium hydroxide nanostructures"Chemical Physics Letters. 389(1-3). 58-63 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ito et al.: "Spectroscopic study on a thermoelectron-enhanced microplasma jet"Journal of Physics D. 37(3). 445-448 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] C.Liang et al.: "Synthesis, characterization, and phase stability of ultrafine TiO_2 nanoparticles by pulsed laser ablation in liquid media"Journal of Materials Research. 19(5). 1551-1557 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Sasaki et al.: "Fabrication of oxide base nanostructures using pulsed laser ablation in aqueous solutions"Applied Physics A. (in press).

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Yoshiki Shimizu: "Fabrication of spherical carbon via UHF microplasma CVD"Journal of Physics D. 36(23). 2940-2944 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Changhao Liang: "One-step growth of silica nanotubes and simultaneous filling with indium sulfide nanorods"Journal of Materials Chemistry. 14(2). 248-252 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Tsuyohito Ito: "Spectroscopic study on a thermoelectron-enhanced microplasma jet"Journal of Physics D. 37(3). 445-448 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Tsuyohito Ito: "Decrease of breakdown voltages for micrometer-scale gap electrodes for carbon dioxide near the critical point : Temperature and pressure dependences"Journal of Applied Physics. 94(8). 5411-5413 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Changhao Liang: "Synthesis of ultrafine SnO_<2-x> nanocrystals by pulsed laser-induced reactive quenching in liquid medium"Journal of Physical Chemistry B. 107(35). 9220-9225 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Tsuyohito Ito: "Carbon nanotube and nanopolyhedron syntheses by a discharge under a supercritical fluid environment"Journal of Materials Chemistry. accepted.

    • Related Report
      2003 Annual Research Report
  • [Publications] Yoshiki Shimizu: "Fabrication of carbon nanotube assemblies on Ni-Mo substrates mimics law of natural forest growth"Chemical Physics Letters. 370(5-6). 774-780 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Zhongke Wang: "Catalyst-free fabrication of single crystalline boron nanobelts by laser ablation"Chemical Physics Letters. 368(5-6). 663-667 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Tsuyohito Ito: "Thermoelectron-enhanced micrometer-scale plasma generation"Applied Physics Letters. 80. 2648-2650 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Yoshiki Shimizu: "Fabrication of spherical carbon via UHF microscale plasma CVD"Journal of Physics, D. (accepted).

    • Related Report
      2002 Annual Research Report
  • [Publications] 寺嶋 和夫: "ナノプラズマ/マイクロプラズマの微細加工技術への応用"エレクトロニクス実装学会誌. 5巻6号. 529-532 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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