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Ultra-fast imaging study on femtosecond laser processes

Research Project

Project/Area Number 14350380
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionNagaoka University of Technology

Principal Investigator

ITO Yoshiro  Nagaoka University of Technology, Department of Mechanical Engineering, Professor, 工学部, 教授 (60176378)

Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥14,000,000 (Direct Cost: ¥14,000,000)
Fiscal Year 2004: ¥1,900,000 (Direct Cost: ¥1,900,000)
Fiscal Year 2003: ¥4,100,000 (Direct Cost: ¥4,100,000)
Fiscal Year 2002: ¥8,000,000 (Direct Cost: ¥8,000,000)
Keywordsfemtosecond laser / laser ablation / time-resolved imaging / ultra-fast phenomena / shadowgraph / transient stress / 過渡応力 / フェトム秒レーザー / レーザー加工プロセス / シャドーグラフ / ガラス / ポンプ-プローブ法
Research Abstract

Materials processing by ultra-fast lasers have become new, attractive methods in laser materials processing. The processes, are, however, not clear enough to understand these futures.
In this study, an ultra-fast imaging system has been developed for a study on femtosecond laser processes of several kinds of materials, such as metal, metal film, semi-conductor and dielectrics. The system developed is a kind of pump-probe systems. Out put of a second harmonic generator contains both the fundamental and the second-harmonic wavelength light : the fundamental light is used as a pump pulse and the second harmonics light as a probe pulse. Time interval between these two pulses is changed by optical delay lines and images illuminated by probe pulses are taken by a CCD camera. Series of images taken at different time interval reveal time dependence of ultra-fast laser processing. The observation geometry of the system can change between two modes: side-looking and surface looking modes.
Observed images in side-looking mode show laser-induced plumes propagating into air from 2 to 9 ns after laser irradiation. From the change of the position of the front of the plume at constant time with pulse number suggest that the ablation rates at initial stage are constant and are greatest for glass substrate and smallest for aluminum. Observed images in the surface-looking mode suggest that there is a significant time delay between the pump pulse and the appearance of observable change at the irradiated position.
In addition, a time-resolved observation method of laser-induced transient stress field has been developed to study the fast laser processing in details. The method utilizes a nano-second pulse laser as a probe pulse and photoelasticity methods as a principle of visualization of the stress field. Using this system, laser-induced stress fields in epoxy-resin blocks from 100 to 2000 ns after laser irradiation are successfully visualized.

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (24 results)

All 2005 2004 2003 Other

All Journal Article (17 results) Patent(Industrial Property Rights) (2 results) Publications (5 results)

  • [Journal Article] Time-resolved observation of the change of electrode-shape in single discharge : Rapid self forming of a thin electrode2005

    • Author(s)
      Rie Tanabe, Yoshiro Ito, Hideki Takezawa, Naotake Mohri
    • Journal Title

      Vournal of Applied Physics, 97(5),

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Time-resolved observation of the change of electrode-shape in single discharge: Rapid self forming of a thin electrode2005

    • Author(s)
      Rie Tanabe, Yoshiro Ito, Hideki Takezawa, Naotake Mohri
    • Journal Title

      Journal of Applied Physics 97(5)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 超短パルスレーザーによる加工プロセスの時間分解観察の試み2005

    • Author(s)
      决得純年, 伊藤義郎
    • Journal Title

      2005年度精密工学会春季年会講演論文集

    • NAID

      130004657506

    • Related Report
      2004 Annual Research Report
  • [Journal Article] アブレーション加工におけるレーザー作用の、時間分解イメージングによる検討2005

    • Author(s)
      松倉正直, 伊藤義郎
    • Journal Title

      2005年度精密工学会春季年会講演論文集

    • NAID

      130004657505

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Transient stress field in a sample induced by intense laser pulses2004

    • Author(s)
      Yoshiro Ito, Junichi Tadano, Masanao Matsukura
    • Journal Title

      Proceedings of LPM 2004, Proc.of SPIE 5662,

      Pages: 444-449

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Coupling of focused laser pulse to surfaces of transparent materials studied by time-resolved imaging technique.2004

    • Author(s)
      Junichi Tadano, Hiromori Kumakura, Yoshiro Ito
    • Journal Title

      Applied Physics A -Materials Science & Processing, 79(4-6)

      Pages: 1031-1033

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Transient stress field in a sample induced by intense laser pulses2004

    • Author(s)
      Yoshiro Ito, Junichi Tadano, Masanao Matsukura
    • Journal Title

      Proceedings of LPM 2004, Proc. of SPIE 5662

      Pages: 444-449

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Coupling of focused laser pulse to surfaces of transparent materials studied by time-resolved imaging technique.2004

    • Author(s)
      Junichi Tadano, Hiromori Kumakura, Yoshiro Ito
    • Journal Title

      Applied Physics A -Materials Science & Processing 79(4-6)

      Pages: 1031-1033

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Coupling of focused laser pulse to surfaces of transparent materials studied by time-resolved imaging technique.2004

    • Author(s)
      Junichi Tadano, Hiromori Kumakura, Yoshiro Ito
    • Journal Title

      Applied Physics A -Materials Science & Processing A-79

      Pages: 1031-1033

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Fabrication of holes and grooves on glass by a ferntosecond laser2003

    • Author(s)
      Yoshiro Ito, Kazunori Kuroi, Kazuhide Hayakawa
    • Journal Title

      Forth International Symposium on Laser Precision Microfabrication, Proc. of SPIE, 5063

      Pages: 338-341

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Angular dependence of coupling between focused laser pulses and a transparent material studied by time-resolved imaging technique2003

    • Author(s)
      Junichi Tadano, Hiromori Kumakura, Yoshiro Ito
    • Journal Title

      Proceedings of International Conference on Leading Edge Manufacturina in 21st Century.

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Time-resolved observation of the change of electrode-shape in single discharge of a thin electrode2003

    • Author(s)
      Rie Tanabe, Yoshiro Ito, Sinsuke Chihara, Yousuke Taguchi, Hideki Takezawa, Naotake Mohri
    • Journal Title

      Proceedings of International Conference on Leading Edge Manufacturing in 21st Century,

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Fabrication of holes and grooves on glass by a femtosecond laser2003

    • Author(s)
      Yoshiro Ito, Kazunori Kuroi, Kazuhide Hayakawa
    • Journal Title

      Forth International Symposium on Laser Precision Microfabrication, Proc. of SPIE 5063

      Pages: 38-341

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Angular dependence of coupling between focused laser pulses and a transparent material studied by time-resolved imaging technique2003

    • Author(s)
      Junichi Tadano, Hiromori Kumakura, Yoshiro Ito
    • Journal Title

      Proceedings of International Conference on Leading Edge Manufacturing in 21st Century

      Pages: 855-860

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Time-resolved observation of the change of electrode-shape in single discharge of a thin electrode2003

    • Author(s)
      Rie Tanabe, Yoshiro Ito, Sinsuke Chihara, Yousuke Taguchi, Hideki Takezawa, Naotake Mohri
    • Journal Title

      Proceedings of International Conference on Leading Edge Manufacturing in 21st Century

      Pages: 933-938

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Fabrication of holes and grooves on glass by a femtosecond laser2003

    • Author(s)
      Yoshiro Ito, Kazunori Kuroi, Kazuhide Hayakawa
    • Journal Title

      Forth International Symposium on Laser Precision Microfabrication, Proc.of SPIE 5063

      Pages: 338-341

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Angular dependence of coupling between focused laser pulses and a transparent material studied by time-resolved imaging technique2003

    • Author(s)
      Junichi Tadano, Hiromori Kumakura, Yoshiro It
    • Journal Title

      Proceedings of International Conference on Leading Edge Manufactureing in 21st Century

      Pages: 855-860

    • Related Report
      2004 Annual Research Report
  • [Patent(Industrial Property Rights)] レーザーを用いた試料内部の応力の時間変化の可視化システム2005

    • Inventor(s)
      伊藤義郎
    • Industrial Property Rights Holder
      長岡技術科学大学
    • Industrial Property Number
      2005-260213
    • Filing Date
      2005-09-08
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 有機EL素子の配線パターンの形成方法及び有機EL素子の形成装置2005

    • Inventor(s)
      鎌田英樹, 松本栄一, 伊藤義郎, 他2名
    • Industrial Property Rights Holder
      長岡技術科学大学, 他2社
    • Industrial Property Number
      2005-355360
    • Filing Date
      2005-10-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] Junichi Tadano, Hiromori Kumakura, Yoshiro Ito: "Coupling of focused laser pulse to surfaces of transparent materials studied by time-resolved imaging technique"Applied Physics A -Materials Science & Processing. (in press). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yoshiro Ito, Kazunori Kuroi, Kazuhide Hayakawa: "Fabrication of holes and grooves on glass by a femtosecond laser"Forth International Symposium on Laser Precision Microfabrication, Proc.of SFIE. 5063. 338-341 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Junichi Tadano, Hiromori Kumakura, Yoshiro Ito: "Angular dependence of coupling between focused laser pulses and a transparent material studied by time-resolved imaging technique"Proceedings of International Conference on Leading Edge Manufacturing in 21st Century. 855-860 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 伊藤義郎, 黒井和典, 栗山規由: "フェムト秒レーザーによるガラスの微細加工-加工部内部形状の観察-"MATE2003論文集. 511-516 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Noriyuki Kuriyama, Yoshiro Ito: "Micro-hole drilling on glass plates by femtosecond laser pulses"Proceedings of Laser Advanced Materials Processing 2002, Third International Symposium on Laser Precision Microfabrication, Proc. of SPIE. 4830. 567-572 (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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