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Fabrication of the oxide single crystal film by Tri-phase Epitaxy

Research Project

Project/Area Number 14350459
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 無機工業化学
Research InstitutionTokyo Institute of Technology

Principal Investigator

KOINUMA Hideomi  Tokyo Institute of Technology, Materials and structures Laboratory, Professor, 応用セラミックス研究所, 教授 (70011187)

Co-Investigator(Kenkyū-buntansha) HASEGAWA Tetsuya  Tokyo University, Department of Chemistry, School of Science, Professor, 大学院・理学系研究科, 教授 (10189532)
CHIKYOW Toyohiro  National Institute of Material Science, Director, ナノマテリアル研究所, ディレクター (10354333)
MATSUMOTO Yuji  Tokyo Institute of Technology, Frontier Collaborative Research Center, Assistant Prodessor, フロンティア創造共同研究センター, 講師 (60302981)
伊高 健治  科学技術振興事業団, 研究員
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥17,000,000 (Direct Cost: ¥17,000,000)
Fiscal Year 2003: ¥4,800,000 (Direct Cost: ¥4,800,000)
Fiscal Year 2002: ¥12,200,000 (Direct Cost: ¥12,200,000)
KeywordsTri-Phase Epitaxy / High Tc Superconductor / Flux Material / Combinatorial Chemistry / Single Crrystal Film / Oxide / トライフェーズエピタキシー
Research Abstract

Tri-phase epitaxy (TPE) is a new approach in vapor phase epitaxy for a single crystal oxide film based on a flux method primarily developed in a bulk single crystal process. That is, the film is grown through a liquid layer of the flux at a high temperature enough to attain a thermodynamic steady-state condition between the growing film and the flux. We have verified the capability of the TPE by fabricating a single crystal film of NdBa_2Cu_3O_<7-d> (Nd123).
In the first year for this project (H14), we attempted to apply the TPE to the fabrications of Ca doped Nd123 and ferroelectric Bi_4Ti_3O_<12> (BIT) single crystal films. In parallel, we also developed a new combinatorial system for a ternary composition spread to speed up the experimental work.
In the next year (H15), a new impurity flux of Bi-Cu-O for the BIT single crystal film was successfully found from a high-throughput screening by the ternary composition spread technique. The additional CuO_x flux could suppress an evaporation of the BiO_x flux during the growth. As a result, the single crystal quality of the BIT film was achieved, which was evidenced by no sliding dislocations and defects inherited from steps of a substrate and/or the lattice mismatching in the film. In addition, we found that the PLD grown BIT film with its surface capped with the BiO_x became single crystalline after annealing at high temperature. This preliminary result suggests a new possibility of "solid phase flux epitaxy" by applying the TPE to the solid phase reaction.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] K.S.Yun, B.D.Choi, J.H.Song, Y.Matsumoto, P.Ahmet, T.Chikyow, M.Kawasaki, H.Koinuma: "Growth of NdBa_2Cu_3O_<7-γ> single crystal thin films by tri-phase epitaxy"Physica C. 378-381. 1202-1208 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, Y.K.Sung, Y.Matsumoto, M.Kawasaki, T.Chikyow, H.Koinuma: "Fabrication of HTSC Single Crystalline Thin Films by Tri-Phase Epitaxy"日本金属学会誌. 66. 284-288 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Ohkubo, Y.Matsumoto, K.Itaka, T.Hassegawa, K.Ueno, M.Ohtani, M.Kawasaki, H.Koinuma: "Quick optimization of Y-type magnetoplumbite thin films by combinatorial pulsed laser deposition technique"Applied Surface Science. 197-198. 3121-315 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Ohkubo, Y.Matsumoto, H.Koinuma, K.Ueno, T.Chikyow, M.Kawasaki: "Synthesis of epitaxial Y-type magnetoplumbite thin films by quick optimization with combinatorial pulsed laser deposition"Journal of Crystal Growth. 247. 105-109 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Koinuma, R.Takahashi, Y.Yamamoto, H.Minami, K.Itaka, Y.Matsumoto, K.Hasegawa, T.Chikyow: "High-throughput screening of binary and ternary dielectric oxides by combinatorial technology"Dielectrics in Emerging Technologies. 01. 323-329 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, Y.Matsumoto, T.Kohno, M.Kawasaki, H.Koinuma: "Fabrication of Nd_<1-x>Ca_xBa_2Cu_3O_<7-d> (x=0〜0.3) single crystalline films by Tri-Phase Epitaxy"Journal of Crystal Growth. 262. 308-312 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, I.Tanigawa, Y.Yamamoto, Y.Yonezawa, Y.Matsumoto, H.Koinuma: "High-Throughput Screening of Flux Materials for Single Crystal Growth by Combinatorial Pulsed Laser Deposition"MRS Fall meeting proceeding. 804. JJ9.20.1-JJ9.20.6 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, H.Kubota, M.Murakami, Y.Yamamoto, Y.Matsumoto, H.Koinuma: "Design of Combinatorial Shadow Masks for Complete Ternary Phase Diagramming of Solid State Materials"Journal of Combinatorial Chemistry. 6. 50-53 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yamamoto, R.Takahashi, Y.Matsumoto, T.Chikyow, H.Koinuma: "Mathematical design of linear action masks for binary and ternary composition spread film library"Applied Surface Science. 233. 9-13 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, H.Kubota, T.Tanigawa, M.Murakami, Y.Yamamoto, Y.Matsumoto, H.Koinuma: "Development of a new combinatorial mask for addressable ternary phase diagramining application to rare earth doped phosphors"Applied Surface Science. 223. 249-252 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Matsuki, Y.Abiko, K.Miyazaki, M.Kobayashi, H.Fujioka, H.Koinuma: "Concept and performance of field-effect amorphous silicon solar cell"Semiconductor Science of Technology. 19. 61-64 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 鯉沼秀臣, 高橋竜太: "ナノ・IT時代の分子機能材料と素子開発 第9章 第2節 セラミックス超伝導材料 -構造と物性-"8 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.S.Yun, B.D.Choi, J.H.Song, Y.Matsumoto, P.Ahmet, T.Chikyow, M.Kawasaki, H.Koinuma: "Growth of NdBa_2Cu_3O_<7-y> single crystal thin films by tri-phase epitaxy"Physica C. 378-381. 1202-1208 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, Y.K.Sung, Y.Matsumoto, M.Kawasaki, T.Chikyow, H.Koinuma: "Fabrication of HTSC Single Crystalline Thin Films by Tri-Phase Epitaxy"日本金属学会誌. 66. 284-288 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Ohkubo, Y.Matsumoto, K.Itaka, T.Hassegawa, K.Ueno, M.Ohtani, M.Kawasaki, H.Koinuma: "Quick optimization of Y-type magnetoplumbite thin films by combinatorial pulsed laser deposition technique"Applied Surface Science. 197-198. 312-315 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] I.Ohkubo, Y.Matsumoto, H.Koinuma, K.Ueno, T.Chikyow, M.Kawasaki: "Synthesis of epitaxial Y-type magnetoplumbite thin films by quick optimization with combinatorial pulsed laser deposition"Journal of Crystal Growth. 247. 105-109 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Koinuma, R.Takahashi, Y.Yamamoto, H.Minami, K.Itaka, Y.Matsumoto, K.Hasegawa, T.Chikyow: "High-throughput screening of binary and ternary dielectric oxides by combinatorial technology"Dielectrics in Emerging Technologies. 01. 323-329 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, Y.Matsumoto, T.Kohno, M.Kawasaki, H.Koinuma: "Fabrication of Nd_<1-x>Ca_xBa_2Cu_3O_<7-d> (x=0〜0.3) single crystalline films by tri-Phase Epitaxy"Journal of Crystal Growth. 262. 308-312 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, T.Tanigawa, Y.Yamamoto, Y.Yonezawa, Y.Matsumoto, H.Koinuma: "High-Throughput Screening of Flux Materials for Single Crystal Growth by Combinatorial Pulsed Laser Deposition"MRS Fall meeting proceeding. 804. JJ9.20.1-6 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 鯉沼秀臣, 高橋竜太: "第9章 第2節 セラミックス超伝導材料-構造と物性-"ナノ・IT時代の分子機能材料と素子開発. 282-289 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, H.Kubota, M.Murakami, Y.Yamamoto, Y.Matsumoto, H.Koinuma: "Design of Combinatorial Shadow Masks for Complete Ternary Phase Diagramming of Solid State Materials"Journal of Combinatorial Chemistry. 6. 50-53 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yamamoto, R.Takahashi, Y.Matsumoto, T.Chikyow, H.Koinuma: "Mathematical design of linear action masks for binary and ternary composition spread film library"Applied Surface Science. 223. 9-13 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, H.Kubota, T.Tanigawa, M.Murakami, Y.Yamamoto, Y.Matsumoto, H.Koinuma: "Development of a new combinatorial mask for addressable ternary phase diagramming : application to rare earth doped phosphors"Applied Surface Science. 223. 249-252 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Matsuki, Y.Abiko, K.Miyazaki, M.Kobayashi, H.Fujioka, H.Koinuma: "Concept and performance of field effect amorphous silicon solar cell"Semiconductor Science of Technology. 19. 61-64 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Takahashi, Y.Matsumoto, H.Kohno, M.Kawasaki, H.Koinuma: "Fabrication of Nd_<1-x>Ca_xBa_2Cu_3O_<7-d> (x=0~0.3) single crystalline films by Tri-Phase Epitaxy"Journal of Crystal Growth. 260. 308-304 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] R.Takahashi, H.Kubota, M.Murakami, Y.Yamamoto, Y.Matsumoto, H.Koinuma: "Design of Combinatorial Shadow Masks for Complete Ternary Phase Diagramming of Solid State Materials"Journal of Combinatorial Chemistry, 6. 50-53 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] R.Takahashi, H.Kubota, T.Tanigawa, M.Murakami, Y.Yamamoto, Y.Matsumoto, H.Koinuma: "Development of a New Combinatorial Mask for Addressable Ternary Phase Diagramming"Applied Surface Science. 223. 249-252 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] N.Matsuki, Y.Abiko, K.Miyazaki, M.Kobayashi, H.Fujioka, H.Koinuma: "Concept and performance of field-effect amorphous silicon solar cell"Semiconductor Science and Technology. 19. 61-64 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 鯉沼秀臣, 高橋竜太: "ナノ・IT時代の分子機能材料と素子開発"NTS出版. 8 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.S.Yun, B.D.Choi, Y.Matsumoto, J.H.Song, N.Kanda, T.Itoh, M.Kawasaki, T.Chikyow, P.Ahmet, H.Koinuma: "Vapor-Liquid-Solid tri-phase pulsed-laser epitaxy of RBa_2Cu_3O_<7-y> single-crystal films"Applied Physics Letters. 80. 61-63 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.S.Yun, B.D.Choi, J.H.Song, Y.Matsumoto, P.Ahmet, T.Chikyow, M.Kawasaki, H.Koi numa: "Growth of NdBa_2Cu_3O_<7-y> single crystal thin films by tri-phase epitaxy"Physica C. 378-381. 1202-1208 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高橋竜太, K.S.Yun, 松本祐司, 川崎雅司, 知京豊裕, 鯉沼秀臣: "Tri-Phase Epitaxyによる高温超伝導、単結晶薄膜の作製"日本金属学会誌. 66・4. 284-288 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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