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High density and large area atmospheric plasma production and the industrial application by using a variable energy type barrier discharge

Research Project

Project/Area Number 14380207
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionIwate University

Principal Investigator

FUJIWARA Tamiya  Iwate University, Electrical and Electronics Engineering, professor, 工学部, 教授 (70042207)

Co-Investigator(Kenkyū-buntansha) TAKAKI Koichi  Iwate University, Electrical and Electronics Engineering, associate professor, 工学部, 助教授 (00216615)
MUKAIGAWA Seiji  Iwate University, Electrical and Electronics Engineering, Research associate, 工学部, 助手 (60333754)
KOISHIBAR Toshiaki  Iwate steel company, deputy manager (scholar), 次長(研究職)
KUWASHIMA Takayuki  industrial technology center of iwate prefecture, chief research specialist, 主任専門研究員
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥6,200,000 (Direct Cost: ¥6,200,000)
Fiscal Year 2004: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2003: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2002: ¥3,200,000 (Direct Cost: ¥3,200,000)
KeywordsCCMD / Self quenching / Dielectric barrier discharge / Microdischarge / Atmospheric pressure plasma / Energy control / DC drive / Discharge mechanism / 自己消弧型放電 / 投入エネルギー / 広断面積化・高密度化 / 進展速度 / 大気圧グロープラズマ / バリア放電 / NOx除去 / 材料表面処理 / 空気浮遊菌除去
Research Abstract

New system CCMD (Capacity-Coupled Multi Discharge : Electric discharge type which replaced the dielectric with the quenching capacitor) in this study unlike the conventional dielectric barrier discharge it was devised. The atmospheric pressure glow plasma was generated, and the research-for the purpose of increase (conventional 5 times) of the input energy to the plasma, broadening the cross section and densifying of the atmospheric pressure plasma, elucidation of the discharge mechanism and clarification of the electrophysical property was carried out. As an industrial application, this plasma was used for the NOx removal, and technology improvement and practical application, application to the material surface treatment of the exhaust gas treatment by the plasma were examined. Until now result is described in the following.
1)The increase of the input energy to the plasma : The input energy to the plasma increases, when the capacity of the quenching capacitor increases, and input ener … More gy is more largest than the dielectric barrier discharge, and it becomes 120 times.
2)The discharge circuit design : L/R<τ<CR is a necessary condition in the circuit action, when the characteristic time of the glow-arc transition is τ, equivalent resistance of discharge circuit including the plasma is R, inductance is L, and capacitance of the quenching capacitor is C.
3)Increase mechanism of the input energy : In the dielectric barrier discharge, it was verified experimentally that upper limit occurred in area effect of surface charge in energy growth.
4)DC drive : The DC drive of CCMD was realized, and it succeededd in the control in the pulse interval.
5)The elucidation of the discharge mechanism : The potential of the needle electrode fluctuated by the microdischarge of several decade ns, and it was verified experimentally that self quenching was realized by this potential fluctuation.
6)The control of the input power to the plasma : The input energy is proportional to the ratio (especially, the integer part) of dielectric breakdown voltage, and capacity of the quenching capacitor and discharge frequency.
7)The propagation velocity of the microdischarge : The propagation velocity of the microdischarge is approximately 3×10^5 m/s.
8)The application to the ozone generation : Generation efficiency of the 41.5 g/kWh was obtained in the oxygen raw material, when it tried to carry out the ozone generation test by the parallel connection of 29 needle electrode. Less

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (51 results)

All 2005 2004 2003 2002 Other

All Journal Article (39 results) Publications (12 results)

  • [Journal Article] Production of Atmospheric-Pressure Glow Discharge in Nitrogen Using Needle-Array Electrode2005

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Applied Physics Letters 86(15)

      Pages: 151501-151501

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] High deposition rate of amorphous carbon film using a magnetically driven shunting arc discharge2005

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Surface and Coatings Technology 196

      Pages: 203-206

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Voltage-current characteristics of nitrogen high-current glow discharge2005

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Journal of Advanced Oxidation Technologies 8(1)

      Pages: 11-17

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 誘電体バリア放電方式オゾナイザの電極形状による高効率化2005

    • Author(s)
      清水雅樹 ほか
    • Journal Title

      電気学会論文誌A 125(6)

      Pages: 501-507

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 高周波放電プラズマにおける基板への熱流束と電力測定2005

    • Author(s)
      蜂谷憲一郎 ほか
    • Journal Title

      電気学会論文誌A 125(3)

      Pages: 223-238

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 高周波放電プラズマにおける基盤への熱流速と電力測定2005

    • Author(s)
      蜂谷憲一郎 ほか
    • Journal Title

      電気学会論文誌A 125(3)

      Pages: 223-228

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Bonding strength of alumina tiles joined using capacitor discharge technique2005

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Surface and Coatings Technology 167-170

      Pages: 495-498

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 高周波プラズマにおける基板への熱流束と電力測定2005

    • Author(s)
      蜂谷 憲一郎, 江部 健太郎, 加藤 昭二, 向川 政治, 高木 浩一, 藤原 民也
    • Journal Title

      電気学会論文誌 (in Japanese) A125(3)

      Pages: 223-228

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 誘電体バリア放電方式オゾナイザの電極形状による高効率化2005

    • Author(s)
      清水雅樹, 佐藤徹, 加藤昭二, 向川政治, 高木浩一, 藤原民也
    • Journal Title

      電気学会論文誌 (in Japanese) A125(6)

      Pages: 501-507

    • NAID

      10015676545

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Production of Atmospheric Pressure Glow Discharge Using Semiconductor Opening Switch Diode2005

    • Author(s)
      K.Takaki, M.Hosokawa, S.Mukaigawa, T.Fujiwara
    • Journal Title

      Transaction of the Material Research Society of Japan 30(1)

      Pages: 295-298

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Voltage-current characteristics of nitrogen high-current glow discharge2005

    • Author(s)
      K.Takaki, M.Hosokawa, T.Sasaki, S, Mukaigawa, T.Fujiwara
    • Journal Title

      Journal of Advanced Oxidation Technologies 8(1)

      Pages: 11-17

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] High deposition rate of amorphous carbon film using a magnetically driven shunting arc discharge2005

    • Author(s)
      Ken Yukimura,, Motoya Kumagai, Koichi Takaki, Ryuji Hasegawa, Satoshi Nakamura, Seiji Mukaigawa, Tamiya Fujiwara
    • Journal Title

      Surface and Coatings Technology 196

      Pages: 203-206

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Production of Atmospheric-Pressure Glow Discharge in Nitrogen Using Needle-Array Electrode2005

    • Author(s)
      K.Takaki, M.Hosokawa, T.Sasaki, S.Mukaigawa, T.Fujiwara
    • Journal Title

      Applied Physics Letters 86(15)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] High deposition rate of amorphous carbon film using a magnetically driven shunting arc discharge2005

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Surface and Coatings Technology (In press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Production of Atmospheric-Pressure Glow Discharge in Nitrogen Using Needle-Array Electrode2005

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Applied Physics Letters (In press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 誘電体バリア放電方式オゾナイザの電極形状による高効率化2005

    • Author(s)
      清水雅樹 ほか
    • Journal Title

      電気学会論文誌A (In press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] 高周波放電プラズマにおける基板への熱流束と電力測定2005

    • Author(s)
      蜂谷憲一郎 ほか
    • Journal Title

      電気学会論文誌A Vol.125,No.3

      Pages: 223-228

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Self-magnetic drive of a shunting arc2004

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Surface and Coatings Technology 186

      Pages: 182-186

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Capacity-coupled multildischarge at atmospheric pressure2004

    • Author(s)
      H.Mase, T.Fujiwara, N.Sato
    • Journal Title

      IEEE TRANSACTIONS ON PLASMA SCIENCE 32(2)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Electrode shape in Dielectric Barrier Discharge Plasma for NOx Removal2004

    • Author(s)
      K.Takaki et al.
    • Journal Title

      IEEE Transactions on Plasma Science 32(1)

      Pages: 32-38

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effect of Electrode Shape in Dielectric Barrier Discharge Plasma Reactor for NOx Removal2004

    • Author(s)
      K.Takaki, M.Shimizu, S.Mukaigawa, T.Fujiwara
    • Journal Title

      IEEE Transactions on Plasma Science 32(1)

      Pages: 32-38

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Capacity-coupled multildischarge at atmospheric pressure2004

    • Author(s)
      H.Mase, T.Fujiwara, N.Sato
    • Journal Title

      IEEE Transactions on Plasma Science 32(2)

      Pages: 380-383

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Self-magnetic drive of a shunting arc2004

    • Author(s)
      K.Takaki, R.Hasegawa, S.Nakamura, S.Mukaigawa, T.Fujiwara, M.Kumagai, K.Yukimura
    • Journal Title

      Surface and Coatings Technology 186

      Pages: 182-186

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] パルスアーク放電からの衝撃波進展特性2004

    • Author(s)
      高木浩一, 向川政治, 藤原民也
    • Journal Title

      プラズマ応用科学 Applied Plasma Science (in Japanese) 12

      Pages: 137-142

    • NAID

      40006676447

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Characteristics of Nitrogen High-Current Glow discharge2004

    • Author(s)
      K.Takaki et al.
    • Journal Title

      Journal of Advanced Oxidation Technologies Vol.8,No.1(In press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Capacity-coupled multidischarge for atmospheric plasma production2003

    • Author(s)
      H.Mase, T.Fujiwara, N.Sato
    • Journal Title

      APPLIED PHYSICS LETTERS 83(26)

      Pages: 5392-5394

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Ion extraction from carbon shunting arc plasma2003

    • Author(s)
      K.Takaki et al.
    • Journal Title

      APPLIED PHYSICS LETTERS 82(16)

      Pages: 2583-2582

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] チタン箔溶断セラミックス接合における回路インダクタンスの効果2003

    • Author(s)
      高田良弘 ほか
    • Journal Title

      電気学会論文誌A 23(9)

      Pages: 884-890

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Measurement of heat flux distribution toward substrate by means of the LiNbO3 interferometer, and electron density in a capacitively coupled if discharge plasma2003

    • Author(s)
      S.Mukaigawa, S.Kanno, K.Takaki, T.Fujiwara
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B206

      Pages: 777-781

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Characteristics of shunting arc discharge for carbon ion source2003

    • Author(s)
      K.Takaki, S.Mukaigawa, T.Fujiwara, M.Kumagai, K.Yukimura
    • Journal Title

      Nuclear Instruments and Methods in Physics Research B206

      Pages: 794-797

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 大気圧グロー放電の発生と応用,大気圧グロー放電の発生2003

    • Author(s)
      高木浩一, 藤原民也, 栃久保文嘉
    • Journal Title

      Journal of Plasma and Fusion Research (in Japanese) 79(10)

      Pages: 1002-1008

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] チタン箔溶断セラミックス接合における回路インダクタンスの効果2003

    • Author(s)
      高田良宏, 板垣稔, 向川政治, 高木浩一, 藤原民也, 大島修三, 高橋幾久雄, 桑嶋孝幸
    • Journal Title

      電気学会論文誌 (in Japanese) A23(9)

      Pages: 884-890

    • NAID

      10011750168

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Ion Extraction from Carbon Shunting Arc Plasma2003

    • Author(s)
      K.Takaki, S.Mukaigawa, T.Fujiwara, M.Kumagai, K.Yukimura
    • Journal Title

      Applied Physics Letters 82(16)

      Pages: 2583-2585

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Capacity-coupled multidischarge for atmospheric plasma production2003

    • Author(s)
      H.Mase, T.Fujiwara, N.Sato
    • Journal Title

      Applied Physics Letters 82(16)

      Pages: 2583-2582

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Bonding strength of alumina tiles jointed using capacitor discharge technique2003

    • Author(s)
      K.Takaki, Y.Takada, M.Itagaki, S.Mukaigawa, T.Fujiwara, S.Ohshima, K.Oyama, I.Takahashi, T.Kuwashima
    • Journal Title

      Surface and Coatings Technology 169-170

      Pages: 495-498

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 非定常的放電プラズマの現象と応用2002

    • Author(s)
      藤原民也
    • Journal Title

      放電学会誌「放電研究」(in Japanese) 45(4)

      Pages: 67-72

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] マルチポイント電極を用いた高効率ディーゼル排ガス処理2002

    • Author(s)
      高木浩一, 向川政治, 藤原民也
    • Journal Title

      プラズマ応用科学 Applied Plasma Science (in Japanese) 10

      Pages: 73-80

    • NAID

      40005782969

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Heat Flux Distribution on a substrate in capacitively coupled radio-frequency discharge plasma2002

    • Author(s)
      K.Takaki, D.Koseki, T.Fujiwara
    • Journal Title

      Applied Physics Letters 80(9)

      Pages: 1526-1528

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] A Capacitor discharge technique with optimized energy for joining ceramics2002

    • Author(s)
      K.Takaki, Y Fujimaki, Y Takada, M.Itagaki, T Fujiwara, S.Ohshima, K.Oyama, I.Takahashi, T.Kuwashima
    • Journal Title

      VACUUM 65

      Pages: 457-462

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] H.Mase, T.Fujiwara, N.Sato: "Capacity-coupled multidischarge for atmospheric plasma production"APPLIED PHYSICS LETTERS. Vol83,No26. 5392-5394 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takaki et al.: "Effect of Electrode shape in Dielectric Barrier Discharge Plasma for NOx Removal"IEEE Transactions on Plasma Science. Vol32,No1(in press). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takaki et al.: "Bonding strength of alumina tiles joined using capacitor discharge technique"Surface and Coatings Technology. 169-170. 495-498 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takaki et al.: "Characteristics of shunting arc discharge for carbon ion source"Nuclear Instruments and Methods in Physics Research B. B 206. 794-797 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takaki et al.: "Ion extraction from carbon shunting arc plasma"APPLIED PHYSICS LETTERS. Vol82,No16. 2583-2582 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 高田良弘 ほか: "チタン箔溶断セラミックス接合における回路インダクタンスの効果"電気学会論文誌A. Vol23,No9. 884-890 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takaki et al.: "Ion extraction from carbon shunting arc plasma"Applied Physics Letters. 82・16(in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Mukaigawa et al.: "Measurement of heat flux distribution toward substrate by means of the LiNbO3 interferometer, and electron density in a capacitively coupled rf discharge plasma"Nuclear Instruments and Methods in Physics Research B. (in press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takaki et al.: "A Capacitor discharge technique with optimized energy for joining ceramics"VACUUM. 65. 457-462 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] K.Takaki et al.: "Heat Flux Distribution on a substrate in capacitively coupled radio-frequency discharge plasma"Applied Physics Letters. 80・9. 1526-1528 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 藤原民也: "非定常的放電プラズマの現象と応用"放電研究. 45・4. 67-72 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高木浩一 et al.: "マルチポイント電極を用いた高効率ディーゼル排ガス処理"プラズマ応用科学. 10. 73-80 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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