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Fabrication of high performance sensing film for gas sensor by the nano structural control using mass controlled layer-by-layer sequential deposition

Research Project

Project/Area Number 14550014
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionKeio University

Principal Investigator

SHIRATORI Seimei  Keio University, Faculty of Science and Technology, Associate Professor, 理工学部, 助教授 (00222042)

Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥4,000,000 (Direct Cost: ¥4,000,000)
Fiscal Year 2003: ¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 2002: ¥2,300,000 (Direct Cost: ¥2,300,000)
Keywordsammonia / gas sensor / nano / structure / sensing film / sensitivity / porous / layer-by-layer / ナノ構造 / アンモニア / 感応膜 / センサデバイス / 比表面積 / 吸着 / 交互積層
Research Abstract

By increasing the surface area of the sensing film, the performance of the ammonium gas sensor was drastically improved in this study.
When the sensing films of gas sensors have porous structure, gas sensors have high speed and highly sensitive response because of the high gas diffusion. In this study, the sheet particulates of α-zirconium phosphates were deposited on the electrode of QCM by casting or sequential adsorption method and the fabricated sensing film was evaluated as a gas sensor for ammonia. This sensor is compared with that using the conventional α-ZrP cast film. Under the 5ppm gas concentration of ammonia, sensor characterization were performed. As the results, when the sheet particulates were used as the sensing films for the gas sensors, the response time was halved and the sensitivity was doubled with those using normal α-ZrP And finally, 100ppb ammonium gas was successfully detected by the developed ammonium gas sensor.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (21 results)

All Other

All Publications (21 results)

  • [Publications] S.Kushida, S.Shiratori: "The Fabrication of Porous Sensing Films Using Zirconium Phosphate for Gas Sensor"Proceedings of the 19th Sensor Symposium. 145-150 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Shiratori, M.Kikuchi, Yutaka Katagiri, Akira Shibue: "Gas adsorption filter using layer-by-layer sequential adsorption method for the protection of sensitive gas sensor"Proceeding of the 19th Sensor Symposium. 135-140 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S Shiratori*, M Kikuchi, H Katagiri, A Shibue: "Gas Adsorption Filter Using Layer-by-Layer Sequential Adsorption Method for the Protection of Sensitive Gas Sensors"9th International meeting on Chemical Sensors. 488 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S Shiratori*, S Kushida: "High performance sensing film using layer-by-layer self-assembled zirconium phosphate for gas sensor"9th International meeting on Chemical Sensors. 94 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 櫛田慎哉, 白鳥世明: "層状リン酸ジルコニウムを用いたアンモニアガスセンサの作製"電気学会電子・情報・システム部門大会講演論文集. GS6-4. 63 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 櫛田慎哉, 白鳥世明: "多孔質剥離微粒子を用いたアンモニアガスセンサの構築"第49回応用物理学関係連合講演会. 3. 30a-M-1 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 櫛田慎哉, 白鳥世明: "リン酸ジルコニウムを用いた低濃度アンモニアガスセンサの構築"第63回応用物理学会学術講演会. III. 25p-ZF- (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 戸井 洋, 大森克哉, 菊地正志, 白鳥世明: "ゼオライトを用いた水晶振動子式メチルメルカプタンガスセンサ"第51回応用物理学関係連合講演会. 3. 30a-ZF-8 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 大森克哉, 戸井 洋, 菊地正志, 白鳥世明: "リン酸ジルコニウム/電解質高分子多層膜を用いた水晶振動子式アンモニアガスセンサ"第51回応用物理学関係連合講演会. 3. 30a-ZF-9 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Kushida, S.Shiratori: "The fabrication of porous sensing films using zirconium phosphate for gas sensor"Proceedings of the 19^<th> Sensor Symposium. 145-150 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Shiratori, M.Kikuchi, Yutaka Katagiri, Akira Shibue: "Gas adsorption filter using layer-by-layer sequential adsorption method for the protection of sensitive gas sensor"Proceeding of the 19th Sensor Symposium. 135-140 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S Shiratori^*, M Kikuchi, H Katagiri, A Shibue: "Gas Adsorption Filter Using Layer-by-Layer Sequential Adsorption Method for the Protection of Sensitive Gas Sensors"9th International meeting on Chemical Sensors. 488 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Shiratori, S.Kushida: "High performance sensing film using layer-by-layer self-assembled zirconium phosphate for gas sensor"9^<th> international meeting on Chemical Sensors. 94 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Seimei Shiratori: "Wet Process layer-by-layer Sequential Depositions and Their Applications"Second International Conference on Molecular Electronics and Bioelectronics. 1. 104-105 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 大森, 戸井, 菊地, 白鳥世明: "リン酸ジルコニウム/電解質高分子多層膜を用いた水晶振動子式アンモニアガスセンサ"第51回応用物理学関係連合講演会講演予稿集. Vo.13(発表予定). (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Kushida, S.Shiratori: "The Fabrication of Porous Sensing Films Using Zirconium Phosphate for Gas Sensor"Proceedings of the 19^<th> Sensor Symposium. (Proceedings). 145-150 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S Shiratori^*, S Kushida: "High performance sensing film using layer-by-layer self-assembled zirconium phosphate for gas sensor"9th International meeting on Chemical Sensors. (ABSTRACT BOOK). 94 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 櫛田慎哉, 白鳥世明: "多孔質剥離微粒子を用いたアンモニアガスセンサの構築"第49回応用物理学関係連合講演会30a-M-1. No3. 1217 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 櫛田慎哉, 白鳥世明: "リン酸ジルコニウムを用いた低濃度アンモニアガスセンサの構築"第63回応用物理学学会術講演会25p-ZF-6. No3. 1097 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S Shiratori^*, M Kikuchi, H Katagiri, A Shibue: "Gas Adsorption Filter Using Layer-by-Layer Sequential Adsorption Method for the Protection of Sensitive Gas Sensors"9th International meeting on Chemical Sensors. (ABSTRACT BOOK). 488 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Shiratori, M.Kikuchi, Yutaka Katagiri, Akira Shibue: "Gas adsorption filter using layer-by-layer sequential adsorption method for the protection of sensitive gas sensor"Proceedings of the 19^<th> Sensor Symposium. (Proceedings). 135-140 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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