Fatigue Characteristics of Micromechanism Fabricated by Surface Micromachining
| Project/Area Number |
14550087
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (C)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 一般 |
|---|
| Research Field |
Materials/Mechanics of materials
|
|---|
| Research Institution | Tokyo Denki University |
|---|
Principal Investigator |
TSUJI Hirokazu Tokyo Denki University, School of Science and Engineering, Associate Professor, 理工学部, 助教授 (10163841)
|
|---|
| Project Period (FY) |
2002 – 2003
|
| Project Status |
Completed (Fiscal Year 2003)
|
| Budget Amount *help |
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 2003: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2002: ¥1,500,000 (Direct Cost: ¥1,500,000)
|
|---|
| Keywords | Micro-machining / Micro-material / Fatigue test / Single-crystalline silicon / Anisotropic etching / Fracture toughness |
|---|
| Research Abstract |
Surface micromachining is applied to the fabrication of micro-specimens for the strength test of micromaterial. The surface micromachining is combined with the bulk micromaching conducted by the anisotropy etching of the single crystalline silicon. Static and fatigue strength are evaluated for the micro-specimens. Results are summarized as follows :
1.A micromaterial testing machine is developed for four points bending under statically and cyclic loading. A Testing system and an algorithm for the computer to measure the specimen deformation and the load are improved.
2.A thin film type of micro-specimen made of aluminum is fabricated by the surface micro-machining. The SEM observation suggested that the specimen needs some improvements in respect to the stress concentration, the residual stress in the film, and the accuracy for the patterning in the photo-etching processes.
3.The Static strength of the single crystalline silicon manufactured by CZ and FZ method are compared each other by the IF method and the four-point bending test. The FZ silicon shows better performance for the bending test, while the CZ silicon shows higher value of the fracture toughness on the IF test.
|
Report
(3 results)
Research Products
(11 results)
