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Fatigue Characteristics of Micromechanism Fabricated by Surface Micromachining

Research Project

Project/Area Number 14550087
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Materials/Mechanics of materials
Research InstitutionTokyo Denki University

Principal Investigator

TSUJI Hirokazu  Tokyo Denki University, School of Science and Engineering, Associate Professor, 理工学部, 助教授 (10163841)

Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥2,300,000 (Direct Cost: ¥2,300,000)
Fiscal Year 2003: ¥800,000 (Direct Cost: ¥800,000)
Fiscal Year 2002: ¥1,500,000 (Direct Cost: ¥1,500,000)
KeywordsMicro-machining / Micro-material / Fatigue test / Single-crystalline silicon / Anisotropic etching / Fracture toughness
Research Abstract

Surface micromachining is applied to the fabrication of micro-specimens for the strength test of micromaterial. The surface micromachining is combined with the bulk micromaching conducted by the anisotropy etching of the single crystalline silicon. Static and fatigue strength are evaluated for the micro-specimens. Results are summarized as follows :
1.A micromaterial testing machine is developed for four points bending under statically and cyclic loading. A Testing system and an algorithm for the computer to measure the specimen deformation and the load are improved.
2.A thin film type of micro-specimen made of aluminum is fabricated by the surface micro-machining. The SEM observation suggested that the specimen needs some improvements in respect to the stress concentration, the residual stress in the film, and the accuracy for the patterning in the photo-etching processes.
3.The Static strength of the single crystalline silicon manufactured by CZ and FZ method are compared each other by the IF method and the four-point bending test. The FZ silicon shows better performance for the bending test, while the CZ silicon shows higher value of the fracture toughness on the IF test.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (11 results)

All Other

All Publications (11 results)

  • [Publications] 郷原広道, 辻 裕一, 木村紀博: "V溝付きシリコン微小試験片の強度評価"日本機械学会関東支部ブロック合同講演会講演論文集. No.020-2. 127-128 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 高野光生, 辻 裕一: "マイクロディスクの光熱駆動(定在波の振動振幅増加の検討)"日本機械学会関東支部ブロック合同講演会講演論文集. No.020-2. 245-246 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 郷原広道, 辻 裕一: "水素イオン注入した単結晶シリコンの機械的性質"2003年度精密工学会秋季大会講演会講演論文集. J85 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Gohara, H.Tsuji: "Fracture toughness of single crystal silicon by H-ion implantation"JSPE proceedings of autumn annual conferences 2003. J85 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Takano, H.Tsuji: "Photo-thermal driving of micro-disk"JSME Proceedings. No.020-2. 245-246 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] H.Gohara, N.Kimura, H.Tsuji: "Strength evaluation of V-notched silicon micro-specimen"JSME Proceedings. No.020-2. 127-128 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 郷原広道, 辻 裕一, 木村紀博: "V溝付きシリコン微小試験片の強度評価"日本機械学会関東支部ブロック合同講演会講演論文集. No.020-2. 127-128 (2002)

    • Related Report
      2003 Annual Research Report
  • [Publications] 高野光生, 辻 裕一: "マイクロディスクの光熱駆動(定在波の振動振幅増加の検討)"日本機械学会関東支部ブロック合同講演会講演論文集. No.020-2. 245-246 (2002)

    • Related Report
      2003 Annual Research Report
  • [Publications] 郷原広道, 辻 裕一: "水素イオン注入した単結晶シリコンの機械的性質"2003年度精密工学会秋季大会講演会講演論文集. J85 (2002)

    • Related Report
      2003 Annual Research Report
  • [Publications] 郷原広道, 辻 裕一, 木村紀博: "V溝付きシリコン微小試験片の強度評価"日本機械学会関東支部ブロック合同講演会講演論文集. No.020-2. 127-128 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高野光生, 辻 裕一: "マイクロディスクの光熱駆動(定在波の振動振幅増加の検討)"日本機械学会関東支部ブロック合同講演会講演論文集. No.020-2. 245-246 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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