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Development of evaluation system of optical elements for vacuum-ultra violet

Research Project

Project/Area Number 14550094
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTokyo University Agriculture And Technology

Principal Investigator

OTANI Yukitoshi  Tokyo University Agriculture And Technology, Faculty of Technology, Associate Professor, 工学部, 助教授 (10233165)

Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥2,700,000 (Direct Cost: ¥2,700,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2002: ¥1,700,000 (Direct Cost: ¥1,700,000)
Keywordsvacuum-ultra violet / Optical elements / F2 laser / birefringence / fluorescent glass / calcium fluoride
Research Abstract

Semiconductors are highly integrated for the requirement of higher mass storage and high speed operation. The wavelength for exposure becomes shorter and shorter to improve high space resolution of lithography, because the space resolution of lithography depends on the wavelength. Now ArF laser is planning to be used for next generation of lithography and its resolution of line width is expected 90 nm. Moreover, the next next generation of lithography is intended to use a F2 (fluorine) laser in 157nm. There is little room for option of optical components except a calcium fluoride (CaF2). However it has birefringence dispersion such as true bireflingence. It means that birefringence increases in response to short wavelength. It is necessary to change the old way to measure by using visible light especially, He-Ne laser. Therefore we have to inspect optical components in the same wavelength. We propose a Mueller matrix polarimeter and interferometer for 1 57nm instead of birefringence measurement. Moreover, we purpose a novel image detection system for vacuum ultra-violet using a fluorescent glass. A vacuum Mueller matrix polarimeter is developed for measurement of the Muller matrix of samples, partially, calcium fluoride materials in 157nm wavelength. From the measured Mueller matrix with no sample present, we found the influence of absorption error in the detector and orientation error in quarter-wave plates on measurement results. The birefringence of samples is determind from the Mueller matrix. Experimental results show this Mueller matrix polarimeter is available to be used for characterizing the intrinsic birefringence of materials for processed lens at the 157nm lithography.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (7 results)

All Other

All Publications (7 results)

  • [Publications] Y.Otani, M.Takahashi, L.Jin, H.Kowa, N.Umeda: "Image detection system for 157 nm using fluorescent glass"Proc.SPIE. 5188. 134-137 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] L.H.Jin, H.Kowa, Y.Otani, N.Umeda: "Mueller matrix imaging polarimeter in 157nm"Proc.SPIE. 5188. 146-153 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Otani, M.Takahashi, L.Jin, H.Kowa, N.Umeda: "Image detection system for 157 nm using fluorescent glass"Proc.SPIE. Vol.5188. 134-137 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] L.H.Jin, H.Kowa, Y.Otani, N.Umeda: "Mueller matrix imaging polarimeter in 157nm"Proc.SPIE. Vol.5188. 146-153 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Otani, M.Takahashi, L.Jin, H.Kowa, N.Umeda: "Image detection system for 157nm using fluorescent glass"Proc.SPIE. 5188. 134-137 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] L.H.Jin, H.Kowa, Y.Otani, N.Umeda: "Mueller matrix imaging polarimeter in 157nm"Proc.SPIE. 5188. 146-153 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 高橋政克, 若山俊隆, 金蓮花, 高和宏行, 大谷幸利, 梅田倫弘: "真空紫外領域における画像検出システム"Optics Japan 2002 日本光学会年次学術講演会講演予稿集. 146-147 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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