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Trial production research of an super clean robot corresponding to a high vacuum, which is indispensable in a next-generation semiconductor manufacture process

Research Project

Project/Area Number 14550218
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Dynamics/Control
Research InstitutionKYUSHU UNIVERSITY

Principal Investigator

KANEMITSU Yoichi  Kyushu University, Graduate School, Faculty of Engineering Department of Intelligent Machinery and Systems, Professor, 大学院・工学研究院, 教授 (00274514)

Co-Investigator(Kenkyū-buntansha) MATSUDA Koichi  Kyushu University, Graduate School, Faculty of Engineering Department of Intelligent Machinery and Systems, Research Associate, 大学院・工学研究院, 助手 (80284537)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥3,100,000 (Direct Cost: ¥3,100,000)
Fiscal Year 2004: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2003: ¥600,000 (Direct Cost: ¥600,000)
Fiscal Year 2002: ¥1,800,000 (Direct Cost: ¥1,800,000)
Keywordsclean robot / magnetic bearing / magnetic levitation / non contact levitation / movement without contact / without contamination / variable bias control / phase angle control / Hinfinity 制御 / 非接触 / ロバスト制御 / H-infinity制御 / マイクロステップ駆動
Research Abstract

Aiming at a super clean robot applying the technology of a magnetic bearing and magnetic levitation, and realizing a perfect non-contact 3-dimensional robot, we have completed the independent examination of the perpendicular direction, the rotary actuator which manages movement of the circumference around the perpendicular axis, and the linear actuator which manages movement of a radial direction is completed by the end of fiscal 2001.
In fiscal 2002,we studied on stable levitation control of the linear actuator installed on the outer rotor of the rotary actuator in rotation of the rotary actuator.
Two H-infinity controllers at the center position and the maximum extension position are designed using the dynamic model as a measure against a robust unstable high order natural vibration and a gain scheduled controller is realized by changing gain ratio of two controller in proportion to a traveling distance of the actuator. The gain scheduled controller is implemented in PC by real time Li … More nux.
The micro step system has been adopted as a drive system of the stepping motor of the rotary actuator, and the desired accuracy of positioning is achieved by the open loop.
In fiscal 2003,the design point of the gain schedule H-infinity control of the linear actuator was selected at the center, two both end. The gain of the controller is given by the linear interpolation among the three design points and then the the high order natural vibration is decreased.
In order to decrease the residual angular vibration in the rotary actuator after arrival to a target position, we try adjustment of the pulse generating timing of a stepping motor. A little improvement is achieved but residual vibration remains.
In fiscal 2004,we adopted a phase compensation of the machine angle of a magnetization magnetic pole, and an electric angle of the magnetizing current detecting an angular velocity of the actuator in order to reduce immediately the free vibration after arriving at a predetermined position and to shorten positioning time. We succeeded in shortening of the time from movement of the rotatary actuator to stillness by this method. Less

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (38 results)

All 2004 2003 2002 Other

All Journal Article (26 results) Book (3 results) Publications (9 results)

  • [Journal Article] Levitation and Travel Control of Magnetically Levitated Linear Arm in Non-Contact Clean Robot2004

    • Author(s)
      KANEMITSU Yoichi, KIJIMOTO Shinya, MATSUDA Koichi
    • Journal Title

      Proc.of International Conference on Intelligent Manipulation and Grasping 1

      Pages: 302-307

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Evaluation of identification method of the fluid/structure interaction forces in turbo machine levitated by active magnetic bearings2004

    • Author(s)
      Tea-Jin PARK, Yoichi KANEMITSU, Shinya KIJIMOTO
    • Journal Title

      Proc.of 9^<th> International Symposium on Magnetic Bearings 1

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Image-Processing Approach to Vibration Isolation of a Scanning Electron Microscope2004

    • Author(s)
      K.MATSUDA, Y.KANEMITSU, S.KIJIMOTO, R.TANAKA
    • Journal Title

      The SPIE Journal of Microlithography, Microfabrication and Microsystems Vol.3 No.1

      Pages: 186-193

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] 磁気軸受支持回転体の不つりあいとセンサーランナウトの同定(第2報 重み付き逐次最小法を適用した同定法と実験)2004

    • Author(s)
      朴泰〓, 金光陽一, 雉本信哉, 松田浩一
    • Journal Title

      日本機械学会論文集 C編 70-691

      Pages: 656-663

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] A Study on Stability Criteria of Rotor-AMB System2004

    • Author(s)
      KANEMITSU, Yoichi
    • Journal Title

      Proc.NEDO-ISO Joint Workshop

      Pages: 3-13

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Levitation and Travel Control of Magnetically Levitated Linear Arm in Non-Contact Clean Robot2004

    • Author(s)
      KANEMITSU Yoichi, KIJIMOTO Shinya, MATSUDA Koichi
    • Journal Title

      Proc.of International Conference on Intelligent Manipulation and Grasping

      Pages: 302-307

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation of identification method of the fluid/structure interaction forces in turbo machine levitated by active magnetic bearings2004

    • Author(s)
      Tea-Jin PARK, Yoichi KANEMITSU, Shinya KIJIMOTO
    • Journal Title

      Proc.of 9^<th> International Symposium on Magnetic Bearings (CD-ROM)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Image-Processing Approach to Vibration Isolation of a Scanning Electron Microscop2004

    • Author(s)
      K.MATSUDA, Y.KANEMITSU, S.KIJIMOTO, R.TANAKA
    • Journal Title

      The SPIE Journal of Microlithography, Microfabrication and Microsystems

      Pages: 186-193

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Identification of Unbalance and Sensor Runout on Rigid Rotor Supported by Magnetic Bearings (2^<nd> report Identification Method and Experiment by the Weighted-incremental Least Square On-line Mehtod)2004

    • Author(s)
      Tea-Jin PARK, Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA
    • Journal Title

      Transaction of the Japan Society of Mechanical Engineers, Series C Vol.70, No.691

      Pages: 656-663

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Evaluation of identification method of the fluid/structure interaction forces in turbo machine levitated by active magnetic bearings2004

    • Author(s)
      Tea-Jin PARK, Yoichi KANEMITSU, Shinya KIJIMOTO
    • Journal Title

      Proc.of 9^<th> International Symposium on Magnetic Bearings 1(CD-ROM)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Active Magnetic Bearings International Standardization2003

    • Author(s)
      Yoichi Kanemitsu, Osami Matsushita
    • Journal Title

      Proc.7^<th> International symposium on magnetic suspension technology(ISMST7)

      Pages: 268-275

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Identification of unbalance and sensor runout on rigid rotor supported by magnetic bearings using weighted-incremental least square on-line method2003

    • Author(s)
      Tea-Jin PARK, Yoichi KANEMITSU
    • Journal Title

      Proc.ofAsia-Pacific Vibration Conference 2003

      Pages: 550-555

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 非接触クリーンロボットのリニアアームの浮上制御2003

    • Author(s)
      金光陽一, 雉本信哉, 松田浩一, 松下晃洋, 西村英高
    • Journal Title

      第8回「運動と振動の制御」シンポジウム講演論文集

      Pages: 159-162

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Control of Non-contact Clean Robot (Levitation Control of Linear Actuator)2003

    • Author(s)
      Akihiro MATSUSHITA, Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Hidetaka NISHIMURA
    • Journal Title

      Proc.JSME NO.03-7(CD-ROM)

    • NAID

      110002483158

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Identification of unbalance and sensor runout on rigid rotor supported by magneticbearings using weighted-incremental least square on-line method2003

    • Author(s)
      Tea-Jin PARK, Yoichi KANEMITSU
    • Journal Title

      Proc.of Asia-Pacific Vibration Conference

      Pages: 550-555

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Levitation Control of Linear Arm in Non-contact Clean Robot (Stable travel by changing bias current of AMB)2003

    • Author(s)
      Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA, Akihiro MATSUSHITA, Hidetaka NISHIMURA
    • Journal Title

      Proc.8^<th> Symposium on Motion and Vibration Control

      Pages: 159-162

    • NAID

      110002502055

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] 能動磁気浮上システムによる微振動制御2002

    • Author(s)
      渡辺和英, 金光陽一, 原辰次, 芳我尚秀
    • Journal Title

      日本機械学会論文集C編 66-669

      Pages: 63-71

    • NAID

      110002378491

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] クリーンロボットの磁気浮上系の制御に関する研究2002

    • Author(s)
      松田浩一
    • Journal Title

      ネスレ科学振興年報 9

      Pages: 1-6

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Robust Controller Design of Rotary Actuator of Contact-free Clean Robot Using Magnetic Bearings2002

    • Author(s)
      Y.Kanemitsu, K.Fujii, S.kijimoto, K.Matsudam, K.Watanabe
    • Journal Title

      Proc.6^<th> Internationl Conference on Motion and Vibration Control

      Pages: 1110-1115

    • NAID

      110002490117

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Controller Design of an Electromagnetically Levitated Vibration Isolation System2002

    • Author(s)
      M.Suzuki, Y.Kanemitsu, S.Kijimoto, K.Matsuda
    • Journal Title

      Proc.8^<th> International Conference on Magnetic Bearings

      Pages: 133-138

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Identification of Unbalance and High Order Sensor Runout on Rigid Rotor Supported by Magnetic Bearing2002

    • Author(s)
      T.J.Park, Y.Kanemitsu, S.Kijimoto, K.Matsuda, Y.Koba
    • Journal Title

      Proc.8^<th> International Conference on Magnetic Bearings

      Pages: 355-360

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Levitation Control of Linear Arm in Non-Contact Clean2002

    • Author(s)
      Yoichi KANEMITSU, Shinya KIJIMOTO, Koichi MATSUDA
    • Journal Title

      Proc.7^<th> International symposium on magnetic suspension technology(ISMST7)

      Pages: 296-301

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Micro-Vibration Control by Active Magnetic Levitation System2002

    • Author(s)
      Katsuhide WATANABE, Yoichi KANEMITSU, Shinji HARA, Takahide HAGA
    • Journal Title

      Transaction of the Japan Society of Mechanical Engineers, Series C Vol.68, No.669

      Pages: 1405-1413

    • NAID

      110002378491

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Robust Robust Controller Design of Rotary Actuator of Contact-free Clean Robot Using Magnetic Bearings2002

    • Author(s)
      Kanemitsu, Y., Fujii, K., Kijimoto, S., Matsuda, K., Watanabe, K.
    • Journal Title

      Proc.6^<th> International Conference on Motion and Vibration Control

      Pages: 1110-1115

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Controller Design of an Electromagnetically Levitated Vibration Isolation System2002

    • Author(s)
      Suzuki, M., Kanemitsu, Y., Kijimoto, S., Matsuda, K.
    • Journal Title

      Proc.8^<th> International Symposium on Magnetic Bearings

      Pages: 133-138

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Inentification of Unbalance and High Order Sensor Runouton Rigid Rotor Supported by Magnetic Bearings2002

    • Author(s)
      Park, T.J., Kanemitsu, Y., Kijimoto, S., Matsuda, K., Koba, Y.
    • Journal Title

      Proc.8^<th> International Symposium on Magnetic Bearings

      Pages: 355-360

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] 磁気軸受ガイドブック2004

    • Author(s)
      金光陽一, 我妻隆夫, 高橋直彦, 福島康雄, 松下修己
    • Total Pages
      190
    • Publisher
      日本工業出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] Magnetic Bearing Guidebook2004

    • Author(s)
      Yoichi KANEMITSU, Takao AZUMA, Naohiko TAKAHASHI, Yasuo FUKUSHIMA, Osami MATSUSHITA
    • Publisher
      Nihhon Kogyo Shuppann
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Book] 磁気軸受ガイドブック2004

    • Author(s)
      金光陽一, 高橋直彦, 福島康雄, 松下修己
    • Total Pages
      190
    • Publisher
      日本工業出版
    • Related Report
      2004 Annual Research Report
  • [Publications] Yoichi KANEMITSU.Shinya KIJIMOTO, Koichi MATSUDA: "Levitation Control of Linear Arm in Non-Contact Clean"Proc.7^<th> International symposium on magnetic suspension technology(ISMST7). 296-301 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Yoichi Kanemitsu, Osami Matsushita: "Active Magnetic Bearings International Standardization"Proc.7^<th> International symposium on magnetic suspension technology(ISMST7). 268-275 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Tea-Jin PARK, Yoichi KANEMITSU: "Identification of unbalance and sensor runout on rigid rotor supported by magnetic bearings using weighted-incremental least square on-line method"Proc.of Asia-Pacific Vibration Conference 2003. 550-555 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 金光陽一, 雉本信哉, 松田浩一, 松下晃洋, 西村英高: "非接触クリーンロボットのリニアアームの浮上制御"第8回「運動と振動の制御」シンポジウム講演論文集. 159-162 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 渡辺和英, 金光陽一, 原辰次, 芳我尚秀: "能動磁気浮上システムによる微振動制御"日本機械学会論文集C編. 68-669. 63-71 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 松田浩一: "クリーンロボットの磁気浮上系の制御に関する研究"ネスレ科学振興会年報. 9. 1-6 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Kanemitsu, K.Fujii, S.Kijimoto, K.Matsuda, K.Watanabe: "Robust Controller Design of Rotary Actuator of Contact-Free Clean Robot Using Magnetic Bearings"Proc.6^<th> International Conference on Motion and Vibration Control. 1110-1115 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Suzuki, Y.Kanemitsu, S.Kijimoto, K.Matsuda: "Controller Design of an Electromagnetically Levitated Vibration Isolation system"Proc.8^<th> International Symposium on Magnetic Bearings. 133-138 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.J.Park, Y.Kanemitsu, S.Kijimoto, K.Matsuda, Y.Koba: "Identification of Unbalance and High Order Sensor Runout on Rigid Rotor Supported by Magnetic Bearings"Proc.8^<th> International Symposium on Magnetic Bearings. 355-360 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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