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"Studies on Tuning of Photonic Crystal Characteristics after Fabrication"

Research Project

Project/Area Number 14550337
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionTeikyo University of Science and Technology

Principal Investigator

NAGANUMA Mitsuru  Teikyo Univ. of Sci. & Tech., Department of Science and Technology, Professor, 理工学部, 教授 (70319086)

Co-Investigator(Kenkyū-buntansha) NAKAO Mashashi  NTT Photonics Laboratory, Integrated Photnics Device Lab., Senior Research Eng., フォトニクスデバイス研究部, 主幹研究員
TAKAHASHI Kiyoshi  Teikyo Univ. of Sci. & Tech., Department of Science and Technology, Professor, 理工学部, 教授 (10016313)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥3,400,000 (Direct Cost: ¥3,400,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2002: ¥2,400,000 (Direct Cost: ¥2,400,000)
KeywordsPhotonic Crystals / Auto-Cloning Technology / Twofold Exposure Method / High Dispersion Fiber / Femto-Second Pulse / Supercontinuum Light / Photonic Bandgap / International Information Exchange / スーパーコンテイニューム光 / 2次元構造 / 半導体ピラー / チューニング技術 / レーザ発振 / ドライエッチングダメージ
Research Abstract

(1)Position control of 2D pillar structure by electron beam irradiation and their lasing action
Photonic crystal with 2D pillar structure is fabricated by dry etching of GaAs/A1GaAs multi-layered structure. By irradiation of electron beam in the SEM apparatus, it observed that regularly arranged lattice was deformed and bunched locally. This phenomenon is analyzed in terms of the balance of Coulomb attractive and repulsive forces. It was found that the Coulomb force is enough strong to give permanent deformation to the pillar with the dimensions of 0.3 μm diameter and 1μm long.
Lasing characteristics were investigated on the 2D photonic crystal mentioned above using Ti-Sapphire laser as an excitation source. It was confirmed that the crystal lased with the excitation threshold of 100mW based on the dependence of output light power on excitation power. The lasing wavelength was at the higher energy edge of the calculated photonic band gap, where the optical gain band of GaAs and the photo … More nic band gap cross over.
(2)Fabrication and evaluation of the combined structure photonic crystal and semiconductor
Above-mentioned photonic crystal structure with tuning mechanism has a weak point that dry etched damage results in poor optical gain although basic material is semiconductor. To overcome this problem, dielectric photonic crystal was combined with semiconductor multiplayer structure. That is, SiO_2/Si 3D photonic crystal was grown on semiconductor MOW structure with 2D corrugation on their surface. Photoluminescence propagating through MQW waveguide was affected by the presence of overgrown photonic crystal and showed new luminescence peak resulted from interaction of MOW optical gain and periodical feature of the photonic crystal. In addition to the semiconductor substrate, aluminum oxide hall array fabricated by anodic oxidization of aluminum metal was successfully used.
(3)Supercontinuum light generation through photonic crystal fiber
We have paid attention to the very small cores in the cladding of photonic crystal fiber, which are unintentionally generated and so-called pseudo core. Using specially designed coupling optics it became possible to hit the specific pseudo core by Ti-Sapphire pulse laser with pulse width less than 1ps. The supercontinuum light raged from 450nm to 1400nm was obtained. Since the size of the pseudo core is so small even sub-mm-long-fiber is able to produce the supercontinuum light, which is, to our knowledge, the shortest length of supercontinuum light generation. It was preliminarily observed the supercontinuum light with 35μm-long-SiO2 air suspended wire fabricated by Si photolithography. Less

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (43 results)

All Other

All Publications (43 results)

  • [Publications] M.Naganuma, et al.: "Optical and mechanical properties of GaAs/AlGaAs 2-D photonic crystals"Proc. of the 4th Japanese-Spanish-German Workshop on Recent Progress in Advanced Materials, Devices, Processing, and Cha racterization. 5 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Segawa, et al.: "Fabrication of 3D photonic crystals on 2D-patterned InP substrates"Proc. of the intern. Conf. on Indium Phosphide and Related Materials (IPRM'02). PII. 17-20 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Nakao, et al.: "Fabrication of GaAs Hole Array as a 2D-Photonic Crystal and Their Application to Phonic Bandgap Waveguide"Opt.Quantum Electronics. 34. 183 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 中尾正史, 他: "InP基板上自己クローニング3次元フォトニック結晶"2002年電子情報通信学会ソサエティー大会予稿集. C-4-8 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 高橋俊一, 他: "Si基板上自己クローニング3次元フォトニック結晶"第63回応用物理学会学術講演会予稿集. 25a-YA-6 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 宇田和也, 他: "InP基板上自己クローニング3次元フォトニック結晶(2):構造解析"第63回応用物理学会学術講演会予稿集. 25a-YA-7 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 辻綾太郎, 他: "InP基板上自己クローニング3次元フォトニック結晶(3):スペクトル解析"第63回応用物理学会学術講演会予稿集. 25a-YA-8 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 中尾正史, 他: "InP基板上自己クローニング3次元フォトニック結晶(4):発光特性"第63回応用物理学会学術講演会予稿集. 25a-YA-9 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Nakao, et al.: "Femto-second-laser inducedphotoemission from InP-based MQW structure with over-cladding layerof 3-dimensional Si/SiO2 photonic crystals fabricated by autocloning technology"Proc. of Sixth International Symposium on Contemporary Photonics Technology(CPT2003). 86-87 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Takahashi, et al.: "Fabrication of 3D a-Si/SiO2 photonic crystals on 2D sub-micron-patterned Si substrates"Proc. of Sixth International Symposium on Contemporary Photonics Technology(CPT2003). 57-58 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Tsuji, et al.: "Optical characteristics of 3D-photonic crystals fabricated on 2D-patterned semiconductor substrates by autocloning technology"Proc. of Sixth International Symposium on Contemporary Photonics Technology(CPT2003). 59-60 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 中尾正史, 他: "フォトニック結晶ファイバの広帯域光源への応用(1):マルチコア型PCF"2003秋 応用物理学会学術講演会 予稿集. 1p-ZD-16 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 酒巻健司, 他: "フォトニック結晶ファイバの広帯域光源への応用(2):SC発生の励起波長依存性"2003秋 応用物理学会学術講演会 予稿集. 31a-ZM-7 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 酒巻健司, 他: "フォトニック結晶ファイバの広帯域光源への応用?スーパーコンティニューム光発生の初期および成長過程"2003電子情報通信学会ソサイエティ大会ダイジェスト. C-3-39 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 中尾正史, 他: "高規則アルミナ上へのオートクローニングによるTa205/Si02 3次元構造作製と特性評価"2003電子情報通信学会ソサイエティ大会ダイジェスト. C-3-45 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Mitsuru NAGANUMA, et al.: "Nano-Photonics --Control of Light-Wave by Nano-Process Technology--"Technical Digest of Japan-Germany-Spain Joint Workshop on Advanced Semiconductor Optoelectronic Devices and materials. 34-35 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Kenji Sakamaki, et al.: "Initial and Growth Stages of Supercontimuum Generation in Photonic Crystal Fiber"Technical Digest of 7th International Symposium on Contemporary Photonics Technology (CPT2004). 50-51 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Naganuma, M.Nakao, M.Izutsu: "Optical and mechanical properties of GaAs/AlGaAs 2-D photonic crystals"Proc. of the 4th Japanese-Spanish-German Workshop on Recent Progress in Advanced Materials, Devices, Processing, and Characterization. Paper#5. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Segawa, K.Utaka M.Naganuma, T.Sato, S.Kawakami, M.Izutsu, M.Nakao: "Fabrication of 3D photonic crystals on 2D-patterned InP substrates"Int'l Conf. on Indium Phosphide and Related Materials (IPRM'02),. PII-17. (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Nakao, K.Utaka, T.Sato, M.Naganuma, M.Izutsu: "Femto-second-laser inducedphotoemission from InP-based MQW structure with over-cladding layerof 3-dimensional Si/SiO 2 photonic crystals fabricated by autocloning technology"Sixth International Symposium on Contemporary Photonics Technology(CPT2003). E-3. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Takahashi, H.Nakaoka, K.Utaka, M.Naganuma, T.Sato, M.Izutsu, M.Nakao: "Fabrication of 3D a-Si/SiO 2 photonic crystals on 2D sub-micron-patterned Si substrates"Sixth International Symposium on Contemporary Photonics Technology (CPT2003). D-10. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] R.Tsuji, K.Nakamura, K.Utaka, M.Naganuma, T.Sato, M.Izutsu, M.Nakao: "Optical characteristics of 3D-photonic crystals fabricated on 2D-patterned semiconductor substrates, by autocloning technology"Sixth International Symposium on Contemporary Photonics Technology (CPT2003). D-11. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Sakamaki, M.Nakao, M.Naganuma, M.Izutsu: "Initial and Growth Stages of Supercontinuum Generation in Photonic Crystal Fiber"CPT2004. (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Naganuma, K.Sakamaki, M.Nakao, M.Izutsu: "Nano-Photonics -Control of Light-Wave by Nano-Process Technology-"Japan-Germany-Spain Joint Workshop on Advanced Semiconductor Optoelectronic Devices and Materials March Oita, Japan. 13-14 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Sakamaki, M.Nakao, M.Naganuma, M.Izutsu: "Soliton Induced Supercontinuum Generation in Photonic Crystal Fiber"IEEE J. Selected Quantum Electron.. (Submitted). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Mitsuru NAGANUMA, et al.: "Nano-Photonics --Control of Light-Wave by Nano-Process Technology--"Technical Digest of Japan-Germany-Spain Joint Workshop on Advanced Semiconductor Optoelectronic Devices and Materials. 34-35 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Kenji Sakamaki, et al.: "Initial and Growth Stages of Supercontinuum Generation in Photonic Crystal Fiber"Technical Digest of 7th International Symposium on Contemporary Photonics Technology (CPT2004). 50-51 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] 中尾正史 他: "フォトニック結晶ファイバの広帯域光源への応用(1):マルチコア型PCF"2003秋 応用物理学会学術講演会 予稿集. 1p-ZD-16 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 酒巻健司 他: "フォトニック結晶ファイバの広帯域光源への応用(2):SC発生の励起波長依存性"2003秋 応用物理学会学術講演会 予稿集. 31a-ZM-7 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 酒巻健司 他: "フォトニック結晶ファイバの広帯域光源への応用?スーパーコンティニューム光発生の初期および成長過程"2003電子情報通信学会ソサイエティ大会ダイジェスト. C-3-39 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 中尾正史 他: "高規則アルミナ上へのオートクローニングによるTa2O5/SiO2 3次元構造作製と特性評価"2003電子情報通信学会ソサイエティ大会ダイジェスト. C-3-45 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Naganuma et al.: "Optical and mechanical properties of GaAs/AlGaAs 2-D photonic crystals"Proc. of the 4th Japanese-Spanish-German Workshop on Recent Progress in Advanced Materials, Devices, Processing, and Characterization. 5 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Segawa et al.: "Fabrication of 3D photonic crystals on 2D-patterned InP substrates"Proc.of the intern.Conf.on Indium Phosphide and Related Materials (IPRM'02). PII. 17-20 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Nakao et al.: "Femto-second-laser inducedphotoemission from InP-based MQW structure with over-cladding layerof 3-dimensional Si/SiO2 photonic crystals fabricated by autocloning technology"Proc.of Sixth International Symposium on Contemporary Photonics Technology(CPT2003). 86-87 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] S.Takahashi et al.: "Fabrication of 3D a-Si/SiO2 photonic crystals on 2D sub-micron-patterned Si substrates"Proc.of Sixth International Symposium on Contemporary Photonics Technology(CPT2003). 57-58 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] R.Tsuji et al.: "Optical characteristics of 3D-photonic crystals fabricated on 2D-patterned semiconductor substrates by autocloning technology"Proc.of Sixth International Symposium on Contemporary Photonics Technology(CPT2003). 59-60 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] M.Nakao et al.: "Fabrication of GaAs Hole Array as a 2D-Photonic Crystal and Their Application to Phonic Bandgap Waveguide"Opt.Quantum Electronics. 34. 183 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] A.Yokoo et al.: "Emission From Functional-Polymer-Injected Point Defect in Two-Dimensional Photonic Crystal"J.Quantum Electronics. (In press). (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] 中尾正史 他: "InP基板上自己クローニング3次元フォトニック結晶"2002年電子情報通信学会ソサイエティー大会予稿集. C-4-C-8 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 高橋俊一, 他: "Si基板上自己クローニング3次元フォトニック結晶"第63回応用物理学会学術講演会予稿集. 25a-YA-6 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 宇田和也, 他: "InP基板上自己クローニング3次元フォトニック結晶(2):構造解析"第63回応用物理学会学術講演会予稿集. 25a-YA-7 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 辻綾太郎, 他: "InP基板上自己クローニング3次元フォトニック結晶(3):スペクトル解析"第63回応用物理学会学術講演会予稿集. 25a-YA-8 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 中尾正史: "InP基板上自己クローニング3次元フォトニック結晶(4):発光特性"第63回応用物理学会学術講演会予稿集. 25a-YA-9 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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