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Impurity doping into semiconductors by electron irradiation with low energy

Research Project

Project/Area Number 14550338
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field 電子デバイス・機器工学
Research InstitutionDaido Institute of Technology

Principal Investigator

FUJIMOTO Hiroshi  Daido Institute of Technology, Dept. of Informatics, Associate Professor, 情報学部, 助教授 (90075911)

Co-Investigator(Kenkyū-buntansha) WADA Takao  Nagoya Sangyou University, Dept. of Industrial Information, Professor, 産業情報学部, 教授 (60023040)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2004: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2003: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2002: ¥1,500,000 (Direct Cost: ¥1,500,000)
Keywordselectron irradiation / electron beam doping / impurity doping / pn junction / SIMS / photoluminescence / electron beam doping / CVD法 / pn junction / SIMS法 / BCl_3 / PCl_3 / B doping / P doping / photoluminescence / kick-out machanism / GaAs / Si / diamond
Research Abstract

Impurity atoms can be doped into semiconductor substrates by electron irradiation with considerably low energy (750 keV energy was used for the investigation). This method is named electron beam doping (EBD). In this investigation Si, GaAs, SiC and diamond were used as semiconductor substrates, and Zn, Si B and B atoms were doped into the substrates. Distribution of impurity atoms in the substrate was observed by SIMS (Secondary Ion Mass Spectrometry) after EBD. Photoluminescence (PL) was also measured for typical samples.
Electron irradiation with energy of 750 keV was carried out on every three-layer structure of GaAs/Zn//Zn/GaAs, GaAs/Si//Si/GaAs, GaAs//Si//GaAs, Si//P//Si, Si/B_6Si//Si, Si//Ge//Si, where a mark [/] denotes that an element material is deposited on the substrate by evaporation and a mark [//] denotes that a surface is in contact with other one. SIMS results showed impurity atoms were doped into all substrates.
Formation of pn junctions was confirmed on samples : the Si substrate doped with P atoms by the electron irradiation on the Si/P//P/Si structure and the Si one doped with B atoms using two-layer structure of B_4C//Si, respectively.

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (13 results)

All 2003 Other

All Journal Article (8 results) Publications (5 results)

  • [Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      phys.stat.sol.(C) 0, No.2

      Pages: 780-787

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electron beam doping of impurity atoms into semiconductors by superdiffusion2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      phys.stat.sol.(C) 0, No.2

      Pages: 788-794

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electron beam doping (superdiffusion) technique in semiconductors at room temperature2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      Defect and Diffusion Forum Vols.221-223

      Pages: 23-30

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      phys.stat.sol.(C) O, No.2

      Pages: 780-787

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electron beam doping of impurity atoms into semiconductors by superdiffusion2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      phys.stat.sol.(C) O, No.2

      Pages: 788-794

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Superdiffusion of impurity atoms in damage-free regions of semiconductors2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      Phisica status solidi (c) 0.No.2

      Pages: 780-787

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Electron beam doping of impurity atoms into semiconductors by kick-out mechanism2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      Psica status solidi (C) 0.No.2

      Pages: 788-794

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Diodes fabricated by electron beam doping (superdiffusion) technique in semiconductors at room temperature2003

    • Author(s)
      Takao Wada, Hiroshi Fujimoto
    • Journal Title

      Defect and Deffusion Forum Vols.221-223

      Pages: 23-30

    • Related Report
      2004 Annual Research Report
  • [Publications] Takao Wada, Hiroshi Fujimoto: "Superdiffusion of impurity atoms in damage-free regions of Semiconductors"phisica status solidi (C). 0.No.2. 780-787 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takao Wada, Hiroshi Fujimoto: "Electron beam doping of impurity atoms into semiconductors by kick-out mechanism"phisica status solidi (C). 0.No.2. 788-794 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takao Wada, Hiroshi Fjimoto: "Diodes fabricated by electron beam doping (superdiffusion) technique in semiconductors at room temperature"Defect and Diffusion Forum. Vols.221-223. 23-30 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Takao Wada, Hiroshi Fujimoto: "Superdiffusion of impurity atoms in damage-free regions of semiconductors"phisica status solidi (c). 0.No.2. 780-787 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Takao Wada, Hiroshi Fujimoto: "Electron beam doping of impurity atoms into semiconductors by superdiffusion"phsica status solidi. 0.No.2. 788-794 (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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