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High performance control system for thin film deposition in plasma based on evanescent laser spectroscopy

Research Project

Project/Area Number 14550407
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionHokkaido University

Principal Investigator

BRATESCU Maria a.  Hokkaido Univ., Div.of Electr.Inf.Eng., Research Associate, 大学院・工学研究科, 助手 (70312379)

Co-Investigator(Kenkyū-buntansha) SUDA Yoshiyuki  Hokkaido Univ., Div.of Electr.Inf.Eng., Research Associate, 大学院・工学研究科, 助手 (70301942)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2003: ¥700,000 (Direct Cost: ¥700,000)
Fiscal Year 2002: ¥2,900,000 (Direct Cost: ¥2,900,000)
KeywordsLaser spectroscopy / Evanescent Wave / Thin film deposition / Laser Ablation / Excited Particles / Thin film properties / Plasma Diagnostics
Research Abstract

The main results of the research were focused on the followings objectives : to understand the mechanism of a film growth in plasma and in a plasma-assisted laser ablation system and to understand the influence of the deposited film on the spectroscopic and electrical characteristics of plasma. Finally we can control the film properties during the deposition process.
(A)Dielectric barrier discharge (DBD) plasma in CH_4 and Ar gas mixtures used for a-C:H film deposition
1.Spectroscopic and electrical properties of DBD
In plasma, we measured Ar(1s_5), Ar(1s_3) and Ar(1s_2) atoms number density using a plasma modulation laser absorption spectroscopy coupled with laser absorption spectroscopy system. The CH(X^2Π) radical number density was measured using optical emission spectroscopy and actinometry method. The excitation transfer from Ar(1s_5) and Ar(1s_3) metastable atom to CH(A^2Δ) radical, which was induced by collisions in plasma, was observed by laser collisional induced fluorescence. A … More r(1s_5) metastable atoms in the vicinity of about 300nm of the film surface were detected by using evanescent wave absorption spectroscopy method.
The electrical properties of DBD were measured using V-Q Lissajous figures. The effective gas breakdown voltage, the electncal charge discharged through the gas in half cycle and the energy deposited in full cycle, characterized DBD plasma.
2.Film analysis
The contents of sp^3,sp^2 bonds and CH_2,CH_3 groups in the a-C:H film were determined by using Fourier Transform Infra Red (FTIR) spectroscopy. The content of hydrogen in the film was calculated from the IR absorption spectrum. The refractive index, the extinction coefficient and the thickness of the a-C:H film were determined using spectroscopic ellipsometry method. The energy gap of the film was calculated from the extinction coefficient of a-C:H film The maximum value of the energy band gap, which corresponds to a high content of sp^3 fraction in the film, was obtained when CH radical number density in the plasma was minimum (〜10^8cm^<-3>).
(B)RF plasma-assisted laser ablation of carbon in nitrogen atmosphere
The spatial distributions of C and N atoms were measured by time-resolved absorption spectroscopy. The spatial distributions of the relative densities of CN radical, C_2, and C_3 molecules were measured using time-resolved emission spectroscopy. We determined that nitrogen gas produced an increase of carbon atoms and molecules densities in the ablation plume. It was observed that addition of RF plasma to the plume increased the CN radical and C atom densities and decreased the C_2 and C_3 molecule densities.
The RF plasma changed the evolution of various fractional species of C,N,CN,C_2 and C_3 in the ablation plume. The chemical reactions with and without RF plasma were explained using the evolution and the density of the fractional species of C,N,CN,C_2 and C_3 in the plume. Film properties depend on the composition of the laser ablation plume. Less

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (117 results)

All Other

All Publications (117 results)

  • [Publications] M.A.Bratescu, Y.Sakai, D.Yamoka, Y.suda, H.Sugawara: "Electron and Excited Particle Densities in a Carbon Ablation Plume"Applied Surface Science. 197-198. 257-262 (2002)

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  • [Publications] M.A.Bratescu, N.Sakura, D.Yamaoka, Y.Sakai, H.Sugawara, Y.Suda: "Spectroscopic measurements of excited particles in a N2 gas RF plasma-assisted carbon laser ablation"Applied Physics A. (in press). (2004)

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  • [Publications] 吉崎泰直, Bratescu Maria-Antoaneta, 酒井洋輔, 須田善行, 菅原広剛: "Ar+CH_4バリア放電を用いたa-C:H堆積におけるAr(1s_<3,5>)およびCHのレーザ分光診断"電気学会論文誌. 124-A. 158-163 (2004)

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  • [Publications] M.A.Bratescu, M.Yanagida, Y.Sakai: "Excitation transfer on a Xe discharge tube wall detected by evanescent wave"Proceedings of Joint Conference ESCAMPIG 16 (European Conference on Atomic and Molecular Physics of Ionized Gases) and ICRP 5 (International Conference on Reactive Plasma),July,14-18,Grenoble, France. 1. 287 (2002)

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  • [Publications] M.A.Bratescu, Y.Sakai, Y.Yoshizaki: "Investigation of collisional mixing between Ar(4s[3/2]_<1,2>) and Ar(4s'[1/2]_<0,1>) using optical-optical double resonance absorption spectroscopy"Program of the 55-th Annual Gaseous Electronics Conference, YF1 4,Minneapolis, Minnesota, October,2002. 47-7. 75 (2002)

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  • [Publications] M.A.Bratescu, D.Yamaoka, Y.Sakai, Y.Suda, H.sugawara: "Investigation of excited species in a carbon ablation plume in nitrogen gas environment"Proceedings of 16th International Symposium on Plasma Chemistry, Taormina, Itary, June 22-27. 57 (2003)

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      2003 Final Research Report Summary
  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai: "Carbon Nanostructure Growth by Short-wavelength Laser Ablation"Proceedings of 16th International Symposium on Plasma Chemistry, Taormina, Itary, June 22-27. 557 (2003)

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  • [Publications] Y.Sakai, N.Sakura, M.A.Bratescu, Y.Suda, H.Sugawara: "Spectroscopy investigation of the excited particles in an rf plasma-aided laser ablation plume"Program of the 56-th Annual Gaseous Electronics Conference, NWP.006,NASA AMES Research Center, San Francisco, 21-24 October. (2003)

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  • [Publications] Y.Sakai, Y.Yoshizaki, M.A.Bratescu, Y.Suda: "Laser spectroscopy investigations of the collisional processes in Ar and CH_4 mixtures in a dielectric barrier discharge"Program of the 56-th Annual Gaseous Electronics Conference, NWP.007,NASA AMES Research Center, San Francisco, 21-24 October. (2003)

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  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai, Y.Suda: "Role of Ar(1s_5) atoms and CH(X_2・) radicals in a CH_4/Ar dielectric barrier discharge used for a-C:H deposition"Proceedings of LAPD11 11th International Symposium on LASER-AIDED PLASMA DIAGNOSTICS 28 Sep.-02 Oct. 2003 Les Houches France. (2003)

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  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai: "Level mixing diagnostics using double resonance absorption spectroscopy"Proceedings of LAPD11 11th International Symposium on LASER-AIDED PLASMA DIAGNOSTICS 28 Sep.-02 Oct. 2003 Les Houches France(Invited Lecture). (2003)

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  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, J.Tsujino, K.Suzuki: "Growth of carbon nanotube on Fe or Ni-diposited Si substrate by feeding carbon ablation plume"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10,2003,Hersonissos, Crete, Geece. (2003)

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  • [Publications] M.Itoh, Y.Suda, M.A.Bratescu, Y.Sakai, K.Suzuki: "Amorphous carbon nitride film preparation by plasma-assisted pulsed laser deposition method"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10,2003,Hersonissos, Crete, Geece. (2003)

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  • [Publications] M.A.Bratescu, N.Sakura, D.Yamaoka, Y.Sakai, Y.Suda, H.Sugawara: "Spectroscopic measurements of excited particles in a N_2 gas RF plasma-assisted carbon laser ablation"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10,2003,Hersonissos, Crete, Geece. (2003)

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  • [Publications] 山岡大祐, M.A.Bratescu, 酒井洋輔, 須田善行: "レーザ吸収分光法によるカーボンプルーム中のArII密度測定"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集,29a-D-10. 1. 174 (2002)

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  • [Publications] 柳田雅紀, M.A.Bratescu, 酒井洋輔, 菅原広剛: "放電管壁における励起Xe(1s_5)密度と電子密度・温度との関係"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集,30a-D-3. 1. 175 (2002)

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  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "光学二重共鳴を用いたArガスプラズマ中の衝突過程の研究"2002年(平成14年)秋季 第63回応用物理学関係連合講演会講演予稿集,24a-ZA-11. 1. 97 (2002)

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  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "2光子レーザー吸収分光法におけるArパルスプラズマの診断"2002年(平成14年)電気関係学会北海道支部連合大会講演論文集,No.78. 118 (2002)

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  • [Publications] 柳田雅紀, M.A.Bratescu, 酒井洋輔, 菅原広剛: "エバネセント波を用いたXe放電管壁における励起遷移レートの測定"平成14年度 電気学会研究会 放電研究会 ED-02-88. 1. 13-18 (2002)

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  • [Publications] 山岡大祐, M.A.Bratescu, 須田善行, 酒井洋輔: "カーボンアブレーションプルームの電子、イオン、励起原子密度測定"平成14年度 電気学会研究会 放電研究会 ED-02-89. 1. 19-24 (2002)

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  • [Publications] 酒井洋輔, M.A.Bratescu, 柳田雅紀: "エヴァネセント波吸収法によるXeプラズマ管壁のXe(1s_5)密度と励起移行に関する研究"平成14年度 第17回 光源物性とその応用研究会資料 LS-02-41,AR-02-10、PE-02-10. 65-74 (2002)

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  • [Publications] 太田章嗣, C.Biloiu, 酒井洋輔, M.A.Bratescu, 須田善行: "C_8F_<18>プラズマCVDを用いたa-C:F膜の生成とその特性の評価"電気学会放電研究会資料,ED-03-115. 49-54 (2003)

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  • [Publications] 宇高孝二, 須田善行, M.A.Bratescu, 酒井洋輔, 菅原広剛: "短波長レーザアブレーションによるカーボンナノチューブ合成"電気学会放電研究会資料,ED-03-114. 43-48 (2003)

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  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH_4バリア放電を用いたa-C:H堆積におけるAr(1s_<3,5>)およびCHのレーザ分光診断"電気学会基礎・材料・共通部門大会講演予稿集 II7. 19-24 (2003)

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  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH_4混合ガスにおける誘電体バリアプラズマのAr(1s_<3,5>)とCH励起種エネルギー移行"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,31a-R-3. 1. 93 (2003)

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  • [Publications] 佐倉伸和, M.A.Bratescu, 酒井洋輔, 須田善行: "RFプラズマ支援レーザ炭素アブレーションプルーム中励起種の分光学的診断"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,31a-R-2. 1. 93 (2003)

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  • [Publications] 宇高孝二, 須田善行, M.A.Bratescu, 酒井洋輔, 菅原広剛: "短波長レーザアブレーションによる多層カーボンナノチューブ作成"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,30a-YA-1. 1. 429 (2003)

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  • [Publications] 太田章嗣, C.Biloiu, M.A.Bratescu, 酒井洋輔: "C_8F_<18>プラズマCVDによるa-C:F膜堆積とその特性"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,1a-ZG-5. 1. 106 (2003)

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  • [Publications] M.A.Bratescu, Y.Sakai, M.Yanagida: "Measurement of Xe(1s5) on a Barrier Discharge Wall by Evanescent Laser Spectroscopy"平成15年 第20回プラズマプロセシング研究会(SPP20)プロシーディングス A3-6、2003年1月29日〜31日、長岡. 71-72 (2003)

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  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, T.Kojima: "Formation of carbon nanostructure by pulsed laser deposition"平成15年 第20回プラズマプロセシング研究会(SPP20)プロシーディングス P1-39、2003年1月29日〜31日、長岡. 213-214 (2003)

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  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH4混合ガスDBDによるa-C:H薄膜堆積とDBDのレーザ分光診断"平成15年春季第50回応用物理学関係連合講演会,29p-E-1(2003). 1. 159 (2003)

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  • [Publications] A.Ohta, S.Tazawa, Y.Sakai, M.A.Bratescu: "Relationship between the C_8F_<18> plasma and a-C:F film properties by PECVD"平成16年 第21回プラズマプロセシング研究会(SPP21) プロシーディングスA1-09、2004年1月28日〜30日、札幌. 32-33 (2004)

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  • [Publications] Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda, H.Sugawara: "Relation between plasma and a-C:H film properties in Ar and CH_4 dielectric barrier discharge"平成16年 第21回プラズマプロセシング研究会(SPP21) プロシーディングスP1-22、2004年1月28日〜30日、札幌. 114-115 (2004)

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  • [Publications] N.Sakura, M.A.Bratescu, Y.Sakai, Y.Suda: "Analysis of the carbon plume and the thin film properties in a N_2 gas RF plasma-assisted PLD"平成16年 第21回プラズマプロセシング研究会(SPP21) プロシーディングスP1-23、2004年1月28日〜30日、札幌. 116-117 (2004)

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  • [Publications] S.Tazawa, A.Ohta, Y.Sakai, M.A.Bratescu: "Enhancement of breakdown voltage between a-C:F film coated electrodes in N_2,Ar and He gases"平成16年 第21回プラズマプロセシング研究会(SPP21) プロシーディングスP1-42、2004年1月28日〜30日、札幌. 154-155 (2004)

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  • [Publications] S.Y.So, H.Sugawara, Y.Suda, M.A.Bratescu, Y.Sakai: "Numerical analysis of carbon plume in Ar plasma"平成16年 第21回プラズマプロセシング研究会(SPP21) プロシーディングスP3-12、2004年1月28日〜30日、札幌. 38-339 (2004)

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  • [Publications] A.Okita, Y.Hayakawa, Y.Suda, T.Kojima, Y.Sakai, M.A.Bratescu, H.Sugawara: "Carbon nanotube growth on Si/Al/SiO2 and Fe/Al/SiO2 substrates by plasma enhanced chemical vapor deposition"平成16年 第21回プラズマプロセシング研究会(SPP21) プロシーディングスP2-22、2004年1月28日〜30日、札幌. 242-243 (2004)

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  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai, Y.Suda: "Spectroscopic and electrical characteristics of a dielectric barrier discharge in Ar/CH_4 gas mixture"第18回光源物性とその応用研究会、神奈川大学、2003年12月1日,LS-03-17,AR-03-19,PE-03-09. 71-79 (2003)

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  • [Publications] M.A.Bratescu, Y.Sakai, D.Yamaoka, Y.Suda., H.Sugawara: "Electron and Excited Particle Densities in a Carbon Ablation Plume"Applied Surface Science. 197-198. 257-262 (2002)

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      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda, H.Sugawara: "Laser spectroscopy of Ar(1s_<3,5>) and CH in Ar+CH_4 DBD for a-C:H deposition system"IEEJ Transactions on Fundamentals and Materials. 124-A. 158-163 (2004)

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  • [Publications] M.A.Bratescu, N.Sakura, D.Yamaoka, Y.Sakai, H.Sugawara, Y.Suda: "Spectroscopic measurements of excited particles in a N2 gas RF plasma-assisted carbon laser ablation"Applied Physics A. (at press). (2004)

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  • [Publications] M.A.Bratescu, Y.Sakai, Y.Yoshizaki: "Investigation of collisional mixing between Ar(4s[3/2]_<1,2> and Ar(4s'[1/2]_<0,1>) using optical-optical double resonance absorption spectroscopy"Program of the 55-th Annual Gaseous Electronics Conference, YF1 4, Minneapolis, Minnesota. October. (2002)

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  • [Publications] M.A.Bratescu, D.Yamaoka, Y.Sakai, Y.Suda., H.Sugawara: "Investigation of excited species in a carbon ablation plume in nitrogen gas environment"Proceedings of 16th International Sympos on Plasma Chemistry, Taormina, Italy. June22-27. 57 (2003)

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  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai: "Carbon Nanostructure Growth by Short-wavelength Laser Ablation"Proceedings of 16th International Sympos on Plasma Chemistry, Taormina, Italy. June22-27. 557 (2003)

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  • [Publications] Y.Sakai, N.Sakura, M.A.Bratescu, Y.Suda, H.Sugawara: "Spectroscopy investigation of the excited particles in an rf plasma-aided laser ablation plume"Program of the 56-th Annual Gaseous Electronics Conference, NWP.006, NASA AMES Research Center, San Francisco. 21-24October. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Sakai, Y.Yoshizaki, M.A.Bratescu, Y.Suda: "Laser spectroscopy investigations of the colhsional processes in Ar and CH_4 mixtures in a dielectric barrier discharge"Program of the 56-th Annual Gaseous Electronics Conference, NWP.007, NASA AMES Research Center, San Francisco. 21-24 October. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai, Y.Suda: "Role of Ar(1s_5) atoms and CH(X^2Π) radicals in a CH_4/Ar dielectric barrier discharge used for a-C:H deposition"Proceedings of LAPD11 11th International Symposium on LASER-AIDED PLASMA DIAGNOSTICS 28 Sep.-02 Oct.Les Houches France,. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai: "Level mixing diagnostics using double resonance absorption spectroscopy"Proceedings of LAPD11 11th International Symposium on LASER-AIDED PLASMA DIAGNOSTICS 28 Sep.-02 Oct.Les Houches France, (Invited Lecture). (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, N.Sakura, D.Yamaoka, Y.Sakai, Y.Suda, H.Sugawara: "Spectroscopic measurements of excited particles in a N_2 gas RF plasma-assisted carbon laser ablation"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10, Hersonissos, Crete, Geece. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, M.Yanagida, Y.Sakai: "Excitation transfer on a Xe discharge tube wall detected by evanescent wave"Proceedings of Joint Conference ESCAMPIG 16 (European Conference on Atomic and Molecular Physics of Ionized Gases) and ICRP 5 (International Conference on Reactive Plasma), July, 14-18, Grenoble, France. 1. 287 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, J.Tsujno, K.Suzuki: "Growth of carbon nanotube on Fe or Ni-deposited Si substrate by feeding carbon ablation plume"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10, Hersonissos, Crete, Geece. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Itoh, Y.Suda, M.A.Bratescu, Y.Sakai, K.Suzuki: "Amorphous carbon nitride film preparation by plasma-assisted pulsed laser deposition method"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10, Hersonissos, Crete, Geece. (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] D.Yamaoka, M.A.Bratescu, Y.Sakai, Y.Suda: "Measurement of Ar ion number density in a carbon laser ablation plume system by using laser absorption spectroscopy"Extended Abstracts (The 49th Spring Meeting,2002), The Japan Society of Applied Physics and Related Societies 29a-D-10. 1. 174 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Yanagida, M.A.Bratescu, Y.Sakai, H.Sugawara: "Measurement of Xe excited state on 1s5 level on the discharge tube wall : relation with electron density and electron temperature"Extended Abstracts (The 49th Spring Meeting,2002), The Japan Society of Applied Physics and Related Societies 29a-D-10. 1. 175 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda: "Investigation of collisional mixing between Ar(4s[3/2]_<1,2>) and Ar(4s'[1/2]_<0,1>) using optical-optical double resonance absorption spectroscopy"Extended Abstracts (The 63th Autumn Meeting,2002), The Japan Society of Applied Physics and Related Societies 2 4a-ZA-11. 1. 97 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda: "Optical-optical double resonance absorption spectroscopy in pulsed plasma"Proceedings of the Technical Meeting on IEEJ Electrical Discharges Conference, Hokkaido Branch. No.78. 118 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Yanagida, M.A.Bratescu, Y.Sakai, H.Sugawara: "Measurement of the excitation transfer rate on xenon discharge tube wall by using evanescent wave absorption"Proceeding of IEE Japan, Fundamentals and Materials, ED-02-88. 1. 13-18 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] D.Yamaoka, M.A.Bratescu, Y.Suda., Y.Sakai: "Measurement of electron density, ion density and excited atom density in a carbon ablation plume"Proceeding of IEE Japan, Fundamentals and Materials, ED-02-89. 1. 19-24 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Sakai, M.A.Bratescu, M.Yanagida: "Measurement of Xe(1s5) number density on the plasma wall using laser colhstonaly induced fluorescence and evanescent laser absorption spectroscopy"Proceedings of The Japan Society of Applied Physics, the 17^<th> Conference of Light Sources. 1. 65-74 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Sakai, M.Yanagida: "Measurement of Xe(1s5) on a Barrier Discharge Wall by Evanescent Laser Spectroscopy"Proceedings of the 20^<th> Symposium on Plasma Processing. A3-6. 71-72 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, T.Kojima: "Formation of carbon nanostructure by pulsed laser deposition"Proceedings of the 20^<th> Symposium on Plasma Processing. P1-39. 213-214 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki.M.A.Bratescu, Y.Sakai, Y.Suda: "Deposition of a-C:H film a in Ar/CH4 dielectric barrier discharge and laser spectroscopy diagnostics"Extended Abstracts (The 50th Spring Meeting,2003), The Japan Society of Applied Physics and Related Societies 29p-E-1. 1. 159 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Ohta, C.Biloiu, Y.Sakai, M.A.Bratescu, Y.Suda: "a-C:F film deposition using C_8F_<18> plasma CVD and measurement of the film properties"Proceedings of the Technical Meeting on IEEJ Electrical Discharges Conference, ED-03-115. 1. 49-54 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Utaka, Y.Suda, M.A.Bratescu, Y.Sakai, H.Sugawara: "Carbon nanotube synthesis by using ablation with a short wavelength laser"Proceedings of the Technical Meeting on IEEJ Electrical Discharges Conference, ED-03-114. 1. 43-48 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki.M.A.Bratescu, Y.Sakai, Y.Suda: "Deposition of a-C:H film in dielectric barrier discharge and measurement of Ar(1s3,1s5) atom and CH radical using laser spectroscopy diagnostics"Proceedings of the Technical Meeting on IEEJ Electrical Discharges Conference. 117. 19-24 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki.M.A.Bratescu, Y.Sakai, Y.Suda: "Excitation transfer from Ar(1s3,1s5) atom to CH radical in Ar+CH4 dielectric barrier discharge"Extended Abstracts (The 64th Autumn Meeting,2003), The Japan Society of Applied Physics and Related Societies 31a-R-3. 1. 93 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Sakura.M.A.Bratescu, Y.Sakai, Y.Suda: "Optical spectroscopy of RF plasma aided laser ablation plume"Extended Abstracts (The 64th Autumn Meeting,2003), The Japan Society of Applied Physics and Related Societies 31a-R-2. 1. 93 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] K.Utaka, Y.Suda, M.A.Bratescu, Y.Sakai, H.Sugawara: "Formation of multiwall carbon nanotube using short wavelength laser ablation"Extended Abstracts (The 64th Autumn Meeting,2003), The Japan Society of Applied Physics and Related Societies 30a-YA-1. 1. 429 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Ohta, C.Biloiu.M.A.Bratescu, Y.Sakai: "Characteristics of a-C:F film deposited in C_8F_<18> plasma CVD system"Extended Abstracts (The 64th Autumn Meeting,2003), The Japan Society of Applied Physics and Related Societies 1a-ZG-5. 1. 106 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda, H.Sugawara: "Relation between plasma and a-C:H film properties in Ar and CH_4 dielectric barrier discharge"Proceedings of the 21^<st> Symposium on Plasma Processing. P1-22. 114-115 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] N.Sakura, M.A.Bratescu, Y.Sakai, Y.Suday: "Analysis of the carbon plume and the thin film properties in a N_2 gas RF plasma-assisted PLD"Proceedings of the 21^<st> Symposium on Plasma Processing. P1-23. 116-117 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Ohta, S.Tazawa.Y.Sakai, M.A.Bratescu: "Relationship between the C_8F_<18> plasma and a-C:F film properties by PECVD"Proceedings of the 21^<st> Symposium on Plasma Processing. A1-09. 32-33 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Tazawa, A.Ohta, Y.Sakai, M.A.Bratescu: "Enhancement of breakdown voltage between a-C:F film coated electrodes in N_2, Ar and He gases"Proceedings of the 21^<st> Symposium on Plasma Processing. P1-42. 154-155 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] S.Y.So, H.Sugawara, Y.Suda, M.A.Bratescu, Y.Sakai: "Numerical analysis of carbon plume in Ar plasma"Proceedings of the 21^<st> Symposium on Plasma Processing. B3-12. 338-339 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] A.Okita.Y.Hayakawa, Y.Suda, T.Kojima, Y.Sakai, M.A.Bratescu, H.Sugawara: "Carbon nanotube growth on Si/Al/SiO2 and Fe/Al/SiO2 substrates by plasma enhanced chemical vapor deposition"Proceedings of the 21^<st> Symposium on Plasma Processing. P2-22. 242-243 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai, Y.Suda: "Spectroscopic and electrical characteristics of a dielectric barrier discharge in Ar/CH_4 gas mixture"Proceedings of The Japan Society of Applied Physics, the 18^<st> Conference of Light Sources LS-03-17, AR-03-19, PE-03-09. 71-79 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.A.Bratescu, N.Sakura, D.Yamaoka, Y.Sakai, H.Sugawara, Y.Suda: "Spectroscopic measurements of excited particles in a N2 gas RF plasma-assisted carbon laser ablation"Applied Physics A. (in press). (2004)

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      2003 Annual Research Report
  • [Publications] 吉崎泰直, Bratescu Maria-Antoaneta, 酒井洋輔, 須田善行, 菅原広剛: "Ar+CH_4バリア放電を用いたa-C:H堆積におけるAr(1s_<3,5>)およびCHのレーザ分光診断"電気学会論文誌. 124-A. 158-163 (2004)

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      2003 Annual Research Report
  • [Publications] M.A.Bratescu, D.Yamaoka, Y.Sakai, Y.Suda, H.Sugawara: "Investigation of excited species in a carbon ablation plume in nitrogen gas environment"Proceedings of 16th International Symposium on Plasma Chemistry, Taormina, Italy, June 22-27. 57 (2003)

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      2003 Annual Research Report
  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai: "Carbon Nanostructure Growth by Short-wavelength Laser Ablation"Proceedings of 16th International Symposium on Plasma Chemistry, Taormina, Italy, June 22-27. 557 (2003)

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      2003 Annual Research Report
  • [Publications] Y.Sakai, N.Sakura, M.A.Bratescu, Y.Suda, H.Sugawara: "Spectroscopy investigation of the excited particles in an rf plasma-aided laser ablation plume"Program of the 56-th Annual Gaseous Electronics Conference, NWP.006, NASA AMES Research Center, San Francisco, 21-24 October. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Sakai, Y.Yoshizaki, M.A.Bratescu, Y.Suda: "Laser spectroscopy investigations of the collisional processes. in Ar and CH_4 mixtures in a dielectric barrier discharge"Program of the 56-th Annual Gaseous Electronics Conference, NWP.007, NASA AMES Research Center, San Francisco, 21-24 October. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai, Y.Suda: "Role of Ar(1s_5) atoms and CH(X^2・) radicals in a CH_4/Ar dielectric barrier discharge used for a-C:H deposition"Proceedings of LAPD11 11th International Symposium on LASER-AIDED PLASMA DIAGNOSTICS 28 Sep.-02 Oct. 2003 Les Houches France. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai: "Level mixing diagnostics using double resonance absorption spectroscopy"Proceedings of LAPD11 11th International Symposium on LASER-AIDED PLASMA DIAGNOSTICS 28 Sep.-02 Oct. 2003 Les Houches France(Invited Lecture). (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, J.Tsujino, K.Suzuki: "Growth of carbon nanotube on Fe or Ni-deposited Si substrate by feeding carbon ablation plume"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10, 2003, Hersonissos, Crete, Geece. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.Itoh, Y.Suda, M.A.Bratescu, Y.Sakai, K.Suzuki: "Amorphous carbon nitride film preparation by plasma-assisted pulsed laser deposition method"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10, 2003, Hersonissos, Crete, Geece. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] M.A.Bratescu, N.Sakura, D.Yamaoka, Y.Sakai, Y.Suda, H.Sugawara: "Spectroscopic measurements of excited particles in a N_2 gas RF plasma-assisted carbon laser ablation"Proceedings of COLA'03 7^<th> International Conference on Laser Ablation, October 5-10, 2003, Hersonissos, Crete, Geece. (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] 太田章嗣, C.Biloiu, 酒井洋輔, M.A.Bratescu, 須田善行: "C_8F_<18>プラズマCVDを用いたa-C : F膜の生成とその特性の評価"電気学会放電研究会資料,ED-03-115. 49-54 (2003)

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      2003 Annual Research Report
  • [Publications] 宇高孝二, 須田善行, M.A.Bratescu, 酒井洋輔, 菅原広剛: "短波長レーザアブレーションによるカーボンナノチューブ合成"電気学会放電研究会資料,ED-03-114. 43-48 (2003)

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      2003 Annual Research Report
  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH_4バリア放電を用いたa-C:H堆積におけるAr(1s_<3,5>)およびCHのレーザ分光診断"電気学会基礎・材料・共通部門大会講演予稿集 II7. 19-24 (2003)

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      2003 Annual Research Report
  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH_4混合ガスにおける誘電体バリアプラズマのAr(1s_<3,5>)とCH励起種エネルギー移行"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,31a-R-3. 1. 93 (2003)

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      2003 Annual Research Report
  • [Publications] 佐倉伸和, M.A.Bratescu, 酒井洋輔, 須田善行: "RFプラズマ支援レーザ炭素アブレーションプルーム中励起種の分光学的診断"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,31a-R-2. 1. 93 (2003)

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      2003 Annual Research Report
  • [Publications] 宇高孝二, 須田善行, M.A.Bratescu, 酒井洋輔, 菅原広剛: "短波長レーザアブレーションによる多層カーボンナノチューブ作成"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,30a-YA-1. 1. 429 (2003)

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      2003 Annual Research Report
  • [Publications] 太田章嗣, C.Biloiu, M.A.Bratescu, 酒井洋輔: "C_8F_<18>プラズマCVDによるa-C:F 膜堆積とその特性"2003年(平成15年)秋季 第64回応用物理学関係連合講演会講演予稿集,1a-ZG-5. 1. 106 (2003)

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      2003 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Sakai, M.Yanagida: "Measurement of Xe(1s5) on a Barrier Discharge Wall by Evanescent Laser Spectroscopy"平成15年 第20回プラズマプロセシング研究会(SPP20)プロシーディングス A3-6、2003年1月29日〜31日、長岡. 71-72 (2003)

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      2003 Annual Research Report
  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, T.Kojima: "Formation of carbon nanostructure by pulsed laser deposition"平成15年 第20回プラズマプロセシング研究会(SPP20)プロシーディングス P1-39、2003年1月29日〜31日、長岡. 213-214 (2003)

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      2003 Annual Research Report
  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH_4混合ガスDBDによるa-C:H薄膜堆積とDBDのレーザ分光診断"平成15年春季第50回応用物理学関係連合講演会,29p-E-1 (2003). 1. 159 (2003)

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      2003 Annual Research Report
  • [Publications] A.Ohta, S.Tazawa, Y.Sakai, M.A.Bratescu: "Relationship between the C_8F_<18> plasma and a-C:F film properties by PECVD"平成16年 第21回プラズマプロセシング研究会(SPP21)プロシーディングス A1-09、2004年1月28日〜30日、札幌. 32-33 (2003)

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      2003 Annual Research Report
  • [Publications] Y.Yoshizaki, M.A.Bratescu, Y.Sakai, Y.Suda, H.Sugawara: "Relation between plasma and a-C:H film properties in Ar and CH_4 dielectric barrier discharge"平成16年 第21回プラズマプロセシング研究会(SPP21)プロシーディングス P1-22、2004年1月28日〜30日、札幌. 114-115 (2004)

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      2003 Annual Research Report
  • [Publications] N.Sakura, M.A.Bratescu, Y.Sakai, Y.Suda: "Analysis of the carbon plume and the thin film properties in a N_2 gas RF plasma-assisted PLD"平成16年 第21回プラズマプロセシング研究会(SPP21)プロシーディングス P1-23、2004年1月28日〜30日、札幌. 116-117 (2004)

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      2003 Annual Research Report
  • [Publications] S.Tazawa, A.Ohta, Y.Sakai, M.A.Bratescu: "Enhancement of breakdown voltage between a-C:F film coated electrodes in N_2,Ar and He gases"平成16年 第21回プラズマプロセシング研究会(SPP21)プロシーディングス P1-42、2004年1月28日〜30日、札幌. 154-155 (2004)

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      2003 Annual Research Report
  • [Publications] S.Y.So, H.Sugawara, Y.Suda, M.A.Bratescu, Y.Sakai: "Numerical analysis of carbon plume in Ar plasma"平成16年 第21回プラズマプロセシング研究会(SPP21)プロシーディングス B3-12、2004年1月28日〜30日、札幌. 338-339 (2004)

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      2003 Annual Research Report
  • [Publications] A.Okita, Y.Hayakawa, Y.Suda, T.Kojima, Y.Sakai, M.A.Bratescu, H.Sugawara: "Carbon nanotube growth on Si/Al/SiO2 and Fe/AI/SiO2 substrates by plasma enhanced chemical vapor deposition"平成16年 第21回プラズマプロセシング研究会(SPP21)プロシーディングス(SPP 21)プロシーディングス P2-22、2004年1月28日〜30日、札幌. 242-243 (2004)

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      2003 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Yoshizaki, Y.Sakai, Y.Suda: "Spectroscopic and electrical characteristics of a dielectric barrier discharge in Ar/CH_4 gas mixture"第18回光源物性とその応用研究会、神奈川大学、2003年12月1日,LS-03-17,AR-03-19,PE-03-09. 71-79 (2003)

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      2003 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Sakai, D.Yamaoka, Y.Suda, H.Sugawara: "Electron and Excited Particle Densities in a Carbon Ablation Plume"Applied Surface Science. 197-198. 257-262 (2002)

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      2002 Annual Research Report
  • [Publications] M.A.Bratescu, M.Yanagida, Y.Sakai: "Excitation transfer on a Xe discharge tube wall detected by evanescent wave"Proceedings of Joint Conference ESCAMPIG 16 (European Conference on Atomic and Molecular Physics of Ionized Gases) and ICRP 5 (International Conference on Reactive Plasma). 1. 287 (2002)

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      2002 Annual Research Report
  • [Publications] M.A.Bratescu, Y.Sakai, Y.Yoshizaki: "Investigation of collisional mixing between Ar(4s[3/2]_<1,2>) and Ar(4s'[1/2]_<0,1>) using optical-optical double resonance absorption spectroscopy"Program of the 55-th Annual Gaseous Electronics Conference, YF14, Minneapolis, Minnesota, October, 2002. 47-7. 75 (2002)

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      2002 Annual Research Report
  • [Publications] 山岡大祐, M.A.Bratescu, 酒井洋輔, 須田善行: "レーザー吸収分光法によるカーボンプルーム中のArII密度測定"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集. 29a-D-10. 174 (2002)

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  • [Publications] 吉崎素直, M.A.Bratescu, 酒井洋輔, 菅原広剛: "放電管壁における励起Xe(1s_5)密度と電子密度・温度との関係"2002年(平成14年)春季 第49回応用物理学関係連合講演会講演予稿集. 30a-D-3. 175 (2002)

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      2002 Annual Research Report
  • [Publications] 吉崎素直, M.A.Bratescu, 酒井洋輔, 須田善行: "光学二重共鳴を用いたArガスプラズマ中の衝突過程の研究"2002年(平成14年)秋季 第63回応用物理学関係連合講演会講演予稿集. 24a-ZA-11. 97 (2002)

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  • [Publications] 吉崎素直, M.A.Bratescu, 酒井洋輔, 須田善行: "2光子レーザー吸収分光法におけるArパルスプラズマの診断"2002年(平成14年)電気関係学会北海道支部連合大会講演論文集. No.78. 118 (2002)

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  • [Publications] 柳田雅紀, M.A.Bratescu, 酒井洋輔, 菅原広剛: "エバネセント波を用いたXe放電管壁における励起遷移レートの測定"平成14年度 電気学会研究会 放電研究会 ED-02-88. 13-18 (2002)

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      2002 Annual Research Report
  • [Publications] 山岡大祐, M.A.Bratescu, 須田善行酒井洋輔: "カーボンアブレーションプルームの電子、イオン、励起電子密度測定"平成14年度 電気学会研究会 放電研究会 ED-02-89. 19-24 (2002)

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  • [Publications] M.A.Bratescu, Y.Sakai, M.Yanagida: "Measurement of Xe(1s5)on a Barrier Discharge Wall by Evanescent Laser Spectroscopy"平成15年 第20回プラズマプロセシング研究会 (SPP20) プロシーディングス A3-6. 71 (2003)

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  • [Publications] 酒井洋輔, M.A.Bratescu, 柳田雅紀: "エヴァネセント波吸収法によるXeプラズマ管壁のXe(1s_5)密度と励起移行に関する研究"平成14年度 第17回 光源物性とその応用研究会資料 LS-02-41, AR-02-10, PE-02-10. 65-74 (2002)

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  • [Publications] Y.Suda, K.Utaka, M.A.Bratescu, Y.Sakai, T.Kojima: "Formation of carbon nanostructure by pulsed laser deposition"平成15年 第20回プラズマプロセシング研究会 (SPP20) プロシーディングス P1-39. 213 (2003)

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  • [Publications] 吉崎泰直, M.A.Bratescu, 酒井洋輔, 須田善行: "Ar+CH4混合ガスDBDによるa-C : H薄膜堆積とDBDのレーザ分光診断"平成15年春季第50回応用物理学関係連合講演会, 2 9p-E-1. (2003)

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Published: 2002-04-01   Modified: 2016-04-21  

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