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Study on radiation damages of semiconductor devices for high and low temperature

Research Project

Project/Area Number 14550660
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Physical properties of metals
Research InstitutionKumamoto National College of Technology

Principal Investigator

SHIGAKI Kazusada  Kumamoto National College of Technology, Department of Electronic Engineering, Associate Professor, 電子工学科, 助教授 (50044722)

Co-Investigator(Kenkyū-buntansha) OHYAMA Hidenori  Kumamoto National College of Technology, Department of Electronic Engineering, Professor, 電子工学科, 教授 (80152271)
HAYAMA Kiyoteru  Kumamoto National College of Technology, Department of Information and Communication Engineering, Associate Professor, 情報通信工学科, 助教授 (00238148)
KUDOU Tomohiro  Kumamoto National College of Technology, Department of Electronic Engineering, Associate Professor, 電子工学科, 助教授 (90225160)
HAKATA Tetsuya  Kumamoto National College of Technology, Department of Electronic Control, Associate Professor, 電子制御工学科, 助教授 (60237899)
TAKAKURA Kenichirou  Kumamoto National College of Technology, Department of Electronic Engineering, Associate Researcher, 電子工学科, 助手 (70353349)
Project Period (FY) 2002 – 2004
Project Status Completed (Fiscal Year 2004)
Budget Amount *help
¥3,500,000 (Direct Cost: ¥3,500,000)
Fiscal Year 2004: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2003: ¥900,000 (Direct Cost: ¥900,000)
Fiscal Year 2002: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsRadiation damage / High energy particle / Electron / InGaAs photodiode / SOI MOS / Degradation / Induced lattice defects / Recovery by annealing / 高エネルギー粒子
Research Abstract

In these days when the use of nuclear reactors, high-energy particle accelerators and artificial satellites expands, the development of semiconductor devices, which can normally operate in a radiation-rich environment, is extensively taking place everywhere. In the project, the degradation of the electrical performance and the generated lattice defects in semiconductor devices, subjected to 1-MeV electrons, 1-MeV fast neutrons, were investigated as a function of fluence and radiation source. The radiation damages of semiconductor devices for high and low temperature was also studied. The main conclusions which can be made from the research project:
1. The degradation of the electrical performance of devices increases with increasing radiation fluence, while it decreases with increasing germanium content.
2. The electron capture levels, which act as generation-recombination center, are mainly responsible for the degradation of device performance.
3. At 300 ℃ irradiation, the reduction of the photo current is only 30 % of the starting value. This result suggests that the creation and recovery of the radiation damage proceeds simultaneously at high temperature irradiation.
4. The damage coefficient for neutron irradiation is nearly the same as for neutron irradiation and is about three orders of magnitude larger than that for electron irradiation. This difference is due to the different number of knock-on atoms, which is correlated with the difference of mass and the possibility of nuclear collisions for the formation of lattice defects.

Report

(4 results)
  • 2004 Annual Research Report   Final Research Report Summary
  • 2003 Annual Research Report
  • 2002 Annual Research Report
  • Research Products

    (36 results)

All 2004 2003 2002 Other

All Journal Article (24 results) Publications (12 results)

  • [Journal Article] Anomalous threshold voltage change by 2 MeV electron irradiation at 100℃ in deep submicron metal-oxide-semiconductor field-effect transistors2004

    • Author(s)
      K.Hayama et al.
    • Journal Title

      Appl.Phys.Lett. Vol.84

      Pages: 3088-3090

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] A study on radiation damage of IGBTs by 2-MeV electrons at different irradiation temperature2004

    • Author(s)
      H.Ohyama et al.
    • Journal Title

      Nucl.Instrum.Methods B Vol.219-220

      Pages: 676-679

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Radiation damages of InGaAs photodiodes by high-temperature electron irradiation2004

    • Author(s)
      H.Ohyama et al.
    • Journal Title

      Nucl.Instrum.Methods B Vol.219-220

      Pages: 718-721

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Electron irradiation effect on thermal donors in CZ-Si2004

    • Author(s)
      K.Takakura et al.
    • Journal Title

      Eur.Phys.J.Appl.Phys. Vol.27

      Pages: 133-135

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Degradation of electrical performance and floating body effect in ultra thin gate oxide FD-SOI n-MOSFETs by 7.5-MeV proton irradiation2004

    • Author(s)
      K.Hayama et al.
    • Journal Title

      Microelectron.Reliab. Vol.44

      Pages: 1721-1726

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Annual Research Report 2004 Final Research Report Summary
  • [Journal Article] Impact of 7.5-MeV proton irradiation on front-back gate coupling effect in ultra thin gate oxide FD-SOI n-MOSFETs2004

    • Author(s)
      K.Hayama et al.
    • Journal Title

      IEEE Trans.on Nucl.and Sci. Vol.51

      Pages: 3795-3800

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Anomalous threshold voltage change by 2 MeV electron irradiation at 100 ℃ in deep submicron metal-oxide-semiconductor field-effect transistors2004

    • Author(s)
      H.K.Hayama, Ohyama, E.Simoen, J.M.Rafi, A.Mercha, C.Claeys
    • Journal Title

      Appl.Phys.Lett. 84

      Pages: 3088-3090

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Radiation damages of InGaAs photodiodes by high-temperature electron irradiation2004

    • Author(s)
      H.Ohyama, K.Takakura, M.Nakabayashi, T.Hirao, S.Onoda, T.Kamiya, E.Simoen, C.Claeys, S.Kuboyama, K.Oka, S.Matsuda
    • Journal Title

      Nucl.Instrum.Methods B 219-220

      Pages: 718-721

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Electron irradiation effect on thermal donors in CZ-Si2004

    • Author(s)
      K.Takakura, H.Ohyama, H.Murakawa, T.Yoshida, J.M.Rafi, R.Job, A.Ulyashin, E.Simoen, C.Claeys
    • Journal Title

      Eur.Phys.J.Appl.Phys. 27

      Pages: 133-135

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Degradation of electrical performance and floating body effect in ultra thin gate oxide FD-SOI n-MOSFETs by 7.5-MeV proton irradition2004

    • Author(s)
      K.Hayama, K.Takakura, H.Ohyama, A.Marcha, E.Simoen, C.Claeys, J.M.Rafi, M.Kokkoris
    • Journal Title

      Microelectron.Reliab. 44

      Pages: 1721-1726

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Impact of 7.5-MeV proton irradiation on front-back gate coupling effect in ultra thin gate oxide FD-SOI n-MOSFETs2004

    • Author(s)
      K.Hayama, K.Takakura, H.Ohyama, J.M.Rafi, A.Mercha, Simoen, C.Claeys
    • Journal Title

      IEEE Trans.on Nucl.and Sci 51

      Pages: 3795-3800

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Imapct of 7.5-MeV proton irradiation on front-back gate coupling effect in ultra thin gate oxide FD-SOI n-MOSFETs2004

    • Author(s)
      K.Hayama et al.
    • Journal Title

      IEEE Trans.on Nucl.and Sci. Vol.51

      Pages: 3795-3800

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Damage coefficient in high-temperature particle- and g-irradiated silicon p-i-n diode2003

    • Author(s)
      H.Ohyama, K.Takakura, K.Hayama, S.Kuboyama, Y.Deguchi, S.Matsuda, E.Simoen, C.Claeys
    • Journal Title

      Appl.Phys.Lett. 82

      Pages: 296-298

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Radiation damage in Si photodiodes by high temperature irradiation2003

    • Author(s)
      H.Ohyama, K.Takakura, E.Simoen, K.Kobayashi, C.Claeys, J.Uemura, T.Kishikawa
    • Journal Title

      Physica E 16

      Pages: 533-538

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Effects of irradiation temperature on radiation damage in electron-irradiated MOS FETs2003

    • Author(s)
      H.Ohyama, K.Hayama, K.Takakura, E.Simoen, C.Claeys
    • Journal Title

      Microelectronic Engineering 66

      Pages: 530-535

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Radiation damage of Si photodides by high-temperature irradiation2003

    • Author(s)
      H.Ohyama, K.Takakura, K.Shigaki, T.Jono, E.Simoen, C.Claeys, J.Uemura, T.Kishikawa
    • Journal Title

      Microelectronic Engineering 66

      Pages: 536-541

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Irradiation temperature dependence of radiation damage in STI diodes2003

    • Author(s)
      H.Ohyama, K.Hayama, K.Takakura, T.Miura, K.Shigaki, T.Jono, E.Simoen, A.Poyai, C.Claeys
    • Journal Title

      Microelectronic Engineering 66

      Pages: 517-521

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Radiation damage induced in Si photodiodes by high-temperature neutron irradiation2003

    • Author(s)
      H.Ohyama, E.Simoen, C.Claeys, K.Takakura, T.Jono, H.Matsuoka, J.Uemura, T.Kishikawa
    • Journal Title

      Journal of Materials Science. 14

      Pages: 437-440

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Influence of irradiation temperature on electron-irradiated STI diodes2003

    • Author(s)
      H.Ohyama, K.Hayama, K.Takakura, T.Miura, K.Shigaki, T.Jono, E.Simoen, A.Poyai, C.Claeys
    • Journal Title

      Journal of Materials Science 14

      Pages: 451-454

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Recovery behaviour resulting from thermal annealing in n-MOSFETs irradiated by 20-MeV protons2003

    • Author(s)
      K.Takakura, H.Ohyama, A.Ueda, M.Nakabayashi, K.Hayama, K.Kobayashi, E.Simoen, K.Kobayashi, E.Simoen, A.Mercha, C.Claeys
    • Journal Title

      Semicond.Sci.Technology 18

      Pages: 506-511

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Induced lattice defects in InGaAs photodides by high-temperature electron irradiation2003

    • Author(s)
      H.Ohyama, K.Kobayashi, J.Vanhellemont, E.Simoen, C.Claeys, K.Takakura, T.Hirao, S.Onoda
    • Journal Title

      Physica B 340-342

      Pages: 337-340

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Comparison of electron irradiation effect on thermal donors in CZ and oxygen doped FZ silicon2003

    • Author(s)
      K.Takakura, H.Ohyama, T.Yoshida, H.Murakawa, J.M.Rafi, R.Job, A.Ulyashin, E.Simoen, C.Claeys
    • Journal Title

      Physica B 340-342

      Pages: 1022-1025

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Radiation effects on n-MOSFETs fabricated in a BiCMOS process2002

    • Author(s)
      H.Ohyama, E.Simoen, C.Claeys, K.Hayama, M.Nakabayashi, A.Ueda, K.Kobayashi
    • Journal Title

      Nucl.Instrum.Methods B 186

      Pages: 419-423

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Journal Article] Radiation damage of polycrystalline Silicon films2002

    • Author(s)
      H.Ohyama, M.Nakabayashi, E.Simoen, C.Claeys, K.Tanaka, K.Kobayashi
    • Journal Title

      Nucl.Instrum.Methods B 186

      Pages: 176-180

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2004 Final Research Report Summary
  • [Publications] H.Ohyama et al.: "Damage coefficient in high-temperature particle- and -irradiated silicon p-i-n diode"Appl.Phys.Lett.. Vol.82. 296-298 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Ohyama et al.: "Radiation damage in Si photodiodes by high temperature irradiation"Physica E. Vol.16. 533-538 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Ohyama et al.: "Effects of irradiation temperature on radiation damage in electron-irradiated MOS FETs"Microelectronic Engineering. Vol.66. 530-535 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Ohyama et al.: "Radiation damage induced in Si photodiodes by high-temperature neutron irradiation"Journal of Materials Science. Vol.14. 473-440 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Ohyama et al.: "Influence of irradiation temperature on electron-irradiated STI diodes"Journal of Materials Science. Vol.14. 451-454 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takakura et al.: "Recovery behaviour resulting from thermal annealing in n-MOSFETs irradiated by 20-MeV protons"Semicond.Sci.Technology. Vol.18. 506-511 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] H.Ohyama et al.: "Radiation effects on n-MOSFETs fabricated in a BiCMOS process"Nucl.Instrum.Methods B. Vol.186. 419-423 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Ohyama et al.: "Radiation damage in flash memory cell"Nucl.Instrum.Methods B. Vol.186. 392-400 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Ohyama et al.: "Radiation damage of polycrystalline Silicon films"Nucl.Instrum.Methods B. Vol.186. 176-180 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Ohyama et al.: "Defects assessment of irradiated STI diodes"Nucl.Instrum.Methods B. Vol.186. 424-428 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Ohyama et al.: "Effects of mechanical stress on polycrystalline-silicon resistors"Thin Solid Films. Vol.406/1-2. 195-199 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] H.Ohyama et al.: "Damage coefficient in high-temperature particle-and -irradiated silicon p-i-n diode"Appl.Phys.Lett.. Vol.82. 296-298 (2003)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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