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Preparation of oxide semiconductor films via solution deposition method and investigation on the interfaces inside the films

Research Project

Project/Area Number 14550665
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionGifu University

Principal Investigator

OHYA Yutaka  Gifu University, Faculty of Engineering, Professor, 工学部, 教授 (80167311)

Co-Investigator(Kenkyū-buntansha) BAN Takayuki  Gifu University, Faculty of Engineering, Research associate, 工学部, 助手 (70273125)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2003: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 2002: ¥2,600,000 (Direct Cost: ¥2,600,000)
Keywordszinc oxide films / preferred oriented film / ethanolamine / hydroxyketone / thin film transistor / zirconia film / 電気伝導度 / 高誘電率膜 / 酸素吸着 / フォトルミネッセンス / アセトイン
Research Abstract

Zinc oxide films were fabricated using a sol, which was prepared from zinc acetate with additions of diethanolamine, and co-addition of monoethanolamine and acetoin. The prepared sol was 0.5 mol/L concentration. The co-added amounts of monoethanolamine and acetoin were equimolar and a half molar to zinc, respectively. The substrates used were heat resistant glass and silicon wafer with oxide layer of 130 nm thick. A non-ionic surfactant was used for coating on silicon wafer. Deposited films by a dip-coating procedure were heated at 600 to 900 to form oxide films. In order to investigate the thin film transistor, zirconia thin film was also deposited between the silicon wafer and zinc oxide layer.
By rapid heat treatment, zinc oxide films were oriented with c-axis perpendicular to the substrate surface. The electrical resistivity of the films heated at 500-600℃ ranged 1 to 5 Ωcm, and became larger when heated higher temperature. The film of the lowest resistivity, had a carrier density of 10^<16> cm^3 and a mobility of 1-5 cm^2/Vs. The measurement of electrical conductivity of this film deposited on SiO_2/Si wafer revealed a considerable amount of leakage current through the insulating SiO_2 layer. This leakage was attributed to defects of the SiO2 layer. In order to passivate the SiO_2 layer, cover deposition with Ta_2O_5 or ZrO_2 was examined. The ZrO_2 film with smooth surface was obtained and the film prevented the leakage through the insulating layer. Thus manufactured multilayered film, ZnO/ZrO_2/SiO_2/Si, exhibited an excellent feature as a thin film transistor.

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (40 results)

All Other

All Publications (40 results)

  • [Publications] T.Ban, Y.Ohya, Y.Takahashi: "Reaction of Titanium Isopropoxide with Alkanolamines and Association of the Resultant Ti Species."J.Sol-Gel Sci.Tech.. 27. 363-372 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ban, S.Kondoh, T.Ohya, Y.Ohya, Y.Takahashi: "Photocatalysis of A Transparent Titanate Aqueous Sol Prepared from Titanium Tetraisopropoxide and Tetramethylammonium Hydroxide."J.Photochem.Photobiol.A, Chem.. 165. 219-225 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, A.Nakayama, T.Ban, Y.Ohya, Y.Takahashi: "Effects of Photoirradiation on the Properties of Layered Titanate Thin Films from Transparent Aqueous Titanate Gels."Bull.Chem.Soc.Jpn.. 76. 429-435 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Syukri, T.Ban, Y.Ohya, Y.Takahashi: "Synthesis of Metallic Ni and Ni-Co Alloy Fine Powders from a Mixed-Metal Acetate Precursor."Mater Chem.Phys.. 78. 645-649 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, A.Nakayama, Y.Shibata, T.Ban, Y.Ohya, Y.Takahashi: "Preparation and Characterization of Titania Thin Films from Aqueous Solutions."J.Sol-Gel Sci.Tech.. 26. 799-802 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya, T.Tamakoshi, T.Ban, Y.Takahashi: "Lead Zirconate Titanate Thick Films by Sol-Gel Method for Piezoelectric Application."Proc.13^<th> IEEE Inter.Symp.Appl.Ferroelectrics 2002. 467-470 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Syukri, Y.Ito, T.Ban, Y.Ohya, Y.Takahashi: "Use of 2-Hydroxylhydrazine as a New Modifier in Dip-Coating Nickel Films."Thin Solid Films. 422. 48-54 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya, K.Horinouchi, T.Ban, Y.Takahashi, N.Murayama: "Gas Sensing Properties of Al_2O_3/SnO_2 Multilayered Films Modified with Pt"J.Ceram.Soc.Jpn.. 110. 950-953 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Syukri, T.Ban, Y.Ohya, Y.Takahashi: "Novel Approach to Deposition of Copper Thin Films by Dip-Coating Method"J.Mater.Sci.Letters. 21. 1449-1451 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, M.Kabata, T.Ban, Y.Ohya, Y.Takahashi: "Effect of α-Hydroxyketones as Chelate Ligands on Dip-Coating of Zirnonia Thin Films"J.Sol-Gel Sci.Tech.. 25. 43-50 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, A.Nakayama, T.Ban, Y.Ohya, Y.Takahashi: "Synthesis and Characterization of Halogen-free, Transparent, Aqueous Colloidal Titanate Solutions from Titanium Alkoxide"Chem.Mater. 14. 3082-3089 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Matsui, Y.Yoshimura, T.Ohya, T.Ban, Y.Ohya, Y.Takahashi: "Preparation and Characterization of Dye-Doped Zirconia Gel Films from Zirconium Tetra-n-butoxide Stabilized with Diethanolamine or Acetoin."Bull.Chem.Soc.Jpn.. 75. 589-593 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya, S.Itoda, T.Ban, Y.Takahashi: "Lead Zirconate Titanate Thick Films Fabricated from Sols with and without Its Powder"Jpn.J.Appl.Phys.. 41. 270-274 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] 大矢 豊: "透明導電膜の新展開II,第10章「ディップコート法による高性能ITO膜の作製」"シーエムシー出版. 122-133 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ban, Y.Ohya, Y.Takahashi: "Reaction of Titanium Isopropoxide with Alkanolamines and Association of the Resultant Ti Species."J.Sol-Gel Sci.Tech.. 27[3]. 363-372 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ban, S.Kondoh, T.Ohya, Y.Ohya, Y.Takahashi: "Photocatalysis of A Transparent Titanate Aqueous Sol Prepared from Titanium Tetraisopropoxide and Tetramethylammonium Hydroxide."J.Photochem.Photobiol.A.Chem.. 156. 219-225 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, A.Nakayama, T.Ban, Y.Ohya, Y.Takahashi: "Effects of Photoirradiation on the Properties of Layered Titanate Thin Films from Transparent Aqueous Titanate Gels."Bull.Chem.Soc.Jpn.. 76. 429-435 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Syukri, T.Ban, Y.Ohya, Y.Takahashi: "Synthesis of Metallic Ni and Ni-Co Alloy Fine Powders from a Mixed-Metal Acetate Precursor."Mater Chem.Phys.. 78[3]. 645-649 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, A.Nakayama, Y.Shibata, T.Ban, Y.Ohya, Y.Takahashi: "Preparation and Characterization of Titania Thin Films from Aqueous Solutions."J.Sol-Gel Sci.Tech.. 26[1]. 799-902 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya, T.Tamakoshi, T.Ban, Y.Takahashi: "Lead Zirconate Titanate Thick Films by Sol-Gel Method for Piezoelectric Application."Proc.13^<th> IEEE Inter.Symp.Appl.Ferroelectrics 2002. 467-470 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Syukri, Y.Ito, T.Ban, Y.Ohya, Y.Takahashi: "Use of 2-Hydroxyihydrazine as a New Modifier in Dip-Coating Nickel Films."Thin Solid Films. 422[1-2]. 48-54 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya, K.Horinouchi, T.Ban, Y.Takahashi, N.Murayama: "Gas Sensing Properties of Al_2O_3/SnO_2 Multilayered Films Modified with Pt."J.Ceram.Soc.Jpn.. 110[10]. 950-953 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Syukri, T.Ban, Y.Ohya, Y.Takahashi: "Approach to Deposition of Copper Thin Films by Dip-Coating Method."J.Mater.Sci.Letters. 21[18]. 1449-1451 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, M.Kabata, T.Ban, Y.Ohya, Y.Takahashi: "Effect of α-Hydroxyketones as Chelate Ligands on Dip-Coating of Zirconia Thin Films"J.Sol-Gel Sci.Tech.. 25[1]. 43-50 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ohya, A.Nakayama, T.Ban, Y.Ohya, Y.Takahashi: "Synthesis and Characterization of Halogen-free, Transparent, Aqueous Colloidal Titanate Solutions from Titanium Alkoxide."Chem.Mater. 14[7]. 3082-3089 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] M.Matsui, Y.Yoshimura, T.Ohya, T.Ban, Y.Ohya, Y.Takahashi: "Preparation and Characterization of Dye-Doped Zirconia Gel Films from Zirconium Tetra-n-butoxide Stabilized with Diethanolamine or"Bull.Chem.Soc.Jpn.. 75[3]. 589-593 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya, S.Itoda, T.Ban, Y.Takahashi: "Zirconate Titanate Thick Films Fabricated from Sols with and without Its Powder."Jpn.J.Appl.Phys.. 41[1]. 270-274 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Y.Ohya: "High performance ITO films by dip-coating method"Developments of transparent conductive films II (CMC Publisher Inc.). 122-133 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] T.Ban, Y.Ohya, Y.Takahashi: "Reaction of Titanium Isopropoxide with Alkanolamines and Association of the Resultant Ti Species"J.Sol-Gel Sci.Tech. 27・3. 363-372 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Ban, S.Kondoh, T.Ohya, Y.Ohya, Y.Takahashi: "Photocatalysis of A Transparent Titanate Aqueous Sol Prepared from Titanium Tetraisopropoxide and Tetramethylammonium Hydroxide"J.Photochem.Photbiol.A, Chem. 156. 219-225 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Ohya, A.Nakayama, T.Ban, Y.Ohya, Y.Takahashi: "Effects of Photoirradiation on the Properties of Layered Titanate Thin Films from Transparent Aqueous Titanate Gels"Bull.Chem.Soc.Jpn. 76. 429-435 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Syukri, T.Ban, Y.Ohya, Y.Takahashi: "A Simple Synthesis of Metallic Ni and Ni-Co Alloy Fine Powders from a Mixed-Metal Acetate Precursor"Mater.Chem.Phys.. 78・3. 645-649 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Ohya, A.Nakayama, Y.Shibata, T.Ban, Y.Ohya, Y.Takahashi: "Preparation and Characterization of Titania Thin Films from Aqueous Solutions"J.Sol-Gel Sci.Tech.. 26・1. 799-802 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Syukri, T.Ban, Y.Ohya, Y.Takahashi: "A Simple Synthesis of Metallic Ni and Ni-Co Alloy Fine Powders from a Mixed-Metal Acetate Precursor"Mater. Chem. Phys. 78・3. 645-649 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Ohya, A.Nakayama, Y.Shibata, T.Ban, Y.Ohya, Y.Takahashi: "Preparation and Characterization of Titania Thin Films from Aqueous Solutions"J. Sol-Gel Sci. Tech. 26・1. 799-802 (2003)

    • Related Report
      2002 Annual Research Report
  • [Publications] Syukri, Y.Ito, T.Ban, Y.Ohya, Y.Takahashi: "Use of 2-Hydroxylhydrazine as a New Modifier in Dip-Coating Nickel Films"Thin Solid Films. 422・1-2. 48-54 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Ohya, K.Horinouchi, T.Ban, Y.Takahashi, N.Murayama: "Gas Sensing Properties of Al_2O_3/SnO_2 Multilayered Films Modified with Pt"J. Ceram. Soc. Jpn.. 110・10. 950-953 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] T.Ohya, A.Nakayama, T.Ban, Y.Ohya, Y.Takahashi: "Synthesis and Characterization of Halogen-free, Transparent, Aqueous Colloidal Titanate Solutions from Titanium Alkoxide"Chem. Mater.. 14・7. 3082-3089 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Y.Ohya, S.Itoda, T.Ban, Y.Takahashi: "Lead Zirconate Titanate Thick Films Fabricated from Sols with and without Its Powder"Jpn. J. Appl. Phys.. 41・1. 270-274 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] 大矢 豊: "透明導電膜の新展開II,第10章「ディップコート法による高性能ITO膜の作製」"シーエムシー出版. 122-133 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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