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PREPARATION OF PIEZOELECTRIC PZT THIN FILMS BY HYBRID PROCESSING

Research Project

Project/Area Number 14550695
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Material processing/treatments
Research InstitutionTOHOKU UNIVERSITY

Principal Investigator

WANG Zhan jie  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院・工学研究科, 助教授 (20323074)

Co-Investigator(Kenkyū-buntansha) MAEDA Ryutaro  National Institute of Advanced Science and Technology, Senior Researcher, 産業技術総合研究所, 主任研究官 (60357986)
SATO Yutaka  Tohoku University, Graduate School of Engineering, Research Associate, 大学院・工学研究科, 助手 (00292243)
KOKAWA Hiroyuki  Tohoku University, Graduate School of Engineering, Professor, 大学院・工学研究科, 教授 (10133050)
Project Period (FY) 2002 – 2003
Project Status Completed (Fiscal Year 2003)
Budget Amount *help
¥3,600,000 (Direct Cost: ¥3,600,000)
Fiscal Year 2003: ¥1,300,000 (Direct Cost: ¥1,300,000)
Fiscal Year 2002: ¥2,300,000 (Direct Cost: ¥2,300,000)
KeywordsPZT thin film / sol-gel method / laser ablation / hybrid processing / preferred orientation / electrical properties / piezoelectric properties / micro actuator / マイクロアクチュェータ
Research Abstract

Thin films of Pb(Zr_xTi_<1-x>)O_3 (PZT) were prepared by hybrid processing (sol-gel method and laser ablation) on Pt/Ti/SiO_2/Si substrates. The temperature of post-deposition annealing in hybrid processing is lower than that in the case of direct film deposition by laser ablation on a Pt/Ti/SiO_2/Si substrate. The preferred orientation of the films derived by hybrid processing can be controlled using the layer deposited by the sol-gel method. The films fabricated by hybrid processing consist of the perovskite phase with a (111)-preferred orientation and have good ferroelectric properties. The effect of Zr/Ti ratio on the electrical properties and crystal structure as well as microstructure of the PZT films was investigated, too. It was found that the PZT films derived from the target with a Zr/Ti ratio of 45/55 exhibited better electric properties than that derived from the target with a Zr/Ti ratio of 52/48, and their composition was close to the morphotropic phase boundary compositi … More on. The transmission electron microscopy image showed that the films had a polycrystalline columnar microstructure extending through the thickness of the film, and no sharp interface was observed between the layers obtained by the sol-gel method and laser ablation. The HTEM image also revealed that the crystalline lattice of the layers was continuous and there was no difference in. crystalline orientation between the layers obtained by the sol-gel method and laser ablation. These results indicated that the lower PZT layer deposited by the sol-gel method acted as a seed layer for the crystallization of the upper PZT layer deposited by laser ablation. The solid-phase epitaxial effect between the PZT layers deposited by the sol-gel method and laser ablation lowers the temperature of postdeposition annealing, and the preferred orientation of the PZT films can be controlled using the layer deposited by the sol-gel method. In the application, the micromirror actuated by the PZT film was designed and fabricated successfully with three-mask lithography process. The scanning performance is demonstrated while driving the device at the measured resonant frequency. Less

Report

(3 results)
  • 2003 Annual Research Report   Final Research Report Summary
  • 2002 Annual Research Report
  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] Z.J.WANG, I.Karibe, R.MAEDA, H.KOKAWA: "Preparation of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing : Sol-Gel Method and Laser Ablation"J.Am.Ceram.Soc.. 85・12. 3108-3110 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, I.KARIBE, R.MAEDA, H.KOKAWA: "Microstructure and Electrical Properties of PZT Thin Films Deposited by Laser Ablation on Template Layer"Integrated Ferroelectrics. 46. 187-195 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, I.KARIBE, L.J.YAN, R.MAEDA, H.KOKAWA: "Effect of Zr/Ti Ratio in Targets on Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition on Template Layer"Jpn.J.Appl.Phys.. 41・11. 6658-6663 (2002)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, L.J.YAN, Y.AOKI, H.KOKAWA, R MAEDA: "Preparation and Characterization of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing : Sol-Gel Method and Pulsed Laser Deposition"Jpn.J.Appl.Phys.. 42・9. 5936-5940 (2003)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, H.Y.Bi, H.KOKAWA, L.ZHANG, T.TSAUR, R.MAEDA: "Preparation and characterization of PZT thin films deposited by pulsed laser deposition on template layer"Journal of the European ceramic Society. 24. 1269-1232 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, H.KOKAWA, R.MAEDA: "Growth of lead zirconate titanate thin films by hybrid processing : sol-gel method and pulsed-laser deposition"Journal of Crystal Growth. 262. 359-365 (2004)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, I.Karibe, R.MAEDA, H.KOKAWA: "Preparation of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing : Sol-Gel Method and Laser Ablation"Journal of the American Ceramic Society. 85・12. 3108-3110 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, I.KARIBE, R.MAEDA, H.KOKAWA: "Microstructure and Electrical Properties of PZT Thin films Deposited by Laser Ablation on Template Layer"Integrated Ferroelectrics. 46. 187-195 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, I.KARIBE, L.J.YAN, R.MAEDA, H.KOKAWA: "Effect of Zr/Ti Ratio in Targets on Electrical Properties of Lead Zirconate Titanate Thin Films Derived by Pulsed Laser Deposition on Template Layer"Japanese Journal of Applied Physics. 41・11. 6658-6663 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, L.J.YAN, Y.AOKI, H.KOKAWA, R.MAEDA: "Preparation and Characterization of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Pulsed Laser Deposition"Japanese Journal of Applied Physics. 42・9. 5936-5940 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, H.Y.BI, H.KOKAAW, L.ZHANG, J.TSAUR, R.MAEDA: "Preparation and characterization of PZT thin films deposited by pulsed laser deposition on template layer"Journal of the European Ceramic Society. 24. 1269-1232 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Z.J.WANG, H.KOKAWA, R.MAEDA: "Growth of lead zirconate titanate thin films by hybrid processing : sol-gel method and pulsed-laser deposition"Journal of Crystal Growth. 262. 359-365 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2003 Final Research Report Summary
  • [Publications] Zhan Jie Wang: "Preparation and characterization of Lead Ziroconate Titanate Thin Films Derived by Hybrid processing : Sol-Gel Method and Pulsed Laser Deposition"Japanese Jounal of Applied physics. 42(9B). 5936-5940 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Zhan Jie Wang: "Preparation and characterization of PZT thin films deposited by pulsed laser deposition on template layer"Journal of the European Ceramic Society. 24(6). 1232-1269 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Zhan Jie Wang: "Growth of lead zirconate titanate thin films by hybrid processing : sol-gel method and pulsed-laser deposition"Jounal of Crystal Growth. 262(1-4). 359-365 (2004)

    • Related Report
      2003 Annual Research Report
  • [Publications] Zhan Jie Wang: "Preparetion of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing : Sol-Gel Method and Laser Ablation"J.Am.Ceram.Soc. 85・12. 3108-3110 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Zhan Jie Wang: "Microstructure and Electrical Properties of PZT Thin Films Deposited by Laser Ablation on Template Layer"Integrated Ferroelectrics. 46. 187-195 (2002)

    • Related Report
      2002 Annual Research Report
  • [Publications] Zhan Jie Wang: "Effect of Zr/Ti Ration in Targets on Electrical Properties of Lead Zirconate Titanete Thin Films Derived by Pulsed Laser Deposition on Template Layer"Jpn.J.Appl.Phys.. 41・11. 6658-6663 (2002)

    • Related Report
      2002 Annual Research Report

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Published: 2002-04-01   Modified: 2016-04-21  

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