One-by-oneドーピング法による特性ゆらぎのない極微半導体デバイスの実現

• Project/Area Number: 14750240
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Electronic materials/Electric materials
• Research Institution: Waseda University
• Principal Investigator: 品田 賢宏 早稲田大, 理工学部, 助手 (30329099)
• Project Period (FY): 2002
• Project Status: Completed (Fiscal Year 2002)
• Budget Amount: ¥3,900,000 (Direct Cost: ¥3,900,000); Fiscal Year 2002: ¥3,900,000 (Direct Cost: ¥3,900,000)