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High-resolution, element-specific microscope using a laser-produced-plasma soft X-ray source

Research Project

Project/Area Number 15002001
Research Category

Grant-in-Aid for Specially Promoted Research

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Engineering
Research InstitutionTohoku University

Principal Investigator

YAMAMOTO Masaki  Tohoku University, IMRAM, Professor (00137887)

Co-Investigator(Kenkyū-buntansha) YANAGIHARA Mihiro  Tohoku University, IMRAM, Professor (40174552)
HATANO Tadashi  Tohoku University, IMRAM, Assistant Professor (90302223)
EJIMA Takeo  Tohoku University, IMRAM, Assistant Professor (80261478)
TSURU Toshihide  Tohoku University, IMRAM, Assistant Professor (30306526)
TOYODA Mitsunori  Tohoku University, IMRAM, Assistant Professor (40375168)
Project Period (FY) 2003 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥379,600,000 (Direct Cost: ¥292,000,000、Indirect Cost: ¥87,600,000)
Fiscal Year 2007: ¥22,100,000 (Direct Cost: ¥17,000,000、Indirect Cost: ¥5,100,000)
Fiscal Year 2006: ¥158,600,000 (Direct Cost: ¥122,000,000、Indirect Cost: ¥36,600,000)
Fiscal Year 2005: ¥37,700,000 (Direct Cost: ¥29,000,000、Indirect Cost: ¥8,700,000)
Fiscal Year 2004: ¥87,100,000 (Direct Cost: ¥67,000,000、Indirect Cost: ¥20,100,000)
Fiscal Year 2003: ¥74,100,000 (Direct Cost: ¥57,000,000、Indirect Cost: ¥17,100,000)
KeywordsSoft X-ray / Multilayer / Microscope / Laser Plasma / Period thickness distribution control / Sputtering / Ellipsometer / Growth rate monitor
Research Abstract

The project aims to develop a soft X-ray Schwarzschild microscope having spatial resolution of 50 nm enabling fast and easy laboratory imaging of organic and inorganic hybrids, magnetic materials and biological samples with the soft X-ray light in the wavelength range of 3 to 30 nm. The soft X-ray microscope is composed of a clean laboratory source of a laser produced plasma, imaging multilayer mirrors of specific D-spacing for monochromatic reflection, high accuracy alignment optics by visible light and image detectors, all comply with the high quality imaging.
The most outstanding technology established is with our multilayer fabricator enabling D-space control on concave and convex mirror substrates with high accuracy of 0.1%, which achieves exact wavelength matching among the monochromatic mirrors for the wavelengths of 13.5nm and beyond, down to the 4.5nm, the carbon window region. The fabrication is supported by a new laboratory spectro-reflectometer designed for the curved mirror samples, a soft X-ray interferometer for the wave-front error measurements and a multilayer surface milling system for digital error correction by the layer period removal. These equipments help establishing soft X-ray optical engineering with multiyear optics.
The most dominant achievement is the high grade <one shot imaging> by the microscope with the high 80% throughput 4-mirror optics developed. The resolution of the image has already met the 400nm limit by the CCD detector pixel size and is expected to reach 30nm. The high resolution imaging of living cells within the 0.2mm field of view will show details inside with 6000×6000 pixels by one shot. The image is free from burring by possible Brownian motion of particles in solution and offers new process of detailed analysis of multi-events in the wide field of view at desired magnification in the computer display of the novel optical microscope.

Report

(9 results)
  • 2013 Self-evaluation (Follow-up Assessment) ( PDF )   Comments (Follow-up Assessment) ( PDF )
  • 2012 Abstract(Follow-up Assessment) ( PDF )
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (281 results)

All 2008 2007 2006 2005 2004 2003 Other

All Journal Article (71 results) (of which Peer Reviewed: 18 results) Presentation (204 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results) Publications (2 results)

  • [Journal Article] 軟X線多層膜鏡の形状誤差補正のための大面積イオン銃を用いたミリンダ装置の開発2008

    • Author(s)
      戸坂亜希
    • Journal Title

      J. Vac. Soc. Jpn. 51

      Pages: 115-117

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Precise determination of layer structure with EUV ellipsometry data obtained by multilayer polarizing elements2008

    • Author(s)
      T. Tsuru
    • Journal Title

      Phys. Stat Sol (c) 5

      Pages: 1129-1132

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Development of an ion mulling system for figure error correction of a soft X-ray multilayer mirror [in Japanese]2008

    • Author(s)
      A. Tosaka
    • Journal Title

      J.Vac.Soc.Jpn. 51

      Pages: 115-117

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Precise determination of layer structure with EUV ellipsometry data obtained by multilayer polarizing elements2008

    • Author(s)
      T. Tsuru
    • Journal Title

      Physica Status Solidi(c) 5

      Pages: 1129-1132

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multilayer polarizers in the range of 20-40 eV2007

    • Author(s)
      T. Hatano
    • Journal Title

      Photon Factory Activity Report 2006 #24 Part B 24

      Pages: 270-270

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Ru capping film on Mo/Si multilayers for EUV lithography2007

    • Author(s)
      T. Matsuo
    • Journal Title

      Photon Factory Activity Report 2006 #24 Part B 24

      Pages: 116-116

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Advances in short-wavelength X-ray multilayer optics : toward high-throughput multi-mirror systems for the wavelengths<10 nm2007

    • Author(s)
      A. Artyukov
    • Journal Title

      Proceedings of SPIE 6702

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 軟X線実験室顕微鏡用の多層膜結像鏡開発2007

    • Author(s)
      原田哲男
    • Journal Title

      Photon Factory News 25

      Pages: 28-32

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Journal Article] Optimal design of multilayer mirrors for water-window microscope optics2007

    • Author(s)
      Y. Uspenskii
    • Journal Title

      Opt. Rev. 14

      Pages: 64-73

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayers2007

    • Author(s)
      T. Tsuru
    • Journal Title

      AIR, Proc. 9th International Conference on Synchrotron Radiation Instrumentation 879

      Pages: 1524-1527

    • NAID

      120003728276

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Advances in short-wavelength X-ray multilayer optics : toward high-throughput multi-mirror systems for the wavelengths < 10 nm2007

    • Author(s)
      A. Artyukov
    • Journal Title

      Proceedings of SPIE 6702 67020V

      Pages: 7-7

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of Multilayer Imaging Mirrors for a Laboratory Soft X-ray Microscope2007

    • Author(s)
      T. Harada, T. Hatano, M. Yamamoto
    • Journal Title

      Photon Factory News 25

      Pages: 28-32

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayers2007

    • Author(s)
      T. Tsuru
    • Journal Title

      AIP, Proc. 9th International Conference on Synchrotron Radiation Instrumentation 879

      Pages: 1524-1527

    • NAID

      120003728276

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Physics of X-ray multilayers[in Japanese]2007

    • Author(s)
      M. Yamamoto
    • Journal Title

      Development and Application of Extreme Ultraviolet Light Source CMC Publ.

      Pages: 183-196

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Advances in short-wavelength X-ray multilayer optics: toward high-throughput multi-mirror systems for the wavelengths < 10 nm2007

    • Author(s)
      A. Artyukov
    • Journal Title

      Proceedings of SPIE 6702

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Ru capping film on Mo/Si multilayers for EUV lithography2007

    • Author(s)
      T. Matsuo
    • Journal Title

      Photon Factory Activity Report 2006#24 Part B 24

      Pages: 116-116

    • Related Report
      2007 Annual Research Report
  • [Journal Article] Multilayer polarizers in the range of 20-40eV2007

    • Author(s)
      T. Hatano
    • Journal Title

      Photon Factory Activity Report 2006#24 Part B 24

      Pages: 270-270

    • Related Report
      2007 Annual Research Report
  • [Journal Article] 軟X線多層膜鏡の形状誤差補正のための大面積イオン銃を用いたミリング装置の開発2007

    • Author(s)
      戸坂亜希
    • Journal Title

      真空 51(In press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayers2007

    • Author(s)
      T.Tsuru
    • Journal Title

      AIP Proceedings 879

      Pages: 1524-1527

    • NAID

      120003728276

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Optimal design of multilayer mirrors for water-window microscope optics2007

    • Author(s)
      Y.Uspenskii
    • Journal Title

      Optical Review 14

      Pages: 64-73

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Photoelectron spectroscopy with phases of standing waves observed by total electron yield and reflection spectra2007

    • Author(s)
      T.Ejima
    • Journal Title

      AIP conference proceedings 879

      Pages: 1634-1634

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Analytical designing of two-aspherical-mirror anastigmats permitting practical misalignments in a soft-X-ray optics2006

    • Author(s)
      M. Toyoda
    • Journal Title

      Opt. Rev. 13

      Pages: 149-157

    • NAID

      10019176674

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Narrow band Mo/Si multilayers with thick Si structures2006

    • Author(s)
      T. Harada
    • Journal Title

      IPAP Conference Series 7

      Pages: 195-197

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Modification of a laboratory soft X-ray spectro-reflectometer for evaluation of a spherical mirror2006

    • Author(s)
      T. Ohigashi
    • Journal Title

      IPAP Conference Series 7

      Pages: 189-191

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Analytical designing of two-aspherical-mirror anastigmat permitting practical misalignments for soft-X-ray imaging2006

    • Author(s)
      M. Toyoda
    • Journal Title

      IPAP Conference Series 7

      Pages: 186-188

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Investigation of soft X-ray multilayer fabrication by an in-situ ellipsometric depositionmonitor2006

    • Author(s)
      T. Tsuru
    • Journal Title

      IPAP Conference Series 7

      Pages: 168-170

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics2006

    • Author(s)
      T. Tsuru
    • Journal Title

      Thin Solid Films 515

      Pages: 947-951

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability2006

    • Author(s)
      E. Majkova
    • Journal Title

      Thin Solid Films 497

      Pages: 115-120

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Investigation of soft X-ray multilayer fabrication by an in-situ ellipsometric deposition monitor2006

    • Author(s)
      T. Tsuru
    • Journal Title

      IPAP Conference Series 7

      Pages: 168-170

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Investigation of soft X-ray multilayer fabrication by an in-situ ellipsometric deposition monitor2006

    • Author(s)
      T.Tsuru
    • Journal Title

      IPAP Conference Series 7

      Pages: 168-170

    • Related Report
      2006 Annual Research Report
  • [Journal Article] In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics2006

    • Author(s)
      T.Tsuru
    • Journal Title

      Thin Solid Films 515

      Pages: 947-951

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Nanometer-scale period Sc/Cr multilayer mirrors and their thermal stability2006

    • Author(s)
      E.Majkova
    • Journal Title

      Thin Solid Films 497

      Pages: 115-120

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Analytical Designing of Two-Aspherical-Mirror Anastigmat Permitting Practical Misalignments for Soft-X-Ray Imaging2006

    • Author(s)
      M.Toyoda
    • Journal Title

      IPAP Conference Series 7

      Pages: 186-188

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Modification of a Laboratory Soft X-Ray Spectro-Reflectometer for Evaluation of a Spherical Mirror2006

    • Author(s)
      T.Ohigashi
    • Journal Title

      IPAP Conference Series 7

      Pages: 189-191

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Narrow Band Mo/Si Multilayers with Thick Si Structures2006

    • Author(s)
      T.Harada
    • Journal Title

      IPAP Conference Series 7

      Pages: 195-197

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Studies of multilayer structure in depth direction by soft X-ray spectroscopy2006

    • Author(s)
      M.Watanabe
    • Journal Title

      Nucl. Sci. Tech. 17

      Pages: 257-267

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 反射率測定と全光電子収量測定を合わせた極紫外反射多層膜の位相測定法2006

    • Author(s)
      江島丈雄
    • Journal Title

      分光研究 第55巻第4号

      Pages: 259-260

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Phase change observation in reflection multilayers by total electron yield and reflection spectra2006

    • Author(s)
      T.Ejima
    • Journal Title

      Appl. Phys. Lett. 89

      Pages: 21914-21914

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Microscopic optical and photoelectron measurements of MWO4 (M=Mn, Fe, and Ni)2006

    • Author(s)
      T.Ejima
    • Journal Title

      Journal of Luminescence 119-120

      Pages: 59-63

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Thin film filters for an EUV multilayer mirror optics with a laser produced plasma lightsource2005

    • Author(s)
      T. Harada
    • Journal Title

      J. Electron. Spectrosc. Relat. Phenom. 144-147

      Pages: 1075-1077

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometr2005

    • Author(s)
      T. Tsuru
    • Journal Title

      J. Electron. Spectrosc. Relat Phenom. 144-147

      Pages: 1083-1085

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Schwarzschild microscope in vacuum ultraviolet and soft X-ray regions2005

    • Author(s)
      M. Watanabe
    • Journal Title

      Nuc. Sci. Tech. 16

      Pages: 129-138

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] X線ミラー多層膜2005

    • Author(s)
      山本正樹
    • Journal Title

      機械の研究 57

      Pages: 74-81

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Thin film filters for an EUV multilayer mirror optics with a laser produced plasma light source2005

    • Author(s)
      T. Harada
    • Journal Title

      J. Electron. Spectrosc. Relat. Phenom.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometry2005

    • Author(s)
      T. Tsuru
    • Journal Title

      J. Electron. Spectrosc. Relat, Phenom.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] X-ray multilayer mirrors[in Japanese]2005

    • Author(s)
      M. Yamamoto
    • Journal Title

      Kikaino-Kenkyu. 57

      Pages: 74-81

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Accurate measurement of EUV multilayer period thicknesses by in-situ automatic ellipsometry2005

    • Author(s)
      T.Tsuru
    • Journal Title

      Journal of Electron Spectroscopy and Related Phenomena 144-147

      Pages: 1083-1085

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Thin film filters for an EUV multilayer mirror optics with a laser produced plasma source2005

    • Author(s)
      T.Harada
    • Journal Title

      Journal of Electron Spectroscopy and Related Phenomena 144-147

      Pages: 1075-1077

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Top layer's thickness dependence on total electron-yield X-ray standing-wave2005

    • Journal Title

      Journal of Electron Spectroscopy and Related Phenomena 144-147

      Pages: 897-899

    • Related Report
      2005 Annual Research Report
  • [Journal Article] X線ミラー多層膜2005

    • Author(s)
      山本 正樹
    • Journal Title

      機械の研究 57

      Pages: 74-81

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Aging and thermal stability of Mg/SiC and Mg/Y203 reflection multilayers in the 25-35 nm region2005

    • Author(s)
      T.Ejima
    • Journal Title

      Applied Optics 44

      Pages: 5446-5453

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Surface Segregation of CaF2 in Thin Si(111)/CaF2/Si Multilayers Studied by Total Electron Yield Spectroscopy and In situ Ellipsometry2005

    • Author(s)
      T.Ejima
    • Journal Title

      Japanese Journal of Applied Physics 44

      Pages: 5171-5177

    • NAID

      130004534327

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Magnetic rotation spectra of Co/Pt and Co/Cu multilayers in 50-90 eV region2005

    • Author(s)
      K.Saito
    • Journal Title

      Journal of Electron Spectroscopy and Related Phenomena 144-147

      Pages: 757-760

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Schwarzschild microscope in vacuum ultraviolet and soft X-ray regions2005

    • Author(s)
      M.Watanabe
    • Journal Title

      Nuc.Sci.Tech. 16

      Pages: 129-138

    • Related Report
      2005 Annual Research Report
  • [Journal Article] A new beamline apparatus for polarimetry and ellipsometry using soft X-ray multilayers2004

    • Author(s)
      H. Kimura
    • Journal Title

      AIP, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705

      Pages: 537-540

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004

    • Author(s)
      T. Tsuru
    • Journal Title

      AIR, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705

      Pages: 732-735

    • NAID

      120003728299

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Normal incidence reflectometry ofconcave multilayer mirrors using synchrotron radiation toevaluate the period thickness distribution2004

    • Author(s)
      T. Hatano
    • Journal Title

      AIP, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705

      Pages: 839-842

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic nullellipsometer2004

    • Author(s)
      T. Tsuru
    • Journal Title

      Thin Solid Films 455-456

      Pages: 705-709

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004

    • Author(s)
      T. Tsuru
    • Journal Title

      AIP, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705

      Pages: 732-735

    • NAID

      120003728299

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Normal incidence reflectometry of concave multilayer mirrors using synchrotron radiation to evaluate the period thickness distribution2004

    • Author(s)
      T. Hatano
    • Journal Title

      AIP, Proc. 8th International Conference on Synchrotron Radiation Instrumentation 705

      Pages: 839-842

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer2004

    • Author(s)
      T. Tsuru
    • Journal Title

      Thin Solid Films

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Normal incidence reflectometry of concave multilayer mirrors using synchrotron radiation to evaluate the period thickness distribution2004

    • Author(s)
      Tadashi Hatano
    • Journal Title

      AIP conference proceedings 705

      Pages: 839-842

    • Related Report
      2004 Annual Research Report
  • [Journal Article] A new beamline appatatus for polarimetry and ellipsometry using soft X-ray multilayers2004

    • Author(s)
      Hiroaki Kimura
    • Journal Title

      AIP conference proceedings 705

      Pages: 537-540

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Simulation study of total-electron-yield X-ray standing wave spectra of Mo/SiC/Si/SiC and Mo/Si multilayers2004

    • Author(s)
      Takeo Ejima
    • Journal Title

      AIP conference proceedings 705

      Pages: 1126-1129

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Thickness monitoring of nm period EUV multilayer fabrication by ellipsometry2004

    • Author(s)
      Toshihide Tsuru
    • Journal Title

      AIP conference proceedings 705

      Pages: 732-735

    • NAID

      120003728299

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Realtime layer-by-layer analysis for multilayer fabrication monitoring by an automatic null ellipsometer2004

    • Author(s)
      Toshihide Tsuru
    • Journal Title

      Thin Solid Films 455-456

      Pages: 705-709

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Figure error correction by reflection wavefront control of Cu Kα grazing incidence multilayermirrors2003

    • Author(s)
      E. Majkova
    • Journal Title

      Optical Review 10

      Pages: 398-401

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] A tracking ellipsometer of picometer sensitivity enabling 0.1% sputtering-rate monitoring of EUV nanometer multilayer fabrication2003

    • Author(s)
      M. Yamamoto
    • Journal Title

      Thin Solid Films 433

      Pages: 224-229

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] ナノテク研究を加速する超光学の開発-元素で色付いたナノ世界を50nmの超解像で撮る軟X線顕微鏡-2003

    • Author(s)
      山本正樹
    • Journal Title

      応用光学 3

      Pages: 20-22

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Figure error correction by reflection wavefront control of Cu Kα grazing incidence multilayer mirrors2003

    • Author(s)
      E. Majkova
    • Journal Title

      Optical Review 10

      Pages: 398-401

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Development of super-optics accelerating nano-technology research ; Soft X-ray microscope for 50-nm super resolution view of nano-world colored by atomic elements[in Japanese]2003

    • Author(s)
      M. Yamamoto
    • Journal Title

      Ouyou-Kougaku 3

      Pages: 20-22

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 回折格子の実測VLSパラメーターに基づく軟X線実験室分光反射率計の配置最適化2008

    • Author(s)
      中島将
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      船橋
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 汎用軟X線実験装置を用いたAl薄膜の透過像撮像2008

    • Author(s)
      羽多野忠
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      船橋
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 波面補正のための軟X線多層膜鏡の大面積一括ミリング2008

    • Author(s)
      戸坂亜希
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      船橋
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜顕微鏡用の0.1%オーダー精度波長マッチング技術開発2008

    • Author(s)
      原田哲男
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      船橋
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Parameter optimization of a soft X-ray laboratory spectro-reflectometer based on VLS parameters of the grating[in Japanese]2008

    • Author(s)
      M.Nakajima
    • Organizer
      The 55th Spring Meeting, 2008, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Funabashi
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Transmission image of patterned A1 films using a versatile soft X-ray experimental apparatus[in Japanese]2008

    • Author(s)
      T. Hatano
    • Organizer
      The 55th Spring Meeting, 2008, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Funabashi
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ion milling of multilayer mirrors for reflection phase correction [in Japanese]2008

    • Author(s)
      A. TJapan, Osaka
    • Organizer
      The 55th Spring Meeting, 2008, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Funabashi
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of 0.1% Order Precision Wavelength Matching Technology for Soft X-ray Multilayer Imaging Mirrors[in Japanese]2008

    • Author(s)
      T. Harada
    • Organizer
      The 55th Spring Meeting, 2008, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Funabashi
    • Year and Date
      2008-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜顕微鏡用の0.1%オーダー精度波長マッチング技術開発2008

    • Author(s)
      原田哲男
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 波面補正のための軟X線多層膜鏡の大面積一括ミリング2008

    • Author(s)
      戸坂亜希
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 汎用軟X線実験装置を用いたAl薄膜の透過像撮像2008

    • Author(s)
      羽多野 忠
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] 回折格子の実測VLSパラメーターに基づく軟X線実験室分光反射率計の配置最適化2008

    • Author(s)
      中島 将
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学理工学部
    • Year and Date
      2008-03-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] φ100mm均一強度イオンビームによる軟X線多層膜鏡波面補正ミリング装置の開発2008

    • Author(s)
      戸坂亜希
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜成膜のpm感度その場偏光解析2008

    • Author(s)
      津留俊英
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] シャッター速度制御による膜厚分布制御成膜法2008

    • Author(s)
      羽多野忠
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 軟X線結像鏡多層膜の精密膜厚制御2008

    • Author(s)
      原田哲男
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 軟X線用非球面対物鏡の解析的光学設計2008

    • Author(s)
      豊田光紀
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 1パルスイメージングのための高スループット極紫外顕微鏡TXM32008

    • Author(s)
      江島丈雄
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of a surface milling system for figure error correction of soft X-ray multilayer mirrors using a □ 100mm ion gun [in Japanese]2008

    • Author(s)
      A. TJapan, Osaka
    • Organizer
      The 1st Symposium of CAMS
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] In-situ ellipsometry of picometer sensitivity for soft X-ray multilayer mirror fabrication[in Japanese]2008

    • Author(s)
      T. Tsuru
    • Organizer
      The 1st Symposium of CAMS
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Thickness distribution controlled film deposition method using a programmable shutter[in Japanese]2008

    • Author(s)
      T. Hatano
    • Organizer
      The 1st Symposium of CAMS
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precision Period Thickness Control of Multilayer for the Soft X-ray Imaging Mirrors[in Japanese]2008

    • Author(s)
      T.Harada
    • Organizer
      The 1st Symposium of CAMS
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analytical designing of two-aspherical-mirror optics for soft X-ray imaging[in Japanese]2008

    • Author(s)
      M. Toyoda
    • Organizer
      The 1st Symposium of CAMS
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High Throughput Extreme Ultraviolet Microscope TXM3 for Single Shot Imaging[in Japanese]2008

    • Author(s)
      T.Ejima
    • Organizer
      The 1st Symposium of CAMS
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2008-03-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 1パルスイメージングのための高スループット極紫外顕微鏡TXM^32008

    • Author(s)
      江島丈雄
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] Φ100mm均一強度イオンビームによる軟X線多層膜鏡波面補正ミリング装置の開発2008

    • Author(s)
      戸坂亜希
    • Organizer
      先端計測シンポジウム2008-軟X線顕微計測-
    • Place of Presentation
      仙台
    • Year and Date
      2008-03-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] High Confidence Mo/Si Multilayer Deposition for the Transmission X-Ray Multilayer Mirror Microscope TXM32008

    • Author(s)
      T. Harada
    • Organizer
      The 9th International Conference on the Physics of X-Ray Multilayer Structures
    • Place of Presentation
      USA, Montana
    • Year and Date
      2008-02-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of an ion milling system by a wide-area ion beam for accurate phase correction of EUV multilayer mirrors2008

    • Author(s)
      T. Tsuru
    • Organizer
      The 9th International Conference on the Physics of X-Ray Multilayer Structures
    • Place of Presentation
      USA, Montana
    • Year and Date
      2008-02-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] High Confidence Mo/Si Multilayer Deposition for the Transmission X-Ray Multilayer Mirror Microscope TXM^32008

    • Author(s)
      T. Harada
    • Organizer
      The 9th International Conference on the Physics of X-Ray Multilayer Structures
    • Place of Presentation
      USA, Montana
    • Year and Date
      2008-02-06
    • Related Report
      2007 Annual Research Report
  • [Presentation] High throughput EUV Microscope TXM3 for single shot imaging2008

    • Author(s)
      T. Ejima
    • Organizer
      The 9th International Conference on the Physics of X-Ray MultilayerStructures
    • Place of Presentation
      USA, Montana
    • Year and Date
      2008-02-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High throughput EUV Microscope TXM3 for single shot imaging2008

    • Author(s)
      T. Ejima
    • Organizer
      The 9th International Conference on the Physics of X-Ray Multilayer Structures
    • Place of Presentation
      USA, Montana
    • Year and Date
      2008-02-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High throughput EUV Microscope TXM^3 for single shot imaging (Invited)2008

    • Author(s)
      T. Ejima
    • Organizer
      The 9th International Conference on the Physics of X-Ray Multilayer Structures
    • Place of Presentation
      USA, Montana
    • Year and Date
      2008-02-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] 軟X線Schwarzschild顕微対物用1nm形状精度精密球面鏡の開発2007

    • Author(s)
      神野貴義
    • Organizer
      第7回多元物質科学研究所研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2007-12-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜波面補正装置のミリンダ速度測定とイオンビーム強度分布の均一化2007

    • Author(s)
      酒井優
    • Organizer
      第7回多元物質科学研究所研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2007-12-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線実験室高分解能分光反射率計の光学設計と光軸調整2007

    • Author(s)
      中島将
    • Organizer
      第7回多元物質科学研究所研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2007-12-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Development of ultra-precise-spherical mirrors of 1 nm figure accuracy for soft-X-ray Schwarzschild optics[in Japanese]2007

    • Author(s)
      T.Jinno
    • Organizer
      The 7th Meeting of IMRAM
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2007-12-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Milling rate measurement and control of a ion milling system for figure error correction of soft X-ray multilayer mirrors[in Japanese]2007

    • Author(s)
      Y. Sakai
    • Organizer
      The 7th Meeting of IMRAM
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2007-12-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical design and alignment of a soft X-ray laboratory spectro-reflectometer of a high spectral resolution[in Japanese]2007

    • Author(s)
      M. Nakajima
    • Organizer
      The 7th Meeting of IMRAM
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2007-12-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜波面補正装置のミリング速度測定とイオンビーム強度分布の均一化2007

    • Author(s)
      酒井優
    • Organizer
      第7回多元物質科学研究所研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2007-12-12
    • Related Report
      2007 Annual Research Report
  • [Presentation] 軟X線Schwarzschild顕微対物用1nm形状精度精密球面鏡の開発2007

    • Author(s)
      神野貴義
    • Organizer
      第62回応用物理学会東北支部学術講演会
    • Place of Presentation
      八戸
    • Year and Date
      2007-12-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜鏡の反射波面補正用均一強度イオンビームの生成とミリング速度計測2007

    • Author(s)
      酒井優
    • Organizer
      第62回応用物理学会東北支部学術講演会
    • Place of Presentation
      八戸
    • Year and Date
      2007-12-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Development of ultra-precise-spherical mirrors of 1 nm figure accuracy for soft-x-ray Schwarzschild optics[in Japanese]2007

    • Author(s)
      T. Jinno
    • Organizer
      The 62nd Annual Meeting, 2004, Tohoku Chapter, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Hachinohe
    • Year and Date
      2007-12-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Dose control and measurement of a wide ion beam for uniform surface milling of soft X-ray multilayer mirrors[in Japanese]2007

    • Author(s)
      Y. Sakai
    • Organizer
      The 62nd Annual Meeting, 2004, Tohoku Chapter, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Hachinohe
    • Year and Date
      2007-12-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 偏心・チルト外乱に強く軟X線適用の“合わせ鏡"2枚凹面アプラナート顕微対物2007

    • Author(s)
      豊田光紀
    • Organizer
      Optics & Photonics Japan 2007 第10回光設計賞受賞記念講演
    • Place of Presentation
      大阪
    • Year and Date
      2007-11-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Design of two-concave-mirror aplanat tolerating large alignment errors for soft X-ray microscope[in Japanese]2007

    • Author(s)
      M. Toyoda
    • Organizer
      Optics & Photonics Japan 2007
    • Place of Presentation
      Japan, Osaka
    • Year and Date
      2007-11-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 偏心・チルト外乱に強く軟X線適用の"合わせ鏡"2枚凹面アプラナート顕微対物2007

    • Author(s)
      豊田光紀
    • Organizer
      Optics & Photonics Japan 2007第10回光設計賞受賞記念講演
    • Place of Presentation
      大阪
    • Year and Date
      2007-11-27
    • Related Report
      2007 Annual Research Report
  • [Presentation] pm感度エリプソメーターによる軟X線多層膜ミラーの成膜モニタリング2007

    • Author(s)
      津留俊英
    • Organizer
      第1回偏光計測研究会
    • Place of Presentation
      仙台
    • Year and Date
      2007-11-16
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] In-situ monitoring of soft X-ray multilayer mirror fabrication by an automatic null ellipsometer with picometer sensitivity[in Japanese]2007

    • Author(s)
      T. Tsuru
    • Organizer
      The 1st Meeting, Professional Group of Ellipsometry and Polarimetry
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2007-11-16
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜鏡の形状誤差補正のための大面積イオン銃を用いたミリング装置の開発2007

    • Author(s)
      戸坂亜希
    • Organizer
      第48回真空に関する連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2007-11-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Development of an ion milling system for figure error correction of a soft X-ray multilayer mirror[in Japanese]2007

    • Author(s)
      A. TJapan, Osaka
    • Organizer
      The 48th Annual Symposium of the Vacuum Society of Japan
    • Place of Presentation
      Japan, Tokyo
    • Year and Date
      2007-11-14
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 多層膜反射波長マッチングのためのIBS成膜装置の安定化2007

    • Author(s)
      原田哲男
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] φ1OO mm 均一強度イオンビーム生成による軟X線多層膜鏡の全面一括ミリング2007

    • Author(s)
      戸坂亜希
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ミラーの偏心誤差に強い軟X線用2枚凹面アブラナディック対物鏡の開発2007

    • Author(s)
      豊田光紀
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Period-by-periodイオンミリングによる軟X線多層膜結像鏡の波面補正法の開発2007

    • Author(s)
      津留俊英
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜光工学と結像光学への展望2007

    • Author(s)
      山本正樹
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 透過型X線反射多層膜顕微鏡TXM3用精密多層膜鏡の開発2007

    • Author(s)
      羽多野忠
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM3の開発2007

    • Author(s)
      江島丈雄
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Stabilization of IBS Deposition System for the Reflection Spectra Matching of Multilayer Mirrors[in Japanese]2007

    • Author(s)
      T. Harada
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Surface milling of soft X-ray multilayer mirror for figure error correction using a dose- controlled □ 100mm ion gun[in Japanese]2007

    • Author(s)
      A. TJapan, Osaka
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of two-concave-mirror aplanat tolerating large alignment errors for soft X-ray imaging[in Japanese]2007

    • Author(s)
      M. Toyoda
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of a period-by-period ion milling system for accurate figure error correction of soft X-ray multilayer mirrors[in Japanese]2007

    • Author(s)
      T. Tsuru
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Soft X-ray mulilayer Optical Engineering and future scope for Imaging Optics[in Japanese]2007

    • Author(s)
      M. Yamamoto
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of precise multilayers for the transmission X-ray multilayer mirror microscope TXM^3[in Japanese]2007

    • Author(s)
      T. Hatano
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] DeveIopment of Transmission-type X-ray Multilayer Mirror Microsocpe TXM3 using Laser produced plasma light source[in Japanese]2007

    • Author(s)
      T. Ejima
    • Organizer
      The 9th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Nagoya
    • Year and Date
      2007-11-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM^3の開発2007

    • Author(s)
      江島丈雄
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] 透過型X線反射多層膜顕微鏡TXM^3用精密多層膜鏡の開発2007

    • Author(s)
      羽多野忠
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] 軟X 線多層膜光工学と結像光学への展望2007

    • Author(s)
      山本正樹
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] Period-by-period イオンミリングによる軟X 線多層膜結像鏡の波面補正法の開発2007

    • Author(s)
      津留俊英
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] ミラーの偏心誤差に強い軟X 線用2枚凹面アプラナティック対物鏡の開発2007

    • Author(s)
      豊田光紀
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] Φ100mm均一強度イオンビーム生成による軟X 線多層膜鏡の全面一括ミリング2007

    • Author(s)
      戸坂亜希
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] 多層膜反射波長マッチングのためのIBS 成膜装置の安定化2007

    • Author(s)
      原田哲男
    • Organizer
      第9回X線結像光学シンポジウム
    • Place of Presentation
      名古屋
    • Year and Date
      2007-11-02
    • Related Report
      2007 Annual Research Report
  • [Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM3の開発22007

    • Author(s)
      江島丈雄
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 大面積イオン銃を用いた軟X線多層膜鏡の表面ミリング2007

    • Author(s)
      戸坂亜希
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 実験室極紫外顕微鏡用多層膜鏡の波長マッチング2007

    • Author(s)
      原田哲男
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ミラーの偏心誤差に強い軟X線用2枚凹面アブラナディック対物鏡の開発2007

    • Author(s)
      豊田光紀
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      札幌
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Transmission-type X-ray Multilayer Mirror Microsocpe TXM3 using Laser produced plasma light source : Part 2[in Japanese]2007

    • Author(s)
      T. Ejima
    • Organizer
      The 68th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Surface milling of soft X-ray multilayer mirror for sub-nm figure error correction using a □ 150mm ion gun[in Japanese]2007

    • Author(s)
      A. TJapan, Osaka
    • Organizer
      The 68th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Wavelength Matching of Multilayer Mirrors for a Laboratory EUV Microscope[in Japanese]2007

    • Author(s)
      T. Harada
    • Organizer
      The 68th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of two-concave-mirror aplanat tolerating large misalignments for soft X-ray imaging[in Japanese]2007

    • Author(s)
      M. Toyoda
    • Organizer
      The 68th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2007-09-05
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ミラーの偏心誤差に強い軟X線用2枚凹面アプラナティック対物鏡の開発2007

    • Author(s)
      豊田光紀
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] 実験室極紫外顕微鏡用多層膜鏡の波長マッチング2007

    • Author(s)
      原田哲男
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] 大面積イオン銃を用いた軟X線多層膜鏡の表面ミリング2007

    • Author(s)
      戸坂亜希
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM^3の開発22007

    • Author(s)
      江島丈雄
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] Period-by-period ion milling system for accurate phase correction of EUV multilayer mirror reflection2007

    • Author(s)
      T. Tsuru
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Laser produced plasma soft X-ray source for a laboratory spectro-reflectometer2007

    • Author(s)
      T. Hatano
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Exact reflection wavelength matching of curved multilayer mirrors for an EUV microscope2007

    • Author(s)
      T. Harada
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Dose control of a wide ion beam by designed mask-plates for uniform surface milling2007

    • Author(s)
      A. Tosaka
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Development of Transmission-type X-ray Multilayer Mirror Microscope using a LPP source2007

    • Author(s)
      T. Ejima
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Annual Research Report 2007 Final Research Report Summary
  • [Presentation] Design of Aspherical Imaging Optics Tolerating Practical Misalignments for Soft-X-Ray Microscopes2007

    • Author(s)
      M. Toyoda
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Design of Aspherical lmaging Optics Tolerating Practical Misalignments for Soft-X-Ray Microscopes2007

    • Author(s)
      M. Toyoda
    • Organizer
      The 15th International Conference on Vacuum Ultraviolet Radiation Physics
    • Place of Presentation
      Germany, Berlin
    • Year and Date
      2007-07-30
    • Related Report
      2007 Annual Research Report
  • [Presentation] High precision multilayers of imaging mirrors for diffraction-limited soft x-ray microscopes2007

    • Author(s)
      T. Hatano
    • Organizer
      The 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies
    • Place of Presentation
      China, Chengdu
    • Year and Date
      2007-07-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High precision multilayers of imaging mirrors for diffraction-limited soft X-ray microscopes2007

    • Author(s)
      T. Hatano
    • Organizer
      The 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies
    • Place of Presentation
      China, Chengdu
    • Year and Date
      2007-07-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] High precision multilayers of imaging mirrors for diffraction-limited soft X-ray microscopes (Plenary Invited)2007

    • Author(s)
      T. Hatano
    • Organizer
      The 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies
    • Place of Presentation
      China, Chengdu
    • Year and Date
      2007-07-10
    • Related Report
      2007 Annual Research Report
  • [Presentation] Precise determination of layer structure by analysis of EUV ellipsometry data obtained with use omultilayer polarizing elements2007

    • Author(s)
      T. Tsuru
    • Organizer
      The 4th International Conference on Spectroscopic EUipsometry
    • Place of Presentation
      Sweden, Stockholm
    • Year and Date
      2007-06-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise determination of layer structure by analysis of EUV ellipsometry data obtained with use of multilayer polarizing elements2007

    • Author(s)
      T. Tsuru
    • Organizer
      The 4th International Conference on Spectroscopic Elliosometry
    • Place of Presentation
      Sweden, Stockholm
    • Year and Date
      2007-06-11
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] PLD法用粒子速度フィルタを用いたSnからの粒子速度分布測定2007

    • Author(s)
      村田浩道
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      相模原
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] レーザープラズマ光源を用いた透過結像型極紫外顕微鏡TEUVMの開発2007

    • Author(s)
      江島丈雄
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      相模原
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜鏡の形状誤差補正のためのイオンミリング装置の開発2007

    • Author(s)
      戸坂亜希
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      相模原
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 極紫外シュバルツシルト対物鏡の波長マツチング2007

    • Author(s)
      原田哲男
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      相模原
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 非等周期構造による極端紫外線・軟X線多層膜鏡の高反射帯の広帯域化2007

    • Author(s)
      津留俊英
    • Organizer
      第54回応用物理学関係連合講演会
    • Place of Presentation
      相模原
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] The velocity distribution of debris ejected from Sn target by pulased laser deposition method using rotation-type velocity filter[in Japanese]2007

    • Author(s)
      H. Murata
    • Organizer
      The 54th Spring Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sagamihara
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Transmission-type Extreme Ultraviolet Microscope TEUVM using Laser produced plasma light source[in Japanese]2007

    • Author(s)
      T. Ejima
    • Organizer
      The 54th Spring Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sagamihara
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of the ion milling system for sub-nm figure error correction of a soft X-ray multilayer mirror[in Japanese]2007

    • Author(s)
      A. TJapan, Osaka
    • Organizer
      The 54th Spring Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sagamihara
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Wavelength matching of an EUV Schwarzschild objective[inJapanese]2007

    • Author(s)
      T.Harada
    • Organizer
      The 54th Spring Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sagamihara
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Reflection passband broadening by aperiodic designs of EUV/soft X-ray multilayer mirrors[in Japanese]2007

    • Author(s)
      T. Tsuru
    • Organizer
      The 54th Spring Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sagamihara
    • Year and Date
      2007-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optimization of layer thickness in EUV/soft X-ray multilayer optics for wideband reflectance2006

    • Author(s)
      T. Tsuru
    • Organizer
      The 9th International Conference on Synchrotron Radiation Instrumentation(SRI)
    • Place of Presentation
      Korea, Daegu
    • Year and Date
      2006-06-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optimization of layer thickness in EUV/soft X-ray multilayer optics for wideband reflectance2006

    • Author(s)
      T. Tsuru
    • Organizer
      he 9th International Conference on Synchrotron Radiation Instrumentation (SRI)
    • Place of Presentation
      Korea, Daegu
    • Year and Date
      2006-06-01
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] In-situ ellipsometric monitor with layer-by-layer analysis for precise thickness control of EUV multilayer optics2006

    • Author(s)
      T. Tsuru
    • Organizer
      Internal Conference on Metallurgical Coatings and Thin Films (ICMCTF)
    • Place of Presentation
      USA, San Diego
    • Year and Date
      2006-05-04
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of multilayer optics for high resolution EUV imaging (invited)2006

    • Author(s)
      T. Hatano
    • Organizer
      Internal Conference on Metallurgical Coatings and Thin Films (ICMCTF)
    • Place of Presentation
      USA, San Diego
    • Year and Date
      2006-05-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 疑似球面ホルダーを用いた球面基板用膜厚分布制御パラメーター導出2006

    • Author(s)
      原田哲男
    • Organizer
      第53回応用物理学関係連合講演会
    • Place of Presentation
      東京
    • Year and Date
      2006-03-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] The Period Thickness Distribution on the Spherical Substrates Measured with Si Wafers Assemblies[in Japanese]2006

    • Author(s)
      T. Harada
    • Organizer
      The 53th Spring Meeting, 2006, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Tokyo
    • Year and Date
      2006-03-24
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optimization of boundary structure for soft X-ray multilayer mirrors by an ellipsometric deposition monitor2006

    • Author(s)
      T. Tsuru
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-15
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] The Beam instability of an ECR ion gun and its similarity to the AC power source fluctuation2006

    • Author(s)
      T. Harada
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-15
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analytical designing of two-aspherical-mirror anastigmat permitting practical misalignments for soft-X-ray imaging2006

    • Author(s)
      M. Toyoda
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] The Period thickness distribution on the spherical substrates measured with Si wafers assemblies2006

    • Author(s)
      T. Harada
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical design of a laboratory spctro-reflectometer for multilayer imaging optics in the waterwindow region2006

    • Author(s)
      T. Hatano
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fabrication of wideband multilayer mirrors at EUV wavelength region2006

    • Author(s)
      H. Murata
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical design of a laboratory spctro-reflectometer for multilayer imaging optics in the water window region2006

    • Author(s)
      T. Hatano
    • Organizer
      The 8th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Sapporo
    • Year and Date
      2006-03-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線多層膜結像鏡の開発とpm感度レートモニター(招待講演)2005

    • Author(s)
      津留俊英
    • Organizer
      第8回X線結像光学シンポジウム
    • Place of Presentation
      神戸
    • Year and Date
      2005-12-13
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of soft X-ray multilayer imaging optics by a picometer sensitivity deposition rate monitor[in Japanese]2005

    • Author(s)
      T. Tsuru
    • Organizer
      The 8th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Kobe
    • Year and Date
      2005-12-13
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Narrow band Mo/Si EUV multilayers with thick Si structures2005

    • Author(s)
      T, Harada
    • Organizer
      4th International Extreme Ultra Violet Lithography (EUVL)Symposium
    • Place of Presentation
      USA, San Diego
    • Year and Date
      2005-11-08
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Narrow band Mo/Si EUV multilayers with thick Si structures2005

    • Author(s)
      T. Harada
    • Organizer
      4th International Extreme Ultra Violet Lithography (EUVL) Symposium
    • Place of Presentation
      USA, San Diego
    • Year and Date
      2005-11-08
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] イオンビームスパッタリング法によるMo/Si多層膜鏡成膜のその場偏光解析2005

    • Author(s)
      津留俊英
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島
    • Year and Date
      2005-09-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 水の窓領域の多層膜結像鏡評価のための実験室分光反射率計の光学設計2005

    • Author(s)
      羽多野忠
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島
    • Year and Date
      2005-09-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ECRイオンガンのビーム強度不安定性と電源電圧変動との相関2005

    • Author(s)
      原田哲男
    • Organizer
      第66回応用物理学会学術講演会
    • Place of Presentation
      徳島
    • Year and Date
      2005-09-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] In-situ ellipsometric monitoring of Mo/Si multilayer mirrors deposited by ion beam sputtering method[in Japanese]2005

    • Author(s)
      T. Tsuru
    • Organizer
      The 66th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies, 27a-B-4
    • Place of Presentation
      Japan, Tokushima
    • Year and Date
      2005-09-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optical design of a laboratory spctro-reflectometer for multilayer imaging optics in the water window region[in Japanese]2005

    • Author(s)
      T. Hatano
    • Organizer
      The 66th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Tokushima
    • Year and Date
      2005-09-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] The beam instability of an ECR ion gun and its similarity to the AC power source fluctuation[in Japanese]2005

    • Author(s)
      T. Harada
    • Organizer
      The 66th Autumn Meeting, 2007, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Tokushima
    • Year and Date
      2005-09-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Analytical designing of two-aspherical-mirror anastigmats permitting practical misalignments for soft-X-ray imaging2005

    • Author(s)
      M. Toyoda
    • Organizer
      The 8th International Conference on X-ray Microscopy (XRM)
    • Place of Presentation
      Japan, Himeji
    • Year and Date
      2005-07-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Narrow band Mo/Si EUV multilayers with thick Si structures2005

    • Author(s)
      T. Harada
    • Organizer
      The 8th International Conference on X-ray Microscopy (XRM)
    • Place of Presentation
      Japan, Himeji
    • Year and Date
      2005-07-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Improvement in S/N ratio of our soft X-ray spectro-reflectometer with a laser-produced plasma source2005

    • Author(s)
      T. Ohigashi
    • Organizer
      The 8th International Conference on X-ray Microscopy (XRM)
    • Place of Presentation
      Japan, Himeji
    • Year and Date
      2005-07-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Investigation of soft X-ray multilayer mirror fabrication by an in-situ ellipsometric depositionmonitor2005

    • Author(s)
      T. Tsuru
    • Organizer
      The 8th International Conference on X-ray Microscopy (XRM)
    • Place of Presentation
      Japan, Himeji
    • Year and Date
      2005-07-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Shutter speed function of shortest elapsed time in thickness distribution Controlled Multilayer Deposition2005

    • Author(s)
      T. Hatano
    • Organizer
      The 8th International Conference on X-ray Microscopy (XRM)
    • Place of Presentation
      Japan, Himeji
    • Year and Date
      2005-07-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Investigation of soft X-ray multilayer mirror fabrication by an in-situ ellipsemetric deposition monitor2005

    • Author(s)
      T. Tsuru
    • Organizer
      The 8th International Conference on X-ray Microscopy (XRM)
    • Place of Presentation
      Japan, Himeji
    • Year and Date
      2005-07-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 瞳の遮光に着目した2面非球面高スループット対物鏡の新設計手法2005

    • Author(s)
      豊田光紀
    • Organizer
      第52回応用物理学関係連合講演会
    • Place of Presentation
      さいたま
    • Year and Date
      2005-03-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線結像用の精密多層膜鏡の開発2005

    • Author(s)
      羽多野忠
    • Organizer
      第52回応用物理学関係連合講演会
    • Place of Presentation
      さいたま
    • Year and Date
      2005-03-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 実用的なアライメント誤差を許容する軟X線用結像光学系の設計2005

    • Author(s)
      豊田光紀
    • Organizer
      第52回応用物理学関係連合講演会
    • Place of Presentation
      さいたま
    • Year and Date
      2005-03-31
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] New design strategy for the two-aspherical-mirror anastigmat[in Japanese]2005

    • Author(s)
      M. Toyoda
    • Organizer
      The 52nd Spring meeting, 2005, Japan Society of Applied Phvsics and Related Societies
    • Place of Presentation
      Japan, Saitama
    • Year and Date
      2005-03-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of precise multilayer mirrors for soft X-ray imaging[in Japanese]2005

    • Author(s)
      T. Hatano
    • Organizer
      The 52nd Spring meeting, 2005, Japan Society of Applied Phvsics and Related Societies
    • Place of Presentation
      Japan, Saitama
    • Year and Date
      2005-03-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Design of soft x-ray imaging optics tolerating practical alignment errors[in Japanese]2005

    • Author(s)
      M. Toyoda
    • Organizer
      The 52nd Spring meeting, 2005, Japan Society of Applied Phvsics and Related Societies
    • Place of Presentation
      Japan, Saitama
    • Year and Date
      2005-03-31
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of soft X-ray wavefront control technology for imaging multilayer mirrors2005

    • Author(s)
      M. Yamamoto
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-03
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of soft X-ray wavefront control technology for imagine multilaver mirrors2005

    • Author(s)
      M. Yamamoto
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-03
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Thin film filter for an EUV multilayer mirror optics with a laser produced plasma light source2005

    • Author(s)
      T. Harada
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise thickness monitoring of EUV multilayer mirror fabrication by an ellipsometric thickness monitor2005

    • Author(s)
      T. Tsuru
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] On shape selection of a speed Controlled shutter for thickness distribution control.2005

    • Author(s)
      T. Hatano
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Improvement of our EUV spectro-reflectometer with a laser-produced plasma source2005

    • Author(s)
      T. Ohigashi
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] On shape selection of a speed controlled shutter for thickness distribution control2005

    • Author(s)
      T. Hatano
    • Organizer
      2nd International Symposium on Technologies and Applications of Photoelectron Micro-Spectroscopy with Laser-based VUV Sources
    • Place of Presentation
      Japan, Tsukuba
    • Year and Date
      2005-02-02
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] エリプソメトリーによるTiO2/SiO2多層膜スパッタ成膜のその場計測2004

    • Author(s)
      森澤大輔
    • Organizer
      第59回応用物理学会東北支部学術講演会
    • Place of Presentation
      仙台
    • Year and Date
      2004-12-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] In-situ ellispmetric monitoring of TiO2/SiO2 multilayer fabrications[in Japanese]2004

    • Author(s)
      D. Morisawa
    • Organizer
      The 59th Annual Meeting, 2004, Tohoku Chapter, Japan Society of Applied Physics and Related Societies, 10aB2
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2004-12-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise fabrication of EUV multilayer mirrors for high-resolution imaging.2004

    • Author(s)
      T. Tsuru
    • Organizer
      SANKEN International Symposium on Scientific and Industrial Nanotechnology 2004 (SISSIN-2004)
    • Place of Presentation
      Japan, Osaka
    • Year and Date
      2004-12-06
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise fabrication of EUV multilayer mirrors for high-resolution imaging2004

    • Author(s)
      T. Tsuru
    • Organizer
      SANKEN International Symposium on Scientific and Industrial Nanotechnology 2004 (SISSIN-2004)
    • Place of Presentation
      Japan, Osaka
    • Year and Date
      2004-12-06
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] その場計測エリプソメークーによる軟X線ナノ薄膜成膜の精密膜厚制御2004

    • Author(s)
      木下雄介
    • Organizer
      第4回多元物質利科学研究所研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2004-12-03
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise thickness control of ultra-thin film fabrication by an in-situ ellipsometer[in Japanese]2004

    • Author(s)
      Y. Kinoshita, T. Tsuru, T. Ohigashi, T. Hatano, M. Yamamoto
    • Organizer
      The 4th Meeting of IMRAM
    • Place of Presentation
      Sendai
    • Year and Date
      2004-12-03
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] An ellipsometric thickness monitor with layer-by-layer analysis for EUV multilayer optics fabrication2004

    • Author(s)
      T. Tsuru
    • Organizer
      3rd International EUVL Symposium
    • Place of Presentation
      Japan, Miyazaki
    • Year and Date
      2004-11-02
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 極紫外狭帯域分光フィルター用Mo/Si高次多層膜鏡の開発2004

    • Author(s)
      原田哲男
    • Organizer
      第65回応用物理学会学術連合講演会
    • Place of Presentation
      仙台
    • Year and Date
      2004-09-03
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 自動消光エリプソメーターによる軟X線ビームスプリッター成膜の精密膜厚制御2004

    • Author(s)
      木下雄介
    • Organizer
      第65回応用物理学会学術連合講演会
    • Place of Presentation
      仙台
    • Year and Date
      2004-09-03
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Higher Order Mo/Si EUV Multilayer Mirrors for Narrow Band Reflection Filtering[in Japanese]2004

    • Author(s)
      T. Harada
    • Organizer
      The 65th Autumn Meeting, 2004, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2004-09-03
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise thickness control of EUV beam splitter fabrication by an automatic null ellipsometer[in Japanese]2004

    • Author(s)
      Y. Kinoshita, T. Tsuru, M. Yamamoto
    • Organizer
      The 65th Autumn Meeting, 2004, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2004-09-03
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Thin film filters for an EUV multilayer mirror optics with a laser produced plasma light source2004

    • Author(s)
      T. Harada
    • Organizer
      The 14th International Conference on Vacuum Ultraviolet Radiation Physios (VUV)
    • Place of Presentation
      Australia, Cairns
    • Year and Date
      2004-07-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Deposition rate monitoring for accurate period control of EUV multilayers by in-situautomatic ellipsometry2004

    • Author(s)
      T. Tsuru
    • Organizer
      The 14th International Conference on Vacuum Ultraviolet Radiation Physics (VUV)
    • Place of Presentation
      Australia, Cairns
    • Year and Date
      2004-07-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Thin film filters for an EUV multilayer mirror optics with a laser produced plasma light source2004

    • Author(s)
      T. Harada
    • Organizer
      The 14th International Conference on Vacuum Ultraviolet Radiation Physics (VUV)
    • Place of Presentation
      Australia, Cairns
    • Year and Date
      2004-07-22
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Deposition rate monitoring for accurate period control of EUV multilayers by in-situ automatic ellipsometry2004

    • Author(s)
      T. Tsuru
    • Organizer
      The 14th International Conference on Vacuum Ultraviolet Radiation Physics (VUV)
    • Place of Presentation
      Australia, Cairns
    • Year and Date
      2004-07-22
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 軟X線結像光学用の高性能多層膜ミラー開発2004

    • Author(s)
      山本正樹
    • Organizer
      平成16年度日本真空協会6月研究例会
    • Place of Presentation
      東京
    • Year and Date
      2004-06-18
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of high performance multilayer mirrors for soft X-ray imaging optics[in Japanese]2004

    • Author(s)
      M. Yamamoto
    • Organizer
      June monthly meeting of Japan Vacuum Society in 2004
    • Place of Presentation
      Japan, Tokyo
    • Year and Date
      2004-06-18
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] その場計測・膜厚解析エリプソメトリーによる軟X線ミラー多層膜成膜pm感度モニタリング2004

    • Author(s)
      津留俊英
    • Organizer
      第51回応用物理学関係連合学術講演会
    • Place of Presentation
      八王子
    • Year and Date
      2004-03-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Picometer sensitivity monitoring of soft X-ray mirror multilayer by in-situ ellipsometry of real-time thickness analysis[in Japanese]2004

    • Author(s)
      T. Tsuru, T. Tsutou, M. Yamamoto
    • Organizer
      The 51st Spring Meeting, 2004, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Hachiouji
    • Year and Date
      2004-03-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Precise determination of multilayer period thickness utilizing the side band structure of EUV spectral reflectance2004

    • Author(s)
      T. Hatano
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of an EUV interferometer with a laser produced plasma source for figure error measurements2004

    • Author(s)
      M. Yamamoto
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ultra-high vacuum compatible ion beam sputtering system for reflective multilayer fabricatior of soft X-ray imaging optics2004

    • Author(s)
      Y. Adachi
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Imaging plate recording of 2 dimensional pattern for use with a laser produced plasma EUV source2004

    • Author(s)
      T. Harada
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Optimal design of aperiodic multilayer mirrors for water-window microscope optics2004

    • Author(s)
      Y. A. Uspenskii
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Ultra-high vacuum compatible ion beam sputtering system for reflective multilayer fabrication of soft X-ray imaging optics2004

    • Author(s)
      Y. Adachi
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of an automatic null ellipsometer for sputtering rate monitoring of EUV multilayer fabrication2004

    • Author(s)
      T. Tsutou
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-08
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Nanometer-scale period multilayers : Thermal stability study2004

    • Author(s)
      E. Majkova
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-08
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Real-time ellipsometry of picometer sensitivity for thickness monitoring of EUV multilayer fabrication2004

    • Author(s)
      T. Tsuru
    • Organizer
      The 7th International Conference on the Physics of X-Ray Multilayer Structures (PXRMS)
    • Place of Presentation
      Japan, Rusutsu
    • Year and Date
      2004-03-07
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] ピコメーター感度エリプソメーターによる極紫外多層膜鏡の成膜モニタリング2003

    • Author(s)
      津藤高志
    • Organizer
      第三回多元研研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2003-12-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] スパッタリング成膜用デュアルイオン銃の動作安定化調整と多層膜の周期性評価2003

    • Author(s)
      足立康伸
    • Organizer
      第三回多元研研究発表会
    • Place of Presentation
      仙台
    • Year and Date
      2003-12-12
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Deposition rate monitoring of EUV multilayer mirror fabrication by in-situellipsometry of picometer sensitivity[in Japanese]2003

    • Author(s)
      T. Tsutou
    • Organizer
      The 3rd Meeting of IMRAM
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2003-12-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Rate stabilization of dual ion gun sputtering deposition and periodicity of fabricated multilayers[in Japanese]2003

    • Author(s)
      Y. Adachi
    • Organizer
      The 3rd Meeting of IMRAM
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2003-12-12
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 極紫外多層膜鏡の成膜レートモニタの開発2003

    • Author(s)
      津藤高志
    • Organizer
      第7回X線結像シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] レーザー生成プラズマ光源を用いた極紫外干渉計の開発2003

    • Author(s)
      原田哲男
    • Organizer
      第7回X線結像シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] イオン銃の動作安定化と極紫外凹面鏡多層膜の膜厚制御性能の向上2003

    • Author(s)
      足立康伸
    • Organizer
      第7回X線結像シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] LPP軟X線光源を用いた超高分解能多元物質顕微鏡の開発2003

    • Author(s)
      山木正樹
    • Organizer
      第7回X線結像シンポジウム
    • Place of Presentation
      仙台
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of a deposition rate monitor for accurate thickness control of EUV multilayer mirrors[in Japanese]2003

    • Author(s)
      T. Tsutou
    • Organizer
      The 7th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Developement of the EUV interferometer with Laser Produced Plasma Light Source[in Japanese]2003

    • Author(s)
      T. Harada
    • Organizer
      The 7th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Stabilization of ion guns for sputtering deposition of EUV concave multilayers and improvement of thickness accuracy[in Japanese]2003

    • Author(s)
      Y. Adachi
    • Organizer
      The 7th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of Super resolution element specific microscope with use of LPP soft X-ray source[in Japanese]2003

    • Author(s)
      M. Yamamoto
    • Organizer
      The 7th Symposium of X-ray Imaging Optics
    • Place of Presentation
      Japan, Sendai
    • Year and Date
      2003-11-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] An ellipsoraetric picometer sputtering-rate monitor for exact EUV multilayer fabrication2003

    • Author(s)
      M. Yamamoto
    • Organizer
      2nd International EUVL Symposium
    • Place of Presentation
      Belgium, Antwerp
    • Year and Date
      2003-10-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] An ellipsometric picometer sputtering-rate monitor for exact EUV multilayer fabrication2003

    • Author(s)
      M. Yamamoto
    • Organizer
      2nd International EUVL Symposium
    • Place of Presentation
      Belgium, Antwerp
    • Year and Date
      2003-10-01
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] 新型極紫外シアリング干渉計による形状計測のための縞形成と解析法の検討2003

    • Author(s)
      原田哲男
    • Organizer
      第64回応用物理学会学術連合講演会
    • Place of Presentation
      福岡
    • Year and Date
      2003-09-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Fringe formation and analysis method for figure measurements by a new EUV shearing interferometer[in Japanese]2003

    • Author(s)
      T. Harada
    • Organizer
      The 64th Autumn Meeting, 2006, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Fukuoka
    • Year and Date
      2003-09-01
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] レーザー生成プラズマ光源用の回転ドア式デブリ除去ユニット2003

    • Author(s)
      古舘三七二
    • Organizer
      第64回応用物理学会学術連合講演会
    • Place of Presentation
      福岡
    • Year and Date
      2003-08-30
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Debris removal unit of a swing door type for a laser produced plasma source[in Japanese]2003

    • Author(s)
      M. Furudate
    • Organizer
      The 64th Autumn Meeting, 2006, Japan Society of Applied Physics and Related Societies
    • Place of Presentation
      Japan, Fukuoka
    • Year and Date
      2003-08-30
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of a high sensitivity thickness monitor for EUV multilayer mirror fabrication2003

    • Author(s)
      T. Tsuru
    • Organizer
      he 8th International Conference on Synchrotron RadiationInstrumentation(SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Development of a high sensitivity thickness monitor for EUV multilayer mirror fabrication2003

    • Author(s)
      T. Tsuru
    • Organizer
      The 8th International Conference on Synchrotron Radiation Instrumentation (SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-28
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Beamline optics alignment at bending magnet sections by use of a Sc/Cr multilayer polarizer2003

    • Author(s)
      T. Hatano
    • Organizer
      he 8th International Conference on Synchrotron RadiationInstrumentation(SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-27
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Beamline optics alignment at bending magnet sections by use of a Sc/Cr multilayer polarizer2003

    • Author(s)
      T. Hatano
    • Organizer
      The 8th International Conference on Synchrotron Radiation Instrumentation (SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-27
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Linear polarization measurements of soft X-ray emitted from a figure-8 undulator by using a multilayer2003

    • Author(s)
      T. Hirono
    • Organizer
      he 8th International Conference on Synchrotron Radiation Instrumentation(SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Normal incidence reflectometry of concave multilayer mirrors using synchrotron radiation2003

    • Author(s)
      T. Hatano
    • Organizer
      he 8th International Conference on Synchrotron Radiation Instrumentation(SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-26
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Linear polarization measurements of soft X-ray emitted from a figure8 undulator by using a multilayer2003

    • Author(s)
      T.Hirono
    • Organizer
      The-8th International Conference on Synchrotron Radiation Instrumentation (SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Normal incidence reflectometry of concave multilayer mirrors using synchrotron radiation2003

    • Author(s)
      T. Hatano
    • Organizer
      The 8th International Conference on Synchrotron Radiation Instrumentation (SRI)
    • Place of Presentation
      USA, San Francisco
    • Year and Date
      2003-08-26
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] In-situ measurement of multilayer deposition process by an automatic null ellipsometer with picometer sensitivity2003

    • Author(s)
      T. Tsuru
    • Organizer
      The 3rd International Conference on Spectroscopic Ellipsometry (ICSE)
    • Place of Presentation
      Austria, Vienna
    • Year and Date
      2003-07-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] An accurate method of λ/4 plate characterization in the condition of use on the ellipsometer2003

    • Author(s)
      M. Yamamoto
    • Organizer
      The 3rd International Conference on Spectroscopic Ellipsometry (ICSE)
    • Place of Presentation
      Austria, Vienna
    • Year and Date
      2003-07-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] In-situ measurement of multilayer deposition process by an automatic null ellinsometer with picometer sensitivity2003

    • Author(s)
      T. Tsuru
    • Organizer
      The 3rd International Conference on Spectroscopic Ellipsometry (ICSE)
    • Place of Presentation
      Austria, Vienna
    • Year and Date
      2003-07-10
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] EUV光源の開発と応用第II編EUVリソグラフィ用のマスクとレジスト技術第1章X線多層膜の物理2007

    • Author(s)
      山本正樹
    • Publisher
      (株)シーエムシー出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] EUV光源の開発と応用 第II編「EUVリソグラフィ用のマスクとレジスト技術」第1章「X線多層膜の物理」2007

    • Author(s)
      山本正樹
    • Publisher
      (株)シーエムシー出版
    • Related Report
      2006 Annual Research Report
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/labo/m_yamamoto/indexTok.htm

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] 多層膜の表面形状加工方法及び表面形状加工装置2007

    • Inventor(s)
      津留俊英
    • Industrial Property Rights Holder
      津留俊英
    • Industrial Property Number
      2007-065078
    • Filing Date
      2007-03-14
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Publications] M.Yamamoto, Y.Hotta, M.Sato: "A tracking ellipsometer of picometer sensitivity enabling 0.1% sputtering-rate monitoring of EUV nanometer multilayer fabrication"Thin Solid Films. 433/1-2. 224-229 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] Eva Majkova, Masaki Yamamoto: "Figure error correction by reflection wavefront control of Cu Kα grazing incidence multilayer mirrors"Optical Review. 10. 398-401 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2018-03-28  

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