• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

金属ガラスの極微小化における力学特性評価とその寸法効果

Research Project

Project/Area Number 15074205
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionTokyo Institute of Technology

Principal Investigator

肥後 矢吉  Tokyo Institute of Technology, 精密工学研究所, 教授 (30016802)

Co-Investigator(Kenkyū-buntansha) 曽根 正人  東京工業大学, 精密工学研究所, 准教授 (30323752)
石山 千恵美  東京工業大学, 精密工学研究所, 助教 (00311663)
柴田 暁伸  東京工業大学, 精密工学研究所, 助教 (60451994)
高島 和希  熊本大学, 工学部, 教授 (60163193)
Project Period (FY) 2003 – 2007
Project Status Completed (Fiscal Year 2007)
Budget Amount *help
¥31,200,000 (Direct Cost: ¥31,200,000)
Fiscal Year 2007: ¥4,600,000 (Direct Cost: ¥4,600,000)
Fiscal Year 2006: ¥5,100,000 (Direct Cost: ¥5,100,000)
Fiscal Year 2005: ¥6,500,000 (Direct Cost: ¥6,500,000)
Fiscal Year 2004: ¥6,900,000 (Direct Cost: ¥6,900,000)
Fiscal Year 2003: ¥8,100,000 (Direct Cost: ¥8,100,000)
Keywords金属ガラス / 微小引張試験片 / 材料特性評価 / 引張強度 / ナノ結晶分散 / 電解研磨 / 微小試験片 / 材料評価法 / マイクロ加工 / アモルファス / MEMS / 微小材料試験 / 機械的性質 / 薄膜
Research Abstract

金属ガラスは安定なアモルファス構造で機械的特性に異方性が無く,高降伏強度で耐食性に優れていることからMEMSなどの超微小デバイスへの展開にきわめて適している。本研究では,金属ガラスを極微小デバイス用構造材料へ適用する際に最も重要となる機械的性質と信頼性評価法とともに,めっきによる基板へ薄膜を作成する手法を開発することを目的としている。
本年度は,PdとPt基金属ガラスのミクロンサイズでの特性を評価するとともに,前年度開発した加工層の影響を無視できる加工法により作製した微小曲げ試験を用いて変形帯の位置を精密に同定しながら変形とナノ結晶析出の関係を透過電子顕微鏡を用いて検討し,明らかにした。また,組成を制御した金属ガラス薄膜をメッキで作成する最適条件を調ベメッキで作成したものと溶解で作成したものの違いを明らかにすることに成功した。また,微細構造物を構築する上で重要な基板や他金属層,高分子層との剥離強度を正確に求める方法を併せて開発した。
以上,金属ガラスを変形した際に析出するなの結晶は変形帯から離れた位置に析出し,大きな変形帯のみに出来ること,NiPPd金属ガラスの組成はメッキ液の組成とともに温度を精密に制御することにより自由に変えられること,およびフォトリソグラフによって基板上の薄膜に数十ミクロン径の円柱をエポキシ樹脂で作成することによって円柱に負荷を与えて直接微小領域の薄利強度を求められることを明らかにした。

Report

(5 results)
  • 2007 Annual Research Report
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (53 results)

All 2008 2007 2006 2005 2004 Other

All Journal Article (29 results) (of which Peer Reviewed: 9 results) Presentation (21 results) Publications (3 results)

  • [Journal Article] Uniform Ni P Film Using an Electroless Plating Method with an Emulsion of Supercritical Carbon Dioxide2007

    • Author(s)
      Hiroki Uchiyama, Masato Sone, Chiemi Ishiyama, Tatsuro Endo, Takeshi Hatsuzawa, and Yakichi Higo
    • Journal Title

      Journal of The Electrochemical Society 154 (7)

      Pages: 91-94

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] DEVELOPMENT OF NEW EVALUATION METHOD FOR ADHESIVE STRENGTH BETWEEN MICROSIZED PHOTORESIST AND Si SUBSTRATE OF MEMS DEVICES2007

    • Author(s)
      Chiemi Ishiyama, Masato Sone and Yakichi Higo
    • Journal Title

      Key Engineering Materials 345-346

      Pages: 1185-1188

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanomechanical properties of embedded dendrite phase and its influence on inelastic deformation of Zr55Al10Ni5Cu30 glassy alloy2007

    • Author(s)
      Y.-H. Lee, J.-S. Park, Y. Higo, D. Kwon
    • Journal Title

      Materials Science and Engineering A 449 451

      Pages: 945948-945948

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of P content on nanocrystalline morphology formed by FIB irrad iation in Ni-P amorphous alloy2007

    • Author(s)
      Koji Sato, Chiemi Ishiyama, Masato Sone, Yakichi Higo
    • Journal Title

      Material Transaction 48[7]

      Pages: 1964-1967

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of the Micro-sized BMG Tensile Specimen Fabricated by Electrolytic Polishin Techique2007

    • Author(s)
      Mikito Kondo, Ryo Morihashi, Chiemi Ishiyama, Masato Sone, Yakichi Higo
    • Journal Title

      Material Transaction 48[7],

      Pages: 1785-1788

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 電解研磨による微小サイズ引張試験片作製法の開発2007

    • Author(s)
      近藤幹人, 森橋遼, 石山千恵美, 曽根正人, 肥後矢吉
    • Journal Title

      金属学会誌 71(2)

      Pages: 1-6

    • NAID

      10018509111

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Elastic anisotropy of an Fe79Si12B9 amorphous alloy thin film studied by ultrasound spectroscopy2007

    • Author(s)
      Ryuichi Tarumi, Akira Shibata, Hirotsugu Ogi, Masahiko Hirao, Kazuki Takashima, Yakichi Higo
    • Journal Title

      Jouranal of Applied Physics JR06-3384R

    • NAID

      120007148314

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Size effects of the micro-sized polycrystalline SUS304 tensile specimen fabricated by electrolytic polishing technique2007

    • Author(s)
      M.Kondo, C. Ishiyama, M.Sone Yakichi Higo
    • Journal Title

      Transactions of Material Research Society of Japan 32[4]

      Pages: 1187-1190

    • NAID

      130007923027

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanical testing of micro-sized specimens2007

    • Author(s)
      YAKICHI HIGO, KAZUKI TAKASHIMA
    • Journal Title

      Netsu Shori 44(1)

      Pages: 1-2

    • NAID

      10012104674

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 電解研磨による微小サイズ引張試験片作製法の開発2007

    • Author(s)
      近藤幹人, 森橋 遼, 石山千恵美, 曽根正人, 肥後矢吉
    • Journal Title

      日本金属学会誌 71. 2

      Pages: 170-175

    • NAID

      10018509111

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Evaluation of the micro-sized BMG specimen fabricated by electrolytic polishing technique2006

    • Author(s)
      M.Kondo, R.Morihashi, C.Ishiyama, M.Sone, Y.Higo
    • Journal Title

      The 5th International Conference on Bulk Metallic Glasses Proceedings

      Pages: 71-71

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 電解研磨により作製したSUS304微小引張試験片の機械的性質2006

    • Author(s)
      近藤 幹人, 石山 千恵美, 曽根 正人, 肥後 矢吉
    • Journal Title

      第50回日本学術会議材料工学連合講演会

      Pages: 105-105

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effects of P content on nanocrystalline morphology in Ni-P amorphous alloy formed by FIB irradiation2006

    • Author(s)
      K.Sato, C.Ishiyama, S.Masato, Y.Higo
    • Journal Title

      The 5th International Conference on Bulk Metallic Glasses Proceedings

      Pages: 70-70

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Effects of a stress field on the crystallographic orientation of nanocrystals formed in a Ni-P amorphous alloy by FIB irradiation2006

    • Author(s)
      Y.Higo, M.Kubota, C.Ishiyama, M.Sone
    • Journal Title

      The 5th International Conference on Bulk Metallic Glasses Proceedings

      Pages: 95-95

    • Related Report
      2006 Annual Research Report
  • [Journal Article] The Mechanical Properties of Microscale MEMS Materials2006

    • Author(s)
      T.P.Halford, K.Takashima, Y.Higo
    • Journal Title

      Thin Solid Films (In press)

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fatigue and Fracture of a Ni-P Amorphous Alloy Thin Film on the Micrometer Scale2005

    • Author(s)
      K.Takashima, Y.Higo
    • Journal Title

      Fracture and Fatigue of Engineering Materials and Structures, 28(7)

      Pages: 703-710

    • Related Report
      2005 Annual Research Report
  • [Journal Article] The Effect of Sample Preparation upon the Fracture Toughness of Microsized TiAl2005

    • Author(s)
      T.P.Halford, D.Rudinal, K.Takashima, Y.Higo
    • Journal Title

      Key Engineering Materials 297-300

      Pages: 2416-2422

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Toughness Measurement of a Micro-Sized Single Crystal Silicon2005

    • Author(s)
      Satoru Koyama, Kazuki Takashima, Yakichi Higo
    • Journal Title

      Key Engineering Materials 297-300

      Pages: 292-298

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fracture Tests of Micro-sized TiAl specimens2005

    • Author(s)
      T.P.Halford, K.Takashima, Y.Higo, P.Bowen
    • Journal Title

      Fatigue and Fracture of Engineering Materials and Structures 28

      Pages: 695-701

    • Related Report
      2005 Annual Research Report
  • [Journal Article] マイクロサイズ試験片によるTiAl基金属化合物の破壊じん性試験2005

    • Author(s)
      高島和希, Timothy P Halford, Discar Rudinal, 肥後矢吉
    • Journal Title

      材料 54(10)

      Pages: 1036-1040

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 単結晶シリコンウェハーのミクロンサイズにおける破壊靭性評価2005

    • Author(s)
      小山聡, 高島和希, 肥後矢吉
    • Journal Title

      電気学会論文誌E 125(7)

      Pages: 302-302

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Fatigue Testing of microsized samples of γ-TiAl based material2005

    • Author(s)
      T.P.Halford, K.Takashima, Y.Higo
    • Journal Title

      Materials Research Society Symposium Proceedings 842

      Pages: 229-234

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Micro-Fracture Toughness Testing of TiAl based Alloys with a Fully Lamellar Structure2005

    • Author(s)
      K.Takashima, D.Rudinal, T.P.Halford, Y.Higo, M.Takeyama
    • Journal Title

      Materials Research Society Symposium Proceedings 842

      Pages: 175-180

    • Related Report
      2005 Annual Research Report
  • [Journal Article] アモルファス合金より作製した微小サイズ試験片の曲げ特性に及ぼすイオン注入の効果2004

    • Author(s)
      久保田仁, 小山 聡, 高島和希, 肥後矢吉
    • Journal Title

      第134回日本金属学会春期大会講演概要

      Pages: 383-383

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Effect of Ion-Implantation on the Mechanical Properties of a Zr-Ni Amorphous Alloy2004

    • Author(s)
      H.Kubota, S.Koyama, K.Takashima, Y.Higo
    • Journal Title

      Abstracts for the 11th Int.Symp.on Metastable, Mechanically Alloyed and Nanocrystalline Materials

      Pages: 82-82

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Formation of Self-Oriented Nanocrystals in an Amorphous Alloy under Focused-Ion-Beam Irradiation2004

    • Author(s)
      T.Kamikawa, R.Tarumi, K.Takashima, Y.Higo
    • Journal Title

      Trans.Mat.Res.Soc.Japan 29・7

      Pages: 3095-3097

    • Related Report
      2004 Annual Research Report
  • [Journal Article] マイクロサイズ試験片を用いた材料試験2004

    • Author(s)
      高島和希, 肥後矢吉
    • Journal Title

      熱処理 44

      Pages: 1-2

    • NAID

      10012104674

    • Related Report
      2004 Annual Research Report
  • [Journal Article] マイクロサイズ試験片を用いた材料評価試験2004

    • Author(s)
      高島和希, 肥後矢吉
    • Journal Title

      検査技術 9・9

      Pages: 1-5

    • NAID

      40006391753

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Focused Ion Beam Irradiation Induced Formation of Oriented Nanocrystals - Its Characterization and Applications-2004

    • Author(s)
      Y.Higo, R.Tarumi
    • Journal Title

      Proc.8th Asia-Pacific Conference on Electron Microscopy

      Pages: 596-597

    • Related Report
      2004 Annual Research Report
  • [Presentation] 超臨界二酸化炭素処理を利用した微小レジストパターン基板間の密着強度の向上2008

    • Author(s)
      石山千恵美、曽根正人、肥後矢吉
    • Organizer
      化学工学会第73年会
    • Place of Presentation
      静岡大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 超臨界ナノプレーティング法による半導体配線形成技術の開発2008

    • Author(s)
      清水哲也、曽根正人、柴田暁伸、肥後矢吉、石山千恵美、田島久善、宋利国、曽根田栄悦
    • Organizer
      化学工学会第73年会
    • Place of Presentation
      静岡大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 超臨界ナノプレーティング法による半導体配線形成技術の開発2008

    • Author(s)
      清水哲也、曽根正人、柴田暁伸、肥後矢吉、石山千恵美、田島久善、宋利国、曽根田栄悦
    • Organizer
      第55回応用物理学関係連合講演会
    • Place of Presentation
      日本大学船橋キャンパス
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ni電気めっき膜の集合組織形成におよぼす基板の結晶構造の影響2008

    • Author(s)
      田曉伸、島田貴文、石山千恵美、曽根正人、肥後矢吉
    • Organizer
      日本金属学会2008年春期講演大会
    • Place of Presentation
      武蔵工業大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Bonding strength of MEMS materials',The Workshop on MEMS Standardization2007

    • Author(s)
      Yakichi Higo(Invited Lecture)
    • Organizer
      Chinese National Committee of the IEC
    • Place of Presentation
      Beijing,China
    • Year and Date
      2007-06-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] DEVELOPMENT OF NEW EVALUATION METHOD FOR ADHESIVE STRENGTH BETWEEN MICROSIZED PHOTORESIST AND Si SUBSTRATE OF MEMS DEVICES2007

    • Author(s)
      Chiemi Ishiyama, Masato Sone and Yakichi Higo
    • Organizer
      ICM10
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2007-05-30
    • Related Report
      2007 Annual Research Report
  • [Presentation] Interphase boundary structure of lenticular martensite in an Fe-33Ni alloy2007

    • Author(s)
      Akinobu Shibata, Tadashi Furuhara, Tadashi Maki
    • Organizer
      The lst Tnternational Symposium on Steel Science 2007 (IS3-2007)
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effect of Crystallographic Structure of Substrate on Texture in Electrodeposited Ni Layers2007

    • Author(s)
      Takafumi Shimada, Akinlbu Shibata, Masato Sone, Chiemi Ishiyama, Yakichi Higo
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Effects of Supercritical CO2 on Adhesive Strength between Micro-sized Photoresist pattern and Si Substrate2007

    • Author(s)
      Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Interface stability between Ni-p film plated by Supercritical Electroless Plating and the Polymer Substrate2007

    • Author(s)
      Byung-hoon Woo, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Masahiro Yamagata, Kaoru Masuda, Yakichi Higo
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] Fabrication of PdxNiyP100-x-y Metallic Glass film by Electroless Alloy Plating and its catalyst activity2007

    • Author(s)
      Yoshihide Imamura, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Yakichi Higo
    • Organizer
      2007 MRS Fall Meeting
    • Place of Presentation
      Boston,USA
    • Related Report
      2007 Annual Research Report
  • [Presentation] 無電界合金めっき法による、金属ガラス薄膜の作成とその剥離強度試験法の開発2007

    • Author(s)
      曽根正人, 今村嘉秀, 柴田曉伸, 石山千恵美, 肥後矢吉
    • Organizer
      科学研究費特定領域「金属ガラスの科学」AO4班研究会
    • Place of Presentation
      山形大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] MEMS 用微小構造部材-基板間の密着強度に及ぼすプロセス条件の影響2007

    • Author(s)
      石山千恵美, 曽根正人, 肥後矢吉
    • Organizer
      日本機械学会創立110周年記念 2007年度年次大会
    • Place of Presentation
      関西大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] マイクロ試験片中の応力集中部が疲労特性へ及ぼす影響2007

    • Author(s)
      小山聡, 石山千恵美, 曽根正人, 肥後矢吉
    • Organizer
      日本機械学会創立110周年記念 2007年度年次大会
    • Place of Presentation
      関西大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ni-P Film deposited by Supercritical Nano Electroless Plating with Supercritical Fluid Immersion Catalyzation on Polyimide Substrate2007

    • Author(s)
      Woo Byung Hoon, 曽根正人, 柴田曉伸, 石山千恵美, 増田 薫, 山形 昌弘, 肥後矢吉
    • Organizer
      化学工学会北海道支部 第39回秋季大会
    • Place of Presentation
      北海道大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ni電気めっき膜の成長挙動におよぼす基板の影響2007

    • Author(s)
      島田 貴文, 柴田 曉伸, 石山千恵美, 曽根 正人, 肥後 矢吉
    • Organizer
      日本金属学会2007年度秋期大会
    • Place of Presentation
      岐阜大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ni電気めっき膜の核生成におよぼす基板の影響2007

    • Author(s)
      柴田 曉伸, 島田 貴文, 石山千恵美, 曽根 正人, 肥後 矢吉
    • Organizer
      日本金属学会2007年度秋期大会
    • Place of Presentation
      岐阜大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] 無電解合金めっき法による金属ガラス薄膜の作製とその触媒活性2007

    • Author(s)
      今村 嘉秀, 曽根 正人, 柴田曉伸, 石山 千恵美, 肥後矢吉
    • Organizer
      日本金属学会2007年度秋期大会
    • Place of Presentation
      岐阜大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] Ni-PPlating on Polymer Substrate using Supercritical Carbon Dioxide2007

    • Author(s)
      Woo Byung Hoon, 曽根 正人, 柴田 曉伸, 石山 千恵美, 肥後 矢吉
    • Organizer
      日本金属学会2007年度秋期大会
    • Place of Presentation
      岐阜大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] MEMS用金属ガラスの極微小化による機械的特性評価2007

    • Author(s)
      肥後矢吉
    • Organizer
      金属ガラス特定領域研究 AO4班報告会
    • Place of Presentation
      長崎大学
    • Related Report
      2007 Annual Research Report
  • [Presentation] MEMS用金属ガラスの極微小化による機械的特性評価2007

    • Author(s)
      肥後矢吉、曽根正人、石山千恵美、柴田曉伸
    • Organizer
      文部科学省科学研究費補助金・特定領域研究「金属ガラスの材料科学」最終年度(平成19年度)全体報告会
    • Place of Presentation
      大阪、ホテル阪急エクスポパーク
    • Related Report
      2007 Annual Research Report
  • [Publications] S.Koyama, K.Nakai, K.Takashima, Y.Higo: "Fracture Toughness Tests of Thin Films for MEMS Applications"Trans.Mat.Res.Soc.Japan. 28・3. 695-698 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takashima, S.Koyama, K.Nakai, Y.Higo: "Development of Fatigue Pre-Cracking Method into Micro-Sized Specimens for Measuring Fracture Toughness"MRS Symp.Proc.. 741. 35-40 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Takashima, Y.Higo: "Fracture and Fatigue of Micro-Sized Specimens for MEMS/MST Applications"Proceedings of ATEM03 (International Conference on Advanced Technology in Experimental Mechanics 2003. (CD-ROM). OS06W0421 (2003)

    • Related Report
      2003 Annual Research Report

URL: 

Published: 2003-04-01   Modified: 2018-03-28  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi