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Generation of micro-scale reactive plasmas and development of their new applications

Research Project

Project/Area Number 15075101
Research Category

Grant-in-Aid for Scientific Research on Priority Areas

Allocation TypeSingle-year Grants
Review Section Science and Engineering
Research InstitutionKyoto University

Principal Investigator

TACHIBANA Kunihide  Kyoto University, 工学研究科, 教授 (40027925)

Co-Investigator(Kenkyū-buntansha) SHIRAFUJI Tatsuru  京都大学, 産官学連携センター, 准教授 (10235757)
ISHII Shozo  Tokyo Institute of Technology, Graduate School of Science and Engineering, Professor (40016655)
TERASHIMA Kazuo  The University of Tokyo, Graduate School of Frontier Science, Associate Professor (30176911)
Project Period (FY) 2003 – 2008
Project Status Completed (Fiscal Year 2008)
Budget Amount *help
¥20,400,000 (Direct Cost: ¥20,400,000)
Fiscal Year 2008: ¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 2007: ¥4,400,000 (Direct Cost: ¥4,400,000)
Fiscal Year 2006: ¥3,900,000 (Direct Cost: ¥3,900,000)
Fiscal Year 2005: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2004: ¥3,700,000 (Direct Cost: ¥3,700,000)
Fiscal Year 2003: ¥1,700,000 (Direct Cost: ¥1,700,000)
KeywordsMicroplasma / Microdischarge / Plasma generation and control / Plasma diagnostics and simulation / Non-equilibrium material synthesis / Vacuum ultraviolet light source / biomedical processing / Plasma metamaterial / マイクロ放電 / プラズマ生成制御 / プラズマ診断シミュレーション / 非平衡材料合成 / 真空紫外光源 / バイオマテリアルプロセス / プラズマメタマテリアル / 材料合成 / 超微細化工 / バイオマテリアル / 超微細加工 / 超臨界流体 / 分光診断 / 材料プロセス / パルスパワー / マイクロプズマ / プラズマ生成・制御 / プラズマ・シミュレーション / プラズマ応用技術 / 局所材料プロセス / 極微量化学分析 / 微小光源・ディスプレイ
Research Abstract

昨年度に終了した特定領域研究「プラズマを用いたミクロ反応場の創成とその応用」(略称 : マイクロプラズマ)の研究成果を学術書として刊行するために、下記の手順に従って編集・出版作業を進めた。1)編集会議による目次・分担執筆者の決定 : 総括班メンバー(本研究の代表者、班長、事務担当者)によって、書籍の内容、分担執筆者、編集方針などを決定した。2)分担執筆作業 : 各計画研究・公募研究の研究代表者に章・節ごとのデータ提供や下書を依頼した。3)総括班メンバーによって、章ごとの取り纏めと体裁の統一作業を進めた。4)全体の取り纏め作業 : 領域代表者が総括班メンバーの協力の下に、統一的な視点で全体を通した取り纏めを行い、出版社に原稿を入稿した。5)印刷・校正・出版作業 : 出版社による版組・印刷作業、総括班メンバーおよび研究代表者による校正作業を行った後、3月下旬に単行本をオーム社より出版した。6)関係者への配布および広範な利用への依頼 : 完成した書籍(総260ページ)を、本特定領域の関係者並びに関連の深い研究者等に送付し、広範な利用を図るための推薦を依頼した。
なお、出版した書籍のタイトル及び章建ては以下の通りである。
「マイクロプラズマ-基礎と応用-」第1章 序論、第2章 微小空間高密度媒質中での放電プラズマ現象、第3章 マイクロプラズマの生成、第4章 マイクロプラズマの診断とシミュレーション、第5章 マイクロプラズマの応用。

Report

(7 results)
  • 2008 Annual Research Report
  • 2007 Annual Research Report   Final Research Report Summary
  • 2006 Annual Research Report
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (108 results)

All 2009 2008 2007 2006 2005 2004 2003 Other

All Journal Article (51 results) (of which Peer Reviewed: 22 results) Presentation (37 results) Book (4 results) Remarks (3 results) Patent(Industrial Property Rights) (9 results) Publications (4 results)

  • [Journal Article] Formation of ethanol filament and its pulsed discharge for microplasma generation2008

    • Author(s)
      S. Ishii
    • Journal Title

      Japanese Journal of Applied Physics 47(In press)

    • NAID

      40016003407

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrolyte-cathode atmospheric glow discharge with wide-gap operationusing mineature gas flow2008

    • Author(s)
      S. Ishii
    • Journal Title

      IEEE Transactions on Plasma Science 36(In press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development and diagnostics of novel materials processing using supercriticalfluid plasma generated by space- and time-restricted discharge2008

    • Author(s)
      K. Terashima
    • Journal Title

      Transaction on Materials Research Society of Japan 33(In press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Gas-temperature-dependent characteristics of cryo dielectric barrier dischargeplasma under atmospheric pressure2008

    • Author(s)
      K. Terashima
    • Journal Title

      Applied Physics Express 2(In press)

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatiotemporal behavior of excited Xe^*(1s_4, 1s_5)and Kr^*(1s_5)atoms measured by laser-absorption spectroscopy in unit cell of a plasma display panel with Xe-Kr-Ne ternary gas mixture2007

    • Author(s)
      J. -S. Oh
    • Journal Title

      J. Appl. Phys. 102

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Generation of microplasma using pulsed discharge of ethanol droplet in air2007

    • Author(s)
      N. Shirai
    • Journal Title

      Jpn. J. Appl. Phys. 46

      Pages: 370-374

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Carbon materials syntheses using dielectric barrier discharge microplasma in supercritical carbon dioxide environments2007

    • Author(s)
      T. Tomai
    • Journal Title

      J. Supercritical Fluids 41

      Pages: 404-411

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Spatiotemporal behavior of excited Xe^*(ls_4,ls_5) and Kr^*(lS_5) atoms measured by laser-absorption spectroscopy in unit cell of a plasma display panel with Xe-Kr-Ne ternary gas mixture2007

    • Author(s)
      J. -S. Oh
    • Journal Title

      Appl. Phys. 102

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Charactersitics of metamaterials composed of microplasma arrays2007

    • Author(s)
      K. Tachibana
    • Journal Title

      Plasma Phyiscs and Controlled Fusion 49

      Pages: 453-463

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Spatiotemporal behavior of excited Xe^*(IS_4, Is_5) and Kr^*(lS_5)atoms measured by laser-absorption spectroscopy in unit cell of a plasma display panel with Xe-Kr-Ne ternary gas mixture2007

    • Author(s)
      K. Tachibana
    • Journal Title

      Journal of Applied Physics 102

      Pages: 73301-73301

    • Related Report
      2007 Annual Research Report
    • Peer Reviewed
  • [Journal Article] マイクロプラズマの基礎と展望2006

    • Author(s)
      橘邦英
    • Journal Title

      応用物理 75

      Pages: 399-411

    • NAID

      10017540781

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Current status of microplasma research2006

    • Author(s)
      K. Tachibana
    • Journal Title

      IEEJ Trans. 1

      Pages: 145-155

    • NAID

      10025770945

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Water treatment by fast oxygen radical flow with dc-driven microhollow cathode discharge2006

    • Author(s)
      A. Yamatake
    • Journal Title

      IEEE Trans. Plasma Sci. 34

      Pages: 1375-1381

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Microplasma synthesis of carbon nanostructured materials2006

    • Author(s)
      K. Terashima
    • Journal Title

      Adv. Sci. Technol. 48

      Pages: 9-16

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Basic aspects of microplasmas and their future prospects2006

    • Author(s)
      K. Tachibana
    • Journal Title

      Oyobutsuri 75

      Pages: 399-411

    • NAID

      10017540781

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Water treatment by fast oxygen radical flow with dc-driven microhol low cathode discharge2006

    • Author(s)
      A. Yamatake
    • Journal Title

      IEEE Trans. Plasma Sci. 34

      Pages: 1375-1381

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Principles and applications of plasma diagnostics2006

    • Author(s)
      K. Tachibana
    • Journal Title

      Corona Pub., Tokyo

      Pages: 390-390

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Micro and nano-plasma technologies and their industrial applications2006

    • Author(s)
      K. Tachibana
    • Journal Title

      CMC Pub., Tokyo

      Pages: 329-329

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] マイクロプラズマの基礎と展望2006

    • Author(s)
      橘 邦英
    • Journal Title

      応用物理 75・4

      Pages: 399-411

    • NAID

      10017540781

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Current Status of Microplasma Research2006

    • Author(s)
      K.Tachibana
    • Journal Title

      Transactions on Electrical and Electronic Engineering, Japan (IEEJ Trans.) 1・2

      Pages: 145-155

    • NAID

      10025770945

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Generation of microplasma using pulsed discharge of ethanol droplet in air2006

    • Author(s)
      S.Ishii
    • Journal Title

      Japanese Journal of Applied Physics 46・1

      Pages: 370-374

    • NAID

      10018705450

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Water treatment by fast oxygen radical flow with dc-driven microhollow cathode discharge2006

    • Author(s)
      S.Ishii
    • Journal Title

      IEEE Transaction on Plasma Science 34・4

      Pages: 1375-1381

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Micrometer-scale discharge in high-pressure H_2O and Xe environments including supercritical fluid2006

    • Author(s)
      K.Terashima
    • Journal Title

      Journal of Applied Physics 100・12

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Spatiotemporal surface charge measurement in two types of dielectric barrier discharges using pockels effect2006

    • Author(s)
      T.Shirafuji
    • Journal Title

      Japanese Journal of Applied Physics 45・10B

      Pages: 8255-8259

    • NAID

      10018339491

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Diagnostics of microdischarge-integrated plasma sources for display and materials processing2005

    • Author(s)
      K. Tachibana
    • Journal Title

      Plasma Phys. Control. Fusion 47

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Atmospheric dc discbarges with miniature gas flow as microplasma generation method2005

    • Author(s)
      T. Yokoyama
    • Journal Title

      J. Phys. D : Appl. Phys. 38

      Pages: 1684-1689

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] 2.45GHZ microwave-excited atmospheric pressure air microplasmas based on microstrip technology2005

    • Author(s)
      J. Kim
    • Journal Title

      Appl. Phys. Lett. 86

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Atmospheric dc discharges with miniature gas flow as microplasma generation method2005

    • Author(s)
      T. Yokoyama
    • Journal Title

      J. Phys. D : Appl. Phys. 38

      Pages: 1684-1689

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] 2.45GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology2005

    • Author(s)
      J. Kim
    • Journal Title

      Appl. Phys. Lett. 86

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Measurement of metastable He^*(2^3S_1) density in dielectric barrier discharges with two different configurations operating at around atmospheric pressure2005

    • Author(s)
      K.Tachibana
    • Journal Title

      Journal of Applied Physics 97・12

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Verification of a plasma photonic crystal for microwaves of milimeter wavelength range using two-dimensional array of columnar microplasmas2005

    • Author(s)
      K.Tachibana
    • Journal Title

      Applied Physics Letters 87・24

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Interaction and control of milimetre-waves with microplasma arrays2005

    • Author(s)
      K.Tachibana
    • Journal Title

      Plasma Physica and Controlled Fusion 47・12B

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Atmospheric dc discharges with mixture gas flow as microplasma generation method2005

    • Author(s)
      S.Ishii
    • Journal Title

      Journal of Physics D : Applied Physics 38・11

      Pages: 1684-1689

    • Related Report
      2005 Annual Research Report
  • [Journal Article] 2.45 GHz microwave-excited atmospheric pressure air microplasmas based on microstrip technology2005

    • Author(s)
      K.Terashima
    • Journal Title

      Applied Physics Letters 86・19

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Effects of self-erasing discharges on the uniformity of the dielectric barrier discharge2005

    • Author(s)
      T.Shirafuji
    • Journal Title

      Journal of Physics D : Applied Physics 34・12

      Pages: 1910-1917

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Integrated coaxial-hollow micro dielectric-barrier-discharges for a large-area plasma source operating at around atmospheric pressure2005

    • Author(s)
      K.Tachibana
    • Journal Title

      Journal of Physics D : Applied Physics 38・1

      Pages: 431-441

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Atmospheric dc discharges with miniature gas flow as Microplasma generation method2005

    • Author(s)
      S.Ishii
    • Journal Title

      Journal of Physics D : Applied Physics 38(in press)

    • Related Report
      2004 Annual Research Report
  • [Journal Article] ミクロ反応場の生成と応用-マイクロプラズマ研究の現状と将来展望-2004

    • Author(s)
      橘邦英
    • Journal Title

      プラズマ・核融合学会誌 80

      Pages: 825-826

    • NAID

      110003827862

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] DC/Microwave driven micro-plasmas for ozone generation2004

    • Author(s)
      K. Yasuoka
    • Journal Title

      J. Advanced Oxidation Technol. 17

      Pages: 138-141

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Spectroscopic study on a thermoelectron-enhanced microplasma jet2004

    • Author(s)
      T. Ito
    • Journal Title

      J. Phys. D : Appl. Phys. 37

      Pages: 445-448

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] マイクロプラズマの計測・解析2004

    • Author(s)
      橘邦英
    • Journal Title

      プラズマ・核融合学会誌 80

      Pages: 835-844

    • NAID

      110003827864

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Generation of micro-scale reactive plasmas and development of their new applications - Present and future of research and development on microplasmas-2004

    • Author(s)
      K. Tachibana
    • Journal Title

      J. Plasma Fusion Res 80

      Pages: 825-826

    • NAID

      110003827862

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Diagnostics and simulation of microplasmas2004

    • Author(s)
      K. Tachibana
    • Journal Title

      J. Plasma Fusion Res. 80

      Pages: 835-844

    • NAID

      110003827864

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] マイク・プラズマの計測・解析2004

    • Author(s)
      橘 邦英
    • Journal Title

      プラズマ核融合学会誌 80・10

      Pages: 835-844

    • Related Report
      2004 Annual Research Report
  • [Journal Article] マイクロプラズマの生成2004

    • Author(s)
      石井 彰三
    • Journal Title

      プラズマ核融合学会誌 80・10

      Pages: 827-834

    • NAID

      110003827863

    • Related Report
      2004 Annual Research Report
  • [Journal Article] マイクロプラズマの材料デバイスプロセスへの応用2004

    • Author(s)
      寺嶋 和夫
    • Journal Title

      プラズマ核融合学会誌 80・10

      Pages: 845-848

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Carbon nanotube and nanopolyhedron syntheses by a discharge under a supercritical fluid environment2004

    • Author(s)
      K.Terashima
    • Journal Title

      Journal of Material Chemistry 14・10

      Pages: 1513-1515

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Decrease of breakdown voltages for micrometer-scale-gap electrodes for carbon dioxide near the critical point : temperature and pressure dependences2003

    • Author(s)
      T. Ito
    • Journal Title

      J. Appl. Phys. 94

      Pages: 5411-5413

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Observation of self-organized filaments in a dielectric barrier discharge of Ar gas2003

    • Author(s)
      T. Shirafuji
    • Journal Title

      Appl. Phys. Lett. 83

      Pages: 2309-2311

    • NAID

      120000897468

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
    • Peer Reviewed
  • [Journal Article] Decreace of breakdown voltages for micrometer-scale-gap electrodes for carbon dioxide near the critical point : temperature and pressure dependences2003

    • Author(s)
      T. Ito
    • Journal Title

      Appl. Phys 94

      Pages: 5411-5413

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Journal Article] Observation of self-organized filaments in a dielectric barrier discharge of Ar gas2003

    • Author(s)
      T. Shirafuji
    • Journal Title

      Appl. Phys. Lett 83

      Pages: 2309-2311

    • NAID

      120000897468

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Report on MEXT Consortium on Microplasmas in Japan, 2003-20082009

    • Author(s)
      K. Tachibana
    • Organizer
      5th International Workshop on Microplasmas
    • Place of Presentation
      San Diego, U.S.A.
    • Year and Date
      2009-03-05
    • Related Report
      2008 Annual Research Report
  • [Presentation] Electron density measurement of plasma at atmospheric pressure using CO_2 laser heterodyne interferometry2008

    • Author(s)
      N. Takano
    • Organizer
      25th Symp. Plasma Processing
    • Place of Presentation
      山口
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electron density measurement of plasma at atmospheric pressure using CO_2 laser heterodyne interferometry2008

    • Author(s)
      N. Takano
    • Organizer
      25th Symp. Plasma Processing
    • Place of Presentation
      Yamaguchi, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Effect of cathode structure on the stability of high power atmospheric transientglow microplasma2007

    • Author(s)
      S. Ishii
    • Organizer
      4th International Workshop on Microplasmas
    • Place of Presentation
      Tainan, Taiwan
    • Year and Date
      2007-10-29
    • Related Report
      2007 Annual Research Report
  • [Presentation] A convenient flexible plasma source for biomedical applications in air and under water2007

    • Author(s)
      K. Tachibana
    • Organizer
      The First International Conference on Plasma Medicine
    • Place of Presentation
      Corpus Christi, TX, USA
    • Year and Date
      2007-10-18
    • Related Report
      2007 Annual Research Report
  • [Presentation] Microplasma using liquid materials as a plasma reactor2007

    • Author(s)
      S. Ishii
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-08-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] Diagnostics of supercritical CO_2 dielectric barrier discharge plasma by Ramanspectroscopy2007

    • Author(s)
      K. Terashima
    • Organizer
      18th International Symposium on Plasma Chemistry
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2007-08-28
    • Related Report
      2007 Annual Research Report
  • [Presentation] Metamaterials composed of artificial array of microplasmas2007

    • Author(s)
      K. Tachibana
    • Organizer
      34th Europian Physical Society Conference on Plasma Physics
    • Place of Presentation
      Warsaw, Poland
    • Year and Date
      2007-06-05
    • Related Report
      2007 Annual Research Report
  • [Presentation] Temperature dependent characteristics of cryo microplasma2007

    • Author(s)
      Y. Noma
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      京都
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electron density and collisional frequency in plasma with terahertz time-domain spectroscopy2007

    • Author(s)
      H. Nakanishi
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      京都
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Effect of cathode structure on the stability of high power atmospheric transient glow microplasma2007

    • Author(s)
      S. Ibuka
    • Organizer
      4th Int. Workshop on Microplasmas
    • Place of Presentation
      Tainan, Taiwan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Microdischarges on metal surface in a liquid medium2007

    • Author(s)
      M. Kimura
    • Organizer
      4th Int. Workshop on Microplasmas
    • Place of Presentation
      Tainan, Taiwan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Temperature dependent characteristics of cryo microplasma2007

    • Author(s)
      Y. Noma
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      Kyoto
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Electron density and collisional frequency in plasma with terahertz time-domain spectroscopy2007

    • Author(s)
      H. Nakanishi
    • Organizer
      18th Int. Symp. Plasma Chem.
    • Place of Presentation
      Kyoto
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spatiotemporal surface charge measurement in two types of dielectric barrier discharges using Pockels effect2006

    • Author(s)
      R. Abo
    • Organizer
      6th Int. Conf. Reactive Plasmas &23rd Symp. Plasma Processing
    • Place of Presentation
      松島
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Control of microplasma with miniature gas flow in air2006

    • Author(s)
      S. Ishii
    • Organizer
      3rd Int. Workshop on Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Micrometer-scale dc discharge plasma in high-pressure H_2O and Xe environments including supercritical fluid2006

    • Author(s)
      M. Sawada
    • Organizer
      3rd Int. Workshop on Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spatio-temporal measurement of surface charge on dielectric electrodes in a coplanar-electrode cell2006

    • Author(s)
      K. Tachibana
    • Organizer
      3rd Int. Workshop on、Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Characterization of atmospheric pressure dielectric barrier discharges for environmental applications2006

    • Author(s)
      K. Tachibana
    • Organizer
      59th Gaseous Electronics Conf.
    • Place of Presentation
      Columbus, USA
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spatiotemporal surface charge measurement in two types of dielectric barrier discharges using Pockels effect2006

    • Author(s)
      R. Abo
    • Organizer
      6th Int. Conf. Reactive Plasmas & 23rd Symp. Plasma Processing
    • Place of Presentation
      Matsushima, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Spatio-temporal measurement of surface charge on dielectric electrodes in a coplanar-electrode cell2006

    • Author(s)
      K. Tachibana
    • Organizer
      3rd Int. Workshop on Microplasmas
    • Place of Presentation
      Greifswald, Germany
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Diagnostics and modeling of microplasmas2005

    • Author(s)
      K. Tachibana
    • Organizer
      Plasma Sci. Symp. 2005 &22nd Symp. Plasma Processing
    • Place of Presentation
      名古屋
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Water treatment by radical injection with atmospheric micro plasma generated in fast oxygen flow2005

    • Author(s)
      A. Yamatake
    • Organizer
      17th Int. Symp. Plasma Chem.
    • Place of Presentation
      Toronto, Canada
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Diagnostics and modeling of microplasmas2005

    • Author(s)
      K. Tachibana
    • Organizer
      Plasma Sci. Symp. 2005 & 22nd Symp. Plasma Processing
    • Place of Presentation
      Nagoya, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Water treatment by radical injection with atmospheric micro plasma generated in fast oxvgen flow2005

    • Author(s)
      A. Yamatake
    • Organizer
      17th Int. Symp. Plasma Chem.
    • Place of Presentation
      Toronto, Canada
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Measurement of charge distribution on electrodes in dielectric barrier discharge with self-organized filaments2004

    • Author(s)
      S. N. Abolmasov
    • Organizer
      Int. Workshop on Plasma Nano-Technol. and Its Future Vision
    • Place of Presentation
      高山
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Design and control of microplasma devices based on spectroscopic diagnostics2004

    • Author(s)
      K. Tachibana
    • Organizer
      2nd Int. Workshop on Microplasmas
    • Place of Presentation
      Hoboken, USA
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] DC discharge characteristics in a microplasma with miniature gas flow2004

    • Author(s)
      T. Yokoyama
    • Organizer
      5th Int. Symp. Pulsed Power and Plasma Applications
    • Place of Presentation
      Chang-Won, Korea
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Measurement of charge distribution on electrodes in dielectric barrier discharge with self-organized filaments2004

    • Author(s)
      S. N. Abolmasov
    • Organizer
      Int. Workshop on Plasma Nano-Technol. and Its Future Vision
    • Place of Presentation
      Takayama, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Diagnostics of three dimensional behaviors of sustain discharge in an AC-PDP with auxiliary pulses2003

    • Author(s)
      Y. Shintani
    • Organizer
      10th Int. Display Workshops
    • Place of Presentation
      福岡
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A microplasma created from a powder particle by pulsed discharges2003

    • Author(s)
      S. Ishii
    • Organizer
      3rd. Asia-Pacific Int. Symp. Basic and Application of Plasma Technology
    • Place of Presentation
      Taoyuan, Taiwan
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Discharge under a high-pressure carbon dioxide environment up toa supercritical condition2003

    • Author(s)
      T. Ito
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Control of glow/streamer transition in pulse-driven dielectric barrier discharge2003

    • Author(s)
      T. Somekawa
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Diagnostics of three dimensional behaviors of sustain discharge in an AC-PDP with auxiliary pulses2003

    • Author(s)
      Y. Shintani
    • Organizer
      10th Int. Display Workshops
    • Place of Presentation
      Fukuoka, Japan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] A microplasma created from a powder particle by pulsed discharges2003

    • Author(s)
      S. Ishii
    • Organizer
      3rd. Asia-Pacific Int. Symp. Basic and Application of Plasma Technol.
    • Place of Presentation
      Taoyuan, Taiwan
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Discharge under a high-pressure carbon dioxide environment up to a supercritical condition2003

    • Author(s)
      T. Ito
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Presentation] Control of Glow/Streamer Transition in Pulse-Driven Dielectric Barrier Discharge2003

    • Author(s)
      T. Somekawa
    • Organizer
      16th Int. Symp. Plasma Chem.
    • Place of Presentation
      Taormina, Italy
    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] マイクロプラズマ-基礎と応用-2009

    • Author(s)
      橘邦英
    • Total Pages
      260
    • Publisher
      オーム社
    • Related Report
      2008 Annual Research Report
  • [Book] プラズマ診断の基礎と応用2006

    • Author(s)
      橘邦英(分担)
    • Total Pages
      390
    • Publisher
      コロナ社
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] マイクロ・ナノプラズマ技術とその産業応用2006

    • Author(s)
      橘邦英(分担), 石井彰三(分担), 寺嶋和夫(分担)
    • Total Pages
      329
    • Publisher
      シーエムシー出版
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Book] マイクロ・ナノプラズマ技術とその産業応用2006

    • Author(s)
      橘 邦英, 寺嶋和夫(監修・著)
    • Total Pages
      329
    • Publisher
      シーエムシー出版
    • Related Report
      2006 Annual Research Report
  • [Remarks]

    • URL

      http://plasma.kuee.kyoto-u.ac.jp/tokutei429

    • Related Report
      2008 Annual Research Report
  • [Remarks] 「研究成果報告書概要(和文)」より

    • URL

      http://plasma.kuee.kyoto-u.ac.jp/tokutei429/index-j.html

    • Related Report
      2007 Final Research Report Summary
  • [Remarks]

    • URL

      http://plasma.kuee.kyoto-u.ac.jp/tokutei429/

    • Related Report
      2007 Annual Research Report
  • [Patent(Industrial Property Rights)] マイクロプラズフCVD装置2007

    • Inventor(s)
      佐々木毅, 清水禎樹, 寺嶋和夫, 越崎直人
    • Industrial Property Rights Holder
      独立行政法人産業技術総合研究所
    • Acquisition Date
      2007-11-22
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] カーボンナノチューブを備えた金属ワイヤー又はキャピラリー及びカーボンナノチューブの形成方法2006

    • Inventor(s)
      佐々木毅, 清水禎樹, 寺嶋和夫, 越崎直人
    • Industrial Property Rights Holder
      独立行政法人産業技術総合研究所
    • Acquisition Date
      2006-08-11
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ発生装置及び走査電子顕微鏡2005

    • Inventor(s)
      今野茂生, 西山寛之, 長船忠義, 寺嶋和夫
    • Industrial Property Rights Holder
      国立大学法人東京大学, 日本電子株式会社
    • Industrial Property Number
      2005-270362
    • Filing Date
      2005-09-16
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] 電磁波伝送回路及び電磁波伝送制御装置2005

    • Inventor(s)
      橘邦英, 酒井道
    • Industrial Property Rights Holder
      国立大学法人京都大学
    • Filing Date
      2005-09-28
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ発生装置2004

    • Inventor(s)
      西山寛, 伊藤剛仁, 寺嶋和夫, 長船忠義
    • Industrial Property Rights Holder
      寺嶋和夫, 日本電子株式会社
    • Industrial Property Number
      2004-079483
    • Filing Date
      2004-03-19
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ発生装置及び低真空走査電子顕微鏡2004

    • Inventor(s)
      今野茂生, 西山寛之, 長船忠義, 寺嶋和夫
    • Industrial Property Rights Holder
      株式会社東京大学TLO, 日本電子株式会社
    • Patent Publication Number
      2005-270362
    • Filing Date
      2004-03-29
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] マイクロ波励起プラズマ装置及びシステム2004

    • Inventor(s)
      金載浩, 寺嶋和夫
    • Industrial Property Rights Holder
      国立大学法人東京大学
    • Industrial Property Number
      2004-290339
    • Filing Date
      2004-10-01
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ処理方法およびプラズマ処理装置2003

    • Inventor(s)
      橘邦英, 井上良二
    • Industrial Property Rights Holder
      橘邦英, 日立金属株式会社
    • Industrial Property Number
      2003-016106
    • Filing Date
      2003-01-24
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Patent(Industrial Property Rights)] プラズマ処理法およびプラズマ処理装置2003

    • Inventor(s)
      橘邦英, 井上良二
    • Industrial Property Rights Holder
      橘邦英, 日立金属株式会社
    • Industrial Property Number
      2003-165726
    • Filing Date
      2003-06-10
    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2007 Final Research Report Summary
  • [Publications] K.Tachibana: "Diagnostics and control of three-dimensional behaviors of microdischarge in a unit cell of an ac-type plasma display panel"Journal of Physics D : Applied Physics. 36(23). 2928-2939 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] S.Ishii: "Compact fast high-voltage pulse generator utilizing turn-off capability of Si-thyristor"Proceeding of 14th IEEE International Pulsed Power Conference, Dallas. 931 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] K.Terashima: "Decrease of breakdown voltages for micrometer-scale-gap electrodes for carbon dioxide near the critical point : temperature and pressure dependences"Journal of Applied Physics. 94(8). 5411-5413 (2003)

    • Related Report
      2003 Annual Research Report
  • [Publications] T.Shirafuji: "Observation of self-organized filaments in a dielectric barrier discharge of Ar gas"Applied Physics Letters. 83(12). 2309-2311 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2018-03-28  

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