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Research work of reconfigurable millimeter wave antenna

Research Project

Project/Area Number 15201033
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Microdevices/Nanodevices
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

KOTERA Hidetoshi  Kyoto Univ., Dept.of Mechanical eng., professor, 工学研究科, 教授 (20252471)

Co-Investigator(Kenkyū-buntansha) KANNO Isaku  Kyoto Univ., Dept.of Mechanical eng., Associate Professor, 工学研究科, 助教授 (70346039)
SUZIKI Takaaki  Kyoto Univ., Dept.of Mechanical eng., Assistant Professor, 工学研究科, 助手 (10378797)
FUJIWARA Kohji  Okayama Univ., Dept.of Electric eng., Associate Professor, 工学部, 助教授 (20190093)
Project Period (FY) 2003 – 2006
Project Status Completed (Fiscal Year 2006)
Budget Amount *help
¥50,050,000 (Direct Cost: ¥38,500,000、Indirect Cost: ¥11,550,000)
Fiscal Year 2006: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
Fiscal Year 2005: ¥13,780,000 (Direct Cost: ¥10,600,000、Indirect Cost: ¥3,180,000)
Fiscal Year 2004: ¥13,780,000 (Direct Cost: ¥10,600,000、Indirect Cost: ¥3,180,000)
Fiscal Year 2003: ¥12,610,000 (Direct Cost: ¥9,700,000、Indirect Cost: ¥2,910,000)
KeywordsMILLIMETER WAVE / ANTENNA / MEMS / RF-MEMS / PIEZOELECTRIC / PZT / SWITCH / HEATER / 指向性 / 誘電体 / スイッチ / PDMS / 数値計算 / 電磁波 / 圧電素子 / ソフトマイクロマシニング
Research Abstract

In this research work, we have tried to realize a reconfigurable millimeter wave antenna. To realize the reconfigurable antenna, as a first step, we developed two types antenna mechanism. One is a kind of micro-strip line antenna in which the electric current is controlled to be delay for the grand line or neighboring lines.
Another type is a novel mechanism by actuating conductor elements which is arranged in matrix manner in two layers that is separated by dielectric material.
To design the antennas, we calculated the characteristics of wave trajectory in the air from the antenna by FDTD simulation and finite element simulation. The optimization technique was also used to define their optimum shape.
The designed antenna was fabricated by use of the bulk micromachining with silicon substrate and thin metal film and by use of soft micromachining with PDMS and SU8.
We measured the wave propagation from the fabricated antenna in 50GHz range, the characteristic of the antenna agreed well with the calculated results.
To simplify the reconfigurable anntena in the field of millimeter wave, we focused on the dependency of the permeability of piezoelectric material, we designed new heater driven antenna using both CIP calculation and FDTD calculation. The designed antennas were fabricated using MEMS process. The fabricated antennas were tested but the emition properties were not efficiency because of the patterning accuracy and heat-insulated structure.
To drive the antenna we designed and fabricated two types RF-MEMS switch. One is a cantilever type, and another type is a X-Bar type. Both type switches are driven by the PZT thin film deposited on Si substrate.
In this research work, we prove that the designed mechanism and structure for the antenna is feasible for reconfigurable micro antenna.
We can conclude that our research work is worth for realize new antenna and switch in the field of millimeter wave or more high frequency field.

Report

(5 results)
  • 2006 Annual Research Report   Final Research Report Summary
  • 2005 Annual Research Report
  • 2004 Annual Research Report
  • 2003 Annual Research Report
  • Research Products

    (28 results)

All 2007 2006 2005 2004 2003 Other

All Journal Article (27 results) Publications (1 results)

  • [Journal Article] Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films2007

    • Author(s)
      I.Kanno, Y.Tazawa, T.Suzuki, H.Kotera
    • Journal Title

      Microsystem technologies (In Printing)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films2007

    • Author(s)
      Isaku Kanno, Yoshiro Tazawa, Takaaki Suzuki, Hidetoshi Kotera
    • Journal Title

      Microsystem Technologies (On line)

    • Related Report
      2006 Annual Research Report
  • [Journal Article] 低電圧駆動型指向性可変ミリ波アンテナのための基礎的研究(誘電体の局所温度場を制御するマイクロヒータ)2007

    • Author(s)
      平丸大介, 鈴木孝明, 神野伊策, 小寺秀俊
    • Journal Title

      日本AEM学会誌 (掲載確定)

    • NAID

      110006291384

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Characterization of Pb(Zr,Ti)O-3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications2006

    • Author(s)
      Suzuki T, Kanno I, Loverich JJ, Kotera H, Wasa K
    • Journal Title

      SENSORS AND ACTUATORS A-PHYSICAL 125 (2)

      Pages: 382-386

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electric field-induced strain of PbZrO3 films2006

    • Author(s)
      Isaku Kanno, Takashi Inoue, Takaaki Suzuki, Hidetoshi Kotera, Kiyotaka Wasa
    • Journal Title

      Japanese Journal of Applied Physics 45 (9B)

      Pages: 7258-7261

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Piezoelectric microactuators composed of PZT thin films on Si substrates2006

    • Author(s)
      Isaku Kanno, Yoshiro Tazawa, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera
    • Journal Title

      MIPE2006

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Hidetoshi Kotera and Kiyotaka Wasa, Electric field-induced strain of PbZrO3 films2006

    • Author(s)
      Isaku Kanno, Takashi Inoue, Takaaki Suzuki
    • Journal Title

      Japanese Journal of Applied Physics

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Piezoelectric unimorph miroactuators with X-shaped structure composed of PZT thin films2006

    • Author(s)
      Kanno, Y.Tazawa, T.Suzuki, H.Kotera
    • Journal Title

      Microsystem technologies

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Characterization of Pb(Zr, Ti)03 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications2006

    • Author(s)
      Suzuki T, Kanno I, Loverich JJ, Kotera H, Wasa K
    • Journal Title

      SENSORS AND ACTUATORS A-PHYSICAL 125, 2

      Pages: 382-386

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Piezoelectric microactuators composed of PZT thin films on Si substrates2006

    • Author(s)
      Isaku Kanno, Yoshiro Tazawa, Takaaki Kunisawa, Takaaki Suzuki, Hidetoshi Kotera
    • Journal Title

      2006 ASME/JSME Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE2006)

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Electric field-induced strain of PbZr03 films2006

    • Author(s)
      Isaku Kanno, Takashi Inoue, Takaaki Suzuki, Hidetoshi Kotera, Kiyotaka Wasa
    • Journal Title

      Japanese Journal of Applied Physics Vol. 45, No. 9B

      Pages: 7258-7261

    • Related Report
      2006 Annual Research Report
  • [Journal Article] Characterization of Pb(Zr,Ti)O-3 thin films deposited on stainless steel substrates by RF-magnetron sputtering for MEMS applications2006

    • Author(s)
      Suzuki T, Kanno I, Loverich JJ, Kotera H, Wasa K
    • Journal Title

      SENSORS AND ACTUATORS A-PHYSICAL 125(2)

      Pages: 382-386

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Characterization of transverse piezoelectric properties of c-axis oriented PbTiO3 thin films2005

    • Author(s)
      Kanno I, Kogure S, Tabata D, Nakano K, Suzuki T, Kotera H, Wasa
    • Journal Title

      FERROELECTRICS 327

      Pages: 91-95

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Intrinsic crystalline structure of epitaxial Pb(Zr,Ti)O3 thin film2005

    • Author(s)
      Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa
    • Journal Title

      Journal of Applied physics Vol.97,No.7

      Pages: 97-101

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Intrinsic crystalline structure of epitaxial Pb(Zr, Ti)03 thin film2005

    • Author(s)
      Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa
    • Journal Title

      Journal of Applied physics Vol.97,No.7

      Pages: 97-101

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Intrinsic crystalline structure of epitaxial Pb(Zr,Ti)O3 thin films2005

    • Author(s)
      Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa
    • Journal Title

      Journal of Applied physics Vol.97, No.7

      Pages: 97-101

    • Related Report
      2005 Annual Research Report
  • [Journal Article] Characterization of transverse piezoelectric properties of c-axis oriented PbTiO3 thin films2005

    • Author(s)
      Kanno I, Kogure S, Tabata D, Nakano K, Suzuki T, Kotera H, Wasa K
    • Journal Title

      FERROELECTRICS 327

      Pages: 91-95

    • Related Report
      2005 Annual Research Report
  • [Journal Article] RF-MEMSの設計・製造技術2004

    • Author(s)
      神野伊策, 小寺秀俊
    • Journal Title

      精密工学会誌 70, 9

      Pages: 1146-1149

    • NAID

      110001368591

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Low-Voltage Actuation of RF-MEMS Switch Using Piezoelectric PZT Thin Films2004

    • Author(s)
      Isaku Kanno, Hironobu Endo, Hidetoshi Kotera
    • Journal Title

      Production von Leiterplatten Und Systemen 3

      Pages: 457-459

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary 2004 Annual Research Report
  • [Journal Article] Design and Fabrication of RF-MEMS2004

    • Author(s)
      Isaku Kanno, Hidetoshi Kotera
    • Journal Title

      Precision engineering 70,9

      Pages: 1146-1149

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Frequency and Directivity Reconfigurable Antenna for Millimeter-Wave2004

    • Author(s)
      H.Kotera, I Kannno, S Fukuda
    • Journal Title

      Micro System Technologies

      Pages: 526-528

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Thermodynamic study of c-axis-orientated epitaxial Pb(Zr,Ti)O_3 thin films2004

    • Author(s)
      Isaku Kanno, Yu Yokokawa, Hidetoshi Kotera
    • Journal Title

      Physical Review B Volume 69, Number 6

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Low-Voltage actuator of RF-MEMS Switch using Piezoelectirc PZT thin films2003

    • Author(s)
      Isaku Kanno, Endo, Hidetoshi Kotera
    • Journal Title

      Micro System Technologies2003

      Pages: 529-531

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Frequency and Directivity Reconfigurable Antenna for Millimeter-Wave2003

    • Author(s)
      Hidetoshi Kotera, Isaku Kanno, Yoshihisa Fukuda
    • Journal Title

      Micro System Technologies2003

      Pages: 526-528

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Measurement of transverse piezoelectric properties of PZT thin film2003

    • Author(s)
      Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wasa
    • Journal Title

      Sensor and Atuator A107

      Pages: 68-74

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      2006 Final Research Report Summary
  • [Journal Article] Crystallographic characterization of epitaxial Pb(Zr,Ti)O_3 films with different Zr/Ti ratio grown by radio-frequency-magnetron sputtering2003

    • Author(s)
      I.Kannno, H.Kotera, K.Wasa, T.Matsunaga, T.Kamada, R.Takayama
    • Journal Title

      Journal of Applied Physics Vol.93, No.7

      Pages: 4091-4096

    • Related Report
      2004 Annual Research Report
  • [Journal Article] Measurement of transverse piezoelectric properties of PZT thin film2003

    • Author(s)
      Isaku Kanno, Hidetoshi Kotera, Kiyotaka Wase
    • Journal Title

      Sensor and Atuator A107

      Pages: 68-74

    • Related Report
      2004 Annual Research Report
  • [Publications] Isaku Kanno, Endo, Hidetoshi Kotera: "Low-Voltage actuator of RF-MEMS Switch using Piezoelectirc PZT thin films"Micro System Technologies. 529-531 (2003)

    • Related Report
      2003 Annual Research Report

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Published: 2003-04-01   Modified: 2016-04-21  

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